• 제목/요약/키워드: Dielectric resistance

검색결과 330건 처리시간 0.021초

액체절연체(실리콘유) 유전정접의 온도및 주파수의존성 (The Dependence of Temperature and Frequency for the Dissipation Factor in Liquid Dielectrics)

  • 이돈희;소병문;이수원;김왕곤;홍진웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1993년도 추계학술대회 논문집
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    • pp.85-89
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    • 1993
  • Silicone oil exhibits the properies of both organic and inorganic substances and, thus, it has many superior properties such as higher thermal resistance and lower thermal oxidation level when compared to other dielectric liquids. In order to investigate the dielectric characteristics, dielectric liquids of viscosity 1 [cSt] is chosen as the specimen and experiment is performed in the temperature range of 20∼65 [$^{\circ}C$] and frequency range of 30∼1${\times}$10$\^$6/ [Hz] respectively. As a result, the observed linear decrease in dissipation factor at the frequency range below 3 [kHz] is due to the influence of frequency, whereas the increase in dissipation factor at higher frequency range is contributed by electrode's resistance. At a fixed frequency of 30 [kHz], increasing temperature results in higher peak value and wide width of the absorption curve. This is due to the increase in dipole and viscosity. As temperature increases, dipole moment is decreased from 0.98 to 0.64 [debye]. The activation energy which causes the relaxation and loss of dielectric is obtained about 15 [kcal/mole].

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20% 황산 및 8% 황산 + 3% 옥살산에서 AA6061 합금 표면에 형성된 아노다이징 피막의 내전압 특성 (Dielectric breakdown of anodic oxide films formed on AA6061 in 20% H2O4and 8% H2SO4+ 3% C2H2O4 solutions)

  • 박철기;장재확;현윤석;문성모
    • 한국표면공학회지
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    • 제57권1호
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    • pp.8-13
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    • 2024
  • Anodizing of Al6061 alloy was conducted in two different electrolytes of 20% sulfuric acid and 8% sulfuric acid + 3 % oxalic acid solutions at a constant current or decreasing current density conditions, and its dielectric breakdown voltage was measured. The surface morphology of anodic oxide films was observed by TEM and thermal treatment was carried out at 400 ℃ for 2 h to evaluate the resistance of the anodic oxide films to crack initiation. The anodic oxide film formed in 8% sulfuric acid + 3 % oxalic acid solution showed higher dielectric breakdown voltage and better resistance to crack initiation at 400 ℃ than that formed in 20% sulfuric acid solution. The dielectric breakdown voltage increased 6 ~12% by applying decreasing current density comparing with a constant current density.

Failure Analysis for High via Resistance by HDP CVD System for IMD Layer

  • Kim, Sang-Yong;Chung, Hun-Sang;Seo, Yong-Jin
    • Transactions on Electrical and Electronic Materials
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    • 제3권4호
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    • pp.1-4
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    • 2002
  • As the application of semiconductor chips into electronics increases, it requires more complete integration, which results in higher performance. And it needs minimization in device design for cost saving of manufacture. Therefore oxide gap fill has become one of the major issues in sub-micron devices. Currently HDP (High-Density Plasma) CVD system is widely used in IMD (Inter Metal Dielectric) to fill narrower space between metal lines. However, HDP-CVD system has some potential problems such as plasma charging damage, metal damage and etc. Therefore, we will introduce about one of via resistance failure by metal damage and a preventive method in this paper.

Effects of Dysprosium and Thulium addition on microstructure and electric properties of co-doped $BaTiO_3$ for MLCCs

