• 마이크로전자및패키징학회지
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• 제7권3호
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• pp.27-29
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• 2000

Lift-off를 이용한 DLC-coated Si-tip FEA 제조에 있어서 gate 절연막의 측면에 DLC가 coating되는 것을 방지하기 위해 기판 상에 Al 희생층을 경사-회전 증착한 뒤 DLC를 coating하고, 다음으로 희생층을 식각하여 tip 이외의 DLC를 제거하는 방법을 제안하였다. 이러한 Al희생층을 이용한 lift-off공정에 의해 제조된 DLC-coated Si-tip FEA의 전류전압 특성과 전류 표동 특성을 조사하였으며, gate 누설 전류의 감소와 방출 전류의 안정성을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1340-1342
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• 1998

The diamond-like carbon(DLC) film, as an antireflection layer, is coated on a commerically used Ge window. DLC films are deposited by using an rf(13.56 MHz) plasma CVD. The optimal value of thickness and refractive index of DLC layer has been determined from the computer simulation. IR-transmittances of DLC-coated Ge windows are estimated by measuring FTIR spectra in the wavelength range of$ 2.5{\sim}25{\mu}m$. By coating the DLC film on one side of the Ge window, the transmittance measured at a wavelength of $10{\mu}m$ is about 60 %, while that of the bare Ge is lower than 50 %. Also, a higher transmittance up to about 90 % is obtained by coating the DLC film on both sides of the window. It may be suggested that the further improvement of the IR-transmittance can be achieved by more precisely controlling the thickness and the refractive index of DLC layer and also by adopting various muliti-layer antireflection structures.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1312_1313
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• 2009

In this study the fabrication technique of the planner field emission device structure with a DLC layer were studied. The bottom Mo electrode using electrochemical method on the DLC layer deposited using assist sputtering.

• 한국표면공학회지
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• 제53권6호
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• pp.306-311
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• 2020

In this work, diamond-like carbon (DLC) films are coated onto plasma nitrided AISI 4140 steel by DC-pulsed PECVD. One problem of DLC films is their very poor adhesion on steel substrates. The purpose of the nitriding was to enhance adhesion between the substrate and the DLC films. The white layer formation is avoided. Plasma nitriding increased adhesion from 8 N for DLC coating to 25 N for duplex coating. Duplex plasma nitriding/DLC coating was proven to be more effective in improving the adhesion. The purpose of the bond layer was to enhance adhesion between the substrate and the DLC films.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.76-79
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• 1999

Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

• 한국표면공학회지
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• 제47권1호
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• pp.13-19
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• 2014

The various surface treated conditions of Fe-3.0%Ni-0.7%Cr-1.4%Mn-X steel such as as-received, ion nitriding, DLC coated, DLC coated after nitriding for 3 hrs and 6 hrs were investigated to evaluate the beneficial effect for plastic mold steel. Micro Vickers hardness tester was used to estimate nitriding depth from the hardness profile and to measure hardness on the surface. Elastic modulus and residual stress were measured by a nanoindentator. Scratch test and SP (small ball punch test) were utilized to assess the adhesive strength of DLC coating. The depth of nitriding layer was measured as $50{\mu}m$ for the condition of 3 hrs nitriding and $90{\mu}m$ for that of 6 hrs nitriding. Hardness, elastic modulus, residual stress of DLC coating were 20.37 GPa, 162.78 GPa and -1456 MPa respectively. Residual stress on the surface of DLC coating after nitriding could increase to -3914 MPa by introducing nitriding before DLC coating. During the 'Ball-On-Disc' test ${\gamma}^{\prime}$ particles pulled out from the surface of nitrized layer tend to enhance abrasive wear mode since the fraction of ${\gamma}^{\prime}$ (Fe4N) in ion-nitrized layer is known to increases with nitriding time. Thus the specific wear rate of the nitriding layer increased. Comparing with nitriding the specific wear rate in work piece disc as well as ball decreased prominently in DLC coating due to the remarkable reduction in friction coefficient.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.71-72
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• 2007

