• Transactions on Electrical and Electronic Materials
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• v.12 no.3
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• pp.115-118
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• 2011

Process characterization of the chemical mechanical polishing (CMP) process for undensified phosphosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been addressed to experimenters to understand the relationship between input variables and responses of interest in a simple and efficient way. It is typically beneficial for determining the adequate size of experiments with multiple process variables and making statistical inferences for the responses of interests. Equipment controllable parameters to operate the machine include the down force (DF) of the wafer carrier, pressure on the backside of the wafer, table and spindle speed (SS), slurry flow rate, and pad condition. None of them is independent; thus, the interaction between parameters also needs to be indicated to improve process characterization in CMP. In this paper, we have selected the five controllable equipment parameters, such as DF, back pressure (BP), table speed (TS), SS, and slurry flow (SF), most process engineers recommend to characterize the CMP process with respect to material removal rate (RR) and film uniformity as a percentage. The polished material is undensified PSG. PSG is widely used for the plananization in multi-layered metal interconnects. We identify the main effect of DF, BP, and TS on both RR and film uniformity, as expected, by the statistical modeling and analysis on the metrology data acquired from a series of $2^{5-1}$ fractional factorial design with two center points. This revealed the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that the process control based on better understanding of the process is the key to success in semiconductor manufacturing, typically when the wafer size reaches 300 mm and is continuously scheduled to expand up to 450 mm in or little after 2012.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.5
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• pp.797-804
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• 2012

Magnesium has a long tradition of use as a lightweight material in the field of automotive industry. This paper presents the design optimization process of Mg armrest frame to minimize its weight by replacing the steel frame. formerly, the analysis of steel armrest frame was peformed to determine the design specifications for Mg armrest frame. The initial design of Mg armrest frame was carried out by topological optimization technique. After six types of design variables and four types of response variables were defined, DOE(Design of Experiment) and RSM (Response Surface Method) were applied in order to measure sensitivity of design variables and realize optimization through regression model. After design optimization, the weight of the optimized Mg armrest frame was reduced by about 3% compared to the initial design of the Mg frame and was decreased by 41.7% in comparison with that of the steel frame. Some prototypical armrest frames were also made by die casting process and tested. The results were satisfying for its design specifications.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.4
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• pp.8-14
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• 2006

The important function of Ball-Stop part is to operate power shift using suitable pneumatic force for vehicle with more than 5 ton when a driver changes gear. In this paper, we have applied the concept of the DFSS(Design for Six Sigma) to robust design of Ball-Stop part. First, we have found the control factors which could mainly influence the performance of the Ball-Stop part. The simulations of contact between head and detent pin was performed to evaluate effect of control factors according to DOE(Design of experiment) by using $ADAMS^{(R)}$. Finally, we have obtained optimal levels of each factors using $MINITAB^{(R)}$. Through the comparison of the result of optimized design with one of inintial design, we have verified the usefulness of DFSS method which can be applied to robust design of mechanical systems.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.11
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• pp.1535-1540
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• 2013

In this paper, the Radial Magnetic Force(RMF) and cogging torque which cause vibration and noise in IPM type BLDC motor were analyzed. The cogging torque and RMF cause electromagnetic vibration. So, a notch was installed for the equilibrium of RMF and cogging torque reduction. The notch was analyzed by using a Fourier Series for the energy distribution of the air-gap. The equilibrium of RMF and the reduction of cogging torque were performed by a Design Of Experiment(DOE) with the notch. Also, operating characteristics and efficiency were analyzed and compared.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.462-470
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• 2016

The locking load of a conventional manhole depends on the weight of its cover. Locking-type manhole structures with a special locking mechanism were recently developed to prevent accidents such as stolen cover, away cover from a frame. The weight of the manhole structure can be reduced under structural safety because the locking force of a locking-type manhole is greater than the weight of the cover. A light-weight manhole cover is developed in this study by using a finite element stress analysis and the design of experiments. Static stress analysis and fracture experiments are also conducted to analyze the states of the initial product. The optimum light-weight manhole cover considering manufacturing molds is developed and tested. Consequently, the weight was found to reduce by 16%. In addition, the fracture load increased by 38%.

