• Title/Summary/Keyword: DOE2

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실험계획법을 이용한 세슘보조 스퍼터링 공정의 특성분석 (Characterization of Cesium Assisted Sputtering Process Using Design of Experiment)

  • 민철홍;박성진;윤능구;김태선
    • 한국표면공학회지
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    • 제40권4호
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    • pp.165-169
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    • 2007
  • Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics between process input factors and equipment responses. Therefore, to maximize film quality, optimization of manufacturing process is essential and process characterization is the first step for process optimization. For this, we designed 2 level design of experiment (DOE) to analyze ITO film characteristics including film thickness, resistivity and transmittance. DC power, pressure, carrier flow, Cs temperature and substrate temperature were selected for process input variables. Through statistical effect analysis methods, relation between three types of ITO film characteristics and five kinds of process inputs are successfully characterized and eventually, it can be used to optimize Cs assisted sputtering processes for various types of film deposition.

MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구 (Study on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass)

  • 윤지섭;최재호;정윤성;민경원;임원빈;김형준
    • 반도체디스플레이기술학회지
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    • 제20권2호
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    • pp.61-66
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    • 2021
  • In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2.

Development of Load Prediction Equations of Office Buildings

  • Seok, Ho-Tae;Kim, Kwang-Woo
    • International Journal of Air-Conditioning and Refrigeration
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    • 제10권2호
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    • pp.65-71
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    • 2002
  • The objective of this study is to evaluate the design parameters and to develop the cooling and heating load prediction equations of office buildings. The building load calculation simulation was carried out using the DOE-2.1E program. The results of the simulation were used as data for multiple regression analysis which could develop the load prediction equations.

PMN-PZT 세라믹스에 있어서 열에이징 효과 (Effect of Thermal Aging in PMN-PZT Ceramics)

  • 이개명;박창엽
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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    • pp.17-21
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    • 1995
  • Tw types of Pb(Mn$\sub$1/3/Nb$\sub$2/3/)O$_3$+PZT Ceramics had been fabricated by hot-pressing method. One had cause grain and the other had fine grain doe to Cr$_2$O$_3$ addition. These specimen were poled by applying the DC electric field in various steps. The effects of thermal aging on their piezoelectric characteristics and temperature stability of the frequency were investigated.

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The Equilibrium Design of Radial Magnetic Force for Reduction of Vibration in IPM type BLDC Motor

  • Lee, Gyeong-Deuk;Kim, Gyu-Tak
    • Journal of Electrical Engineering and Technology
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    • 제11권2호
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    • pp.377-382
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    • 2016
  • In this paper, influence of vibration on cogging torque and Radial Magnetic Force(RMF) imbalance was investigated in the IPM type BLDC motor. Design of cogging torque reduction and the RMF equilibrium was proceed applied to Design of Experiment(DOE). Vibration test results, the RMF imbalance was confirmed that a significant impact of vibration.

고체상미량분석법(SPME-GC/FID)에서 실험계획법을 이용한 연료첨가제 미량분석의 최적조건 (Optimization Condition of Trace Analysis of Fuel Oxygenated Compounds Using The Design of Experiment (DOE) in Solid-Phase Microextraction with GC/FID)

  • 안상우;이시진;장순웅
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제15권1호
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    • pp.9-18
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    • 2010
  • In this study, Solid-phase micro-extraction (SPME) with Gas Chromatograph using Flame Ionization Detector (GC/FID) was studied as a possible alternative to liquid-liquid extraction for the analysis of Methyl tert-butyl ether (MTBE) and Tertiary-butyl ether (TBA) in water and an optimization condition of trace analysis of MTBE and TBA using the design of experiment (DOE) was described. The aim of our research was to apply experimental design methodology in the optimization condition of trace analysis of fuel oxygenated compounds in soil-phase microextraction with GC/FID. The reactions of SPME were mathematically described as a function of parameters of Temp ($X_1$), Volume ($X_2$), Time ($X_3$) and Salt ($X_4$) being modeled by the use of the partial factorial designs, which was used for fitting 2nd order response surface models and was alternative to central composite designs. The model predicted agreed with the experimentally observed result ($Y_1$(MTBE, $R^2$ = 0.96, $Y_2$ (TBA, $R^2$ = 0.98)). The estimated ridge of the expected maximum responses and optimal conditions for MTBE and TBA were 278.13 and (Temp ($X_1$) = $48.40^{\circ}C$, Volume ($X_2$) = 73.04 mL, Time ($X_3$) = 11.51 min and Salt ($X_4$) = 12,50 mg/L), and 127.89 and (Temp ($X_1$) = $52.12^{\circ}C$, Volume ($X_2$) = 88.88mL, Time ($X_3$) = 65.40 min and Salt ($X_4$) = 12,50 mg/L), respectively.

