• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.1139-1143
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• 1991

Using industrial robots and sensors, we developed an inline car body inspection system which proposes high flexibility and sufficient accuracy. Car Body Inspection(CBI) cell consists of two industrial robots, two corresponding carriages, camera vision system, a process computer with multi-tasking ability and several LDS's. As industrial robots guarantee sufficient repeatabilities, the CBI cell adopts the concept of relative measurement instead of that of absolute measurement. By comparing the actual measured data with reference data, the dimensional errors of the corresponding points can be calculated. The length of the robot arms changes according to ambient temperature and it affects the measuring accuracy. To compensate this error, a robot arm calibration process was realized. By measuring a reference jig, the differential changes of the robot arms due to temperature fluctuation can be calculated and compensated.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.5
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• pp.1347-1354
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• 1994

This paper deals with the experimental research, including measurement and analysis and field survey, on the causes of occurring noise defective gear boxes in hoist production plant in order to reduce the fraction of their occurrence. In this reserch following investigations are performed : measurement and gear-boxes, examination of each machining process of production, measurement and analysis of dimensional accuracy of each part, comparative vibration test with exchanging inaccurate parts. From these investigations, it is found that the machining accuracy of pinion gear tooth thickness is the most sensitive factor of noise problem. By maintaining the tooth thickness error within 0.05 mm tolerance in the gear cutting process, the fraction of noise defective gear-boxes are greatly reduced to less than 2%, where the usual rate of it has been 20-50%.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.165-168
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• 2002

In most shipyards, the measurement of 3-dimensional relative position of pipes should be connected in the block depends on the manual operation. It results a very tedious and inefficient procedure, thus the proper measurement system is needed to improve productivity and accuracy. This paper describes the development results of pipe measurement system including system concepts, measuring procedures, system calibration, and its accuracy and productivity. And also, the possibility and things to be improved for application in shipyard are discussed in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.71-77
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• 1996

This paper describes the development of on the machine measuring(OMM) system which can directlry measure the three dimensional machined dimensilnal accuracy using scanning probe in milling machine. Two algolithms, continuous path(CP) measurement using UC program and CAD data assisted point to point(PTP) measurement, were developed regarding specification of scanning probe. The OMM system was contructed to verify the developed system suing the proposed algorithm, and actually measured three kinds of machined TV shadow mask molds. The developed system was evaluated it's repeatability and compared with the current measurement system of CMM(Coording Measuring Machine) in terms of relative accuracy and time reduction and productivity increase.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2004.04a
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• pp.291-298
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• 2004

Effective 3 dimensional modelling is to be essential work for design of construction, mechanic and industrial part. Especially, it makes possible for reverse design. It need rapidity, accuracy, reality. Data acquisition method for modelling are contact 3dimensional measurement system, LASER scanner, Pattern scanner, and digital photogrammetry. This study introduce to 3 dimensional modelling methods and analysis of these method. We tried to 3D modelling of automobile part using OPTO-Top pattern scanner which system have rapidity and accuracy, and compared effectiveness of each method. The 3D display web environment was made.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.5
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• pp.27-34
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• 2021

This study analyzes machining characteristics and presents optimal cutting conditions by measuring the surface roughness, dimensional accuracy, and dimension straightness based on the feed rate after processing the inner diameter hall of SCM415 steel using an automatic CNC(Computerized Numerical Control) lathe. The testing material was cut using an 11.8 mm-diameter Chamdrill after mounting the 32 mm-diameter round bar on an automatic CNC lathe. The cut depth was set at 3 mm, and the cutting speed was fixed at 1500 rpm. The surface roughness, dimensional accuracy, and dimension straightness of 15 testings were measured by changing the feed rate to 0.05, 0.1, and 0.15 mm/rev, respectively. It was difficult to process more than 15 tests during the maching due to noise or break. Additionally, the optimum cutting of SCM415 steel showed excellent surface roughness in the 10^th and 11^th of testing at cutting speed and feed speed of 1500 rpm and 0.05 mm/rev, respectively. The dimensional accuracy was measured in three dimensions after drilling, which showed good results with an average range of 0.0138-0.0208 mm. Moreover, the lower the feed speed, the higher the accuracy. Additionally, the measurement results of the dimensional straightness showed that the straightness is the straightness was the best at the 1^th and 2^th cutting regardless of the feed speed.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.3
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• pp.56-62
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• 1996

This paper presented a new measuring system to improve circular motion accuracy by using two-dimensonal probe and master ring for NC machine tools. This measuring system reduced the circular motion error conspicuously by eliminating the influence of the acceleration/deceleration range and compensating the friction force whose influences were significant while measuring the motion. Experimental results show that this system had enough accuracy to measure a circular motion for NC machine tools, compared with the circular test method and the r .theta. method.

• Journal of Korea Multimedia Society
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• v.21 no.8
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• pp.864-875
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• 2018

In this paper, we propose a measurement method for height of white light scanning interferometer using deep learning. In order to measure the fine surface shape, a three-dimensional surface shape measurement technique is required. A typical example is a white light scanning interferometer. In order to calculate the surface shape from the measurement image of the white light scanning interferometer, the height of each pixel must be calculated. In this paper, we propose a neural network for height calculation and use virtual data generation method to train this neural network. The accuracy was measured by inputting 57 actual data to the neural network which had completed the learning. We propose two new functions for accuracy measurement. We have analyzed the cases where there are many errors among the accuracy calculation values, and it is confirmed that there are many errors when there is no interference fringe or outside the learned range. We confirmed that the proposed neural network works correctly in most cases. We expect better results if we improve the way we generate learning data.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.8
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• pp.2555-2560
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• 1996

Inspecting the dimensional accuracy of a car-body in assembly line is a very important process to assure high productivity. Now there exist two common inspecting methods in practice. One is to measure a sampled car-body with three dimensional measuring machine, and the other is to measure car-body with three dimensional measuring machine, and the other is to measure car-body in assembly line using many sensors fixed to a large jig frame. The formal method takes too long to inspect a sampled car-body of a same sort, and cannot therefore give an useful error trend for the whole production. On the other hand, the latter lacks flexibility and is very cost-intensive. By using industrial robots and sensors, an in-line Car-Body Measuring(CBM) system which ensured high flexiblity and sufficient accuracy was developed. This CBM cell operates in real production line and measures the check points by the non-contact type using camera and laser displacement sensor(LDS). This system can handle about 15 Measuring points within a cycle time of 40 seconds. A process computer controls whole process such as data acquisition file handling and data analysis. Robot arms changes in length due to ambient temperature fluctuation affecting the measuring accuracy. To compensate this error, a robot arm calibration process was developed.