• Title/Summary/Keyword: Defect level

Search Result 589, Processing Time 0.034 seconds

A Reliability and warpage of wafer level bonding for CIS device using polymer (폴리머를 이용한 CIS(CMOS Image Sensor) 디바이스용 웨이퍼 레벨 접합의 warpage와 신뢰성)

  • Park, Jae-Hyun;Koo, Young-Mo;Kim, Eun-Kyung;Kim, Gu-Sung
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.16 no.1
    • /
    • pp.27-31
    • /
    • 2009
  • In this paper, the polymer adhesive bonding technology using wafer-level technology was investigated and warpage results were analyzed. Si and glass wafer was bonded after adhesive polymer layer and dam pattern for uniform state was patterned on glass wafer. In this study, warpage result decreased as the low of bonding temperature of Si wafer, bonding pressure and height of adhesive bonding layer. The availability of adhesive polymer bonding was confirmed by TC, HTC, Humidity soak test after dicing. The result is that defect has not found without reference to warpage.

  • PDF

A Study on Behavior of Deep Levels for AlGaAs Epi-layers using DLTS (DLTS를 이용한 AlGaAs 에피층의 깊은준위 거동에 관한 연구)

  • Choi, Young-Chul;Park, Young-Ju;Kim, Tae-Geun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.07a
    • /
    • pp.150-153
    • /
    • 2004
  • 본 논문에서는 780 nm 고출력 레이저 다이오드의 신뢰성을 향상시키기 위하여 DLTS(deep level transient spectroscopy)을 이용하여 MOCVD(metalorganic chemical vapor deposition) 성장 조건 변화에 따른 $Al_{0.48}Ga_{0.52}As$$Al_{0.1}Ga_{0.9}As$ 물질에서의 깊은준위(deep level)의 거동을 조사하였다. DLTS 측정결과, MOCVD로 성장된 막에서만 나타나는 결함(defect)으로 추정되는 trap A(0.3 eV), DX center로 알려진 trap B, 갈륨(Ga) vacancy와 산소(O2) 원자의 복합체(complex)에 의한 결함인 trap D(0.6 eV) 및 EL2 라고 불리우는 trap E(0.9 eV)의 네 가지 깊은준위들이 관측되었고, 성장 조건의 변화에 따라 깊은 준위들의 농도가 감소하는 것을 관측함으로써 최적 성장 조건을 찾을 수 있었다.

  • PDF

Resolution of Protein-Losing Enteropathy after Congenital Heart Disease Repair by Selective Lymphatic Embolization

  • Kylat, Ranjit I;Witte, Marlys H;Barber, Brent J;Dori, Yoav;Ghishan, Fayez K
    • Pediatric Gastroenterology, Hepatology & Nutrition
    • /
    • v.22 no.6
    • /
    • pp.594-600
    • /
    • 2019
  • With improving survival of children with complex congenital heart disease (CCHD), postoperative complications, like protein-losing enteropathy (PLE) are increasingly encountered. A 3-year-old girl with surgically corrected CCHD (ventricular inversion/L-transposition of the great arteries, ventricular septal defect, pulmonary atresia, postdouble switch procedure [Rastelli and Glenn]) developed chylothoraces. She was treated with pleurodesis, thoracic duct ligation and subsequently developed chylous ascites and PLE (serum albumin ${\leq}0.9g/dL$) and was malnourished, despite nutritional rehabilitation. Lymphangioscintigraphy/single-photon emission computed tomography showed lymphatic obstruction at the cisterna chyli level. A segmental chyle leak and chylous lymphangiectasia were confirmed by gastrointestinal endoscopy, magnetic resonance (MR) enterography, and MR lymphangiography. Selective glue embolization of leaking intestinal lymphatic trunks led to prompt reversal of PLE. Serum albumin level and weight gain markedly improved and have been maintained for over 3 years. Selective interventional embolization reversed this devastating lymphatic complication of surgically corrected CCHD.

Performance Analysis Framework for Post-Evaluation of Construction Projects through Benchmarking from Advanced Countries (선진국 사례 벤치마킹을 통한 건설공사 사후평가 성과분석 체계 개발)

  • Lee, Kang-Wook
    • Journal of the Korean Society of Industry Convergence
    • /
    • v.25 no.6_2
    • /
    • pp.1017-1027
    • /
    • 2022
  • Development of social overhead capital (SOC) requires huge national finance, and performance issues such as cost-efficiency, safety, and environment have been constantly raised. However, currently each construction client has limited access to its own projects' performance without analytic methodology for industry-level comparisons and benchmarking for improvement. To overcome this problem, this study proposes a comprehensive performance analysis framework for post-evaluation of large-scale construction projects. To this end, this study performed a case study of advanced countries (the U.S., the U.K. and Japan) and consultation with related experts to develop a tailored performance analysis framework for the Post- Construction Evaluation and Management system in Korea. The developed framework covers three categories (project performance, project efficiency, and ripple effect), nine areas (cost, schedule, change, safety, quality, demand, benefit-cost ratio, civil complaint, and defect), and 31 detailed metrics. Using industry-level project performance database and statistical techniques, the proposed framework can be used not only to diagnose excellent and unsatisfactory performance areas for completed construction projects, but also to provide reference data for future similar projects. This study can contribute to the improvement of clients' performance management practices and effectiveness of construction projects.

