• 제목/요약/키워드: Discharge pressure measurement

검색결과 103건 처리시간 0.025초

자장을 이용한 이온화율 증대형 삼극형 BARE에서 이온화율의 증대경향과 QMS를 이용한 이온의 에너지 분포 측정 (Measurement of Ion Energy Distribution using QMS & Ionization Enhancement by usign Magnetic Field in Triod BARE)

  • 김익현;주정훈;한봉희
    • 한국표면공학회지
    • /
    • 제24권3호
    • /
    • pp.119-124
    • /
    • 1991
  • Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD process using permanent magnet is developed, which enhances the ionization rate by confining the plasma suppressing the wall loss of electron. By the result to investigate the characteristic of glow discharge, the ionization rate of this process is enhanced about twice as high as that of triod BARE process (about 26%), and more dense TiN microstructures are obtained in this process. Cylindrical ion energy analyzer is made and attached in front of a quadrupole mass filter for the analysis of the energy distribution of reactive gas and activated gas ions from the plasma zone. To analyze the operation mechanism of ion energy analyzer, computer simulation is performed by calculation the electric field environment using finite element method. By these analyses of ion energy distribution of outcoming ions from the plasma zone, it is found that magnetic field enhances ion kinetic energy as well as ionization rate. The other results of this study is that the foundation of feed-back system is constructed, which automatically control the partial pressure of reactive gas. In can be possible by recording the data of mass spectrum and ion energy analysis using A-D converter.

  • PDF

평판형유도결합플라즈마의 임피던스특성 측정 및 수치해석 (Measurement and Numerical Analysis of Impedance Characteristics of Planar ICP)

  • 양일동;이호준;황기웅
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1994년도 추계학술대회 논문집 학회본부
    • /
    • pp.281-283
    • /
    • 1994
  • The impedance characteristics of planar ICP have been measured and compared with the theoretical results obtained by the field equation. The resistance of the total impedance had a maximum point and the inductance decreased monotonically as the electron density increased from $2.5{\times}10^{10}cm^{-3}$ to $7{\times}10^{11}cm^{-3}$ and the Pressure from 1mT to 50mT. The impedance characteristics were also dependent on the profile of the electron density. The effective collision frequency, ${\nu}_{eff}$ was $9.0{\times}10^6Hz$ at 5mT and $.5{\times}10^7Hz$ at 100mT. The effective collision frequency at 5mT was not so different from that at 100mT and it is doe to the reduction of the discharge channel cross-section at high pressure. The estimated effective collision frequency from the simulation data was of the same order as the measured one.

  • PDF

SMPS와 1단 저압 임팩터를 이용한 대기 중 서브 마이크론 에어로졸 유효 밀도 측정 (Effective density measurement of ambient sub-micron aerosol using SMPS and 1 stage low-pressure impactor)

  • 오재호;한장섭;박근영;황정호
    • 한국입자에어로졸학회지
    • /
    • 제15권3호
    • /
    • pp.115-126
    • /
    • 2019
  • In this study, a serial methodology is presented for estimating the effective density of ambient sub-micron aerosol employing lab-made 1 stage low-pressure impactor of Hyun et al. (2015) and SMPS (Scanning Mobility Particle Sizer) together. The effective density from this methodology (Impactor+SMPS) was compared with another methodology (BAM+SMPS) for estimating the effective density employing BAM (Beta-Attenuation Monitor) and SMPS. As a result, the effective density obtained with impactor+SMPS ranged from $0.42g/cm^3$ to $2.36g/cm^3$, while the effective density obtained with BAM+SMPS ranged from $1.01g/cm^3$ to $1.72g/cm^3$. The difference between these results might be caused by the particle loss in the impactor.

연료전지 블로어 4기종 국산화 개발 (Development of 4 Types of Fuel Cell's Blower)

  • 탁봉열;김찬규;이소아;장춘만
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2011년도 춘계학술대회 초록집
    • /
    • pp.91-91
    • /
    • 2011
  • This paper describes development procedure of the four types of fuel cell's blowers: pressurized fuel blower, selective oxidation air blower, cathode air blower, and burner air blower. Diaphragm blowers having two heads are selected to maintain force balance when the rotating arms are moving by the driving motor. Dimensions of a diaphragm cavity is designed according to the optimal design procedure using numerical simulation and experimental measurement. Experimental apparatus is designed by considering the bower characteristics having low flow rate and high pressure. Test blower is operated by a diaphragm, which has suction and discharge port on the top of the blower. For analyzing the internal flow of the blower, three-dimensional Navier-Stokes analysis is introduced in the present study. Throughout the optimal design of the blowers, blower performance is enhanced by reducing the unbalance motion of the rotating arm and loss region in the diaphragm cavity.

