• Korean Journal of Materials Research
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• v.9 no.12
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• pp.1211-1215
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• 1999

Fluorinated amorphous carbon (a-C:F) films were prepared by an electron cyclotron resonance chemical vapor deposition (ECRCVD) system using a gas mixture of $C_2F_6$ and $CH_4$ over a range of deposition temperature (room temperature ~ 300$^{\circ}C$). 500$^{\AA}C$ thick DLC films were pre-deposited on Si substrate to improve the strength between substrate and a-C:F film. The chemical bonding structure, chemical composition, surface roughness and dielectric constant of a-C:F films deposited by varying the deposition temperature were studied with a variety of techniques, such as Fourier transform infrared spectroscopy(FTIR), X-ray photoelectron spectroscopy(XPS), atomic force microscopy (AFM) and capacitance-voltage(C-V) measurement. Both deposition rate and fluorine content decreased linearly with increasing deposition temperature. As the deposition temperature increased from room temperature to 300$^{\circ}C$, the fluorine concentration decreased from 53.9at.% down to 41.0at.%. The dielectric constant increased from 2.45 to 2.71 with increasing the deposition temperature from room temperature to 300$^{\circ}C$. The film shrinkage was reduced with increasing deposition temperature. This results ascribed by the increased crosslinking in the films at the higher deposition temperature.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1319_1321
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• 2009

본 논문은 마이크로웨이브 플라즈마 프로세스에 의하여 사이클로헥산을 이용한 다이아몬드 박막 제작에 관한 산소유량 변화 및 파라메타 변화에 따른 분광분석 결과에 대하여 논하였다. 인가전력을 증가시킴에 따라서 수소원자의 $H_{\alpha}$ 및 $H_{\beta}$의 발광강도는 증가되는 반면에 CH(B-X) 발광강도는 일정하였으며, 헥산 유량을 증가시킴에 따라 CH(B-X) 라디칼의 발광강도가 증가되고, 산소유량을 증가시킴에 따라 CH(B-X) 라디칼이 산소원자와의 결합에 의해 밀도가 감소하여 발광강도가 감소되었다. 그리고, 산소가 공급되지 않은 경우에는 비정질 또는 DLC 성분이 많이 함유된 결정성이 거의 없는 다이아몬드 박막이 성장되었으며, 산소유량을 증가시킴에 따라서 결정 표면에 잔존하는 미결합 탄소성분들이 제거되면서 결정성이 향상됨을 알 수 있었다. 본 연구를 통하여 유기용매인 사이클로헥산을 이용하여 다이아몬드 박막이 성장됨을 확인할 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.302-303
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• 2006

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

• Journal of the Korean Society for Heat Treatment
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• v.34 no.3
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• pp.130-136
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• 2021

With the development of the industry, bearings that require higher durability and efficiency are required, and various methods to reduce friction and wear of bearings are being studied. In this study, a wear test was conducted for STB2, a bearing steel material, by machining a micro-line pattern on the race surface of the bearing by machining. The pattern pitch of the specimens was processed to 40㎛, 80㎛, and 150㎛, and the coefficient of friction characteristics were investigated for the unpatterned specimen and the specimen with a DLC thin film deposited on the surface. As a result of the wear test, the pattern pitch showed the smallest coefficient of friction at 40㎛, and it was confirmed that the smaller the pattern pitch, the better the tribology characteristics.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.91-91
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• 2017

트라이볼로지란? 상대운동을 하면서 서로 영향을 미치는 두면 및 이와 관련된 문제로 마찰, 마모, 윤활에 대한 것을 말한다. 트라이볼로지는 1960대에 조사 연구되기 시작하면서 학문적으로 많은 정리가 이루어졌고, 현재 현대사회에서 문제가 되고 있는 에너지 및 환경 문제를 해결할 수 있는 핵심 요소로 떠오르고 있다. 특히 4차 산업혁명시대를 맞이하여 많은 부분에서는 인공지능, 클라우딩, 빅 데이터 및 로봇 등을 이야기하고 이에 대한 투자 및 개발을 이야기하고 있지만, 이 4차 산업을 뒷받침할, 강인한 제조업이 없으면 불가능한 혁명이라고 말 할 수 있다. 특히 트라이볼로지는 제조업의 무인 자동화 및 무인 로봇 등 이를 필요로 하는 산업 기기와 같은 전반적인 부품 및 소재의 마모를 감소시켜, 기계 장치의 신뢰성을 증가시킬 수 있다. 마찰은 두 물체 상호간의 열 발생을 억제 시키고, 마모는 물체의 표면 경도가 높으면 높을수록 마모량이 적어진다고 알려져있다. 따라서 트라이볼로지와 관련한 표면 처리의 경우, 고온 환경에서의 사용성 증대 및 고경도화 그리고 저마찰을 위한 방향으로 개발 발전되어져 왔다. 트라이볼로지 코팅 중 내마모 코팅의 경우, 티타늄 원소를 기본으로 알루미늄(Al) 및 실리콘(Si)를 합금화하면서, 고경도화 및 내열성을 증대시키는 방향으로 발전되어 왔다. 그에 따라 표면경도의 경우, 4000 Hv, 내열성 $1200^{\circ}C$에 도달였다. 하지만 여전히 철계와의 마찰계수는 0.3 이상으로 이를 낮추는 방법이 요구되고 있다. 최근 트라이볼로지 코팅 중 카본을 함유한 비정질 다이아몬드상 카본 막 (Diamond like Carbon Film : DLC) 이나, Diamond 막의 수요 증가는 마찰을 낮추어 융착마모를 줄이려는 노력으로 볼 수 있다. 특히 수소를 포함하지 않는 고경도 탄소막인 ta-C(tetrahedral amorphous-Carbon)의 수요는 증대되고 있으며, 이에 대한 후막화 및 양산화 기술의 개발의 현재 isssu로 대두되고 있다.

