• 제목/요약/키워드: Deposition dose

검색결과 141건 처리시간 0.029초

Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

  • 송종수;윤홍로;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.312.1-312.1
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    • 2016
  • We have deposited ZnO thin films by ultraviolet (UV) enhanced atomic layer deposition using diethylznic (DEZ) and water (H2O) as precursors with UV light. The atomic layer deposition relies on alternating dose of the precursor on the surface and subsequent chemisorption of the precursors with self-limiting growth mechanism. Though ALD is useful to deposition conformal and precise thin film, the surface reactions of the atomic layer deposition are not completed at low temperature in many cases. In this experiment, we focused on the effects of UV radiation during the ALD process on the properties of the inorganic thin films. The surface reactions were found to be complementary enough to yield uniform inorganic thin films and fully react between DEZ and H2O at the low temperature by using UV irradiation. The UV light was effective to obtain conductive ZnO film. And the stability of TFT with UV-enhanced ZnO was improved than ZnO by thermal ALD method. High conductive UV-enhanced ZnO film have the potential to applicability of the transparent electrode.

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WSix 증착에서 공정조건이 contact 저항에 미치는 영향 (Influence of Process Condition on Contact Resistance in WSix Deposition)

  • 정양희;강성준;강희순
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 춘계종합학술대회
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    • pp.279-282
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    • 2002
  • In this paper, we discuss influence of process condition on contact resistance in WSix deposition process. In the WSix deposition process, we confirmed that word line to bit line contact resistance(WBCR) due to temperature of word line WSix deposition among various process condition split experiment. RTP treatment, d-poly ion implantation dose and thickness was estimated a little bit influence on contact resistance. Also, life time of shower head in the process chamber for WSix deposition related to contact resistance. The results obtained in this study are applicable to process control and electrical characteristics for high reliability and high density DRAM's.

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A Study on the Application of Countermeasure for the Reduction of the Ingestion Dose After Nuclear Accidents

  • Hwang, Won-Tae;Suh, Kyung-Suk;Kim, Eun-Han;Park, Young-Gil;Han, Moon-Hee;Gyuseong Cho
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1998년도 춘계학술발표회논문집(2)
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    • pp.583-588
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    • 1998
  • The effectiveness of dose reduction resulting from the application of countermeasures for ingestion pathways after nuclear accidents was investigated together with the derivation of optimized intervention levels for Korean foodstuffs. The radioactivity in foodstuffs was predicted from a dynamic food chain model DYNACON for the date which the deposition occurs. The effectiveness of countermeasures strongly depended on radionuclides, foodstuffs and date of deposition.

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5-엽(葉) 인체 폐 모델에서의 흡입입자 침전해석 (Theoretical Analyses of Particle Deposition in a Five-lobe Compartment Human Lung Model)

  • 구재학
    • 한국대기환경학회:학술대회논문집
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    • 한국대기환경학회 2000년도 춘계학술대회 논문집
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    • pp.245-246
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    • 2000
  • 공기중의 오염 입자가 인체에 얼마나 많은 영향을 미치는가는 흡입된 입자 (inhaled particles) 중에서 얼마나 많은 양이 폐 (lung)에 침전되는가와 밀접한 관계가 있다. 또한 정상 및 비정상 (diseased) 폐에서, 흡입된 입자의 침전 위치와 침전양 (deposition site and dose)은 입자의 크기와 호흡 양식(breathing pattern)에 따라 큰 차이를 보이며, 이런 차이는 흡입오염입자 (inhaled pollutant particles)에 의한 건강 위험도 평가 (health risk assessment) 및 흡입용 약물 (inhaled drug aerosols)의 치료효과(therapeutic effects) 평가 등에 큰 영향을 미친다. (중략)

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Measuring Thermo-luminescence Efficiency of TLD-2000 Detectors to Different Energy Photons

