• Title/Summary/Keyword: Deposited metal area

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Electrical Characteristics of PECVD $Ta_2O_5$ Dielectic Thin Films on HSG and Rugged Polysilicon Electrodes (입체표면 폴리실리콘 전극에서 PECVD $Ta_2O_5$ 유전박막의 전기적 특성)

  • Cho, Yong-Beom;Lee, Kyung-Woo;Chun, Hui-Gon;Cho, Tong-Yul;Kim, Sun-Oo;Kim, Hyeong-Joon;Koo, Kyung-Wan;Kim, Dong-Won
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.246-254
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    • 1993
  • In order to increase the capacitance of storage electrode in the DRAM capacitor, two approaches were performed. First, hemispherical and rugged poly silicon films were made by LPCVD to increase the effective surface area of storage electrode. The even surface morphology of conventional poly silicon electrode was changed into the uneven surface of hemispherical of rugged poly silicon films. Second, PECVD $Ta_2O_5$ dielectric films were deposited and thermally treated to study the dielectrical characteristics of $Ta_2O_5$ film on each electrode. MIS capacitors with $Ta_2O_5$ films were electrically characterized by I-V, C-V and TDDB measurements. As a result, the capacitance of the electrode with uneven surface were increased by a factor of 1.2~1.5 and leakage current was increased compared with those of even surface. TDDB result indicates that the electrode with uneven surface has dielectrically more degraded than that of even surface. These results can be helpful as a basic research to develop new generation DRAM capacitors with $Ta_2O_5$ films.

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Genetic Environments at the Ssangjeon Tungsten-bearing Hydrothermal Vein Deposit (쌍전 함 텅스텐 열수 맥상광상의 생성환경)

  • Sunjin Lee;Sang-Hoon Choi
    • Economic and Environmental Geology
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    • v.55 no.6
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    • pp.689-699
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    • 2022
  • The Ssangjeon tungsten deposit is located within the Yeongnam Massif. Within the area a number of hydrothermal quartz veins were formed by narrow open-space filling of parallel and subparallel fractures in the metasedimentary rocks as Wonnam formation, Buncheon granite gneiss, amphibolite and/or pegmatite. Mineral paragenesis can be divided into two stages (stage I, ore-bearing quartz vein; stage II, barren quartz vein) by major tectonic fracturing. Stage I, at which the precipitation of major ore minerals occurred, is further divided into three substages (early, middle and late) with paragenetic time based on minor fractures and discernible mineral assemblages: early, marked by deposition of arsenopyrite with pyrite; middle, characterized by introduction of wolframite and scheelite with Ti-Fe-bearing oxides and base-metal sulfides; late, marked by Bi-sulfides. Fluid inclusion data show that stage I ore mineralization was deposited between initial high temperatures (≥370℃) and later lower temperatures (≈170℃) from H2O-CO2-NaCl fluids with salinities between 18.5 to 0.2 equiv. wt. % NaCl of Ssangjeon hydrothermal system. The relationship between salinity and homogenization temperature indicates a complex history of boiling, fluid unmixing (CO2 effervescence), cooling and dilution via influx of cooler, more dilute meteoric waters over the temperature range ≥370℃ to ≈170℃. Changes in stage I vein mineralogy reflect decreasing temperature and fugacity of sulfur by evolution of the Ssangjeon hydrothermal system with increasing paragenetic time.

Geochemistry of Heavy Metals and Rare Earth Elements in Core Sediments from the Korea Deep-Sea Environmental Study (KODES)-96 Area, Northeast Equatorial Pacific (한국심해환경연구(KODES) 지역 주상 퇴적물중 금속 및 희토류원소의 지구화학적 특성)

  • Jung, Hoi-Soo;Park, Sung-Hyun;Kim, Dong-Seon;Choi, Man-Sik;Lee, Kyeong-Young
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.2 no.2
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    • pp.125-137
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    • 1997
  • To study the vertical variation of heavy metal and Rare Earth Element (REE) contents in deep-sea sediments, eighteen cores were sampled from the Korea Deep-sea Environmental Study (KODES)-96 area in the C-C zone (Clarion-Clipperton fracture zone), northeast equatorial Pacific. Sediment columns can be divided into three units based on sediment colors and geochemical characters; uppermost Unit I with brown color, middle Unit II with pale brown color and smaller Ni/Cu ratio than the ratio in Unit I, and lowermost Unit III with dark (brown) colors and higher contents of Mn, Ni, Cu, and REEs than those in Unit I and II. Unit II can be divided more into two layers of upper Unit IIa and lower Unit IIb. Unit IIb is characterized by high contents of Cu, 3+REEs (REEs except Ce), smectite, and severely deteriorated fossil tests. Unit III can also be divided into two units; upper Unit IIIa with dark brown color, and lower Unit IIIb with black color and enriched Mn and Fe. The KODES area was located near from the East Pacific Rise (EPR) When Unit III Sediments were deposited, considering the hiatus between Unit II and III (Quaternary-Tertiary boundary) and the spreading rate (10 cm/yr) and direction (north southern west) of the Pacific plate from the EPR. High contents of Mn and Fe in Unit IIIb may be related with hydrothermal influence from the EPR. Meanwhile, Unit IIb (about 2~3 Ma) and Unit III (11~30 Ma) layers were probably formed near (or under) the equatorial high productivity zone, and accordingly received a lot of organic materials. As a result, Cu and 3+REEs, closely associated with organic materials, are enriched in smectite and/or Ca-P composites (fish bone debrise, biogenic apatite) after decomposition and reprecipitation on the sea floor. Higher contents of Cu and 3+REEs in Unit IIb and III are suggested to be the result of abundant supply of organic substances in the equatorial high productivity zone.

