• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.387-394
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• 2013

As the feature size of integrated circuits continues to decrease, the challenge of achieving an oxidation-free exposed layer after photoresist (PR) stripping is becoming a critical issue for semiconductor device fabrication. In this article, the hydrogen plasma characteristics in direct plasma and the PR stripping rate in remote plasma were studied using a $120{\Phi}$ cylindrical inductively coupled plasma source. E mode, H mode and E-H mode transitions were observed, which were defined by matching the $V_{rms}$ and total impedance. In addition, the dependence of the E-H mode transition on pressure was examined and the corresponding plasma instability regions were identified. The plasma density and electron temperature increased gradually under the same process conditions. In contrast, the PR stripping rate decreased with increasing proportion of $H_2$ gas in mixed $H_2/N_2$ plasma. The decrease in concentration of reactive radicals for the removal of PR with increasing $H_2$ gas flow rate suggests that NH radicals have a dominant effect as the main volatile product.

• 한국해양공학회지
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• 제19권2호
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• pp.53-59
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• 2005

The effect of pH on the corrosion characteristics in the dissimilar friction welded zone of IN713LC-SCM440 in the loaded torsional stress was studied. The corrosion experiment was performed for 120 hours on the specimens with five steps of pH. The surface corrosion pattern of the SCM440 area showed global corrosion and narrow pitting, which was caused by galvanic corrosion between friction welded IN713LC and SCM440, but corrosion did not proceeded from the IN713LC area. The average relative electrode potential gradually tends to decrease with the elapse of the immersion time in the acidity area. The average corrosion current also gradually tend to decrease The corrosion rate showed a larger value when the average relative electrode potential was higher and the average relative current was lower. The corrosion rate showed a larger value when the average relative electrode potential was higher in the acidity area, and it showed large when the average relative electrode potential was lower in the alkalinity area.

• KSBB Journal
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• 제8권2호
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• pp.178-184
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• 1993

Extractive fermentations with the extract of Jerusalem artichoke in an aqueous-two-phase-system of polyethyleneglycol(PEG) and dextran(Dx) were investigated to obtain the effects of composition of PEG and Dx on both fermentation ,characteristics and partition ratio of alcohol. The specific growth rate of K. Fraglis CBS 1555 increased with a decrease of concentration of PEG and Dx. It augmented along with concentration of initial sugar up to 80g/l but decreased thereafter. The specific production rate of alcohol showed a rising tendency up to 100g/lof initial sugar, whereafter represented a decreasing trend. The partition ratio of alcohol between two phases augmented according to decrease of Dx comic. and increase of PEG cone. regardless of initial sugar concentrations. The ratio, however, decreased with Increment of initial sugar concentration at constant composition of PEG and Dx. The partition coefficient of alcohol had an ascending effect to the increase of PEG cone, but it had little effect on the changes of concentrations of Dx and initial sugar. The present study suggests that the optimum composition of PEG and Dx in the aqueous-two-phase-system by extractive fermentation were around 6.5%(w/v) of PEG and 3%(w/v) of Dx in considerations of emulsion state, sedimentation and separation of two phases, alcohol partition ratio, and specific growth rate.

• 대한간호학회지
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• 제17권2호
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• pp.116-121
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• 1987

This study was undertaken to elucidate effects of ingesting small or large amount of tap or iced water on circulation of normal healthy men with the purpose of furnishing basic data for nursing intervention of myocardial infarction patients. The subjects for this study were normal healthy men consisting of 30men and 30women in age from 22 to 30 years. One group consisting of 30men drank 240m1 tap water on day l and 240m1 iced water 24hours later. The other group drank 960m1 tap water on day 1 and 960m1 iced water 24hours later. Blood pressure and heart rate were taken in a sitting position before ingesting water, and immediately after ingesting it and at 2,5,10,15,30 minute intervals thereafter. Changes of heart rate, systolic and diastolic blood pressure after ingesting water were compared with those of preingestive period. The results obtained were as follows : 1. There were no significant changes in blood pressure and heart rater after ingesting small amount of water regardless of its temperature. 2. No significant decrease in blood pressure after ingesting large amount of tap water at all time peroids was noted. 3. A strongly significant interaction effect bet-ween temperature and volume was demonstrated, that is, there was a highly significant decrease in blood pressure and heart rate at all time periods after ingesting large amount of iced water.

• 미생물학회지
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• 제5권1호
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• pp.15-19
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• 1967

Chlorella ellipsoidea cells were cultured in an iron, copper, zinc, manganese, molybdenum or boron-free medium. Physiological activities such as growth rate, reproduction, endogenous and glucose respiration, photosynthetic activity and biosythesis of chlorophyll of the micro-element definition cells were measured. It generally, growth rate, respiratory and photosynthetic activities, and biosynthesis of chlorophyll of the micro-element deficient cells decreased more or less, compared with those of the normal cells. The growth of the algal cells in an iron-free medium were retarded severely with the chlorosis, and the photosynthetic activity of the cells decreased remarkably even though the low content of chlorophyll in the cells owing to the iron-deficiency is considered. Therefore, it is deduced that iron takes part in the photosynthetic process itself, possibly by its participation in the photo phosphorylation coupled with electron transport. Respiratory activity of boron-deficient cells showed the most severe decrease whereas those of the molybdenum-deficient cells showed very slight decrease in spite of severe growth retardation.

