• Proceedings of the Materials Research Society of Korea Conference
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• 1998.11a
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• pp.157-157
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• 1998

• Korean Journal of Materials Research
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• v.8 no.2
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• pp.131-134
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• 1998

The deposition rate and surface morphology of Al films deposited by MOCVD have been studied on the $SiO_{2}$ and TiN(60nm/Si) substrates. A1 films were deposited with the pyrolysis of dimethylethylamine alane(DMEAA). When A1 was deposited on Ti& substrate without carrier gas, Al deposition rate increased with H\ulcorner pre- treatment. The $H_2$ gas enhances the CVD reaction at the substrate surface. When Al was deposited on $SiO_{2}$ substrate, $H_2$ plasma pretreatment reduced Al incubation time and made a dense Al film compared with Ar plasma pre- treatment or no pretreatment.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.81-86
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• 1995

Aluminum has been deposited selectively on TiN surfaces in the presence of Si, SiO2 from Dimethyethylamine Alane(DMEAA). The film properties of the deopsited AI film were determined by various methods(SEM, Auger, UV-photospectrometer, Four point-probe, XRD). The effect of in-situ H2 plasma precleaning was studied. The effect of gap distance, pressure and temperature on the properties(crystallinity, resistance, grain size, morphology) of AI film and on the growth rates was investigated. It was found that the plasma precleaning promotes the growth rate and there exists optimum thmperature for maximum growth rate.

• Korean Journal of Materials Research
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• v.6 no.3
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• pp.333-340
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• 1996

p-type(100) 실리콘 기판과 TiN(50nm)/Si 기판에 dimethylethylamine alane(DMEAA)을 반응소스로 하여 알루미늄을 증착시켜 증착온도와 유량, 반송가스 종류에 따른 방향성, 증착속도, 미세구조 변화에 대해 연구하였다. 알루미늄의 증착속도는 기판온도, 반송가스 종류 및 유량에 따라 100-650mn/min으로 다양하게 조절되었다. DMEAA의 증착 활성화에너지는 TiN 기판에서는 약 0.leV이었고 Si와 SiO2 기판에서는 각각 약 0.23eV, 0.24eV이었다. 알루미늄 박막의 방향성은 증착속도의 감소에 따라 (200)에서 (111)방향으로 변하였다. 증착된 알루미늄 박막의 불순물 함량은 산소의 경우 0.2at%, 탄소의 경우 1.8at.%이었다. DMEAA 소스에 의한 알루미늄의 증착속도는 반송가스가 Ar 일 때 보다 H2 가스를 사용하면 증착속도가 크게 증가하였으며 이는 반송가스에 의해 SiO2표면의 흡착 H 농도가 증가하고 흡착 H가 소스 가스와 반응하여 핵생성 site 로 작용하는 것으로 생각된다. 알루미늄 박막의 비저항은 표면 미세조직에 크게 영향을 받으며 그 값은 약 3-7$\mu$$\Omega$cm이었다.

• Journal of the Korean Institute of Gas
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• v.7 no.4 s.21
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• pp.30-35
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• 2003

Product liability(PL) law imposes the liability on manufacturer or wholesaler when the product defects cause harm to consumers of the products or any other parties in their lives, bodies, or properties. In Korea, the law of product liability was enforced in July 2002. In this study the Product Liability Response System of chemical products was developed by using Failure Mode and Effect Analysis(FMEA). For a case study peformed for N,N-Dimethylethylamine. First, product information was gathered through Material Safety Data Sheet(MSDS)and which considered as an instruction manual of chemical product. And an effect caused by product defects is analyzed by FMEA to get Risk Priority Number(RPN) which is calculated by multiplying of severity, occurrence, and detection of the defects. Then hazard was estimated quantitatively by RPN.

• Journal of The Korean Ophthalmological Society
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• v.59 no.11
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• pp.1077-1081
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• 2018

Purpose: We report two cases of corneal edema in patients who presented with bilateral blurry vision due to vaporized amines while working in a polyurethane processing plant. Case summary: A 28-year-old male presented with bilateral blurred vision. His work involved solidifying polyurethane liquid and he often found himself exposed to polyurethane heat and gas. Purpose: We report two cases of corneal edema in patients who presented with bilateral blurry vision due to vaporized amines while working in a polyurethane processing plant. Case summary: A 28-year-old male presented with bilateral blurred vision. His work involved solidifying polyurethane liquid and he often found himself exposed to polyurethane heat and gas. On examination, the patient's uncorrected visual acuity (UCVA) was 20/40 (right) and 30/50 (left). A slit lamp examination revealed subepithelial microbullae in both eyes. The central corneal thickness (CCT) was also increased in both eyes, measuring $698{\mu}m$ (right) and $672{\mu}m$ (left). After prescribing 0.5% moxifloxacin and, 1% fluorometholone eye drops for 3 days in both eyes, the UCVA recovered to 20/40 (right) and 20/20 (left). The CCT decreased to $644{\mu}m$ (right) and $651{\mu}m$ (left), and the microbullae improved significantly in the left eye. The second patient was a 34-year-old female who presented with bilateral decreased visual acuity while at work. She worked in a factory that produced car seat filling. Her UCVA was 20/25 (right) and 20/20 (left). The CCT by specular microscopy was $537{\mu}m$ (right) and $541{\mu}m$ (left). On slit lamp examination, both eyes demonstrated bilateral central subepithelial edema. The patient did not attend any follow-up outpatient appointments after the initial presentation. Conclusions: Exposure to vaporized amines such as polyurethane may causereversible corneal toxicityeven without direct contact. Further consideration should be given to ocular safety and protection from amine compounds in the industrial field.On examination, the patient's uncorrected visual acuity (UCVA) was 20/40 (right) and 30/50 (left). A slit lamp examination revealed subepithelial microbullae in both eyes. The central corneal thickness (CCT) was also increased in both eyes, measuring $698{\mu}m$ (right) and $672{\mu}m$ (left). After prescribing 0.5% moxifloxacin and, 1% fluorometholone eye drops for 3 days in both eyes, the UCVA recovered to 20/40 (right) and 20/20 (left). The CCT decreased to $644{\mu}m$ (right) and $651{\mu}m$ (left), and the microbullae improved significantly in the left eye. The second patient was a 34-year-old female who presented with bilateral decreased visual acuity while at work. She worked in a factory that produced car seat filling. Her UCVA was 20/25 (right) and 20/20 (left). The CCT by specular microscopy was $537{\mu}m$ (right) and $541{\mu}m$ (left). On slit lamp examination, both eyes demonstrated bilateral central subepithelial edema. The patient did not attend any follow-up outpatient appointments after the initial presentation. Conclusions: Exposure to vaporized amines such as polyurethane may causereversible corneal toxicityeven without direct contact. Further consideration should be given to ocular safety and protection from amine compounds in the industrial field.