• Title/Summary/Keyword: Delay profile

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Post Exposure Delay Effect Modeling and Simulation in Chemically Amplified Resists (화학증폭형 감광제의 노광후 지연 효과에 대한 모델링 및 시뮬레이션)

  • 김상곤;손동수;박흥진;손영수;오혜근
    • Proceedings of the Optical Society of Korea Conference
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    • 2001.02a
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    • pp.78-79
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    • 2001
  • 노광 후 지연(Post Exposure Delay: PED) 효과는 그림 1과 같이 노광 후 지연 시간에 따른 감광제의 Profile에 thinning, T-top, foot, undercut 를 보여주는 현상으로 화학 증폭형 감광제(Chemically Amplified Resist, CAR) 개발에 있어 PED의 안정성은 중요한 요소이다(1). 따라서 노광후 지연 효과에 대한 모델링은 연구와 개발을 위한 시뮬레이션 tool에 있어 매우 의미 있는 일이다. T-top 이나 undercut 를 형성하는 Surface inhibition layer(SIL) 은 노광 후 지연시 발생되는 environmental base contamination, acid evaporation 이 주요 원인이며 다른 원인으로는 감광제 속에서 acid migration, spin coating 동안에 photoacid generator (PAG)의 고갈, internal basic impurities 이며 그 외에 nonbsic atmospheric contamination, high power laser source의 영향 등이 있다. (중략)

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Envelope Correlation of Wideband Signals in Nakagami-Rice Fading Channel (나카가미-라이스 페이딩 채널에서 광대역 신호의 진폭 상관)

  • Park, Byeong-Hoon
    • Journal of IKEEE
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    • v.5 no.1 s.8
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    • pp.85-90
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    • 2001
  • In this paper, we analyzed the envelope correlation of wideband signals modulated on two separate subcarriers in a Nakagami-Rice fading channel with exponential power delay profile. The results show that the envelope correlation of resolvable paths is implicated by the ratio of the specular wave power to the mean multipath power as well as the signal bandwidth and the rms delay spread of the multipath waves.

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Modeling of CCP plasma with H2/N2 gas (H2/N2 가스론 이용한 CCP 플라즈마 모델링)

  • Shon, Chae-Hwa
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.158-159
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    • 2006
  • The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multilayer interconnection layers. In order to reduce the RC delay, low-k materials will be used for inter-metal dielectric (IMD) materials. We have developed self-consistent simulation tool that includes neutral-species transport model, based on the relaxation continuum (RCT) model. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatiotemporal steady state profile could be obtained.

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Shock-Tube Study of the Oxidation of Acetaldehyde at High Temperature

  • Won, Seok Jae;Ryu, Ji Cheol;Bae, Jun Hyeon;Kim, Yun Do;Gang, Jun Gil
    • Bulletin of the Korean Chemical Society
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    • v.21 no.5
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    • pp.487-492
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    • 2000
  • The combustion characteristics of a mixture of acetaldehyde, oxygen and argon behind a reflected shock wave at temperatures ranging from 1320 to 1897 K at 100 torr were studied. The emission from the OH radical at 306.4 nm and the pressure profile behind the reflected shock were measured to monitor ignition delay time. The ignition delay times were computed from a proposed mechanism of 110 elementary reactions involving 34 species. The simulation and sensitivity analysis confirm that the main channel for oxidation of acetaldehyde at high temperature consists of the Rice-herzfeld mechanism, the decomposition and oxidation of HCO, and the reaction of H with $O_2$.

Active Suspension System for a One-wheel Car Model Using Single Input Rule Modules Fuzzy Reasoning

  • Yoshimura, Toshio;Teramura, Itaru
    • 제어로봇시스템학회:학술대회논문집
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    • 2004.08a
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    • pp.1275-1280
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    • 2004
  • This paper presents the construction of an active suspension system of a one-wheel car model by using fuzzy reasoning. The car model is approximately described by a nonlinear two degrees freedom system subject to excitation from a road profile, and the active control force is constructed by actuating a pneumatic actuator, and the degradation of the performance due to the delay of the pneumatic actuator is improved by inserting a compensator. The fuzzy control is obtained by single input rule modules fuzzy reasoning, and the excitation from the road profile is estimated by using a disturbance observer. The experimental result shows that the proposed active suspension system much improves the performance in the vibration suppression of the car model.

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Low Profile Dual-Polarized Antenna for SDARS Application

  • Hong Young-Pyo;Kim Jung-Min;Jeong Soon-Chul;Kim Dong-Hyun;Yook Jong-Gwan
    • Journal of electromagnetic engineering and science
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    • v.5 no.1
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    • pp.31-35
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    • 2005
  • This paper presents low form factor dual polarized antenna incorporating low profile annular ring patch antenna having 90$^{\circ}$ phase delay element for circular polarization(CP) and a reactive-loaded monopole linear polarized(LP) antenna. Both types of receiving antennas operate in the same frequency region from 2.320 GHz to 2.345 GHz, while different polarizations are used to take advantage of polarization diversity. The proposed CP antenna has good broadside radiation patterns, while the LP antenna reveals monopole-like radiation patterns. The gains of the antennas are measured to be 1.93 dBi and 2.24 dBi for CP and LP, respectively.

