• Title/Summary/Keyword: Deposition tunnel

Search Result 80, Processing Time 0.028 seconds

Local Variation of Magnetic Parameters of the Free Layer in TMR Junctions

  • Kim, Cheol-Gi;Shoyama, Toshihiro;Tsunoda, Masakiyo;Takahashil, Migaku;Lee, Tae-Hyo;Kim, Chong-Oh
    • Journal of Magnetics
    • /
    • v.7 no.3
    • /
    • pp.72-79
    • /
    • 2002
  • Local M-H loops have been measured on the free layer of a tunneling magnetoresistance (TMR) junction using the magneto-optical Kerr effect (MOKE) system, with an optical beam size of about 2 $\mu$m diameter. Tunnel junctions were deposited using the DC magnetron sputtering method in a chamber with a base pressure of 3$\times$10$^{-9}$ Torr. The relatively irregular variations of coercive force H$_c$(∼17.5 Oe) and unidirectional anisotropy field H$_{ua}$(∼7.5 Oe) in the as-deposited sample are revealed. After $200{^{\circ}C}$ annealing, He decreases to 15 Oe but H$_{ua}$ increases to 20 Oe with smooth local variations. Two-dimensional plots of H$_c$ and H$_{ua}$ show the symmetric saddle shapes with their axes aligned with the pinned layer, irrespective of the annealing field angle. This is thought to be caused by geometric effects during deposition, together with a minor annealing effect. In addition, the variation of root mean square (RMS) surface roughness reveals it to be symmetric with respect to the center of the pinned-layer axis, with the roughness of 2.5 $\AA$ near the edge and 5.8 $\AA$ at the junction center. Comparison of surface roughness with the variation of H$_{ua}$ suggests that the H$_{ua}$ variation of the free layer is well described by dipole interactions related to surface roughness. As a whole, the reversal magnetization is not uniform over the entire junction area and the macroscopic properties are governed by the average sum of local distributions.

The Electromagnetic Properties in Uncoupled funnel-junction with Various Cr Seed Layer (비결합형 터널접합구조에서 Cr 하지층에 따른 전자기적 특성변화)

  • Park, J.W.;Jeon, D.M.;Yoon, S.Y.;Lee, J.Y.;Suh, S.J.
    • Journal of the Korean Magnetics Society
    • /
    • v.13 no.3
    • /
    • pp.91-96
    • /
    • 2003
  • Cross-geometrical Cr/Co/Al-Ox/Co/Ni-Fe tunnel junctions were fabricated by magnetron sputtering. To form an insulating layer, The Al layer was oxidized in an atmosphere of oxygen-argon mixture at low power after deposition. To enhance the coercivity of the bottom Co layer, The Cr seed layer was deposited on the glass and it led to increase in coercivity. The coercivity increase is due to the increase of roughness through the Cr thickness. In over oxidation time, the oxidation of Co bottom layer and flat interface of insulator can increase the bottom Co coercivity. But TMR ratio gradually decrease. TMR ratio is relevant with Cr thickness, insulator thickness, and oxidation time. The maximum TMR ratio was 14% at room temperature and the TMR ratio was decreased to half at 0.51 V.

Thermo-mechanical simulations of pillar spalling for in-situ heater test by FRACOD

