• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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• pp.1352-1355
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• 1996

The control of diamond turning is usually achieved through a laser-interferometer feedback of slide position. If the tool post is rigid and the material removal process is relatively static, then such a non-collocated position feedback control scheme may surface. However, as the accuracy requirement gets tighter and desired surface contours become more complex, the need for a direct tool-tip sensing becomes inevitable. The physical constraints of the machining process prohibit any reasonable implementation of a tool-tip motion measurement. It is proposed that the measured force normal to the face of the workpiece can be filtered through an appropriate admittance transfer function to result in the estimated depth of cut. This can be compared to the desired depth of cut to generate the adjustment control action in addition to position feedback control. In this work, the design methodology on the admittance model-based control with a conventional controller is presented. The recursive least-squares algorithm with forgetting factor is proposed to identify the parameters and update the cutting process in real time. The normal cutting forces are measured to identify the cutting dynamics in the real diamond turning process using the precision dynamometer. Based on the parameter estimation of cutting dynamics and the admittance model-based nanodynamic control scheme, simulation results are shown.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.49-52
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• 1996

The control of diamond turning is usually achieved through a laser-interferometer feedback of slide position. The limitation of this control scheme is that the feedback signal does not account for additional dynamics of the tool post and the material removal process. If the tool post is rigid and the material removal process is relatively static, then such a non-collocated position feedback control scheme may surfice. However, as the accuracy requirement gets tighter and desired surface contours become more complex, the need for a direct tool-tip sensing becomes inevitable. The physical constraints of the machining processprohibit any reasonable implementation of a tool-tip motion measurement. It is proposed that the measured force normalto the face of the workpice can be filterd through an appropriate admittance transfer function to result in the estimated depth of cut. This can be compared to the desired depth of cut to generate the adjustment cotnrol action in addition to position feedback control. In this work, the design methodology on the admittance model-based control with a conventional controller is presented. Based on the empirical data of the cutting dynamics, simulation results are shown.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.343-346
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• 2004

In recent years, various forms of indentation testing have been increasingly used to determine the material properties of specimens. This technique, particularly the nano-indentation method , has been extended to the testing of coating systems in order to calculate the individual properties of the thin coatings and the substrates. However, the interpretation of the test data to achieve this is complex and continues to be a widely studied subject. Based on the finite element method of coated surfaces indented by a Berkovich diamond tip, this paper describes methods for combining FEM and experimental indentation testing to determine coating modulus and hardness independent of substrate effects. Using this proposed methodology, testing and FEM to measure coefficients of friction of sheet steel for outer panel were studied.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.170-170
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• 2004

박막의 접착강도를 측정하기 위하여 수직력과 수평력을 동시에 측정할 수 있는 0.1∼100 N 용량의 2축 로드셀에 기반을 둔 스크레치 테스터를 개발하였다. 반도체용 Si wafer 기판 위에 Au나 Al 등의 금속이 관은 박막으로 증착된 제품을 table에 고정시킨 후, 2축 로드셀(x, z)이 장착된 하중센서의 선단에 Diamond Tip을 장착하여 기판과 박막에 하중(z-axis)을 증가시키면서 동시에 wafer를 x축 방향으로 이동시킨다. 이런 방식으로 시료의 표면을 긁으면 박막이 벗겨져 나가 Diamond Tip이 기판에 닿을 때 서로 다른 경도차에 의해 진동이 발생하게 되고, 이 진동을 Acoustic Emission 센서에서 감지하여 Crack 발생 시점의 Load와 Stroke를 찾아내게 된다.(중략)

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.18-22
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• 2000

An experimental study was carried out to investigate the effect of nano-contact condition on the nano-adhesion phenomena. SPM(scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. DLC(diamond-like carbon) and W-DLC (tungsten-incorporated diamond-like carbon) were coated on (100) silicon wafer by PACVD(plasma assisted chemical vapor deposition). Pull-off forces of Pure Si-wafer, DLC and W-DLC were measured with SPM(scanning probe microscope). Also, the same series of tests were carried out with the tips with different radius of curvature. Results showed that DLC and W-DLC showed much lower pull-off force than Si-wafer and Pull-off force increased with the tip radius.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 추계학술대회 초록집
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• pp.129-130
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• 2009

다이아몬드상 탄소 (Diamond-like Carbon; DLC) 박막은 광학재료의 보호 및 무반사 코팅, 저마찰 오버코팅 및 평판 표시소자의 전계방출 Tip 코팅 등 다양한 분야에 응용이 기대되고 있는 재료이다. 이온빔 방식의 DLC 박막 제조 장치를 이용하여 다양한 조건에서 DLC 박막을 제조하고 그 특성을 평가하였다.

• 한국정밀공학회지
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• 제13권10호
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• pp.154-160
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• 1996

The control of diamond turning is usually achieved through a laser-interferometer feedback of slide position. The limitation of this control scheme is that the feedback signal does not account for additional dynamics of the tool post and the material removal process. If the tool post is rigid and the material removal process is relatively static, then such a non-collocated position feedback control scheme may surfice. However, as the accuracy requirement gets tighter and desired surface cnotours become more complex, the need for a direct tool-tip sensing becomes inevitable. The physical constraints of the machining process prohibit any reasonable implementation of a tool-tip motion measurement. It is proposed that the measured force normal to the face of the workpiece can be filtered through an appropriate admittance transfer function to result in the estimated dapth of cut. This can be compared to the desired depth of cut to generate the adjustment control action in additn to position feedback control. In this work, the design methodology on the admittance model-based control with a conventional controller is presented. The recursive least-squares algorithm with forgetting factor is proposed to identify the parameters and update the cutting process in real time. The normal cutting forces are measured to identify the cutting dynamics in the real diamond turning process using the precision dynamoneter. Based on the parameter estimation of cutting dynamics and the admitance model-based nanodynamic control scheme, simulation results are shown.

• 대한기계학회논문집A
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• 제30권11호
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• pp.1335-1347
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• 2006

Surface energies calculated from measured contact angles between several solutions and test samples, such as Si wafer, $Al_2O_3$, $SiO_2$, PTFE(Polytertrafluoroethylene), and DLC(Diamond Like Carbon) films, based on geometric mean method and Lewis acid base method. In order to relate roughness to adhesion force, surface roughness of test samples were scanned large area and small by AFM(Atomic Force Microscopy). Roughness was representative of test samples in large scan area and comparable with AFM tip radius in small scan area. Adhesion forces between AFM tip and test samples were matched well with order of roughness rather then surface energy. When AFM tips having different radius were used to measure adhesion force on DLCI film, sharper AFM tip was, smaller adhesion force was measured. Therefore contact area was more important factor to determine adhesion force.

• Journal of Periodontal and Implant Science
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• 제28권4호
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• pp.823-828
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• 1998

A primary goal of periodontal therapy is the creation of root surfaces that are free of plaque and calculus. It is not yet to be determined whether it is desirable to have a smooth root surface after treatment. It is also not clear what degree of roughness result from different instruments. In the present study various instruments for root surface debridement were evaluated. 20 extracted teeth were utilized, and the teeth were treated with one of the following instrument: Gracey curette, Perio Clean, and piezo ultrasonic device(Setlec, P Max) with general scaler tip, curette-like tip, and diamond tip. 3 dimensional planimetric device(Accura) was used to evaluate the average surface roughness. It was demonstrated hand and power-driven instruments did not have a significant difference in roughness of the root surface following instrumentation. And ultrasonic scaler tip tended to make a most smooth surface than other instruments. The possible reasons of the result were discussed.