• 제목/요약/키워드: Dense plasma

검색결과 204건 처리시간 0.033초

Heteroepitaxial Growth of Diamond Films Synthesized by Microwave Plasma Enhanced Chemical Vapor Deposition

  • Kim, Yoon-Kee;Lee, Jai-Young
    • The Korean Journal of Ceramics
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    • 제2권4호
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    • pp.197-202
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    • 1996
  • The highly oriented diamond particles were deposited on the mirror-polished (100) silicon substrates in the bell-jar type microwave plasma deposition system using a three-step process consisting if carburization, bias-enhanced nucleation and growth. By adjusting the geometry of the substrate and substrate holder, very dense disc-shaped plasma was formed over the substrate when the bias voltage was below -200V. Almsot perfectly oriented diamond films were obtained only in this dense disc-shaped plasma. From the results of the optical emission spectra of the dense disc-shaped plasma, it was found that the concentrations of atomic hydrogen and hydrocarbon radical were increased with negative bias voltage. It was also found that the highly oriented diamonds were deposited in the region, where the intensity ratios of carbonaceous species to atomic hydrogen are saturated.

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Observation of Transition Boundary between Cold, Dense and Hot, Tenuous Plasmas in the Near-Earth Magnetotail

  • Kim, Hee-Eun;Lee, Ensang
    • Journal of Astronomy and Space Sciences
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    • 제37권2호
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    • pp.95-104
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    • 2020
  • Properties of plasmas that constitute the plasma sheet in the near-Earth magnetotail vary according to the solar wind conditions and location in the tail. In this case study, we present multi-spacecraft observations by Cluster that show a transition of plasma sheet from cold, dense to hot, tenuous state. The transition was associated with the passage of a spatial boundary that separates the plasma sheet into two regions with cold, dense and hot, tenuous plasmas. Ion phase space distributions show that the cold, dense ions have a Kappa distribution while the hot, tenuous ions have a Maxwellian distribution, implying that they have different origins or are produced by different thermalization processes. The transition boundary separated the plasma sheet in the dawn-dusk direction, and slowly moved toward the dawn flank. The hot, tenuous plasmas filled the central region while the cold, dense plasmas filled the outer region. The hot, tenuous plasmas were moving toward the Earth, pushing the cold, dense plasmas toward the flank. Different types of dynamical processes can be generated in each region, which can affect the development of geomagnetic activities.

Dense Plasma Sources for Conventional and $PI_3$ Implanters

  • S.A. Nikiforov;Lee, H.S.;Kim, G.H.;G.H. Rim
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 1999년도 학술대회논문집-국제 전기방전 및 플라즈마 심포지엄 Proceedings of 1999 KIIEE Annual Conference-International Symposium of Electrical Discharge and Plasma
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    • pp.29-39
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    • 1999
  • Both conventional and PI3 implanters require dense sources for high productivity rate, and small sheath expansion in PI3 besides. The problem of the creation of large volume uniform plasma in PI3 facilities replaces that of beam forming in accelerators. Some aspects of ion extraction in both cases and Langmuir probe plasma diagnostics with be discussed. Plasma parameters of large volume multicusp dc hot cathode and inductively coupled RF plasma sources obtained with Langmuir probe and ion mass analyzer with be presented. Design features and performances of high current Freeman and ECR ion sources will be described.

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플라즈마에 의한 고밀도침적물 제조시 변수들의 영향 (Effect of Parameters for Dense Bleposit by Plasma)

  • 정인하
    • 한국분말재료학회지
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    • 제5권2호
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    • pp.111-121
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    • 1998
  • Thick and dense deposit of higher than 97% of theoretical density was formed by induction plasma spraying. To investigate the effects of powder morphology on the density of deposit, two different kinds of Yttria-Stabilized-Zirconia powder, METCO202NS (atomized & agglomerated) and AMDRY146 (fused & crushed), were used and compared. After plasma treatment, porous METCO202NS powder was all the more densely deposited and its density was increased. In addition to the effect of powder morphology, the process parameters such as, sheath gas composition, probe position, particle size and spraying distance, and so on, were evaluated. The result of experiment with AMDRY146 powder, particle size and spraying distance affected highly on the density of the deposit. The optimum process condition for the deposition of -75 ${\mu}m$ of 20%-Yttria-Stabilized-Zirconia powder was 120/201/min of Ar/$H_2$ gas rate, 80 kW of plasma plate power, 8 cm of probe position and 150 Torr of spraying chamber pressure, at which its density showed 97.91% of theoretical density and its deposition rate was 20 mm/min. All the results were assessed by statistical approach what is called ANOVA.

