• Title/Summary/Keyword: Density of pattern

Search Result 1,307, Processing Time 0.026 seconds

A Study on the High Selective Oxide Etching using Inductively Coupled Plasma Source (유도결합형 플라즈마원을 이용한 고선택비 산화막 식각에 관한 연구)

  • 이수부;박헌건;이석현
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.11 no.4
    • /
    • pp.261-266
    • /
    • 1998
  • In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

  • PDF

Micromagnetic Computer Simulation of Ultra-high density Recording with the Use of a Planar-type Head

  • S.H. Lim;Kim, H.J.
    • Journal of Magnetics
    • /
    • v.6 no.4
    • /
    • pp.109-118
    • /
    • 2001
  • A computer simulation, utilizing the Landau-Lifshitz-Gilbert equation, of ultra-high- density recording on continuous longitudinal media is carried out. The two important features of this work are the use of a planar-type head, which enables a high write field of 14183 Oe ts be generated at the center of the recording medium, and the media with very high coercivities up to 13010 Oe. From a systematic investigation, it is found that the optimum write field is higher than the medium coercivity by only 3400 Oe over a wide coercivity range. This new finding allows one to write an a medium with a very high coercivity by using a planar-type head. It is demonstrated that a reasonably good bit pattern with a bit density of 605 kfci is generated on the medium with a coercivity of l1720 Oe, and, combined with a high track pitch density of 100 ktpi, a recording density of 60 Gb/in$^2$can be obtained in a single layer medium. With an improved write- head designs even a higher recording density of 75 Gb/in$^2$may be possible since comparison of the results for the bit pattern from the present head profile and the ideal Lindholm profile indicates an increase in the track pitch density of about 27%. Even at this density, the thermal stability parameter (KV/kT) at room temperature is high enough (60) to provide ample room for thermal stability.

  • PDF

Machine Fault Diagnosis Method based on DWT Power Spectral Density using Multi Patten Recognition (다중 패턴 인식 기법을 이용한 DWT 전력 스펙트럼 밀도 기반 기계 고장 진단 기법)

  • Kang, Kyung-Won;Lee, Kyeong-Min;Vununu, Caleb;Kwon, Ki-Ryong
    • Journal of Korea Multimedia Society
    • /
    • v.22 no.11
    • /
    • pp.1233-1241
    • /
    • 2019
  • The goal of the sound-based mechanical fault diagnosis technique is to automatically find abnormal signals in the machine using acoustic emission. Conventional methods of using mathematical models have been found to be inaccurate due to the complexity of industrial mechanical systems and the existence of nonlinear factors such as noise. Therefore, any fault diagnosis issue can be treated as a pattern recognition problem. We propose an automatic fault diagnosis method using discrete wavelet transform and power spectrum density using multi pattern recognition. First, we perform DWT-based filtering analysis for noise cancelling and effective feature extraction. Next, the power spectral density(PSD) is performed on each subband of the DWT in order to effectively extract feature vectors of sound. Finally, each PSD data is extracted with the features of the classifier using multi pattern recognition. The results show that the proposed method can not only be used effectively to detect faults as well as apply to various automatic diagnosis system based on sound.

Sex-, growth pattern-, and growth status-related variability in maxillary and mandibular buccal cortical thickness and density

