A Study on the Effects of Ti interlayer on the Properties of RF Sputtering SrTiO$_3$ Thin Films
(RF Sputtering 으로 제작한 SrTiO$_3$ 박막 특성에 미치는 Ti 중간층의 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1997.04a
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- pp.8-11
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- 1997