Improvement of Electrical Performance and Stability in ZnO Channel TFTs with Al Doped ZnO Layer (Al Doped ZnO층 적용을 통한 ZnO 박막 트랜지스터의 전기적 특성과 안정성 개선)

  • Eom, Ki-Yun;Jeong, Kwang-Seok;Yun, Ho-Jin;Kim, Yu-Mi;Yang, Seung-Dong;Kim, Jin-Seop;Lee, Ga-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.28 no.5
    • /
    • pp.291-294
    • /
    • 2015
  • Recently, ZnO based oxide TFTs used in the flexible and transparent display devices are widely studied. To apply to OLED display switching devices, electrical performance and stability are important issues. In this study, to improve these electrical properties, we fabricated TFTs having Al doped Zinc Oxide (AZO) layer inserted between the gate insulator and ZnO layer. The AZO and ZnO layers are deposited by Atomic layer deposition (ALD) method. I-V transfer characteristics and stability of the suggested devices are investigated under the positive gate bias condition while the channel defects are also analyzed by the photoluminescence spectrum. The TFTs with AZO layer show lower threshold voltage ($V_{th}$) and superior sub-threshold slop. In the case of $V_{th}$ shift after positive gate bias stress, the stability is also better than that of ZnO channel TFTs. This improvement is thought to be caused by the reduced defect density in AZO/ZnO stack devices, which can be confirmed by the photoluminescence spectrum analysis results where the defect related deep level emission of AZO is lower than that of ZnO layer.

Stainless steel 기판에서 제조된 CIGS 박막 태양전지의 ZnO 확산 방지막을 이용한 deep level defect 감소 연구

  • Kim, Jae-Ung;Kim, Hye-Jin;Kim, Gi-Rim;Kim, Jin-Hyeok;Jeong, Chae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2016.02a
    • /
    • pp.393-393
    • /
    • 2016
  • Cu(In,Ga)Se2 (CIGS) 박막 태양전지는 높은 효율과 낮은 제조비용, 높은 신뢰성으로 인해 박막 태양전지 중 가장 각광받고 있다. 특히 유리기판 대신 가볍고 유연한 철강소재나 플라스틱 소재를 이용하여 발전분야 외에 건물일체형, 수송용, 휴대용등 다양한 분야에 적용이 가능하다. 이러한 유연 기판을 이용한 CIGS 태양전지의 개발을 위해서는 기판의 특성에 따른 다양한 공정개발이 선행되어야 한다. Stainless steel과 같은 철강기판의 경우 Fe, Ni, Cr등의 불순물이 확산되어 흡수층의 특성을 저하시켜 효율을 감소시킨다. 따라서 이러한 철강 기판의 경우 불순물의 확산을 방지하는 확산방지막이 필수적이다. 이러한 유연기판의 특성을 고려하여 본 연구에서는 기존의 두껍고 추가 장비가 요구되는 SiOx나 Al2O3 대신 200nm 이하의 ZnO 박막을 이용하여 확산방지막을 제조하였다. 유연기판으로 STS 430 stainless steel을 이용하였다. 먼저 stainless steel 기판을 이용하여 기판에 의한 흡수층의 특성을 분석하였으며 ZnO 확산 방지막의 유무 및 두께에 따른 흡수층 및 소자의 특성을 분석하였다. 이때 확산 방지막은 기존 TCO 공정에서 사용되는 i-ZnO를 사용하였으며 RF sputter를 이용하여 50~200nm로 두께를 달리하며 특성 비교를 실시하였다. 효율은 확산방지막을 적용하지 않았을 때 약 5.9%에서 확산 방지막 적용시 약 10.7%로 증가하였다. 그 후 기판으로부터 확산되는 불순물의 유입에 의한 결함을 분석하기 위해 DLTS를 이용하여 소자 특성을 분석하였다. 온도는 80~300K으로 가변하며 측정을 실시하였으며 그 후 계산을 통해 activation energy와 capture cross section 값을 구하였다. DLTS 분석 결과 Ni이 CIGS 흡수층으로 확산되어 NiCu anti-site를 형성하여 태양전지의 효율을 감소시키는 것을 확인하였다. 모든 흡수층은 Co-Evaporation 방법을 이용하여 제조하였으며 제조된 흡수층은 SEM, XRF, XRD, GD-OES, PL, Raman등을 이용하여 분석하였으며 그 외 일반적인 방법을 이용하여 Mo, CdS, TCO, Al grid를 제조하였다. AR 코팅은 제외 하였으며 제조된 소자는 솔라 시뮬레이터를 이용하여 효율 특성 분석을 실시하였으며 Q.E. 분석을 실시하였다.