  • Xie, Wei-min;Chen, Bao-wei;Han, Yi;Yang, Zhong-Jian
    • Journal of Radiation Protection and Research
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    • 제41권2호
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    • pp.179-183
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    • 2016
  • Background: As an important detecting device, TLD is a widely used in the radiation monitoring. It is essential for us to study the property of detecting element. The aim of this study is to calculate the thermo-luminescence efficiency of TL elements. Materials and Methods: A batch of thermo-luminescence elements were irradiated by the filtered X-ray beams of average energies in the range 40-200 kVp, 662 keV $^{137}Cs$ gamma rays and then the amounts of lights were measured by the TL reader. The deposition energies in elements were calculated by theory formula and Monte Carlo simulation. The unit absorbed dose in elements by photons with different energies corresponding to the amounts of lights was calculated, which is called the thermo luminescent efficiency (${\eta}^{(E)}$). Because of the amounts of lights can be calculated by the absorbed dose in elements multiply ${\eta}^{(E)}$, the ${\eta}^{(E)}$ can be calculated by the experimental data (the amounts of lights) divided by absorbed dose. Results and Discussion: The deviation of simulation results compared with theoretical calculation results were less than 5%, so the absorbed dose in elements was calculated by simulation results in here. The change range of ${\eta}^{(E)}$ value, relative to 662 keV $^{137}Cs$ gamma rays, is about 30% in the energy range of 33 keV to 662 keV, is in accordance by the comparison with relevant foreign literatures. Conclusion: The ${\eta}^{(E)}$ values can be used for updating the amounts of lights that are got by the direct ratio assumed relations with deposition energy in TL elements, which can largely reduce the error of calculation results of the amounts of lights. These data can be used for the design of individual dosimeter which used TLD-2000 thermo-luminescence elements, also have a certain reference value for manufacturer to improve the energy-response performance of TL elements by formulation adjustment.

원전 인허가승인을 위한 사고결말평가에서 지표침적에 의한 피폭의 민감도 분석 (Importance Analysis of Radiological Exposure by Ground Deposition in Potential Accident Consequences for the Licensing Approval of a Nuclear Power Plant)

  • 황원태;정해선;정효준;김은한;한문희
    • Journal of Radiation Protection and Research
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    • 제39권2호
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    • pp.89-95
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    • 2014
  • 원전의 인허가 승인을 위한 사고결말평가에서 경수로는 미국의 규제지침에서 제시한 바와 같이 방사성물질의 지표침적의 고려를 허용하지 않고 있는데 반해 중수로의 규제지침에서는 이의 고려를 허용하고 있다. 이러한 배경에 따라 본 연구에서는 방사성물질의 지표침적에 의한 피폭영향의 민감도를 정량적으로 고찰, 분석하였다. 가상사고 시나리오를 구성하여 Cs-137과 I-131의 환경방출에 따른 총 피폭선량을 평가한 결과, 방사성물질의 지표침적과 이로 인한 공기중 농도의 감손을 고려치 않는 경우에 보다 보수적 결과를 나타냈다. 이는 지표침적에 의한 피폭선량이 총 피폭선량에 미치는 기여는 상대적으로 적은데 비해 지표침적으로 인한 공기중 농도의 감손이 총 피폭선량에 미치는 기여는 상대적으로 크기 때문이다. 대기안정도, 방출기간, 평가거리 등에 따라 차이는 있지만 두 핵종 모두 총 피폭선량에 대해 흡입에 의한 피폭이 90% 이상을 차지했으며, 지표침적에 의한 피폭은 기껏해야 10% 미만을 나타냈다. 지표침적의 고려에 따른 총 피폭선량의 감소는 $^{137}Cs$ 보다는$^{131}I$의 경우에 보다 컸으며, 대기가 안정하고 방출기간이 길수록, 그리고 방출점으로부터 평가지점이 멀수록 감소경향은 보다 뚜렷하게 나타났다.

Computed tomography-guided 3D printed patient-specific regional anesthesia

  • Jundt, Jonathon S.;Chow, Christopher C.;Couey, Marcus
    • Journal of Dental Anesthesia and Pain Medicine
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    • 제20권5호
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    • pp.325-329
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    • 2020
  • Classic anesthetic techniques for the inferior alveolar nerve, lingual nerve, and long buccal nerve blockade are achieved by estimating the intended location for anesthetic deposition based on palpation, inspection, and subsequent correlation for oral anatomical structures. The present article utilizes computed tomography (CT) data to 3D print a guide for repeatable and accurate deposition of a local anesthetic at the ideal location. This technical report aims to anatomically define the ideal location for local anesthetic deposition. This process has the potential to reduce patient discomfort, risk of nerve damage, and failed mandibular anesthesia, as well as to reduce the total anesthetic dose. Lastly, as robotic-based interventions improve, this provides the initial framework for robot-guided regional anesthesia administration in the oral cavity.

