• Journal of Korea Foundry Society
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• v.12 no.4
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• pp.285-292
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• 1992

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.1
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• pp.1-5
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• 2001

STI(shallow trench isolation)-CMP(chemical mechanical polishing) process have been substituted for LOCOS(local oxidation of silicon) process to obtain global planarization in the below sub-0.5㎛ technology. However TI-CMP process, especially TI-CMP with RIE(reactive ion etching) etch back process, has some kinds of defect like nitride residue, torn oxide defect, etc. In this paper, we studied how to reduced torn oxide defects after STI-CMP with RIE etch back processed. Although torn oxide defects which can occur on trench area is not deep and not severe, torn oxide defects on moat area is not deep and not severe, torn oxide defects on moat area is sometimes very deep and makes the yield loss. Thus, we did test on pattern wafers which go through trench process, APECVD process, and RIE etch back process by using an IPEC 472 polisher, IC1000/SUVA4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the origin of torn oxide defects.

• The Korean Journal of Nuclear Medicine
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• v.21 no.1
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• pp.17-24
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• 1987

Authors classified 161 cases of photon defects due to the gall bladder on hepatic parenchymal scintigraphy on $^{99m}Tc-phytate$ and $^{99m}Tc-DISIDA$ according to the position of the gall bladder, the pattern of photon defects and the hepatobiliary diseases. The results were as follows; 1) Conocordance of $^{99m}Tc-DISIDA$ and $^{99m}Tc-phytate$ hepatic parenchymal images in photon defect due to the gall bladder was 94% of 32 cases. 2) The frequency according to the position of the gall bladder was in order to 68% of the gall bladder of the lower margin of the liver, 30% of the intrahepatic gall bladder and 2% of the extrahepatic gall bladder, and the frequency of the photon defects due to the gall bladder was in order to 81% of the intrahepatic gall bladder, 71% of the gall bladder of the lower margin of the liver and 20% of the extrahepatic gall bladder. 3) The pattern of the photon defects due to the gall bladder was 47% of funnel shape in the intrahepatic gall bladder, 69% of semilunar shape in the gall bladder of the lower margin of the liver and 100% of semilunar shape in the extrahepatic gall bladder. 4) All of 9 cases of the intrahepatic gall bladder at the lateral area of the right lobe and the gall bladder of the lower margin of the liver at the right hepatic angle were associated with liver cirrhosis with the right lobe atrophy and the left lobe hypertrophy, 2 cases of the gall bladder of the lower margin of the liver at just-left side of the porta hepatis with hepatoma in the right lobe and 1 case of the intrahepatic gall bladder at the central portion of the right lobe with choledochal cyst.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1083-1086
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• 2005

Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.8
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• pp.1787-1798
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• 1995

Monitoring and diagnosis of the operating machine mean evaluating the condition of a machine such as the detection of the defects and the prediction of the time to failure in the machine elements, while it is running. In this study, a technique of automatic diagnosis using probability concept is studied and the analyses of the pattern comparison are introduced. An expert system, which is able to analyze the automatic identification of the multiple defects in the ball bearings, is also developed. Finally, to confirm the effectiveness of the programmed algorithms, some tests were made with specimens of the ball bearings involving the multiple defects. The proposed system reasonably predicts the defects.

• Proceedings of the KSR Conference
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• 2009.05a
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• pp.1977-1983
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• 2009

This paper described partial discharge(PD) patterns depending on types of insulation defects in CNCO-W cable(Concentric Neutral Closs-linked Polyethylene Insulated Polyolefin-Water Proof Sheathed Power Cable). The PD measurement system consists of a coupling network, a detection impedance, and a low noise amplifier. A 16 bit, 250 MS/s data acquisition system was used to analyze PD patterns. To simulate insulation defects in a power cable, a needle with the curvature radius of $10{\mu}m$ was inserted into the insulation part. We measured phase ($\Phi$), magnitude (q), and counts (n) of PD pulse for the defects, and classified PD patterns using the PRPD (phase Resolved Partial Discharge) method. From the analysis of acquired PD signals, we could find that a unique PD pattern is formed according to the types of defect.

• Journal of Welding and Joining
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• v.17 no.2
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• pp.53-60
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• 1999

Conventionally, CCD camera and vision sensor using the projected pattern of light is generally used to inspect the weld bead defects. But with this method, a lot of time is needed for image preprocessing, stripe extraction and thinning, etc. In this study, laser vision sensor using the scanning beam of light is used to shorten the time required for image preprocessing. The software for deciding whether the weld bead is in proper shape or not in real time is developed. The criteria are based upon the classification of imperfections in metallic fusion welds(ISO 6520) and limits for imperfections(ISO 5817).

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.3
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• pp.18-23
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• 2006

The formation degree of sustain (ITO pattern) determines the quality of a PDP (Plasma Display Panel). Thus, in the present study, we attempt to detect 100% of the defects that are larger than $30{\mu}m$. Currently, the inspection method in the PDP manufacturing process is dependent upon the naked eye or a microscope in off-line mode. In this study, a prototype inspection system for PDP ITO patterned glass is developed. The developed system, which is based on a line-scan mechanism, obtains information on the defects and sorts the defects by type automatically. The developed inspection system adopts a multi-vision method using slit-beam formation for minimum inspection time and the detection algorithm is embodied in the detection ability. Characteristic defects such as pin holes, substances, and protrusions are extracted using the blob analysis method. Defects such as open, short, spots and others are distinguished by the line type inspection algorithm. It was experimentally verified that the developed inspection system can detect defects with reliability of up to 95% in about 60 seconds for the 42-inch PDP panel.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.340-340
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• 2010

Various structures of vacancy defects in graphene layers and carbon nanotubes have been reported by high resolution transmission electron microscope (HR-TEM) and those arouse an interest of reconstruction processes of vacancy defects. In this talk, we present reconstruction processes of vacancy defects in a graphene and a carbon nanotube by tight-binding molecular dynamics (TBMD) simulations and by first principles total energy calculations. We found that a structure of a dislocation defect with two pentagon-heptagon (5-7) pairs in graphene becomes more stable than other structures when the number of vacancy units is ten and over. The simulation study of scanning tunneling microscopy reveals that the pentagon-heptagon pair defects perturb the wavefunction of electrons near Fermi level to produce the $\sqrt{3}\;{\times}\;\sqrt{3}$ superlattice pattern, which is in excellent agreement with experiment. It is also observed in our tight-binding molecular dynamics simulation that 5-7 pair defects play a very important role in vacancy reconstruction in a graphene layer and carbon nanotubes.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.3
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• pp.246-252
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• 2004

Electronic speckle pattern interferometry (ESPI) for quantitative evaluation of delaminations inside of a composite material plate is described. Delaminations caused by the impact on composite materials are difficult to detect visual inspection and ultrasonic testing due to non-homeogenous structure. This paper proposes the quantitative evaluation technique of the defects made in the composite plates by impact load. Artificial defects are introduced inside of the composite plate for the development of a reliable ESPI inspection technique. Real defects produced by impact tester are inspected and compared with the results of visual inspection which shows a good agreement within 5% error.