  • Lee Hee-Suk;Shen Baotang;Mikael Rinne
    • 한국지구물리탐사학회:학술대회논문집
    • /
    • 2003.11a
    • /
    • pp.244-251
    • /
    • 2003
  • A two-dimensional BEM code, $FRACOD^{2D}$, was applied to simulate fracture initiation and propagation processes in a rock pillar during an in situ heater test of a rock pillar planned at the $\"{A}sp\"{o}$ Underground Rock laboratory of SKB, in Southern Sweden. To take the advantage of conventional BEM for simulating fracturing processes, but without efforts for domain integral transformation, a hybrid approach is developed to simulate the fracturing processes in rock pillar under coupled thermo-mechanical loading. The code FRACOD was used for simulating the fracture initiation and propagation processes with its boundary tractions reflecting the effects of the initial and redistributed thermomechanical stresses in the domain of interest at multiple excavation and heating steps were produced by a special algorithm of stress inversion, based on resultant thermo-mechanical stress fields at each excavation and heat loading step by a FEM code without considering fracturing processes. This hybrid approach can take the advantages of both types of numerical methods and avoids their shortcomings for fracturing process simulation and domain effects, respectively. In this paper, we present the hybrid approach for the stress, displacements, and fracturing processes at sequential excavation and heating steps of the in situ heater test as a predictive modelling, the formulation of the fracturing models and the predictive results. Two sections of borehole depth, 0.5 m and 1.5 m below the tunnel floor are considered. The pillar area is modelled with the FRACOD and the stress field produced by excavation and heating is transferred with corresponding boundary stresses. From the modelling results, the degree of fracturing and damage are evaluated for 120 days of heating. Dominated shear fracturing in the vicinity of the central pillar was observed from the models at both sections, but spalled area appears to be limited. Based on the modelling results, a sensitivity study for the effect of pre-existing fractures in the vicinity of the holes is also conducted, and the initiation and evolution of EDZ around the deposition holes are investigated using this particular numerical technique.

  • PDF

Decrease of Interface Trap Density of Deposited Tunneling Layer Using CO2 Gas and Characteristics of Non-volatile Memory for Low Power Consumption (CO2가스를 이용하여 증착된 터널층의 계면포획밀도의 감소와 이를 적용한 저전력비휘발성 메모리 특성)

  • Lee, Sojin;Jang, Kyungsoo;Nguyen, Cam Phu Thi;Kim, Taeyong;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.29 no.7
    • /
    • pp.394-399
    • /
    • 2016
  • The silicon dioxide ($SiO_2$) was deposited using various gas as oxygen and nitrous oxide ($N_2O$) in nowadays. In order to improve electrical characteristics and the interface state density ($D_{it}$) in low temperature, It was deposited with carbon dioxide ($CO_2$) and silane ($SiH_4$) gas by inductively coupled plasma chemical vapor deposition (ICP-CVD). Each $D_{it}$ of $SiO_2$ using $CO_2$ and $N_2O$ gas was $1.30{\times}10^{10}cm^{-2}{\cdot}eV^{-1}$ and $3.31{\times}10^{10}cm^{-2}{\cdot}eV^{-1}$. It showed $SiO_2$ using $CO_2$ gas was about 2.55 times better than $N_2O$ gas. After 10 years when the thin film was applied to metal/insulator/semiconductor(MIS)-nonvolatile memory(NVM), MIS NVM using $SiO_2$($CO_2$) on tunneling layer had window memory of 2.16 V with 60% retention at bias voltage from +16 V to -19 V. However, MIS NVM applied $SiO_2$($N_2O$) to tunneling layer had 2.48 V with 61% retention at bias voltage from +20 V to -24 V. The results show $SiO_2$ using $CO_2$ decrease the $D_{it}$ and it improves the operating voltage.

A Study on Solid-Phase Epitaxy Emitter in Silicon Solar Cells (고상 성장법을 이용한 실리콘 태양전지 에미터 형성 연구)

