• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1731-1732
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• 2006

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. We have investigate the possibility of new abrasive for the oxide CMP application.

• 한국가시화정보학회:학술대회논문집
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• 2002.11a
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• pp.49-50
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• 2002

In micro-channels, the electro-viscous effect is caused by the electrical double layer on pressure-driven liquid flow. Velocity fields of flow inside micro-channels were measured using micro-PIV system for investigating the electro-viscous effect. De-ionized water and aqueous NaCl solutions with four different concentrations were used as working fluid in a PDMS micro-channel of $100{\mu}m$ width and $66{\mu}m$ height. The pressure gradient, dP/dx, was determined from the pre-determined input flow rate Q of syringe pump. The mean velocity $u_m$ used for calculating Reynolds number was obtained from the PIV velocity field data. These are used to plot the pressure gradient as a function of Reynolds numbers. The pressure gradient far lower concentration solution $(10^{-5}\;M)$ was higher than that for the higher concentration solution. The increase of flow resistance was about $30\%\;and\;37.5\%$ at Re=0.02 and 0.06, respectively.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.38-43
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• 2019

Electrowetting on dielectric (EWOD) is a unique method of shape control of small-volume droplets in microfluidic biochips that relies on modification of surface wetting characteristics using electrical methods. In this study, the droplet shape control on various dielectric surfaces by the EWOD and the effect of droplets on the contact angle as well as the shape were investigated. The droplet used in the experiment was on a sample substrate with $5{\mu}l$ of de-ionized water (DIW) using a micropipette, and wettability was measured with a contact angle meter. This study is expected to be helpful for the development of various micro-total-analysis-systems (${\mu}TAS$) and microfluidic systems with MEMS technology.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.6
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• pp.599-608
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• 2010

The effect of silica(fumed) on nitrate reduction by zero-valent iron(ZVI) was studied using batch experiment. The reduction of nitrate was tested in three different aqueous media including de-ionized water, artificial groundwater and real groundwater contaminated by nitrate. Kinetics of nitrate reduction in groundwater were faster than those in de-ionized water, and first-order rate constant($k_{obs}$) of ZVI/silica(fumed) process was about 2.5 time greater than that of ZVI process in groundwater. Amendment of Silica(fumed) also decreased ammonium presumably through adsorption on silica surface. The pHs in all processes increased due to oxidation of ZVI, but the increase was lower in groundwater due to buffering capacity of groundwater. The result also showed amount of reduced nitrate increased as initial nitrate concentration increased in groundwater. Separate adsorption isotherm experiments indicated that fumed silica itself had some degree of adsorption capacity for ammonium. The overall results indicated that silica(fumed) might be a promising material for enhancing nitrate reduction by ZVI.

• Journal of ILASS-Korea
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• v.17 no.1
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• pp.14-19
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• 2012

The present study conducts experimental investigation on spreading and deposition characteristics of a $4.3{\mu}l$ de-ionized (DI) water droplet impacting upon aluminum (Al 6061) flat and textured surfaces. The micro-textured surface consisted the micro-hole arrays (hole diameter: $125{\mu}m$, hole depth: $125{\mu}m$) fabricated by the conventional micro-computer numerical control (${\mu}$-CNC) milling machine process. We examined the surface effect of texture area fraction ${\varphi}_s$ ranging from 0 to 0.57 and impact velocity of droplet ranging from 0.40 m/s to 1.45 m/s on spreading and deposition characteristics from captured images. We used a high-speed camera to capture sequential images for investigate spreading characteristics and the image sensor to capture image of final equilibrium deposition droplet for analyze spreading diameter and contact angle. We found that the deposition droplet on textured surfaces have different wetting states. When the impact velocity is low, the non-wetting state partially exists, whereas over 0.64 m/s of impact velocity, totally wetting state is more prominent due to the increase kinetic energy of impinging droplet.

• Journal of the Korean institute of surface engineering
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• v.52 no.6
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• pp.364-370
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• 2019

Fe-Mn-Si-Ni-Cr-TiC alloys have a shape memory property, recovering initial shape by heating. With an aim to improve a durability and stability of building and infrastructure, this Fe-based shape memory alloy (FSMA) can be employed to reinforce concrete structure with creation of compressive residual stress. In this work, corrosion resistance of FSMA was compared with general rebar and S400 carbon steel to evaluate the stability in concrete environment. Potentiodynamic polarization test in de-ionized water, tap-water and 3.5 wt.% NaCl solution with variations of pH was used to compare the corrosion resistance. FSMA shows better corrosion resistance than rebar and S400 in tested solutions. However, Cl-containing solution is critical to significantly reduce the corrosion resistance of FSMA. Therefore, though FSMA can be a promising candidate to replace the rebar and S400 for the reinforcement of concrete structure, serious cautions are required in marine environments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.380-381
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• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry (MAS). In order to save the costs of slurry, the original silica slurry was diluted by de-ionized water (DIW). And then, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

• Journal of the Korean Ceramic Society
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• v.55 no.2
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• pp.140-144
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• 2018

$ZnO/TiO_2$ nanocomposites were synthesized via a modified sol-gel technique by incorporating 30 and 70 wt% $TiO_2$ nanopowder into a ZnO sol-gel matrix. Zinc acetate dihydrate was used as the ZnO precursor and de-ionized water as the solvent, while titanium oxysulfate was employed for the synthesis of $TiO_2$ nanopowder. The synthesized $ZnO/TiO_2$ nanocomposites were characterized by x-ray diffraction, UV-vis spectroscopy, scanning electron microscopy, and transmission electron microscopy. The $ZnO/TiO_2$ nanocomposites showed both the ZnO (wurtzite) and $TiO_2$ (anatase) phases. The average ZnO crystallite size of the $ZnO/TiO_2$ nanocomposites was found to be about 26.3 nm. The TEM results confirmed that spherical $TiO_2$ particles were embedded in the ZnO matrix. $TiO_2$ particles attached onto the rod-like ZnO particles were also observed. The $ZnO/TiO_2$ nanocomposites exhibited optical absorption properties superior to those of pure ZnO and $TiO_2$.