  • PDF

The effect of 4-hexylresorcinol on xenograft degradation in a rat calvarial defect model

  • Kang, Yei-Jin;Noh, Ji-Eun;Lee, Myung-Jin;Chae, Weon-Sik;Lee, Si Young;Kim, Seong-Gon
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.38
    • /
    • pp.29.1-29.9
    • /
    • 2016
  • Background: The objective of this study was to evaluate xenograft degradation velocity when treated with 4-hexylresorcinol (4HR). Methods: The scapula of a cow was purchased from a local grocery, and discs (diameter 8 mm, thickness 1 mm) were prepared by trephine bur. Discs treated with 4HR were used as the experimental group. Untreated discs were used as the control. X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), antibacterial test, endotoxin test, and scanning electron microscopy (SEM) were performed on the discs. In vivo degradation was evaluated by the rat calvarial defect model. Results: The XRD and FT-IR results demonstrated successful incorporation of 4HR into the bovine bone. The experimental disc showed antibacterial properties. The endotoxin test yielded results below the level of endotoxin contamination. In the SEM exam, the surface of the experimental group showed needle-shaped crystal and spreading of RAW264.7 cells. In the animal experiments, the amount of residual graft was significantly smaller in the experimental group compared to the control group (P = 0.003). Conclusions: In this study, 4HR was successfully incorporated into bovine bone, and 4HR-incorporated bovine bone had antibacterial properties. In vivo experiments demonstrated that 4HR-incorporated bovine bone showed more rapid degradation than untreated bovine bone.

Redrying Fire - Retardant - Treated Structural Plywood (구조용(構造用) 내화처리(耐火處理) 합판(合板)의 재건조(再乾燥)에 관(關)한 연구(硏究))

  • Lee, Phil-Woo;Schaffer, E.L.
    • Journal of the Korean Wood Science and Technology
    • /
    • v.9 no.4
    • /
    • pp.1-21
    • /
    • 1981
  • Exterior grades of Douglas-fir and aspen plywood were impregnated with interior fire-retardant chemicals and redried under low-, intermediate-, and high-temperature drying conditions. Fire-retardant treatments included borax-boric acid, chromated zinc chloride, minalith, pyresote, and a commercial formulation. Drying processes included kiln and press-drying. Evaluated were drying rates and defects generated. The borax-boric acid and the commercial treatments redried at rates similar to water-treated controls. Other salt treatments were significantly slower drying and more defect prone. Chromated zinc chloride treatment was consistently the slowest drying and most defect prone. Press drying was three times faster at an equivalent temperature level. However, thickness shrinkage doubled because of 50 1b/in. platen pressure.

  • PDF

ILD CMP 공정에서 실리콘 산화막의 기계적 성질이 Scratch 발생에 미치는 영향

  • Jo, Byeong-Jun;Gwon, Tae-Yeong;Kim, Hyeok-Min;Park, Jin-Gu
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2011.10a
    • /
    • pp.23-23
    • /
    • 2011
  • Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

  • PDF

A Case of Hypernatremic Dehydration in an Exclusively Breast-Fed Newborn Infant (모유수유 신생아에게 발생한 고나트륨혈성 탈수증 1례)

  • Park, Kyung Pil;Kim, Jin Kyung;Kim, Heng Mi
    • Clinical and Experimental Pediatrics
    • /
    • v.45 no.6
    • /
    • pp.790-795
    • /
    • 2002
  • Sporadic reports of hypernatremic dehydration in breastfed newborn infants have appeared in medical literature for at least 3 decades. We report the first case of hypernatremic dehydration resulting from inadequate breast-feeding in Korea. A 14-day old baby, born to a mentally retarded mother, was transferred to our hospital with a body weight loss of 460 g since birth(17%) and a serum sodium(Na) level of 179 mEq/L, after initial hydration at another hospital. On admission, a cardiac murmur was heard and an enlarged liver was palpated. Cardiac ultrasonogram revealed ventricular septal defect and ostium secundum atrial septal defect. During hydration, a seizure-like attack developed. Serum Na decreased to 135 mEq/L on the 5th day of admission. Brain ultrasonography and brain magnetic resonance image revealed no remarkable abnormalities. Electroencephalography was normal. She suffered from prerenal azotemia, hyperglycemia and disseminated intravascular coagulation at admission but was treated successfully. Heart failure was also controlled with dobutamine, diuretics and digoxin.