  • Kim, Hyunho;Ji, Kwang-Sun;Bae, Soohyun;Lee, Kyung Dong;Kim, Seongtak;Park, Hyomin;Lee, Heon-Min;Kang, Yoonmook;Lee, Hae-Seok;Kim, Donghwan
    • Current Photovoltaic Research
    • /
    • v.3 no.3
    • /
    • pp.80-84
    • /
    • 2015
  • We suggest new emitter formation method using solid-phase epitaxy (SPE); solid-phase epitaxy emitter (SEE). This method expect simplification and cost reduction of process compared with furnace process (POCl3 or BBr3). The solid-phase epitaxy emitter (SEE) deposited a-Si:H layer by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) on substrate (c-Si), then thin layer growth solid-phase epitaxy (SPE) using rapid thermal process (RTP). This is possible in various emitter profile formation through dopant gas ($PH_3$) control at deposited a-Si:H layer. We fabricated solar cell to apply solid-phase epitaxy emitter (SEE). Its performance have an effect on crystallinity of phase transition layer (a-Si to c-Si). We confirmed crystallinity of this with a-Si:H layer thickness and annealing temperature by using raman spectroscopy, spectroscopic ellipsometry and transmission electron microscope. The crystallinity is excellent as the thickness of a-Si layer is thin (~50 nm) and annealing temperature is high (<$900^{\circ}C$). We fabricated a 16.7% solid-phase epitaxy emitter (SEE) cell. We anticipate its performance improvement applying thin tunnel oxide (<2nm).

Analysis of the Interface Trap Effect on Electrical Characteristic and Reliability of SANOS Memory Cell Transistor (SANOS 메모리 셀 트랜지스터에서 Tunnel Oxide-Si Substrate 계면 트랩에 따른 소자의 전기적 특성 및 신뢰성 분석)

  • Park, Sung-Soo;Choi, Won-Ho;Han, In-Shik;Na, Min-Ki;Om, Jae-Chul;Lee, Seaung-Suk;Bae, Gi-Hyun;Lee, Hi-Deok;Lee, Ga-Won
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.11a
    • /
    • pp.94-95
    • /
    • 2007
  • In this paper, the dependence of electrical characteristics of Silicon-$Al_2O_3$-Nitride-Oxide-Silicon (SANOS) memory cell transistors and program speed, reliability of memory device on interface trap between Si substrate and tunneling oxide was investigated. The devices were fabricated by the identical processing in a single lot except the deposition method of the charge trapping layer, nitride. In the case of P/E speed, it was shown that P/E speed is slower in the SONOS cell transistors with larger interface trap density by charge blocking effect, which is confirmed by simulation results. However, the data retention characteristics show much less dependence on interface trap. Therefore, to improve SANOS memory characteristic, it is very important to optimize the interface trap and charge trapping layer.

  • PDF

Effect of Confining Pressure, Temperature, and Porosity on Permeability of Daejeon Granite: Experimental Study (대전 화강암의 투수계수에 미치는 구속압, 온도, 공극률의 영향: 실험적 연구)

  • Donggil Lee;Seokwon Jeon
    • Tunnel and Underground Space
    • /
    • v.34 no.1
    • /
    • pp.71-87
    • /
    • 2024
  • In deep geological disposal of high-level radioactive waste, the surrounding rock at the immediate vicinity of the deposition hole may experience localized changes in permeability due to in-situ stress at depth, swelling pressure from resaturated bentonite buffer, and the heat generated from the decay of radioactive isotopes. In this study, experimental data on changes in permeability of granite, a promising candidate rock type in South Korea, were obtained by applying various confining pressures and temperature conditions expected in the actual disposal environment. By conducting the permeability test on KURT granite specimens under three or more hydrostatic pressure conditions, the relation in which the permeability decreases exponentially as the confining pressure increases was derived. The temperature-induced changes in permeability were found to be negligible at temperatures below the expected maximum of 90℃. In addition, by establishing a relation in which the initial permeability is proportional to the power of the initial porosity, it was possible to estimate permeability value for granite with a specific porosity under a certain confining pressure.

