• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.546-546
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• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.

• 산업경영시스템학회지
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• 제35권1호
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• pp.115-123
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• 2012

Material flow control mechanism is a kind of operational policy in manufacturing. It is very important because it varies throughput, throughput time, and work-in-process (WIP) under the same manufacturing resources. Many Researchers have developed various material flow control mechanisms and insisted that their mechanism is superior to others. However the experimental environment used in the performance comparison are different and impractical. In this paper, we set various manufacturing environments to fairly compare five previous material flow control mechanism : Push, Pull, CONWIP, Gated MaxWIP, and Critical WIP Loops. The simulation results show that the Push is superior to others in both of throughput and WIP if required demand is less than 80% of capacity. In addition, the performance of CONWIP and its variants are not different statistically.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 1999년도 압출 및 인발 심포지엄
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• pp.9-19
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• 1999

A clad material is a different type of the typical composites which is composed of two or more materials joined at their interface surface. The advantage of clad material is that the combination of different materials can satisfy both the need of good mechanical properties and the other demand of user such as electrical properties instantaneouly. This paper is concerned with the direct and indirect extrusion process of copper-clad aluminum rod. Extrusion of copper-clad aluminum rod was simulated using a commercially available finite element package of DEFORM. The simulations were performed for copper-clad aluminum rod to predict the distributions of temperature, effective stress, effective strain rate and moan stress for some sheath thicknesses, die exit diameters and die temperatures.

• Journal of Welding and Joining
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• 제30권3호
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• pp.51-56
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• 2012

Different microstructures in the weld zone of a metal structure including a fusion zone and heat affected zone are formed as compared to the base material. Thus, the mechanical properties in the weld zone are different from those in the base material. As the basic data for reliably understanding the structural characteristics of welded nuclear material, the mechanical properties in the weld zone and base material for a Zircaloy-4 strap and Hastelloy${(R)}$-X alloy strap are measured using an instrumented indentation technique (IIT) in this study.

• Steel and Composite Structures
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• 제39권2호
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• pp.215-228
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• 2021

This paper investigates the effect of micromechanical models on the bending behavior of bidirectional functionally graded (BDFG) beams subjected to different mechanical loading. The material properties of the beam are considered to be graded in both axial and thickness directions according to a power law. The beam's behavior is modeled by the mean of quasi 3D displacement field that contain undetermined integral terms and involves a reduced unknown functions. Navier's method is employed to determine and compute the displacements and stress for a simply supported beam. Different homogenization schemes such as Voigt, Reus, and Mori-Tanaka are employed to analyze the response of the BDFG beam subjected to linear, uniform, exponential and sinusoidal distributed loading. The results obtained by the present method are compared with available results in the literature and a good agreement was found. Several numerical results are presented in tabular form and in figures to examine the effects of the material gradation, micromechanical models and types of loading on the bending response of BDFG beams. It can be concluded that the present theory is not only accurate but also simple in predicting the bending response of BDFG beam subjected to different static loads.

• International Journal of Concrete Structures and Materials
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• 제10권1호
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• pp.15-28
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• 2016

With the aim to reduce the atmospheric $CO_2$, utilization of the carbonated lime produced from the aqueous carbonation reaction for the synthesis of a cementitious material would be a promising approach. The present investigation deals with the aqueous carbonation of slaked lime, followed by hydrothermal synthesis of a cementitious material utilizing the carbonated lime, silica fume, and hydrated alumina. In this study, the aqueous carbonation reaction was performed under four different conditions. The TGA, FESEM, and XRD analysis of the carbonated product obtained from the four different reaction conditions was performed to evaluate the efficacy of the reaction conditions used for the production of the carbonated lime. Additionally, the performance of the cementitious material was verified analyzing the physical characteristics, mechanical property and setting time. Based on the results, it is demonstrated that the material produced by the hydrothermal method possesses the cementing ability. Additionally, it is revealed that the mortar prepared using the alternative cementitious material yields $33.8{\pm}1.3MPa$ compressive strength. Finally, a plausible reaction scheme has been proposed to explain the overall performances of the aqueous carbonation as well as the hydrothermal synthesis of the cementitious material.