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A Study on the Characteristics of Plasma Blacks Prepared by Plasma Pyrolysis Over Metals Coated Honeycomb Catalysts

  • Park, Soo-Yeop;Lee, Joong-Kee;Yoo, Kyung-Seun;Cho, Won-Ihl;Baek, Young-Soon
    • Carbon letters
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    • 제4권2호
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    • pp.74-78
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    • 2003
  • Four kinds of plasma blacks were prepared by plasma pyrolysis under various metallic catalysts coated on honeycomb, and investigated the catalytic effect on the characteristics of the plasma blacks prepared under plasma pyrolysis condition. Pt, Pt-Rh, and Pd catalysts were employed as active materials to prepare the plasma blacks. In the experimental range studied, the metallic catalysts influenced on surface area, particle size, surface oxygen content and electrical conductivity of the plasma blacks prepared. It was showed that more dense particle of plasma blacks were prepared under existence of metallic catalysts. Presence of the metallic catalyst reduces the electrical resistivity of plasma blacks due to the decrease in the amount of oxygen functional groups. The highest electrical conductivity of plasma black was observed in the Pt catalyst and then followed by those Pt-Rh, Pd and bare cordierite honeycomb.

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Effect of the Raw Material and Coating Process Conditions on the Densification of 8 wt% Y2O3-ZrO2 Thermal Barrier Coating by Atmospheric Plasma Spray

  • Oh, Yoon-Suk;Kim, Seong-Won;Lee, Sung-Min;Kim, Hyung-Tae;Kim, Min-Sik;Moon, Heung-Soo
    • 한국세라믹학회지
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    • 제53권6호
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    • pp.628-634
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    • 2016
  • The 8 wt% yttria($Y_2O_3$) stabilized zirconia ($ZrO_2$), 8YSZ, a typical thermal barrier coating (TBC) for turbine systems, was fabricated under different starting powder conditions and coating parameters by atmospheric plasma spray (APS) coating process. Four different starting powders were prepared by conventional spray dry method with different additive and process parameter conditions. As a result, large- and small-size spherical-type particles and Donut-type particles were obtained. Dense structure of 8YSZ coating was produced when small size spherical-type or Donut-type particles were used. On the other hand, 8YSZ coating with a porous structure was formed from large-size spherical-type particles. Furthermore, a segmented coating structure with vertical cracks was observed after post heat treatment on the surface of dense structured coating by argon plasma flame at an appropriate gun distance and power condition.

조밀한 다이아몬드 막의 합성 (Formation of dense diamond films)

  • 박상현;박재윤;구효근
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1503-1505
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    • 2000
  • To grow the diamond films by using RF-MW mix-process, at first, diamond seeds were deposited on silicon substrate by RF plasma CVD, and then a diamond layer grown by MW plasma CVD on the seeds. The grain-size of diamond films deposited by using HF-MW mix-process was smaller and denser than those of the MW plasma CVD process. The deposited diamond films were analyzed by scanning electron microscophy, X-ray diffractometer and Raman spectroscopy.

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Effect of Processing Parameters and Powder Size on Microstructures and Mechanical Properties of Y2O3 Coatings Fabricated by Suspension Plasma Spray

  • Kim, Sun-Joo;Lee, Jung-Ki;Oh, Yoon-Suk;Kim, Seongwon;Lee, Sung-Min
    • 한국세라믹학회지
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    • 제52권6호
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    • pp.395-402
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    • 2015
  • The suspension plasma spray (SPS) technique has been used to obtain dense $Y_2O_3$ coatings and to overcome the drawbacks of the conventional air plasma spray (APS). SPS uses suspensions containing micrometer or sub-micrometer sized powders dispersed in liquid media. In this study, microstructure developments and mechanical properties have been investigated as functions of particle size of source material and plasma processing parameters such as plasma power and stand-off distance. The microstructure of the coating was found to be highly related to the particle size and the plasma processing parameters, and it was directly reflected in the hardness and the adhesion strength. When fine powder (BET $16.4m^2/g$) was used as a raw material in the suspension, there was, with increasing stand-off distance, a change from a dense structure with a slightly bumpy surface to a porous structure with a cauliflower-like surface. On the other hand, when a coarse powder (BET $2.8m^2/g$) was used, the coating density was lower, with microscopic splats on the surface. Using fine $Y_2O_3$ powders, the coating layer with an optimum short stand-off distance showed a high hardness of approximately 90% of that of sintered $Y_2O_3$ and an adhesion strength several times higher than that of the coating by conventional APS.

NUMERICAL APPROACH TO MICROSTRUCTURAL CHARACTERIZATIONS FOR DENSE AND POROUS THERMAL BARRIER COATINGS

  • Kim, Seok-Chan;Go, Jae-Gwi;Jung, Yeon-Gil;Paik, Un-Gyu
    • Journal of the Korean Society for Industrial and Applied Mathematics
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    • 제15권3호
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    • pp.223-231
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    • 2011
  • During spray coating, especially in an air plasma spray (APS), pores, cracks, and splat boundaries are developed and those factors exert influence on thermomechanical properties such as elastic modulus, thermal conductivity, and coefficient of thermal expansion. Moreover, the thermo mechanical properties are crucial elements to determine the thermoelastic characteristics, for instance, temperature distribution, displacements, and stresses. Two types of thermal barrier coating (TBC) model, the dense and porous microstructures, are taken into account for the analysis of microstructural characterizations. $TriplexPro^{TM}$-200 system was applied to prepare TBC samples, and the METECO 204 C-NS powder is adopted for the relatively porous microstructure and METECO 204 NS powder for the dense microstructure in the top coat of TBCs. Governing partial differential equations were derived based on the thermoelastic theory and approximate estimates for the thermoelastic characteristics were obtained using a finite volume method for the governing equations.