  • PDF

상용 마이크로 가스터빈의 구성부 성능분석 (Evaluation of Component Performance of a Commercial Micro Gas Turbine)

  • 이종준;윤재은;김동섭
    • 유체기계공업학회:학술대회논문집
    • /
    • 유체기계공업학회 2005년도 연구개발 발표회 논문집
    • /
    • pp.331-337
    • /
    • 2005
  • This study aims at evaluation of component performance of a commercial micro gas turbine by detailed measurements of various system parameters. A test facility to measure performance of a micro gas turbine was set up. Performance parameters such as turbine exit temperature, exhaust gas temperature, engine inlet temperature, compressor discharge pressure and fuel flow rate were measured. Variations in measured data and estimated performance parameters were analyzed. In addition to overall engine performance, component characteristic parameters including the turbine inlet temperature, the compressor efficiency, the turbine efficiency, the recuperator effectiveness were estimated. Behaviors of the estimated characteristic parameters with operating condition change were examined.

  • PDF

기체-액체 이젝터 유동의 가시화와 광섬유 탐침에 의한 기포분율 측정 (Visualization of Gas/liquid Ejector Flow and Void Fraction Measurement using Fiber Optic Probe)

  • 최성환;지호성;김경천
    • 한국가시화정보학회지
    • /
    • 제11권1호
    • /
    • pp.34-40
    • /
    • 2013
  • Gas/liquid two-phase ejector is a device without moving parts, in which liquid is used to drive gas of a low-pressure source. In this paper, the hydrodynamic characteristics of a vertical down type two-phase ejector were studied using an air-water loop system. Entrained air flow rates were measured with inlet and outlet pressures of the ejector with varying water flow rate. Homogeneous bubbly flows in the discharge pipe were confirmed by the high speed flow visualization method. Quantitative measurements of void fraction were made using a newly developed fiber optic probe system.

주조 스테인리스강의 해양환경 하에서 플라즈마 이온질화 공정온도에 따른 부식특성 연구 (Corrosion Characteristics of Cast Stainless Steel under Plasma Ion Nitriding Process Temperature in Marine Environment)

  • 정상옥;김성종
    • 한국표면공학회지
    • /
    • 제50권6호
    • /
    • pp.504-509
    • /
    • 2017
  • In order to improve corrosion resistance for cast stainless steel in seawater, the characteristics of corrosion resistance after plasma ion nitriding was investigated. Plasma ion nitriding process was conducted in a mixture of nitrogen of 25% and hydrogen of 75% at substrate temperature ranging from 350 to $500^{\circ}C$ for 10 hours using pulsed-DC glow discharge plasma with working pressure of 250 Pa in vacuum condition. Corrosion tests were carried out for as-received and plasma ion nitrided specimens. The corrosion characteristics were investigated by measurement of weight loss and observation of surface morphology. In anodic polarization experiment, relatively less damage depth and weight loss were presented at a nitrided temperature of $400^{\circ}C$, attributing to the formation of S-phase.

13.56MHz ICP에서 단일 탐침법에 의한 Ne 가스의 발광특성 연구 (A Study on Emission Characteristics of Ne Gas Using a Single Langmuir Probe Method in Radio-Frequency Inductively Coupled Plasma)

  • 조주웅;최용성;김용갑;박대희
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.150-152
    • /
    • 2004
  • In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Ne discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

  • PDF

13.56MHz ICP에서 단일 탐침법에 의한 Ar, Ne 가스의 발광특성 연구 (A Study on Emission Characteristics of Ar, Ne Gas Using a Single Langmuir Probe Method in Radio-Frequency Inductively Coupled Plasma)

  • 조주웅;최용성;김용갑;박대희
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.167-170
    • /
    • 2004
  • In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Argon, Ne discharge for pressure from 1 [mTorr] and input RF power 10 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

  • PDF

저압방전등의 사용중에 발생하는 자계특성 (Characteristics of Magnetic Field Generated by Operating Low Pressure Discharge Lamp)

  • 이복희;전덕규;길경석;백용현
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1994년도 춘계학술대회 논문집
    • /
    • pp.63-66
    • /
    • 1994
  • This paper describes the developed sensor for measuring the time-varying magnetic fields and presents the characteristics of the magnetic fields and presents the characteristics of the magnetic field generated by lighting a fluorescent lamp. The frequency bandwidth of magnetic field measurement system is kknown as 40 Hz∼100 kHz by means of calibration experiment. The magnetic field waveform which originates from the various lighting systems was measured and the frequency components were analyzed by fast Fourier transformation technique. The magnetic field generated during the operation of the fluorescent lamp mainly includes the odd harmonics, and in the case\ulcorner of push button switch and high frequency starter types the fast transient component is occurred in an instant of lighting.

  • PDF