• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.128-128
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• 2010

In this study, we investigated the evolution and reduction of the surface roughness during the high-speed chemical dry thinning process of Si wafers. The direct injection of NO gas into the reactor during the supply of F radicals from NF3 remote plasmas was very effective in increasing the Si thinning rate, due to the NO-induced enhancement of the surface reaction, but resulted in the significant roughening of the thinned Si surface. However, the direct addition of Ar and N2 gas, together with NO gas, decreased the root mean square (RMS) surface roughness of the thinned Si wafer significantly. The process regime for the increasing of the thinning rate and concomitant reduction of the surface roughness was extended at higher Ar gas flow rates. In this way, Si wafer thinning rate as high as $20\;{\mu}m/min$ and very smooth surface roughness was obtained and the mechanical damage of silicon wafer was effectively removed. We also measured die fracture strength of thinned Si wafer in order to understand the effect of chemical dry thinning on removal of mechanical damage generated during mechanical grinding. The die fracture strength of the thinned Si wafers was measured using 3-point bending test and compared. The results indicated that chemical dry thinning with reduced surface roughness and removal of mechanical damage increased the die fracture strength of the thinned Si wafer.

• Korean Journal of Metals and Materials
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• v.48 no.4
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• pp.363-368
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• 2010

N,N'-diphenyl-N,N'-bis(3-methylphenyl)1-1' biphenyl-4,4'-diamine (TPD) hole-transporting layers were deposited using a continuous slot-die coating method on ITO/PET flexible substrates. It is crucial that the substrates have a very smooth surface with a RMS roughness of less than 2 nm for the deposition of semiconductor nanocrystals or Quantum Dots. The parameters of the slot-die coating, including the solution concentration of the TPD, the gap between the slot-die and the substrates, and the coating speed were controlled in these experiments. To obtain full coverage of the TPD films on the ITO/PET substrates (40 mm wide and several meters long), the injection rates of the TPD solution were increased proportional to the coating speed of the flexible substrates. Additionally, the injection rates must be increased as the gap distance changes from 400 to 600 ${\mu}m$ at the same coating speed. A RMS surface roughness of less than 2 nm was obtained, in contrast to bare ITO/PET substrates, at 13 nm, as the coating speed and gap distance increased.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.9
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• pp.5434-5439
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• 2014

The surface management of metals was performed with a tool microscope or surface roughness measurement instruments. These methods were not efficient for checking the surface status of the die in the production field. For this reason, an analysis system or measurement system to monitor the wear, defects and surface status as a die ages is required. This study, developed surface analysis software for automatic analysis and standardization of a die or processed products. Software was designed to measure the basic features, such as circles, dots, and lines. The captured images were rendered as three-dimensional representations so that the depth of the grooves on the die and segmental profiles could be estimated. As a result of experimental analysis, the surface roughness was measured with an accuracy more than 93.2%, and the maximum deviation in the surface roughness for the brightness of the lighting was within $3{\mu}m$. The confidence in the device's precision was assured. These results show quality control through efficient surface analysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.179-179
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• 2009

For the deposition of the semiconductor nanocrystals or quantum dots, it is required to have the substrates with smooth surface roughness. Slot-die coating method wad adopted and optimized varying the processing parameters like coating speed, gap distance, solution concentration, etc to get the smooth coated films on flexible substrates. The coating speed in slot-die method was varied from 1 m/min to 2.5 m/min focusing especially on its industrial usage. The gap distance between the substrate surface and slot-die lip was changed also to control mainly the thickness of coated films.

• Design & Manufacturing
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• v.6 no.1
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• pp.58-62
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• 2012

Unlike conventional single special cut methods, W-EDM is a combination of multiple-effects. This study focuses on the effects of second cut on the roughness of surfaces treated with W-EDM. W-EDM is, to a large extent, typical unmanned-machining equipment, which represents NC machining equipment that allows long-time full automation. W-EMD is getting popular as a precise machining technology and STD11 is frequently used in press die manufacture. In this study, the former is applied to the latter to look at the effects of second cut on the roughness of surfaces treated with W-EDM.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.82-86
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• 1999

