• Title/Summary/Keyword: Diaphragm actuator

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A Study on the Fabrication of a Thremopneumatic micropump (열공압형 마이크로 펌프의 제작에 관한 연구)

  • Kim, Y.S.;Yang, S.S.
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1960-1962
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    • 1996
  • A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.

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Variable-focus Liquid Lens Based on a Laterally-integrated Thermopneumatic Actuator

  • Lee, June Kyoo;Park, Kyung-Woo;Lim, Geunbae;Kim, Hak-Rin;Kong, Seong Ho
    • Journal of the Optical Society of Korea
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    • v.16 no.1
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    • pp.22-28
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    • 2012
  • We report a focal-length tunable liquid lens based on thermopneumatically driven fluidic pressure. The fluidic pressure is generated by deformation of an elastomeric diaphragm induced by thermopneumaticity from a laterally integrated microheater sealed within an air chamber. The pressure is transmitted by a confined liquid to a lens diaphragm through an internal fluid channel. The liquid filling under the lens diaphragm functions as a liquid lens for dynamic focusing with properties depending on the curvature of the deformed diaphragm. The diaphragm area of the air chamber is designed five times larger than that of the lens cavity to yield high focal-length tunability by amplified deflection of the lens diaphragm. With our method, we achieved excellent focal-length tunability from infinity (without an input current) to 4 mm (with an input current of 12 mA) with a lens aperture diameter of 2 mm.

The fabrication of a micro pump with a flap valve and a phase change actuator (알루미늄 플랩 밸브와 상변화 구동 마이크로 펌프의 제작)

  • Lee, Sang-Woo;Sim, Woo-Young;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.1023-1025
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    • 1998
  • This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

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Fabrication of an Electromagnetic Actuator with the Planar Coil (평면 코일을 이용한 전자 구동기 제작)

  • Jeong, Hyun-Ku;Kwon, Ki-Young;Jeong, Ok-Chan;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.3295-3297
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    • 1999
  • This paper presents the fabrication of an electromagnetic micro actuator consisting of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The copper coil is fabricated by electroplating and patterning. The frequency response of the actuator are obtained using a laser vibrometer. When the input voltage is 3 V, the DC deflection is 5 ${\mu}m$, and the resonance frequency is about 35 Hz. Also, the mechanical sensitivity of the actuator diaphragm is 69 ${\mu}m/V$.

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Development of a Peristaltic Micropump with Lightweight Piezo-Composite Actuator Membrane Valves

  • Pham, My;Goo, Nam-Seo
    • International Journal of Aeronautical and Space Sciences
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    • v.12 no.1
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    • pp.69-77
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    • 2011
  • A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

Fabrication and Performance Evaluation of Diaphragm-type Actuators using Biocompatible polymer (생체적합형 고분자를 이용한 박막형 이동기의 제작 및 특성평가)

  • Jung, Young-Dae;Jeong, Hae-Do
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1254-1258
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    • 2007
  • Electro-active polymer (EAP), one of the smart materials, is a new alternative offering ultra-precise movements and bio-compatibility. We present the results of the design, fabrication, and performance evaluation of a fabricated diaphragm-type polymer actuator using segmented polyurethane(SPU). This paper illustrates the relationship between the elastic modulus and maximum deflection as a key property of the Maxwell stress effect and also presents the relationship between the dielectric constant and maximum deflection as a key property of the electrostriction effect, especially in polymer actuators using SPU. A diaphragm-type actuator was used to induce an equation of the vertically distributed load by using a fully clamped circular plate as the boundary condition. To verify the equation, the results were compared to the data measured from load cell. In the near future, a low-cost check valves and bio-robot can be applied by its actuators.

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Fabrication and Test of a Micro Pump with a Magnetostrictive diaphragm (자기변형 박막을 이용한 마이크로 펌프의 제작과 시험)

  • Seo, Jee-Hoon;Jeong, Ok-Chan;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.1017-1019
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    • 1998
  • In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.

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Design and Analysis of Voice Coil Actuator to Drive Fuel Pump in Automobile (자동차 연료펌프 구동용 보이스 코일 전자기 엑츄에이터의 설계 및 해석)

  • Park, Se-Myung;Kim, Jin-Ho;Bai, Cheol-Ho
    • Journal of the Korean Magnetics Society
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    • v.20 no.6
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    • pp.234-238
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    • 2010
  • Solenoid diaphragm fuel pump, which to replace mechanical fuel pump system by utilizing cam-shaft driving force, is in the spotlight for being a high efficient green car component. However, there is a drawback in power consumption as a solenoid diaphragm fuel pump only relies on solenoid for its flux needed in reciprocating motion. Therefore, this research proposes permanent magnet type VCM (Voice Coil Motor) fuel pump system to minimized power consumption. Furthermore, the study compares and analyzes power consumption and dynamic performance between the current and the former solenoid diaphragm pump by conducting finite element analysis with the commercial electromagnetic solver, MAXWELL.

Vibration Power Improvement Method of Curved Beam Based Actuator Using Finite Element Analysis (유한요소해석을 이용한 곡면보 기반 진동체의 진동력 향상 방법)

  • Park, J.S.;Na, S.D.;Sung, K.W.;Kim, Myoung Nam
    • Journal of Korea Multimedia Society
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    • v.22 no.2
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    • pp.271-280
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    • 2019
  • Recently, hearing loss patients have been increasing to excessive use of various multimedia devices. One of the hearing rehabilitation systems, bone conduction hearing aid can be used to conductive deafness patients efficiently. However, the conventional bone conduction hearing systems has some problems such as skin diseases, repulsion of patients, and vibration power reduction by skin damping. In this paper, to overcome the conventional problems, we proposed power improvement method by curved beam diaphragm. The proposed method is skin attachment system which is non-implantable, and then the power of transducer is improved by the proposed method. In order to improve the vibration power of diaphragm, variable that has correlation with displacement are extracted, the diaphragm designed by extracted variable. To verify efficient of the proposed method, experiment conducted by finite element analysis. As a result of, the proposed method confirmed improved power to compare with the conventional method and proposed method.