Risk Assessment from Heterogeneous Energy Deposition in Tissue. The Problem of Effects from Low Doses of Ionizing Radiation

  • Le, Feinendegen;J, Booz
    • 대한핵의학회지
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    • 제26권1호
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    • pp.8-13
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    • 1992
  • Low doses of ionizing radiation from external or internal sources cause heterogeneous distribution of energy deposition events in the exposed biological system. With the cell being the individual element of the tissue system, the fraction of cells hit, the dose received by the hit, and the biological response of the cell to the dose received eventually determine the effect in tissue. The hit cell may experience detriment, such as change in its DNA leading to a malignant transformation, or it may derive benefit in terms of an adaptive response such as a temporary improvement of DNA repair or temporary prevention of effects from intracellular radicals through enhanced radical detoxification. These responses are protective also to toxic substances that are generated during normal metabolism. Within a multicellular system, the probability of detriment must be weighed against the probability of benefit through adaptive responses with protection against various toxic agents including those produced by normal metabolism. Because irradiation can principally induce both, detriment and adaptive responses, one type of affected cells may not be simply summed up at the expense of cells with other types of effects, in assessing risk to tissue. An inventory of various types of effects in the blood forming system of mammals, even with large ranges of uncertainty, uncovers the possibility of benefit to the system from exposure to low doses of low LET radiation. This experimental approach may complement epidemiological data on individuals exposed to low doses of ionizing radiation and may lead to a more rational appraisal of risk.

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Photocatalytic activities and surface properties of e-beam treated carbon paper deposited $TiO_2$ using Atomic Layer Deposition (ALD)

  • Kim, Myoung-Joo;Seo, Hyun-Ook;Luo, Yuan;Kim, Kwang-Dae;Kim, Young-Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.345-345
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    • 2010
  • Thin film of $TiO_2$ deposited on carbon paper was fabricated by atomic layer deposition (ALD) using titanium isopropoxide (TTIP) and $H_2O$ as precursors. In this work, the photocatalytic activities of $TiO_2$ films with and without e-beam treatment were compared. The samples were treated by e-beam using e-beam energy of 1MeV and exposure range between 5 and 15kGy. The photocatalytic activity was evaluated by the photocatalytic degradation of methyleneblue (MB) under UV irradiation (365nm) at room temperature using an UV-vis spectroscopy. The surface properties were characterized by scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS). The sample treated by the low radiation dose has more catalytic activity than other ones. SEM images show that the high radiation dose caused the $TiO_2$ to aggregation on carbon paper. Due to the aggregation of $TiO_2$, the partially exposed carbon paper was oxidized.

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Comparison of Off-site Radiological Dose Due to the Routine Release of Gaseous Radioactive Effluents Based on the Korean and Japanese Regulatory Recommendations

  • Hwang, Won Tae;Kim, Chang Lak;Lee, Cheol-Woo;Han, Moon Hee
    • Journal of Radiation Protection and Research
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    • 제44권4호
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    • pp.161-165
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    • 2019
  • Background: Not only regulatory framework including radiation protection quantities and regulatory standards, but also methodology for regulatory compliance may be different in each country due to inherent philosophy for radiation protection. Materials and Methods: Based on the Korean regulatory models, off-site radiological dose resulting from the routine releases of gaseous radioactive effluents was calculated by applying the parameter values and assumptions recommended in the Korean and Japanese regulations. Results and Discussion: Effective dose for adult based on the Korean recommendation were 17.5 and 1.6 times higher than those of Japanese recommendation for 131I and 133I, respectively, for the same atmosphere dispersion and ground deposition factors. Conclusion: It was due to different parameter values and assumptions recommended for the purpose of evaluating compliance with dose criteria for the radiation protection of the public in each country.