An experimental study has been carried out to reduce bending load, surface roughness and springback in bending process of stainless steel sheets. A U-bending test has been performed to investigate appropriate process parameters for getting better surfaces and accurate dimensions of stainless steel products. In the test, selected process parameters are die material, lubricant, and die clearance. Die materials used in the test are STD11(HRC60), STD11(TiCN), and AMPCO. From the test results, we can suggest that AMPCO dies are most suitable for reducing bending load and surface roughness of stainless steel sheets. And STD11 dies are favorable for avoiding spring-back in the stainless steel sheet-bending.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.14-18
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• 1996

From the experimental study of Wire-Cut EDM of die-material(SKD-11), machining characteristics such as machining rate, surface roughness and hardness have been observed and evaluated under the conditions varing pulse on time, pulse off time, peak voltage after fixing other conditions. It was found that various operating conditions have significant influences on machining rate, surface roughness. Hardness of workpiece was unaffected by operating conditions.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.38-43
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• 2007

This paper describes ultrasonically assisted grinding used to obtain a glossy surface quickly and precisely. High-quality surfaces are required for plastic injection molding dies used in the production of plastic parts such as dials for cellular phones. Traditionally, in order to finish the dies, manual polishing by a skilled worker has been required after the machining processes, such as electro discharge machining (EDM), which leaves an affected layer, and milling, which leaves tooling marks. However, manual polishing causes detrimental geometrical deviations of the die and consumes several days to finish a die surface. Therefore, a machining process for finishing dies without manual polishing to improve the surface roughness and form accuracy would be extremely valuable. In this study, a 3D positioning machine equipped with an ultrasonic spindle was used to conduct grinding experiments. An electroplated diamond tool was used for these experiments. Generally, diamond tools cannot grind steel because of excessive wear as a result of carbon atoms diffusing into bulk steel and chips. However, ultrasonically assisted grinding can achieve a fine surface (roughness Rz of $0.4{\mu}m$) on die steel without severe tool wear. The final aim of this study is to realize mirror surface grinding for injection molding dies without manual polishing. To do this, it is necessary to fabricate an electroplated diamond tool with high form accuracy and low run-out. This paper describes a tool-making method for high precision grinding and the grinding performance of a self-electroplated tool. The ground surface textures, tool performance and tool life were investigated A ground surface roughness Rz of 0.14 um was achieved Our results show that the spindle speed, feed rate and cross feed affected the surface texture. One tool could finish $5000mm^2$ of die steel surface without any deterioration of the ground surface roughness.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.5
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• pp.391-395
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• 2005

This paper has comparatively analyzed the characteristics of the machined surface of a specimen made by machining Die Steel STD11 and a specimen obtained by W-EDM steel. If a press die is manufactured through W-EDM, products of shapes that cannot easily be made through machining can be manufactured easily. However, the life of the press die is significantly reduced compared with the press die made through machining. This is believed to be caused by the deformed layer that has occurred on the surface of the press die that was made through W-EDM. The roughness of the 2 specimens was measured, and it was learned that the distribution of the roughness of the specimen made through the 1st W-EDM was rough. When the specimens were observed using a scanning-electron microscope, there was significant difference between the surface and the cross-section of the 2 specimens, while the cross section of the specimen obtained through W-EDM had the tempered and quenched surface structure which exists in the form of a deformed layer.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.30-36
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• 2013

An FFD(flexible fine die) is an embossed mold that consists of a thin plate ranging from 0.6 to 3 mm in thickness. FFDs are primarily used for cutting LCD films and F-PCB sheets. In the high-speed micro-milling process of flexible fine dies, the lubrication and cooling of the cutting edges is very important from the aspect of eco machining and cutting performance. In this paper, a comparative study of tool wear and surface roughness between cutting fluid and hybrid lubrication for eco-machining of FFD was conducted for processes of high-speed machining of highly hardened material (STC5, HRC52). Especially, the incorporated fluid method for eco machining, in which the cutting performances can be simultaneously measured, was introduced. The machining results show that hybrid lubrication, instead of conventional cutting fluid, leads to excellent tool wear and surface roughness and represents the proper conditions for eco micro-machining of flexible fine dies.