Parametric study of propeller boss cap fins for container ships

  • Lim, Sang-Seop;Kim, Tae-Won;Lee, Dong-Myung;Kang, Chung-Gil;Kim, Soo-Young
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제6권2호
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    • pp.187-205
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    • 2014
  • The global price of oil, which is both finite and limited in quantity, has been rising steadily because of the increasing requirements for energy in both developing and developed countries. Furthermore, regulations have been strengthened across all industries to address global warming. Many studies of hull resistance, propulsion and operation of ships have been performed to reduce fuel consumption and emissions. This study examined the design parameters of the propeller boss cap fin (PBCF) and hub cap for 6,000TEU container ships to improve the propulsion efficiency. The design parameters of PBCF have been selected based on the geometrical shape. Computational fluid dynamics (CFD) analysis with a propeller open water (POW) test was performed to check the validity of CFD analysis. The design of experiment (DOE) case was selected as a full factorial design, and the experiment was analyzed by POW and CFD analysis. Analysis of variance (ANOVA) was performed to determine the correlation among design parameters. Four design alternatives of PBCF were selected from the DOE. The shape of a propeller hub cap was selected as a divergent shape, and the divergent angle was determined by the DOE. Four design alternatives of PBCF were attached to the divergent hub cap, and the POW was estimated by CFD. As a result, the divergent hub cap with PBCF has a negative effect on the POW, which is induced by an increase in torque coefficient. A POW test and cavitation test were performed with a divergent hub cap with PBCF to verify the CFD result. The POW test result showed that the open water efficiency was increased approximately 2% with a divergent hub cap compared to a normal cap. The POW test result was similar to the CFD result, and the divergent hub cap with the PBCF models showed lower open water efficiency. This was attributed to an increase in the torque coefficient just like the CFD results. A cavitation test was performed using the 2 models selected. The test result showed that the hub vortex is increased downstream of the propeller.

CORDEX 동아시아 영역에서 경계조건 및 적운모수화방안이 RegCM4를 이용한 남한 지역 기후모의에 미치는 영향 분석 (Impact of Boundary Conditions and Cumulus Parameterization Schemes on Regional Climate Simulation over South-Korea in the CORDEX-East Asia Domain Using the RegCM4 Model)

  • 오석근;서명석;명지수;차동현
    • 한국지구과학회지
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    • 제32권4호
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    • pp.373-387
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    • 2011
  • 본 연구에서는 CORDEX 동아시아 영역에서 경계조건(ERA-Interim, NCEP/DOE2) 및 적운모수화방안(Grell, Emanuel)이 2010년 7월에 공개된 지역기후모델(RegCM4)의 모의성능에 미치는 영향을 평가하기 위해 1989년에 대해 총 4개의 민감도 실험(EG, EE, NG, NE)을 수행하였다. 남한에서의 기온, 강수에 대한 RegCM4의 모의성능을 분석하기 위해 기상청의 기온, 강수자료를 이용하였다. RegCM4는 경계조건 및 적운모수화방안에 관계없이 기온의 공간분포, 계절변동을 잘 모의한 반면, 모든 실험에서 강수의 시 공간 분포를 적절히 모의하지 못하였다. 특히, EG, NG, NE 실험은 여름 강수를 관측보다 현저히 적게 모의하는 등 강수의 계절변동을 전혀 모의하지 못하고 있다. 하지만 EE 실험에서는 여름 강수를 포함하여 계절변동을 상대적으로 잘 모의하였다. 동아시아 여름 몬순 및 강수강도별 강수량, 강수빈도 모의에서도 EE 실험이 우수한 모의성능을 보였다. RegCM4는 경계조건에 관계없이 기온, 강수 모두 여름보다는 겨울에, Grell 보다는 Emanuel 방안을 적용할 때 높은 모의성능을 보였다. 또한 전체적으로 모의성능은 경계조건보다는 적운모수화방안에 더 큰 영향을 받는다.

LCD 유리 이송용 복합재료 로봇 핸드의 식스 시그마 강건설계 (Six Sigma Robust Design of Composite Hand for LCD Glass Transfer Robot)

  • 남현욱
    • 대한기계학회논문집A
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    • 제29권3호
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    • pp.455-461
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    • 2005
  • This research studied robust design of composite hand for LTR (LCD glass Transfer Robot). $1^{st}$ DOE (Design of Experiment) was conducted to find out vital few Xs. 108 experiments were performed and their results were statistically analyzed. Pareto chart analysis shows that the geometric parameters (height and width of composite beam) are more important than material parameters $(E_{1},\;E_{2})$ or stacking sequence angle. Also, the stacking sequence of mid-layer is more important than that of outer-layer. The main effect plots shows that the maximum deflection of LTR hand is minimized with increasing height, width of beam and layer thickness. $2^{nd}$ DOE was conducted to obtain RSM (Response Surface Method) equation. 25 experiments were conducted. The CCD (Central Composite Design) technique with four factors was used. The coefficient of determination $(R^{2})$ for the calculated RSM equation was 0.989. Optimum design was conducted using the RSM equation. Multi-island genetic algorithm was used to optimum design. Optimum values for beam height, beam width, layer thickness and beam length were 24.9mm, 186.6mnL 0.15mm and 2402.4mm respectively. An approximate value of 0.77mm in deflection was expected to be a maximum under the optimum conditions. Six sigma robust design was conducted to find out guideline for control range of design parameter. To acquire six sigma level reliability, the standard deviation of design parameter should be con trolled within $2{\%}$ of average design value