  • Schneider, Sydney;Gandhi, Vaibhav;Upadhyay, Madhur;Allareddy, Veerasathpurush;Tadinada, Aditya;Yadav, Sumit
    • The korean journal of orthodontics
    • /
    • v.50 no.2
    • /
    • pp.108-119
    • /
    • 2020
  • Objective: The primary objective of this study was to quantitatively analyze the bone parameters (thickness and density) at four different interdental areas from the distal region of the canine to the mesial region of the second molar in the maxilla and the mandible. The secondary aim was to compare and contrast the bone parameters at these specific locations in terms of sex, growth status, and facial type. Methods: This retrospective cone-beam computed tomography (CBCT) study reviewed 290 CBCT images of patients seeking orthodontic treatment. Cortical bone thickness in millimeters (mm) and density in pixel intensity value were measured for the regions (1) between the canine and first premolar, (2) between the first and second premolars, (3) between the second premolar and first molar, and (4) between the first and second molars. At each location, the bone thickness and density were measured at distances of 2, 6, and 10 mm from the alveolar crest. Results: The sex comparison (male vs. female) in cortical bone thickness showed no significant difference (p > 0.001). The bone density in growing subjects was significantly (p < 0.001) lower than that in non-growing subjects for most locations. There was no significant difference (p > 0.001) in bone parameters in relation to facial pattern in the maxilla and mandible for most sites. Conclusions: There was no significant sex-related difference in cortical bone thickness. The buccal cortical bone density was higher in females than in males. Bone parameters were similar for subjects with hyperdivergent, hypodivergent, and normodivergent facial patterns.

Sliding Friction Properties of Laser Surface Dimple Patterned on PMMA under Saline Lubricated (레이저 표면 딤플 패턴된 PMMA 소재 표면의 식염수 윤활 하에서의 미끄럼 마찰특성)

  • Dongho Hyun;Younghun Chae;Da-I Jung
    • Tribology and Lubricants
    • /
    • v.39 no.4
    • /
    • pp.148-153
    • /
    • 2023
  • Laser surface dimple patterning is a method of laser surface texturing to reduce lubrication sliding friction. The dimple pattern improves friction properties by reserving lubricant and trapping worn particles. This surface texturing technology can reduce coefficients of friction and extend the service life by applying a uniform load to the surface of the material. This study investigates the friction properties using PMMA, a highly compatible polymer material, as a specimen. We observe the friction properties of untextured specimens by processing specimens with dimple pattern densities of 5 and 10 on the surface area using laser. Dimple pattern density affects the coefficient of friction. We present the following friction property results using a pin-on-disc sliding friction test under saline lubrication. The coefficients of friction for the dimple patterned specimens are lower than those for the untextured specimens. As the normal load and sliding speed increase, the coefficients of friction of the dimple pattern specimens decrease differently from those of the untextured specimens. The specimen with a dimple pattern density of 5 at a normal load of 24.5 N and a sliding speed of 0.22 m/s has the best friction properties. Notably, different friction properties are exhibited depending on the dimple pattern densities.

A Study on the Preference of the Hedge Planting Pattern (생울타리 식재 패턴의 선호도에 관한 연구)

  • 최연철;김진선
    • Journal of the Korean Institute of Landscape Architecture
    • /
    • v.25 no.3
    • /
    • pp.234-245
    • /
    • 1997
  • This study aims to clarify the preference of the hedge, on focusing the height, density, width of the hedge, which gives limited dwelling space continuity with outer space, promotes the naturality to dwelling environment, and plays an important role as green space in city. For this, it is performed statistical analysis by field survey, by classifying the hedge as planting pattern, and synthesizing the photograph. Therefore, the results of this study are as follows : 1. In the preference of height of the hedge, when only the hedge is composed, 1.5M is preferred, and when the hedge with deciduous tree, with needle-leaf tree, 1.25M is preferred. 2. In the preference of density of the hedge, which are perfect density, in case of the hedge, which are almost density, in case of the needle-leaf tree, are preferred. 3. In the preference of width of the hedge, 0.4M is preferred. 4. In the preferential factors of the hedges, the preference of the hedge is mainly influenced by density. As the result of multiple regression analysis of visual preference as the height, the density, the width, and the regression equation are as follows : Visual Preference = 0.094+0.412(density)+0.370(height)+0.177(width)

