• 한국기계가공학회지
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• 제12권2호
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• pp.34-40
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• 2013

Various depositional conditions, such as substrate, pressure, deposition time, temperature of substrate, power and gas composition, have mainly been studied to attain DLC films using RF sputtering system up to the current. In this study, the $N_2/Ar/CH_4$ gas mixture factored on characteristics of DLC deposited film such as structure, hardness, electrical property were investigated. The concentration of the $N_2$ gas in the sputtering gas may be a significant effect on the growth rate of the doped films, because nitrogen ions react not only with the carbon atoms on the target but also with $C_xH_y$ ions in the plasma on the substrate surface. It was seen from this experimental that the resistance of deposited film is decreased, and the relative intensity ratio of D to G peak is increased as nitrogen content of film deposition is increased.

• 대한치과보철학회지
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• 제46권2호
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• pp.209-216
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• 2008

본 연구의 목적은 내측연결형 임플랜트와 일체형 지대주를 사용하여 최종 보철물을 시적한 뒤에 5만 번의 반복하중 후에 다시 체결하고 20만 번의 반복하중을 가한 후의 지대주 풀림토크와 20만 번의 반복하중을 받은 지대주 풀림토크가 어떻게 달라지는지를 비교하고자 하는 것이다. 실험 재료로는 타이타늄 지대주와 DLC 코팅된 지대주를 사용하였다. 실험군은 4군으로 모두 8개의 ITI SLA $4.1{\times}10mm$ 를 사용하였다. A군과 B군은 5만번, 20만번 반복하중을 가하고 Periotest값과 풀림 토크값을 측정하였으며 C군과 D군은 20만번 반복하중을 가하고 Periotest 값과 풀림토크값을 측정하였다. 풀림 토크값의 측정은 디지털 토크 게이지를 사용하였고, 반복하중은 MTS. (Bionix 850 II, MTS, U.S.A.)를 사용하였으며 100N/cm의 힘을 20도의 경사, 14Hz 의 조건으로 가하였다. A군과 C군은 코팅하지 않은 타이타늄 지대주를 사용하였으며, B군과 D군은 DLC 코팅한 지대주를 사용하였다. 1. 5만번 반복하중을 가한 뒤 측정한 풀림 토크는 B군에서 약간 더 큰 평균값을 보였다. 하지만 통계학적으로 두 군간에 유의한 차이를 보이지 않았다 (P>0.05). 2. 20만번 반복하중을 가한 뒤 측정한 최종 풀림 토크 값은 A군은 C군보다, B군은 D군보다 약간 더 큰 평균값을 보였으나 통계학적으로 두 군간에 유의한 차이를 보이지 않았다 (P>0.05). 3. 20만번 반복하중을 가한 최종 풀림 토크 값은 A, B군과 C, D군 사이에 통계학적으로 유의할 만한 차이가 없었다 (P>0.05).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.170.2-170.2
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• 2016

DLC(Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소DLC로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 높은 열적안정성, 경도(50~60 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source(FVAS)를 자체적으로 개발하여 연구를 진행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통해 음극에서 기판으로 이동하는 카본이온의 에너지와 flux 변화를 통한 박막 증착 거동 및 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0, 5, 10, 15, 20 V 조건으로 진행하였으며, 물성 평가는 경도(Hardness), 마찰계수, 응력(Stress), 전기전도 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인해 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만분석 및 기판 도달 에너지 분석을 진행하였다

• The Korean Journal of Ceramics
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• 제3권2호
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• pp.101-104
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• 1997

Although tribological behavior of Si incorporated DLC films have been intensely investigated, their mechanical properties were not consistent among previous publications. The present work reported the structural change by adding Si, and their effects on the mechanical properties. Si incoporated DLC films were deposited using mixtures of benzene and diluted silane with hydrogen of various volume fractions. We could obtain the films of $X_{si}$ (defined by the Si fraction without considering hydrogen) ranging from 0.01 to 0.21, and found that the mechanical properties of the films changed significantly in the range less than $X_{si}=0.06$. In this range, the hardness and stress increased with Xsi. For higher content of Si, the hardness and stress showed saturated behavior with $X_{si}$. This behavior was discussed in terms of the changes in atomic bond structures.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.791-794
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• 2003

DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.842-845
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• 2003

DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

• Journal of Korean Vacuum Science & Technology
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• 제2권2호
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• pp.101-106
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• 1998

The poor wear and scratch properties of polycarbonate have limited its application in many fields. In order to improve the wear and scratch properties of polycarbonate we have deposited diamond like carbon (DLC) coatings. The diamond like carbon coatings were made using a high frequency ion beam gun by introducing H2 and CH4 gases. The coatings were characterized with Raman spectroscopy, scanning electron microscope, ellipsometer, microscratch tester and hazemeter. Polymeric hard coating was applied onto the polycarbonate substrate before depositing a DLC coating to investigate the effect of interlayer on the system's failure mode.

• Journal of Korean Vacuum Science & Technology
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• 제3권1호
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• pp.54-58
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• 1999

We deposited diamond-like carbon (DLC) films using ion beam sputtering of a graphite target on flat substrates for use as a thin film field emitter. An n-type silicon wafer, titanium-coated silicon, and indium tin oxide (ITO) coated glass were used as a substrate. All films exhibited a sudden increase in the emission after a breakdown occurred at high voltage. The morphology of the films after the breakdown depended on the substrate. On ITO and Ti substrates, the DLC film peeled off upon breakdown, but on the Si substrate the surface melting due to breakdown resulted in the formation of various structures such as a sharp point, mound, and crater. By scanning the deformed surface with a tip anode, we found that the emission was concentrated at the deformed sites, indicating that the field enhancement due to the morphology change was responsible for the increased emission.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권3호
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• pp.109-115
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• 2003

Diamond-like carbon (DLC) films are deposited at room temperature using a filtered cathodic vacuum arc (FCVA) technique. The influence of negative bias voltage (applied to the substrate from 0 to -250V) on the $sp^3$ hybridized carbon fraction is examined by Raman spectroscopy and x-ray photoelectron spectroscopy (XPS) for C 1s core peak. For the first time, depth profile of C 1s, Si 2p, and O 1s XPS peaks for the deposited DLC film are obtained. DLC film is modeled as a multilayered structure. composing of surface, bulk, and interface. In addition, the x-ray reflectivity (XRR) is proposed as a method for estimating the density, surface roughness, and thickness of each layer constituting the DLC film. The estimated thickness of DLC film is in good agreement with the result obtained from the transmission electron microscope (TEM) measurement.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제30회 추계학술대회
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• pp.42-48
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• 1999

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers from radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed under vacuum, dry air and ambient air conditions. It was observed that coefficient of friction was decreased as the environmental condition changes from vacuum, to dry air. It was also observed that the coefficient of friction decreased with increasing silicon concentration in the film. Chemical analyses of debris suggested that the low and stable friction coefficient is closely related to the silicon rich oxide debris and the rolling action.