• 한국재료학회지
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• 제9권5호
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• pp.533-537
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• 1999

ATO(Sb doped $SnO_2$) thin films whose thicknesses were 600, 1100 and $2100\AA$ were prepared by DC magnetron sputtering method. They showed the lowest resistivity at DC sputtering power 0.24kW and had lower resistivity with increasing thickness. The power dependence of resistivity among ATO thin films was also different with thickness. The increase of carrier concentration in ATO thin films was responsible for the decrease of resistivity with thickness increase. ATO thin films which were prepared at 30sccm oxygen flow rate showed a great change of sheet resistance under 1M HCl solution. The investigation of SAM(Scanning Auger Microprobe) revealed that oxygen atomic percentage on the surface of ATO thin films was changed. The decrease of sheet resistance also occurred when ATO thin films, prepared at 30sccm oxygen flow rate, were exposed to air for a long period of time. For this reason, it was considered that the desorption of oxygen on ATO surface was accelerated by HCl.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2017년도 춘계 학술논문 발표대회
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• pp.156-157
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• 2017

It is possible in the case of the chemical admixtures for concrete currently being used in actual work sites to omit quality evaluation and replace it with the scores of the admixture manufactures; this can create a problem of decline in reliability in quality on the work site. Therefore this study sought to analyze the degree of influence changes in the solid content rate of lignin- and naphthalene-based water-reducing agents have on the fundamental characteristics of cement mortar. The results showed that in fresh mortar, the flow and amount of air decreases with decrease in the solid content ratio. In hardened mortar, the condensation strength had hardly any effect on the use of lignin-based water-reducing agent, but naphthalene-based water-reducing agent increased with the decrease in the solid content ratio.

• 열처리공학회지
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• 제4권3호
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• pp.39-46
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• 1991

The effects of austenitizing temperatures and times and cooling rate on the characteristics of continuous air cooling have been investigated for 0.3%C-Mn steels microalloyed with vanadium. Transformation start temperatures have been found to be measured from temperature-time curve directly obtained with continuous air cooling and to decrease with increasing austenitizing temperature, cooling rate and Mn contents. The coarsening behavior of austenite grain size has been measured to abnormally grow at $1050^{\circ}C$ and rapidly grow at $1200^{\circ}C$. It has been found that the volume fraction of pearlite was linealy proportional to the reciprocal square root of austenite grain size. The hardness has been measured to increase with increasing cooling rate up to $250^{\circ}C/min.$ and to remain relatively unchanged in the range of $250{\sim}400^{\circ}C/min.$ showing that hardness valves for steel with a higher Mn content increase more than those for steel with a lower Mn content. The impact property has been found to decrease with increasing of austenite grain size but does not linealy change with the reciprocal square root of austenite grain size.

• Tribology and Lubricants
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• 제18권5호
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• pp.357-363
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• 2002

The vibration characteristics of the pad fluttering in a fluid film tilting pad journal bearing (4-pad LBP) have been investigated experimentally under the different values of oil supply flow rate, bearing load and shaft speed. The vibration characteristics of the pad fluttering are estimated by measuring the time signal of circumferential distribution of the film thickness and the cascade plot of the response of the relative displacement between the bearing and the shaft. It is shown that the vibration frequency of the pad fluttering has a sub-synchronous frequency and almost does not change by the increase of shaft speed. However the vibration amplitude is increased by the increase of shaft speed. From those experimental results, pad fluttering can be thought of as a self-excited vibration. The incipient pad fluttering velocity is increased by the increase of oil supply flow rate and by the decrease of bearing load. It is observed that the vibration amplitude of the pad fluttering can be decrease by the control of supply oil flow rate effectively. And also It is known that the outbreak of pad fluttering does not concern with the shaft vibration.

• Biomolecules & Therapeutics
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• 제5권4호
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• pp.390-401
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• 1997

In order to investigate the pharmacological properties of New Woohwangchungsimwon Liquid (NCL), effects of Woohwangchungsimwon Liquid (CL) and NCL were compared. In isolated rat aorta, NCL and CL showed the relaxation of blood vessels in maximum contractile response to phenylephrine (10$^{-6}$ M) without regard to intact endothelium or denuded rings of the rat aorta. Furthermore, the presences of the inhibitor of NO synthase and guanylate cyclase did not affect the relaxation of NCL and CL. NCL and CL inhibited the vascular contractions induced by acetylcholine, prostaglandin endoperoxide or peroxide in a dose-dependent manner. In conscious spontaneously hypertensive rats (SHRs), NCL and CL significantly decreased heart rate. NCL and CL, at high doses, had a negative inotropic effect that was a decrease of LVDP and (-dp/dt)/(+dp/dt) in the isolated perfused rat hearts, and also decreased the contractile force and heart rate in the isolated rat right atria. In excised guinea-pig papillary muscle, NCL and CL had no effects on parameters of action potential at low doses, whereas inhibited the cardiac contractility at high doses. These results suggested that NCL and CL have weak cardiovascular effects with relaxation of blood vessels and decrease of heart rate, and that this effect is no significant differences between two preparations.