• Proceedings of the KSR Conference
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• 1999.11a
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• pp.566-573
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• 1999

This paper is the result of sensitivity analysis of derailment with respect to the selected suspension elements for the rail vehicle. Derailment phenominon has been explained by the derailment quotient. Thus, the sensitivity of derailment is suggested by a response surface model(RSM) which is a functional relationship between derailment quotient and characteristics of suspension elements. To summarize generation of RSM, we can introduce the procedure of sensitivity analysis as follows. First, to form a RSM, a experiment is performed by a dynamic analysis code, VAMPIRE according to a kind of the design of experiments(DOE). Second, RSM is constructed to a 1$\^$st/ order polynomial and then main effect fators are screened through the stepwise regression. Finally, we can see the sensitivity level through the RSM which only consists of the main effect factors and is expressed by the liner, interaction and quadratic effect terms.

• Transactions of the Society of Information Storage Systems
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• v.4 no.1
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• pp.23-28
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• 2008

In this paper we suggested the moving magnet type actuator for optical disc drive which has high frequency of flexible mode. Generally, moving magnet type actuator has the advantage for increase the frequency of flexible mode. But it has low driving sensitivity due to the weight of its moving part. To overcome this shortcoming, we designed the model with the closed electromagnetic circuit for tracking direction. In addition, we improved the driving sensitivity and frequency of flexible mode by using of DOE (design of experiment) procedure for EM circuit. Consequently, it is verified that final designed model satisfied with the desired specifications.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.103-108
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• 2001

The structure of hard disk drive(HDD) is excited by dynamic motion of a disk-spindle motor, and it makes sound noise. Therefore, the cover and the base of HDD should be designed to reduce noise and vibration induced by spindle motor. The prediction technique of sound pressure level(SPL) of a given structural shape enables us to design a cover and a base with much less vibration and noise. In this paper, we measured the force of disk-spindle motor and predicted SPL from HDD by computational simulation. To get a SPL of HDD by computational simulation, modal analysis and forced vibration analysis were performed with ANSYS, and sound radiation was computed using SYSNOISE. The calculated results were compared with experimental results and a good agreement was obtained. With this computer simulation procedure and design of experiment(DOE), optimal thickness of noise barrier and damper was calculated.

• International Journal of Automotive Technology
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• v.6 no.6
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• pp.625-633
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• 2005

Vehicle drift was reduced using statistical six sigma tools. The study was performed through four steps: M (measure), A (analyze), I (improve), and C (control). Step M measured the main factors which were derived from a fishbone diagram. The measurement system capabilities were analyzed and improved before measurement. Step A analyzed critical problems by examining the process capability and control chart derived from the measured values. Step I analyzed the influence of the main factors on vehicle drift using DOE (design of experiment) to derive the CTQ (critical to quality). The tire conicity and toe angle difference proved to be CTQ. This information enabled the manufacturing process related with the CTQ to be improved. The respective toe angle tolerance for the adjustment process was obtained using the Monte Carlo simulation. Step C verified and controlled the improved results through hypothesis testing and Monte Carlo simulation.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.6
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• pp.1001-1006
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• 2016

As consumption of energy is increasing rapidly, energy saving is emphasized in nowadays. Thermal power plant occupies a large proportion in various type of power plant. Major causes of decreased power generation efficiency on thermal power stations is deposition of fly ash. Soot Blower is a facility to remove the ash which is deposited outside of tube by steam blowing on boiler. Residual stream which caused by lance tube in soot blower cannot be discharged steam effectively in lance tube causes reducing the thickness of lance tube. On the contrary, increasing discharge ratio of steam, lance tube cannot sustain proper pressure to remove ash on tube. This study suggests increasing discharge ratio of steam with proper pressure to remove ash on tube by optimization on shape of lance tube nozzle. To optimize shape of nozzle, discharge ratio and maximum blowing pressure on nozzle is selected as object functions. Diameter of nozzle, distance between nozzles, angle of nozzle and gap between nozzle is selected as design parameters. Then the design of experiment (DOE) with an orthogonal array is performed to analyze the effect of design parameters. And grey relational analysis and analysis of mean (ANOM) is performed to optimize shape of lance tube.