  • Kim, Do-Wan;Kim, Jin-Seong;Noh, Tai-Min;Kang, Do-Won;Kim, Jeong-Wook;Lee, Hee-Soo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.48.2-48.2
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    • 2010
  • The effect of additives as rare-earth in dielectric materials has been studied to meet the development trend in electronics on the miniaturization with increasing the capacitance of MLCCs (multi-layered ceramic capacitors). It was reported that the addition of rare-earth oxides in dielectrics would contribute to enhance dielectric properties and high temperature stability. Especially, dysprosium and thulium are well known to the representative elements functioned as selective substitution in barium titanate with perovskite structure. The effects of these additives on microstructure and electric properties were studied. The 0.8 mol% Dy doped $BaTiO_3$ and the 1.0 mol% Tm doped $BaTiO_3$ had the highest electric properties as optimized composition, respectively. According to the increase of rare-earth contents, the growth of abnormal grains was suppressed and pyrochlore phase was formed in more than solubility limits. Furthermore, the effect of two rare-earth elements co-doped $BaTiO_3$ on the dielectric properties and insulation resistance was investigated with different concentration. The dielectric specimens with $BaTiO_3-Dy_2O_3-Tm2O_3$ system were prepared by design of experiment for improving the electric properties and sintered at $1320^{\circ}C$ for 2h in a reducing atmosphere. The dielectric properties were evaluated from -55 to $125^{\circ}C$ (at $1KHz{\pm}10%$ and $1.0{\pm}0.2V$) and the insulation resistance was examined at 16V for 2 min. The morphology and crystallinity of the specimens were determined by microstructural and phase analysis.

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극미세 전자소자 박막배선 재료 개선을 위한 엘렉트로마이그레이션 현상에 미치는 절연보호막 효과 (Dielectric Passivation Effects on the Electromigration Phenomena for the Improvement of Microelectronic Thin Film interconnection Materials)

  • 박영식;김진영
    • 한국진공학회지
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    • 제5권2호
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    • pp.161-168
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    • 1996
  • For the improvement of microelectronic thin film interconnection materials, dielectric passivation effects on the electromigration phenomena were studied. Using Al-1%Si, various shaped patterns were fabricated and dielectric passivation layers of several structures were deposited on the $SiO_2$ layer. Lifetime of straight pattern showed 2~5 times longer than the other patterns that had various line width and area. It is believed that the flux divergence due to the structural inhomogeneity and so the current crowding effects shorten the lifetime of thin film interconnections. The lifetime of thin film interconnections seems to depend on both the passivation materials and the passivation thickness. PSG/$SiO_2$ dielectric passivation layers showed longer lifetime than $Si_3N_4$ dielectric passivation layers. This results from the PSG on $SiO_2$ layer reduces stress and from the improvement of resistance to the moisture and to the mobile ion such as sodium. This is also believed that the lifetime of thin film interconnections seems to depend on the passivation thickness in case of the same deposition materials.

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주파수 영역 Green 함수와 모멘트법을 이용한 유전체 평판 부착 다이폴 안테나의 특성해석 (Analysis of a Dipole Antenna Attached on a Dielectric Slab Using a Spectral-Domain Green's Function and the Method of Moments)

  • 오이석
    • 한국통신학회논문지
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    • 제21권10호
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    • pp.2703-2709
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    • 1996
  • This paper proposes an exact numerical method for analyzing a dipole antenna attached on a dielectric slab. A Green's function for an infinitesimal current filament on a dielectric slab is derived and a field integral equation is formulated using a boundary condition. The moment Method is used to solve the field integral equation to otain current distribution on the antenna. Since an asymptotic function is used to compute the impedance matrix elements, the computataion time is significantly reduced. Using the computed current distributions, the input impedances, the resonance lengths and the resonant resistances of the antennas for various values of the thichnessandthe dielectric constant of the slab are obtained. It was found that the resonant length and the resonant resistance are decrease monotonically as the dielectric constant increases, however, those are changed up-and-down as the substrate thickness increases.

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PEDCVD로 증착된 ILD용 저유전 상수 SiOCH 필름의 특성 (Characterization of low-k dielectric SiOCH film deposited by PECVD for interlayer dielectric)

  • 최용호;김지균;이헌용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.144-147
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    • 2003
  • Cu+ ions drift diffusion in formal oxide film and SiOCH film for interlayer dielectric is evaluated. The diffusion is investigated by measuring shift in the flatband voltage of capacitance/voltage measurements on Cu gate capacitors after bias temperature stressing. At a field of 0.2MV/cm and temperature $200^{\circ}C,\;300^{\circ}C,\;400^{\circ}C,\;500^{\circ}C$ for 10min, 30min, 60min. The Cu+ ions drift rate of $SiOCH(k=2.85{\pm}0.03)$ film is considerable lower than termal oxide. As a result of the experiment, SiOCH film is higher than Thermal oxide film for Cu+ drift diffusion resistance. The important conclusion is that SiOCH film will solve a causing reliability problems aganist Cu+ drift diffuion in dielectric materials.