LANDFILL STABILIZATION WITH LANDFILL MINING AND THERMAL TREATMENT PROCESS

  • Gust, Micheal A.
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 1996.12a
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    • pp.97-101
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    • 1996
  • Municipal and sanitary landfills can pose environmental problems due to leachate, landfill gas md unstable geotechnical properties. Most governmental bodies delay the correction of landfill problems or landfill replacement until a crises stage is reached. The replacement of a landfill is often made difficult due to costly regulatory controls, public opposition to siting and the high cost of closure for the previous landfill unit. Solutions to extending landfill life and capacity Involve waste minimization by recycling, refuse compaction and waste-to-energy incineration. Incineration can reduce the volume of refuse by 50-95%. The largest installed bases of municipal waste Incinerators are located in Japan and the U.S. The volume of waste contained in a landfill can be estimated by load count tabulations, weight-and-volume measurements or a material balance analysis based on the trash profile of user categories. for an existing landfill, core samples may be collected and analyzed for use in a material balance analysis. Newly generated refuse contains approximately 50% of the heating value of coal. However, landfill properties vary significantly due to the waste profile of the contributors and biodegradation due to time and weathering. The volume of the Nanji-do landfill

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Characterization of Body Shadowing Effects on Ultra-Wideband Propagation Channel

  • Pradubphon, Apichit;Promwong, Sathaporn;Chamchoy, Monchai;Supanakoon, Pichaya;Takada, Jun-Ichi
    • 제어로봇시스템학회:학술대회논문집
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    • 2004.08a
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    • pp.219-222
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    • 2004
  • There are several factors that disturb an Ultra-Wideband (UWB) radio propagation in an indoor environment such as path loss, shadowing and multipath fading. These factors directly affect the quality of the received signal. In this paper, we investigated the influence of the human body shadowing on UWB propagation based on measured wireless channel in an anechoic chamber. The characteristics of the UWB channel including the transmitter and the receiver antenna effects are acquired over the frequency bandwidth of 3${\sim}$11 GHz. The major factors such as the power delay profile (PDP), the angular power distribution (APD), the pulse distortion and the RMS delay spread caused by the human body shadowing are presented.

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Shock Tube and Modeling Study of Ethanol Ignition (에탄올 점화 과정에 관한 충격관 실험 및 모델 연구)

  • Shin, Kuan-Soo;Park, Ki-Soo;Gwon, Eun-Sook
    • Journal of the Korean Chemical Society
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    • v.48 no.1
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    • pp.12-16
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    • 2004
  • The ignition of ethanol-oxygen-argon mixture was studied in reflected shock waves over the temperature range of 1281-1625 K and the pressure range of 0.69-1.06 bar. The ignition delay time was measured by the sudden increase of pressure profile and the radiation emitted by OH radicals. The relationship between the ignition delay time and the concentrations of ethanol and oxygen was determined in the form of mass-action expressions with an Arrhenius temperature dependence. In contrast to the behavior observed in methanol, ethanol acts to inhibit rather than accelerate its own ignition. Several kinetic mechanisms proposed for ethanol oxidation at high temperatures have been tested by the computer simulation.

Effect of Ignition Delay Time Gap on the Linked Pyrotechnic Thrusters (파이로추력기의 점화시간차 영향)

  • Kim, Ki-Un;Jeon, In-Soo;Ahn, Sung-Woo
    • Journal of the Korea Institute of Military Science and Technology
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    • v.14 no.1
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    • pp.154-159
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    • 2011
  • The effect of the ignition delay time gap is newly studied. The operational characteristics of the linked two pyrotechnic thrusters are affected by the time gap. Although two thrusters are simultaneously ignited, the time at which the pressure starts to rise in each thruster may not be synchronized. The characteristic of the system with the time gap is compared with that of the fully synchronized system without any time gap. Depending upon the magnitude of the time gap, the pressure-time profile and the ballistic performance are different. When two pyrotechnic thrusters have a time gap, the peak pressure of one thruster(in which the pressure is built up earlier) is increased and the other is decreased. As the time gap is increased, the peak pressure is converged into the maximum pressure. This maximum pressure can be obtained when only one thruster is activated. Because the maximum pressure is bounded, it is predicted that there isn't any catastrophic failures in the considered system. When the time gap is relatively small, the impulse of the combined force acting on the moving body is almost maintained. But the ballistic performance of the system with a large time gap should be carefully estimated because the reduction of the ballistic performance should not be easily neglected.