Magnetic Properties of Three-layered Ferromagnetic Films with a NiFeCuMo Intermediately Super-soft Magnetic Layer (강자성층 사이에 초연자성 NiFeCuMo 중간층을 삽입한 3층 박막구조의 자기적 특성)

  • Choi, Jong-Gu;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
    • /
    • v.20 no.4
    • /
    • pp.129-133
    • /
    • 2010
  • Two-layered ferromagnetic alloy films (NiFe, CoFe) with a Conetic (NiFeCuMo) intermediately soft magnetic layer of different thickness were investigated to correlate the coercivity values and magnetization process with the strength of saturation field of hard axis. Thickness dependence of the $H_{EC}$ (coercivity of easy axis), $H_{HS}$ (saturation field of hard axis.), and X (susceptibility) of NiFe and NiFeCuMo thin films for the glass/Ta(5 nm)/[CoFe or NiFe(5 nm-t/2)]/NiFeCuMo(t = 0, 4, 6, 8, 10 nm)/[CoFe or NiFe(5 nm-t/2)]/Ta(5 nm) films prepared by the ion beam deposition method was measured. The magnetic properties $H_{EC}$, $H_{HS}$, and X of two-layered ferromagnetic CoFe, NiFe films with a NiFeCuMo intermediately super-soft magnetic layer were strongly depended on the thickness of NiFeCuMo layer. The value of the coercivity and magnetic susceptibility of the NiFeCuMo film decreased by 25% and doubled relative to that of the NiFe film.

Effects of Excavation Damaged Zone on Thermal Analysis of Multi-layer Geological Repository (다층 심지층처분장 열해석에 미치는 암반손상대의 영향)

  • Cho, Won-Jin;Kim, Jin-Seop;Kim, Geon Young
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.17 no.1
    • /
    • pp.75-94
    • /
    • 2019
  • As the present single-layer repository concept requires too large an area for the site of the repository, a multi-layer repository concept has been suggested to improve the disposal density. The effects of the excavation damaged zone around the multi-layer repository constructed in the deep host rock on the temperature distribution in the repository were analyzed. For the thermal analysis of the multi-layer repository, the hydrothermal model was used to consider the resaturation process occurring in the buffer, backfill and rock. The existence of an excavation damaged zone has a significant effect on the temperature distribution in the repository, and the maximum peak temperatures of double-layer and triple-layer repositories can rise to $7^{\circ}C$ and $12^{\circ}C$, respectively depending on the size of the excavation damaged zone and the degree of decrease of the thermal conductivity. The dominant factor affecting the peak temperature in the multi-layer repository is the decrease of thermal conductivity in the excavation damaged zone, and the excavation damaged zone formed around the deposition hole has more significant effects on the peak temperature than does the excavation damaged zone formed around the disposal tunnel.

Analysis of the Thermal and Structural Stability for the CANDU Spent Fuel Disposal Canister (CANDU 처분용기의 열적-구조적 안정성 평가)

  • Lee, Jong-Youl;Cho, Dong-Geun;Kim, Seong-Gi;Choi, Heui-Joo;Lee, Yang
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.6 no.3
    • /
    • pp.217-224
    • /
    • 2008
  • In deep geological disposal system, the integrity of a disposal canister having spent fuels is very important factor to assure the safety of the repository system. This disposal canister is one element of the engineered barriers to isolate and to delay the radioactivity release from human beings and the environment for a long time so that the toxicity does not affect the environment. The main requirement in designing the deep geological disposal system is to keep the buffer temperature below 100$^{\circ}C$ by the decay heat from the spent fuels in the canister in order to maintain the integrity of the buffer material. Also, the disposal canister can endure the hydraulic pressure in the depth of 500 m and the swelling pressure of the bentonite as a buffer. In this study, new concept of the disposal canister for the CANDU spent fuels which were considered to be disposed without any treatment was developed and the thermal stability and the structural integrity of the canister were analysed. The result of the thermal analysis showed that the temperature of the buffer was 88.9$^{\circ}C$ when 37 years have passed after emplacement of the canister and the spacings of the disposal tunnel and the deposition holes were 40 m and 3 m, respectively. In the case of structural analysis, the result showed that the safety factors of the normal and the extreme environment were 2.9 and 1.33, respectively. So, these results reveal that the canister meets the thermal and the structural requirements in the deep geological disposal system.

  • PDF