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Dielectric Breakdown Behavior of Anodic Oxide Films Formed on Pure Aluminum in Sulfuric Acid and Oxalic Acid Electrolytes

  • Hien Van Pham;Duyoung Kwon;Juseok Kim;Sungmo Moon
    • 한국표면공학회지
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    • 제56권3호
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    • pp.169-179
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    • 2023
  • This work studies dielectric breakdown behavior of AAO (anodic aluminum oxide) films formed on pure aluminum at a constant current density in 5 ~ 20 vol.% sulfuric acid (SA) and 2 ~ 8 wt.% oxalic acid (OA) solutions. It was observed that dielectric breakdown voltage of AAO film with the same thickness increased with increasing concentration of both SA and OA solutions up to 15 vol.% and 6 wt.%, respectively, above which it decreased slightly. The dielectric breakdown resistance of the OA films appeared to be superior to that of SA films. After dielectric breakdown test, cracks and a hole were observed. The crack length increased with increasing SA film thickness but it did not increase with increasing OA film thickness. To explain the reason why shorter cracks formed on the OA films than the SA films after dielectric breakdown test, the generation of tensile stresses at the oxide/metal interface was discussed in relation to porosity of AAO films obtained from cross-sectional morphologies.

루타일이 삽입된 유전체 공진기의 두 공진 모드를 이용한 루타일의 유전손실과 $YBa_2Cu_3O_{7-{\delta}}$ 박막의 마이크로파 표면저항 측정 (Simultaneous Measurements of the Loss Tangent of Rutile ($TiO_2$) and the Microwave Surface Resistance of $YBa_2Cu_3O_{7-{\delta}}$ Films using Two Resonant Modes of Rutile -loaded cavity Resonator)

  • 임준;이재훈;김민정;허정;이상영
    • Progress in Superconductivity
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    • 제4권2호
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    • pp.137-143
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    • 2003
  • In measuring the microwave surface resistance of high-Tc superconductor (HTS) films using the dielectric-loaded cavity resonator method, one of the most important factors that limit the measurement sensitivity is the measurement error in the loss tangent ($tan\delta$) of the dielectric rod placed inside the cavity. We have measured the effective surface resistance ( $R_{S}$ $^{eff}$) of$ YBa_2$$_Cu3$$_{7-{\delta}}$ (YBCO) films and the $tan\delta$ of rutile ($TiO_2$) using the 'two-tone'method suggested by Kobayashi et at. [IEEE, MTT-S Digest, 495, (2001)], which enables simultaneous measurements of both the $R_{S}$ $^{eff}$ fof HTS films and the $tan\delta$ of the rutile with high sensitivity. A rutile-loaded cavity resonator with the $TE_{012}$ and $TE_{021}$ resonant frequencies at 13.67 - 14.01 GHz is used for this purpose. At temperatures where the two modes do not couple with other modes, the $R_{S}$ $^{eff}$ of YBCO films and $tan\delta$ of rutile measured by the two-tone method appear to match well with the corresponding values measured using the reported $tan\delta$ values of sapphire within 10 %. Usefulness of the 'two-tone' method for microwave characterization of HTS films and dielectrics is discussed.d.ielectrics is discussed.ussed.

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하이브리드 차량용 견인전동기의 절연성능 비교분석 (Comparative Analysis on Insulation Performance of Traction Motors for Hybrid Vehicles)

  • 최수연;박찬용;김성욱;박대원;길경석;이강원
    • 한국전기전자재료학회논문지
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    • 제21권12호
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    • pp.1124-1129
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    • 2008
  • The object of this paper is to acquire the data related to insulation evaluation of hybrid vehicle traction motors. We made a comparative analysis on Insulation Resistance (IR), Dielectric Absorption Ratio (DAR), and Polarization Index (PI) of the motor stators. The experiment was carried out according to IEEE Std. 43 and IEC 60085-1 for insulation resistance test standard of rotating machinery. Test voltage of 500 V was applied between a phase and the enclosure. The IR and the DAR of used motors were lower than those of new ones. The DAR and the PI were $0.92{\sim}1.02$ and $0.74{\sim}1.1$, respectively and the result did not meet the recommendation basis 2 for insulation level H. From the experimental results, we could prepare parameters and basis for insulation evaluation of the traction motor stator by the comparative analysis of short-time insulation resistance changes, DAR and PI.