  • PDF

Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System

  • Lee, Sang-Ho;Kang, Young-Jae;Park, Jin-Goo;Kwon, Pan-Ki;Kim, Chang-Il;Oh, Chan-Kwon;Kim, Soo-Myoung;Jhon, Myung-S.;Hur, Se-An;Kim, Young-Jung;Kim, Bong-Ho
    • Transactions on Electrical and Electronic Materials
    • /
    • v.7 no.4
    • /
    • pp.163-166
    • /
    • 2006
  • The dishing and the erosion were evaluated on the tungsten CMP process with conventional and new developed slurry. The tungsten thin film was polished by orbital polishing equipment. Commercial pattern wafer was used for the evaluation. Both slurries were pre tested on the oxide region on the wafer surface and the removal rate was not different very much. At the pattern density examination, the erosion performance was increased at all processing condition due to the reduction of thickness loss in new slurry. However, the dishing thickness was not remarkably changed at high pattern density despite of the improvement at low pattern density. At the large pad area, the reduction of dishing thickness was clearly found at new tungsten slurry.

Microprocessor Control of a Prosthetic Arm by EMG Pattern Recognition (EMG 패턴인식을 이용한 인공팔의 마이크로프로세서 제어)

  • Hong, Suk-Kyo
    • The Transactions of the Korean Institute of Electrical Engineers
    • /
    • v.33 no.10
    • /
    • pp.381-386
    • /
    • 1984
  • This paper deals with the microcomputer realization of EMG pattern recognition system which provides identification of motion commands from the EMG signals for the on-line control of a prosthetic arm. A probabilistic model of pattern is formulated in the feature space of integral absolute value(IAV) to describe the relation between a motion command and the location of corresponding pattern. This model enables the derivation of sample density function of a command in the feature space of IAV. Classification is caried out through the multiclass sequential decision process, where the decision rule and the stopping rule of the process are designed by using the simple mathematical formulas defined as the likelihood probability and the decision measure, respectively. Some floating point algorithms such as addition, multiplication, division, square root and exponential function are developed for calculating the probability density functions and the decision measure. Only six primitive motions and one no motion are incorporated in this paper.

  • PDF

Measurement of Sonobuoy Transmitting Antenna System for Anti-Submarine Warfare

  • Min Kyeong-Sik
    • Journal of electromagnetic engineering and science
    • /
    • v.5 no.2
    • /
    • pp.97-103
    • /
    • 2005
  • This paper describes the measured results of sonobuoy transmitting antenna system for anti-submarine warfare (ASW). Since radiation pattern and power density depend on impedance matching between transmitting RF part and antenna with termination resistance, design of matching circuit is very important for sonobuoy system performance. Matching circuit is designed by Smith chart using control of L and C. In standing wave ratio(SWR) measurement using Network Analyzer, SWR of antenna with matching circuit observed 1.5 below at the assigned VHF band. It shows very excellent performance comparison with conversional product that is used for the same object. The measured vertical and horizontal radiation patterns are also shown the satisfaction of military specifications. A drop out of sonobuoy system on the sea is happened when angle of elevation direction is over 10 degrees, and it is conformed that it takes less than I second return to original signal level. The required electric power density is $83\;mW/m^2$ in the military specification, and measured electric power density is observed over average $110\;mW/m^2$ at all frequency bands.

Influence on a density of micro-scale dimple for surface texturing on friction control (마찰제어를 위한 Surface texturing의 Micro-scale dimple 밀도영향)

  • Chae, Young-Hun;Kim, Seock-Sam
    • Proceedings of the KSME Conference
    • /
    • 2004.11a
    • /
    • pp.945-950
    • /
    • 2004
  • Surface texturing of tribological application is another attractive technology of friction reducing. Also, reduction of friction is therefore considered to be a necessary requirement for improved efficiency of machine. In this paper attempts to investigate the effect of density for micro-scale dimple pattern on bearing steel flat mated with pin-on-disk. We demonstrated the lubrication mechanism for a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. It is found that friction coefficient is depended on the density of surface pattern. It was thus verified that micro-scale dimple could affect the friction reduction.Lubrication condition regime has an influence on the friction coefficient induced the density of micro dimple.

  • PDF