• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1960-1962
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• 1996

A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.

• Journal of the Optical Society of Korea
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• 제16권1호
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• pp.22-28
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• 2012

We report a focal-length tunable liquid lens based on thermopneumatically driven fluidic pressure. The fluidic pressure is generated by deformation of an elastomeric diaphragm induced by thermopneumaticity from a laterally integrated microheater sealed within an air chamber. The pressure is transmitted by a confined liquid to a lens diaphragm through an internal fluid channel. The liquid filling under the lens diaphragm functions as a liquid lens for dynamic focusing with properties depending on the curvature of the deformed diaphragm. The diaphragm area of the air chamber is designed five times larger than that of the lens cavity to yield high focal-length tunability by amplified deflection of the lens diaphragm. With our method, we achieved excellent focal-length tunability from infinity (without an input current) to 4 mm (with an input current of 12 mA) with a lens aperture diameter of 2 mm.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3295-3297
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• 1999

This paper presents the fabrication of an electromagnetic micro actuator consisting of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The copper coil is fabricated by electroplating and patterning. The frequency response of the actuator are obtained using a laser vibrometer. When the input voltage is 3 V, the DC deflection is 5 ${\mu}m$, and the resonance frequency is about 35 Hz. Also, the mechanical sensitivity of the actuator diaphragm is 69 ${\mu}m/V$.

• International Journal of Aeronautical and Space Sciences
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• 제12권1호
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1254-1258
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• 2007

Electro-active polymer (EAP), one of the smart materials, is a new alternative offering ultra-precise movements and bio-compatibility. We present the results of the design, fabrication, and performance evaluation of a fabricated diaphragm-type polymer actuator using segmented polyurethane(SPU). This paper illustrates the relationship between the elastic modulus and maximum deflection as a key property of the Maxwell stress effect and also presents the relationship between the dielectric constant and maximum deflection as a key property of the electrostriction effect, especially in polymer actuators using SPU. A diaphragm-type actuator was used to induce an equation of the vertically distributed load by using a fully clamped circular plate as the boundary condition. To verify the equation, the results were compared to the data measured from load cell. In the near future, a low-cost check valves and bio-robot can be applied by its actuators.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1017-1019
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• 1998

In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.

• 한국자기학회지
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• 제20권6호
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• pp.234-238
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• 2010

캠샤프트의 구동력을 활용한 기계식 연료펌프 시스템을 대체할 솔레노이드 격막 연료펌프는 최근 각광받고 있는 고효율 그린카 부품 중 하나이다. 하지만 솔레노이드 격막 연료펌프의 경우 왕복운동에 필요한 자속을 오직 솔레노이드에 의존하므로 전력소비가 비교적 큰 단점이 있다. 따라서 본 연구에서는 전력소모를 최소화 하기 위하여 영구자석형 VCA 연료펌프 시스템을 제안한다. 또한 상용전자기해석소프트웨어인 MAXWELL을 활용하여 유한요소 해석을 통해 기존의 솔레노이드 격막 펌프와의 전력소모 및 동적 성능을 비교 분석한다.

• 한국멀티미디어학회논문지
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• 제22권2호
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• pp.271-280
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• 2019

Recently, hearing loss patients have been increasing to excessive use of various multimedia devices. One of the hearing rehabilitation systems, bone conduction hearing aid can be used to conductive deafness patients efficiently. However, the conventional bone conduction hearing systems has some problems such as skin diseases, repulsion of patients, and vibration power reduction by skin damping. In this paper, to overcome the conventional problems, we proposed power improvement method by curved beam diaphragm. The proposed method is skin attachment system which is non-implantable, and then the power of transducer is improved by the proposed method. In order to improve the vibration power of diaphragm, variable that has correlation with displacement are extracted, the diaphragm designed by extracted variable. To verify efficient of the proposed method, experiment conducted by finite element analysis. As a result of, the proposed method confirmed improved power to compare with the conventional method and proposed method.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.140.1-140.1
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• 2005