• Journal of Biosystems Engineering
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• 제3권2호
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• pp.88-99
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• 1978

In this study, rice harvesting systems suitable to Korean situations and the optimum timing of these systems were determined, respectively, based on experimentally determined factors such as filed yield and the milling quantity and quality measured at various levels of the grain moisture content at harvest. Rice varieties used for the experiment were the AKIBARE (Japonica-type) and the SUWEON 251 (high yielding TONGIL sister-line variety), The harvesting systems studied by the experimental work of this study were traditional system with both the wet material and dry-material threshing system by use of binder with both the dry-material and wet-material threshings, and system by use of combine. Grain samples were taken from final products of the paddy rice harvested from the experiment a fields for each system to measure the recovery rates of the milled rice. The results may be summarized as follows; 1. The milling recovery rate of the AKIBARE variety had highest value within the range of the grain moisture at harvest, showing from 21 to 26 percent. The head-rice recovery for the same variety was a little greater in the wet-material threshing than in the dry-material threshing , higher values of which , were 20 to 25 percent , seen within the range of grain moisture at harvest regardless of the harvesting systems tested. 2. The milling recovery of the SUWEON 251 , when tested for different harvesting systems and harvesting grain moisture, did not show a statistically significant different. In contrast , head-rice recovery for the systems operated by the wet-material threshing was much greater than that by the -material threshing. The difference of the recoveries between these systems range from 2.6 to 4.7 percent. 3. An assessment of the optimum period of -harvest timing for each of the harve\ulcornersting systems tested were made bJ.sed on (a) the maximum total milled-rise yield and (b) the percentage reduction in the total milled-rice yield due to untimely harvest operations. The optimum period determined are: 23-19% for the ATD, AC, STD, SBW, STW systems, 25-21% for the ATW ani ABW systems, and 27-18% for the ABD, SBD, and SC systems, respectively.

• 대한방사선기술학회지:방사선기술과학
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• 제44권5호
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• pp.465-471
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• 2021

Dual-energy X-ray imaging (DEI) techniques can provide X-ray images that a certain material is suppressed or emphasized by combining two X-ray images obtained from two different x-ray spectrum. In this paper, a single-shot DEI, which uses stacked two detectors (i.e., multilayer detector), is proposed to reduce the patient dose and increase throughput in angiography. The polymethyl methacrylate (PMMA) and aluminum (Al) were selected as two basis materials for material decomposition, and material-specific images are reconstructed as a vector combination of these two materials. We investigate the contrast and noise performance of material-decomposed images using iodine phantoms with various concentrations and diameters. The single-shot DEI shows comparable performances to the conventional dual-shot DEI. In particular, the single-shot DEI shows edge enhancement in material-decomposed images due to the different spatial-resolution characteristics of upper and lower detectors. This study could be useful for designing the multilayer detector including scintillators and energy-separation filter for angiography purposes.

• Nuclear Engineering and Technology
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• 제55권8호
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• pp.2734-2741
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• 2023

Brachytherapy is a special case of radiotherapy. It should be arranged according to some principles in medical radiation applications and radiation physics. The primary principle is to use as low as reasonably achievable dose in all ionizing radiation applications for diagnostic and therapeutic treatments. Dosimetric distributions are dependent on radioactive source properties and radiation-matter interactions in an absorber medium such as phantom or tissue. In this consideration, the geometrical structure and material of the seed capsule, which surrounds a radioactive material, are directly responsible for isodose profiles and dosimetric functions. In this study, the radiometric properties of capsule material were investigated on dose distribution in a water phantom by changing its nuclear properties using the EGSnrc Monte Carlo (MC) simulation code. Effective atomic numbers of hypothetic mixtures were calculated by using different elements with several fractions for capsule material. Model 6711 brachytherapy seed was modeled by EGSnrc/Dosrcnrc Code and dosimetric functions were calculated. As a result, dosimetric parameters of hypothetic sources have been acquired in large-scale atomic number. Dosimetric deviations between the data of hypothetic seeds and the original one were analyzed. Unit dose (Gy/Particle) distributions belonging to different types of material in seed capsule have remarkably differed from the original capsule's data. Capsule type is major variable to manage the expected dose profile and isodose distribution around a seed. This study shows us systematically varied scale of material type (cross section or effective atomic number dependent) offers selective material usage in production of seed capsules for the expected isodose profile of a specific source.

• 한국전기전자재료학회논문지
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• 제27권7호
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• pp.443-447
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• 2014

ZnO crystals with different morphologies were synthesized through a thermal evaporation of Zn-Mn mixtures in air. The morphology was dependant on the Mn content in Zn-Mn mixture. The morphology was changed from rod to tetrapod shape with decreasing Mn content in Zn-Mn mixture. The result indicates that the concentration of Mn might be responsible for the different morphologies of ZnO crystals. XRD spectra showed that the ZnO crystals had a hexagonal wurtzite crystal strutures. For all the samples, room temperature cathodoluminescence spectra showed a ultra-violet emission at 380 nm and a green emission at around 500 nm. However, the intensity ratio of ultra-violet emission to green emission was significantly different with the Mn content in the source material.