In this study, we investigated the fabrication of MLR (multi-layer resist) with a very thin diamond-like carbon (DLC) layer. ArF PR/$SiO_2$/DLC MLR structure was investigated and etching characteristics of the DLC layer was patterned using $SiO_2$ hard-mask by varying the process parameters such as different high-frequency/low-frequency combination ($f_{LF}/f_{HF}$), HF/LF power ratio ($P_{HF}/P_{LF}$), $O_2$ flow and $N_2$ flow rate in $O_2/N_2$/Ar plasmas. The results indicated an increased etch rate of DLC for the higher $f_{LF}/f_{HF}$ combination and for the increased low-frequency power ($P_{LF}$). And the etch rate of DLC was decreased with increasing the $N_2$ flow rate in $O_2/N_2$/Ar plasmas. In order to confirm the application of DLC MLR for the etching process of silicon oxide, the stack of ArF PR/BARC/$SiO_2$/DLC/TEOS/Si was investigated.

• 한국해양공학회지
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• 제25권6호
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• pp.60-65
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• 2011

A low temperature plasma carburizing process was performed on AISI 316L austenitic stainless steel to achieve an enhancement of the surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of the processing temperatures on the surface hardened layer during low temperature plasma carburizing in order to obtain the optimum processing conditions. The expanded austenite (${\gamma}_c$) phase, which contains a high saturation of carbon (S phase), was formed on all of the treated surfaces. Precipitates of chromium carbides were detected in the hardened layer (C-enriched layer) only for the specimen treated at $550^{\circ}C$. The hardened layer thickness of ${\gamma}_c$ increased up to about $65{\mu}m$ with increasing treatment temperature. The surface hardness reached about 900 $HK_{0.05}$, which is about 4 times higher than that of the untreated sample (250 $HK_{0.05}$). A minor loss in corrosion resistance was observed for the specimens treated at temperatures of $300^{\circ}C{\sim}450^{\circ}C$ compared with untreated austenitic stainless steel. In particular, the precipitation of chromium carbides at $550^{\circ}C$ led to a significant decrease in the corrosion resistance. A diamond-like carbon (DLC) film coating was applied to improve the wear and friction properties of the S phase layer. The DLC film showed a low and stable friction coefficient value of about 0.1 compared with that of the carburized surface (about 0.45). The hardness and corrosion resistance of the S phase layer were further improved by the application of such a DLC film.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권8호
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• pp.577-579
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• 1999

DLC film remaining on device surface could be removed by eliminating AI sacrificial layer as a final step of lift-off process in the fabrication of DLC-coated Si-tip FEA. The field emission properties(I-V curves, hysteresis, and current fluctuation etc.) of the processed device were analyzed and the process was employed to 1.76 inch-sized FEA panel fabrication in order to evaluate its FED applicability.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.356-356
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• 2007

Plasma immersion ion beam deposition (PIIBD) technique is a cost-effective process for the deposition of diamond like carbon thin film, the possible solid lubricant on large surface and a complex shape. We used PIIB process for the preparation of DLC thin film on $Al_2O_3$ with deposition conditions of deposition temperature range $200^{\circ}C$, working gas pressure of 1.310-1Pa. DLC thin films were coated by $C_2H_2$ ion beam deposition on $Al_2O_3$ after the ion bombardment of SiH4 as the bonding layer. Energetic bombardment of $C_2H_2$ ions during the DLC deposition to ceramic materials generated mixed layers at the DLC-Si interface which enhanced the interface to be highly bonded. Wear test showed that the low coefficient of friction of around 0.05 with normal load 2.9N and proved the advantage of the low energy ion bombardment in PIIBD process which improved the tribological properties of DLC thin film coated alumina ceramic. Furthermore, PIIBD was recognized as a useful surface modification technique for the deposition of DLC thin film on the irregular shape components, such as molds, and for the improvement of wear and adhesion problems of the DLC thin film, high temperature solid lubricant.