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Mesothermal Gold-Silver Mineralization at the Bodeok Mine, Boseong Area : A Fluid Inclusion and Stable Isotope Study (전남(全南) 보성지역(寶城地域) 보덕광산(寶德鑛山)의 심부(深部) 중온형(中溫型) 금(金)-은(銀) 광화작용(鑛化作用): 유체포유물(流體包有物) 및 안정동위원소(安定同位元素) 연구(硏究))

  • So, Chil-Sup;Yun, Seong-Taek;Kim, Se-Hyun;Youm, Seung-Jun;Heo, Chul-Ho;Choi, Seon-Gyu
    • Economic and Environmental Geology
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    • v.26 no.4
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    • pp.433-444
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    • 1993
  • Electrum (32~73 atom. % Ag)-sulfide mineralization of the Bodeok mine in the Boseong area was deposited in two stages of mineralogically simple, massive quartz veins that fill the fractures along fault shear zones in Precambrian gneiss. Radiometric dating indicates that mineralization is Late Jurassic age ($155.9{\pm}2.3$ Ma). Fluid inclusion data show that ore mineralization was formed from $H_2O-CO_2$ fluids with variable $CO_2$ contents ($X_{CO_2}=0.0$ to 0.7) and low salinities (0.0 to 7.4 wt. % eq. NaCl) at temperatures between $200^{\circ}$ and $370^{\circ}C$. Evidence of fluid unmixing ($CO_2$ effervescence) indicates pressures up to 1 kbar. Gold-silver deposition occurred later than base-metal sulfide deposition, at temperatures near $250^{\circ}C$ and was probably a result of cooling and decreasing sulfur activity caused by sulfide precipitation and/or $H_2S$ loss (through fluid unmixing). Calculated sulfur isotope compositions of ore fluids (${\delta}^{34}S_{{\Sigma}S}=1.7$ to 3.3‰) indicate an igneous source of sulfur in hydrothermal fluids. Measured and calculated O and H isotope compositions of ore fluids (${\delta}^{18}O_{water}=4.8$ to 7.2‰, ${\delta}D_{water}=-73$ to -76‰) indicate that mesothermal auriferous fluids at Bodeok were likely mixtures of $H_2O-rich$, isotopically evolved meteoric waters and magmatic $H_2O-CO_2$ fluids.

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Au-Ag-Te Mineralization by Boiling and Dilution of Meteoric Ground-water in the Tongyeong Epithermal sold System, Korea: Implications from Reaction Path Modeling (광화유체의 비등과 희석에 의한 통영 천열수계 Au-Ag-Te 장화작용에 대한 반응경로 모델링)

  • Maeng-Eon Park;Kyu-Youl Sung
    • Economic and Environmental Geology
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    • v.34 no.6
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    • pp.507-522
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    • 2001
  • At the Tongyeong mine, quartz, rhodochrosite (kutnahorite), muscovite, illite, pyrite, galena, chalcopyrite. sphalerite, acanthite, and hessite are the principal vein minerals. They were deposited under epithermal conditions in two stages. Ore mineral assemblages and associated gangue phases in stage can be clearly divided into two general associations: an early cycle (band) that appeared with introduction of most of the sulfides and electrum, and a later cycle in which base metal and carbonate-bearing assemblages (mostly rhodochrosite) became dominant. Tellurides and some electrum occur as small rounded grains within subhedral-to euhedral pyrite or anhedral galena in stageII. Sulfide mineralization is zoned from pyrite to galena and sphalerite. We have used computer modeling to simulate formation of four stages of vein genesis. The reaction of a single fluid with andesite host rock at 28$0^{\circ}C$, isobaric cooling of a single fluid from 26$0^{\circ}C$ to 12$0^{\circ}C$, and boiling and mixing of a fluid with both decreasing pressure and temperature were studied using the CHILLER program. Calculations show that the precipitation of alteration minerals is due to fluid-andesite interaction as temperature drops. Speciation calculations confirm that the hydrothermal fluids with moderately high salinities and pH 5.7 (acid), were capable of transporting significant quantities of base metals. The abundance of gold in fluid depends critically on the ratio of total base metals and iron to sulfide in the aqueous phase because gold is transported as an Au(HS)$_2$- complex, which is sensitive to sulfide activity. Modeling results for Tongyeong mineralization show strong influence of shallow hydrogenic processes such as boiling and fluid mixing. The variable handing in stageII mineralization is best explained by maltiple boilings of hydrothermal fluid followed by lateral mixing of the fluid with overlying diluted, steam-heated ground water. The degree of similarity of calculated mineral assemblages and observed electrum composition and field relationships shows the utility of the numerical simulation method in identifying chemical processes that accompany boiling and mixing in Te-bearing Au-Ag system. This has been applied in models to narrow the search area for epithermal ores.

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