• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.30-34
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• 2023

Since dishing in the CMP process is a major factor that hinders the uniformity of the semiconductor thin film, many studies have focused this issue to improve the non-uniformity of the film due to dishing. In the metal layer, the dishing mainly occurs in the central part of the metal due to a difference in a selection ratio between the metal and the dielectric, thereby generating a step on the surface of the metal layer. Factors that cause dishing include the shape of the thin film, the chemical reaction of the slurry, thermal deformation, and the rotational speed of the pad and head, and dishing occurs due to complex interactions between them. This study analyzed the stress generated on the metal layer surface in the CMP process using ANSYS software, a commercial structure analysis program. The stress caused by the vertical load applied from the pad was analyzed by changing the area density and line width of the dummy metal. As a result of the analysis, the stress in the active region decreased as the pattern density and line width of the dummy metal increased, and it was verified that it was valid compared with the previous study that studied the dishing according to the dummy pattern density and line width of the metal layer. In conclusion, it was confirmed that there is a relationship between dishing and normal stress.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.29 no.6A
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• pp.641-650
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• 2009

This paper presents new equations for member forces in concrete floating structures under wave loadings. The currently adopted design equations for wave loadings disregard the effect of mismatch between design wave length and the length of the structure. In most cases, however, additional internal forces occur due to disequilibriating buoyancy caused by the difference between design wave length and the length of the structure. In this study, new design equations considering the influence of the disequlibriating buoyancy is proposed. In addition, finite element solutions are sought to demonstrate the adequacy of the proposed design formulae in estimating the actual internal forces considering the structure as either rigid or flexible. It has been found that member forces are decreased approximately to around 55% for flexible model when compared with the rigid one.

• Geomechanics and Engineering
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• v.34 no.3
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• pp.233-250
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• 2023

This paper investigates the flexural analysis of isotropic, transversely isotropic, and laminated composite plates using a new higher-order normal and shear deformation theory. In the present theory, only five unknown functions are involved compared to six or more unknowns used in the other similar theories. The developed theory does not need a shear correction factor. It can satisfy the zero traction boundary conditions on the top and the bottom surfaces of the plate as well as account for sufficient distribution of the transverse shear strains. The thickness stretching effect is considered in the computation. A simply supported was considered on all edges of the plate. The plate is subjected to uniform and sinusoidal distributed load in the static analysis. Laminated composite, isotropic, and transversely isotropic plates are considered. The governing equations are obtained utilizing the virtual work principle. The differential equations are solved via Navier's procedure. The results obtained from the developed theory are compared with other higher-order theories considered in the previous studies and 3D elasticity solutions. The results showed that the proposed theory accurately and effectively predicts the bidirectional bending responses of laminated composite plates. Several parametric studies are presented to illustrate the various parameters influencing the static response of the laminated composite plates.

• Structural Engineering and Mechanics
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• v.87 no.2
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• pp.137-149
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• 2023

In this study, to explore the working performance of the CFST split spherical node wind power tower, two groups of CFST split spherical joint plane towers with different web wall thicknesses and a set of space systems were analyzed. The tower was subjected to a low-cycle repeated load test, and the hysteresis and skeleton curves were analyzed. ABAQUS finite element simulation was used for verification and comparison, and on this basis parameter expansion analysis was carried out. The results show that the failure mode of the wind power tower was divided into weld tear damage between belly bar, high strength bolt thread damage and belly rod flexion damage. In addition, increasing the wall thickness of the web member could render the hysteresis curve fuller. Finally, the bearing capacity of the separated spherical node wind power tower was high, but its plastic deformation ability was poor. The ultimate bearing capacity and ductility coefficient of the simulated specimens are positively correlated with web diameter ratio and web column stiffness ratio. When the diameter ratio of the web member was greater than 0.13, or the stiffness ratio γ of the web member to the column was greater than 0.022, the increase of the ultimate bearing capacity and ductility coefficient decreased significantly. In order to maximize the overall mechanical performance of the tower and improve its economy, it was suggested that the diameter ratio of the ventral rod be 0.11-0.13, while the stiffness ratio γ should be 0.02-0.022.

• Steel and Composite Structures
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• v.44 no.4
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• pp.451-471
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• 2022

In the present paper, the static bending and buckling responses of functionally graded carbon nanotubes-reinforced composite (FG-CNTRC) beam under various boundary conditions are investigated within the framework of higher shear deformation theory. The significant feature of the proposed theory is that it provides an accurate parabolic distribution of transverse shear stress through the thickness satisfying the traction-free boundary conditions needless of any shear correction factor. Uniform (UD) and four graded distributions of CNTs which are FG-O, FG-X, FG- and FG-V are selected here for the analysis. The effective material properties of FG-CNTRC beams are estimated according to the rule of mixture. To model the FG-CNTRC beam realistically, an efficient Hermite-Lagrangian finite element formulation is successfully developed. The accuracy and efficiency of the present model are demonstrated by comparison with published benchmark results. Moreover, comprehensive numerical results are presented and discussed in detail to investigate the effects of CNTs volume fraction, distribution patterns of CNTs, boundary conditions, and length-to-thickness ratio on the bending and buckling responses of FG-CNTRC beam. Several new referential results are also reported for the first time which will serve as a benchmark for future studies in a similar direction. It is concluded that the FG-X-CNTRC beam is the strongest beam that carries the lowest central deflection and is followed by the UD, V, Λ, and FG-O-CNTRC beam. Besides, the critical buckling load belonging to the FG-X-CNTRC beam is the highest, followed by UD and FG-O.

