• 한국재료학회지
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• 제25권2호
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• pp.100-106
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• 2015

Plasma properties of dielectric barrier discharges (DBDs) at atmospheric pressure were measured and characterized using optical emission spectroscopy. Optical emissions were measured from argon, nitrogen, or air discharges generated at 5-9 kV using 20 kHz power supply. Emissions from nitrogen molecules were markedly measured, irrespective of discharge gases. The intensity of emission peaks was increased with applied voltage and electrode gap. The short wavelength peaks (315.9 nm and 337.1 nm) measured at the middle of DBDs were significantly increased with applied voltage. The optical emission from DBDs decreased with the addition of oxygen gas, which was especially significant in argon discharge. Emission from oxygen molecules cannot be measured from air discharge and argon discharge with 4.8% oxygen. The emission intensity at 337.1 nm and 357.7 nm related with nitrogen molecule was sensitively changed with electrode types and discharge voltages. However, the pattern of argon emission spectrum was nearly the same, irrespective of electrode type, oxygen content, and discharge voltage.

• 전자공학회논문지SC
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• 제45권5호
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• pp.44-51
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• 2008

UV 램프 시스템은 오랫동안 TFT LCD 나 PDP 의 패널 세정에 사용되어 왔으나, 저렴한 가격의 고성능 세정에 대한 필요성 때문에 고전압 플라즈마 세정에 대한 기술이 개발되고 그 성능이 향상되어 왔다. 장벽방전 (barrier discharge) 혹은 무성방전 (silent discharge)으로 불리는 유전체 장벽 방전 (Dielectric-Barrier Discharges, DBDs) 는 오존 발생기에 주로 이용되어 왔다. 본 논문에서는 LCD 세정용으로 6kW 급 고전압 플라즈마 발생장치를 구현하였다. 3상 입력전압을 직류로 정류한 뒤, 인버터 시스템에 의해 고주파 펄스로 바꾸고 고압 트랜스퍼머를 거쳐 다이오드로 정류한다. 마지막으로, 고압 플라즈마를 발생시키기 위해 양방향 고전압 펄스 스위칭회로가 사용되었다. 실험을 통해 상압 플라즈마가 LCD 패널 세정에 크게 유용함을 보였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.648-652
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• 2004

A comparative investigation of an experimental and a simulation of chemical kinetics for NOx removal from dielectric barrier discharges is presented. Several types of dielectric barrier discharges were implemented depending upon the configuration of electrodes. The simulation was based on an approximate mathematical model for plasma cleaning of waste gas. The influence of non uniform distributions of species due to the production of primary active particles in the streamer channel was taken into account. A comparison of observed experimental to the calculated removal efficiency of NOx showed acceptable agreement.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1314-1316
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• 1995

Basic discharge characteristics of a ferroelectric ball and mica sheet double barrier have been studied for learning the fundamentals of the barrier discharges and for checking the potential to be used as a plasma generator. It is found that plasma generation of the plasma generator was influenced greatly by the dielectric constant of the ferroelectric ball barrier and applied power frequency. As a result, there are optimum conditions of the dielectric constant as a barrier and the applied frequency to generate ozone effectively, which were ${\varepsilon}_r$=600 and f=4 kHz at the present experimental case.

• Applied Science and Convergence Technology
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• 제25권6호
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• pp.138-144
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• 2016

The discharge characteristics of pulse-driven coplanar micro barrier discharges for an ultraviolet (UV) light source using Ne-Xe mixture have been investigated using a two-dimensional fluid simulation at near-atmospheric pressure. The densities of electrons, the radiative excited states, the metastable excited states, and the power loss are investigated with the variations of gas pressure and the gap distance. With a fixed gap distance, the number of the radiative states $Xe^*(^3P_1)$ increases with the increasing driving voltage, but this number shows weak dependency on the gas when that pressure is over 400 Torr. However, the number of the radiative states increases with the increase of the gap distance at a fixed voltage, while the power loss decreases. Therefore, a long gap discharge has higher efficiency for UV generation than does a short gap discharge. A slight change in the electrode tilt angle enhances the number of radiative species 2 or 3 times with the same operation conditions. Therefore, the intensity and efficiency of the UV light source can be controlled independently by changing the gap distance and the electrode structure.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2009년도 추계학술대회 논문집
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• pp.601-603
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• 2009

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1441-1443
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• 1998

In this work, the effects of space charge was analyzed in removal efficiency of pollutant using dielectric barrier discharges. In order to investigate effects of space charge, two dielectrics(XLPE and TR-XLPE) was chosen which are different in space charge distribution. The simultaneously measurement of space charge and discharge current was carried out in XLPE and TR-XLPE with air gap by Pulsed-Electro-Acoustic Method in ac. Also, the removal efficiency is measured by classical ozone generator(von Siemens 1875). From the experimental results, we knew that the space charge distribution affects the discharge patterns. The more space charge is in surface, the quickly discharge initiates and the magnitude of discharge is increased when polarity changes. And these affect the removal efficiency of pollutant.

• 한국표면공학회지
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• 제44권2호
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• pp.50-54
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• 2011

Hydrophobic a-C:F film was coated on polycarbonate film with $CF_4$, $C_2F_6$ and HFC ($C_2F_4H_2$) gas in helium discharge generated by 5~100 kHz AC power supply at atmospheric pressure and room temperature. The highest water contact angle of the a-C:F film formed with $He/C_2F_6$ mixed gas is $155^{\circ}$. X-ray photoelectron spectrum showed that there was 40% of C-$CF_3$ bond at the surface of the super hydrophobic film. The contact angle and deposition rate were decreased with increasing substrate temperature. The contact angle was generally increased with the surface roughness of the film. The contact angle was high when the surface microstructure of the film was fine and sharp at the similar roughness and chemical composition of the surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.152-155
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• 2003

Ashing of photoresist was investigated in dielectric barrier discharges in atmospheric pressure by changing applied voltage, frequency, flow rate. we analyzed the plasma by Optical Emission Spectroscopy(OES) to monitor the variation of active oxygen species. Another new peaks of oxygen radical is observed by addition of argon gas. This may explain the increase in ashing rate with argon addition. With the results of Optical Emission Spectroscopy(OES), we can find the optimized ashing conditions. MIS capacitor for monitoring charging damage by the plasma was also studied. The results suggest the dielectric barrier discharges(DBD) can be an efficient, alternative Plasma source for general surface processing.

• 한국물환경학회지
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• 제28권3호
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• pp.401-408
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• 2012

High-voltage dielectric discharges are an emerging technique in environmental pollutant degradation, which that are characterized by the production of hydroxyl radicals as the primary degradation species. The initiation and propagation of the electrical discharges depends on several physical, chemical, and electrical parameters such as 1st and 2nd voltage of power, gas supply, conductivity and pH. These parameters also influence the physical and chemical characteristics of the discharges, including the production of reactive species such as OH, $H_2O_2$ and $O_3$. The experimental results showed that the optimum 1st voltage and air flow rate for RNO (N-Dimethyl-4-nitrosoaniline, indicator of the generation of OH radical) degradation were 160 V (2nd voltage of is 15 kV) and 4 L/min, respectively. As the increased of the 2nd voltage (4 kV to 15 kV), RNO degradation, $H_2O_2$ and $O_3$ generation were increased. The conductivity of the solution was not influencing the RNO degradation and $H_2O_2$ and $O_3$ generation. The effects pH was not high on RNO degradation. However, the lower pH and the conductivity, the higher $H_2O_2$ and $O_3$ generation were observed.