• Journal of the Korean Recycled Construction Resources Institute
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• v.11 no.4
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• pp.484-492
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• 2023

The structural behaviour of concrete beam was examined by the three points bending test after the completion of the electrochemical chloride extraction (ECE), rather than bond strength mostly measured in previous studies. It was found that the flexural rigidity of concrete was lowered by the ECE, but the strength was enhanced in terms of the maximum load.The flexural rigidity, in the linear elastic range, was reduced by the loss of effective cross-section area. In fact, the inertia moment was substantially subjected to 70 % loss of the cross-section by the tensile strain at the condition of the failure. However, a lower rate of the inertia moment reduction was achieved by the ECE, implying the higher resistance to the cracking, but the higher risk of deformation.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.6
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• pp.268-275
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• 2023

This paper delves into the crucial realm of support structures in metal additive manufacturing (AM) processes and their direct impact on the stiffness of printed components. With the continuous evolution of AM technologies, optimizing support structures has become imperative to enhance the overall quality and performance of manufactured metal parts. Therefore, in this study, tensile specimens were manufactured using various representative support design variables such as support type, spacing, and penetration depth, and the differences in displacement-load curve were analyzed though tensile test. Using additively manufactured support shaped tensile specimen, the paper presents a comprehensive examination of the effect of support parameters on their stiffness. The findings contribute to advancing the understanding how to design supports to suppress thermal deformation of metal parts during AM process, thereby paving the way for enhanced design freedom and functional performance in the ever-expanding field of AM.

• Geomechanics and Engineering
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• v.37 no.3
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• pp.213-222
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• 2024

Determination of jointed rock mass properties plays a significant role in the design and construction of underground structures such as tunneling and mining. Rock mass classification systems such as Rock Mass Rating (RMR), Rock Mass Index (RMi), Rock Mass Quality (Q), and deformation modulus (Em) are determined from the jointed rock masses. However, parameters of jointed rock masses can be affected by the tunnel depth below the surface due to the effect of the in situ stresses. In addition, the geomechanical properties of rocks change due to the effect of metamorphism. Therefore, the main objective of this study is to apply correlation analysis to investigate the relationships between rock mass properties and some parameters related to the depth of the tunnel studied. For this purpose, the field work consisted of determining rock mass parameters in a tunnel alignment (~7.1 km) at varying depths from 21 m to 431 m below ground surface. At the same excavation depths, thirty-seven rock types were also sampled and tested in the laboratory. Correlations were made between vertical stress and depth, horizontal/vertical stress ratio (k) and depth, k and Em, k and RMi, k and point load index (PLI), k and Brazilian tensile strength (BTS), Em and uniaxial compressive strength (UCS), UCS and PLI, UCS and BTS. Relationships were significant (significance level=0.000) at the confidence interval of 95% (r = 0.77-0.88) between the data pairs for the rocks taken from depths greater than 166 m where the ratio of horizontal to vertical stress is between 0.6 and 1.2. The in-situ stress parameters affected rock mass properties as well as metamorphism which affected the geomechanical properties of rock materials by affecting the behavior of minerals and textures within rocks. This study revealed that in-situ stress parameters and metamorphism should be reviewed when tunnel studies are carried out.

• Journal of the Earthquake Engineering Society of Korea
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• v.28 no.1
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• pp.47-57
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• 2024

Recently, in newly constructed apartment buildings, the exterior wall structures have been characterized by thinness, having various openings, and a significantly low reinforcement ratio. In this study, a nonlinear finite element analysis was performed to investigate the crack damage characteristics of the exterior wall structure. The limited analysis models for a 10-story exterior wall were constructed based on the prototype apartment building, and nonlinear static analysis (push-over analysis) was performed. Based on the finite element (FE) analysis model, the parametric study was conducted to investigate the effects of various design parameters on the strength and crack width of the exterior walls. As the parameters, the vertical reinforcement ratio and horizontal reinforcement ratio of the wall, as well as the uniformly distributed longitudinal reinforcement ratio and shear reinforcement ratio of the connection beam, were addressed. The analysis results showed that the strength and deformation capacity of the prototype exterior walls were limited by the failure of the connection beam prior to the flexural yielding of the walls. Thus, the increase of wall reinforcement limitedly affected the failure modes, peak strengths, and crack damages. On the other hand, when the reinforcement ratio of the connection beams was increased, the peak strength was increased due to the increase in the load-carrying capacity of the connection beams. Further, the crack damage index decreased as the reinforcement ratio of the connection beam increased. In particular, it was more effective to increase the uniformly distributed longitudinal reinforcement ratio in the connection beams to decrease the crack damage of the coupling beams, regardless of the type of the prototype exterior walls.

• Journal of the Korea institute for structural maintenance and inspection
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• v.12 no.1
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• pp.158-166
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• 2008

Member force, strain and stress distribution of a section are obtained for prestressed steel and concrete(PSSC) composite bridge subjected to dead and live load in order to interpret the effect of prestressing and deformation of tendon. The stress and strain distribution and moment capacity are obtained for both noncomposite and composite section and for allowable stress limit state, yield limit state and strength limit state. Reliability analysis is conducted after assuming limit states for deflection, stress and flexural strength. Comparing that the reliability index for stress is near 0 for example section which is designed to satisfy the allowable stress exactly, the reliability indexes for deflection and flexural strength are high. Reliability of PSSC girder which is designed based on allowable stress of bridge design code is high for deflection and flexural strength.