• Journal of the Korean Applied Science and Technology
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• v.41 no.1
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• pp.46-57
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• 2024

In this study, the various process conditions for high-power DC Magnetron Sputtering (DCMS) on the surface roughness of carbon thin films were investigated. The optimal conditions for Si/C coating were 40min for deposition time, which does not deviate from normal plasma, to obtain the maximum deposition rate, and the conditions for the best surface roughness were -16volt bias voltage and 400watt DC power with 1.3x10-3torr chamber pressure. Under these optimal conditions, an excellent carbon thin film with a surface roughness of 1.62nm and a thickness of 724nm was obtained. As a result of XPS analysis, it was confirmed that the GLC structure (sp² bonding) was more dominant than the DLC structure (sp³ bonding) in the thin film structure of the carbon composite layer formed by DC sputtering. Except in infrequent cases of relatively plasma instability, the lower bias voltage and applied power induces smaller surface roughness value due to the cooling effect and particle densification. For the optimal conditions for Graphite/C composite layer coating, a roughness of 36.3 nm and a thickness of 711 nm was obtained under the same conditions of the optimal process conditions for Si/C coating. This layer showed a immensely low roughness value compared to the roughness of bare graphite of 242 nm which verifies that carbon coating using DC sputtering is highly effective in modifying the surface of graphite molds for glass forming.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.199-208
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• 1993

The effect of nucleation free energy related to Si surface states on diamond film growth behavior has been studied. Ar first, the three kinds of diamond thin films (A, B, C) were deposited on various Si substrates (A-Si, B-Si, C-Si) whose surfaces were polished with 1 ${\mu}m$ diamond paste, 6 ${\mu}m$ Al_2O_3$ powder and 12 ${\mu}m$ Al_2O_3$ powder respectively. And then, relative nucleation free energy calculated is ${\Delta}G_{A-Si}<{\Delta}G_{B-Si}<{\Delta}G_{C-Si}$. Although there are some difference in grain size, shape and nucleated size, the thin films on A-Si and B-Si were diamond including a small amount of DLC which was confirmed by AES, SEM, XRD, and RHEED. Namely, the diamonds of films (B) were not nucleated in scratches but in dents and larger in grain size compare with the film (C) of which diamond sere nucleated not only scratches but also dents. And, the sphere diamond which is not general shape was grown on C-Si. After all, the sphere was turned out to be the diamond including much graphite as a result of the AES in situ depth profiling. Consequently, the diamond shape and quality grown on Si were Changed from the crystal which the (100) and (110) planes were predominent to the crystal in which (111) plane was predominent, and newt to sphere shape diamond including much graphite according as the nucleation free energy increases.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.189-189
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• 2011

인공관절은 노인성 질환이나 자가 면역질환, 신체적인 외상 등으로 인하여 발생하는 관절의 손상 부위를 대체하기 위해 고안된 관절의 인공 대용물이다. 인공 관절 중 인공 고관절의 경우 관절 운동을 하는 라이너(Liner)와 헤드(Head) 부분이 인공관절의 수명을 결정하게 되는데, 헤드 부분에 메탈소재와 라이너 부분에 고분자 소재를 사용하는 MOP (metal on polymer) 구조의 인공관절은 충격흡수의 장점이 있는 반면 wear debris에 의한 골용해로 인하여 관절이 느슨해지는 문제점이 발생하여 재 시술의 주요 원인이 되고 있다. 또한 메탈 헤드의 마모로 인한 금속이온의 용출은 세포 독성의 문제를 야기하여 인공관절의 수명을 낮추는 또 하나의 요인이 되고 있다. 따라서 인공관절의 수명을 늘리기 위해 DLC, ZrO, TiN 등의 높은 경도 값을 갖는 박막을 금속 헤드 위에 증착하여 상대재인 인공관절용 고분자 소재의 마모량을 줄이고자 하는 연구가 활발하게 진행 되고 있다. 본 연구에서는 PIII&D (Plasma Immersion Ion Implantation & Deposition)공정을 이용하여 Co-Cr-Mo 합금 소재 niobium nitride (NbN) 박막을 증착하여 상대제인 UHMWPE (ultra high molecular polyethylene)의 마모를 줄이고자 하는 연구를 진행하였다. 마모량을 감소시키기 위하여, 박막 증착전에 질소를 이온주입하는 pre-ion implantation 공정을 도입하였으며, 또한 Co-Cr 합금과 NbN박막 사이의 접착력을 증가시키기 위하여 박막의 증착 초기에 이온주입과 증착을 동시에 수행하는 dynamic ion mixing공정을 수행하였다. NbN 박막의 특성을 평가하기 위해 XRD, XPS, AFM 등의 분석을 수행하였으며, 상대재인 초고분자량 폴리에틸렌의 마모량을 측정하기 위해 Pin-on-disk tester를 이용하여 마모 실험을 진행하였다. 마모 실험 결과, pre-ion implantation 공정을 도입한 경우 현재 상용화 되어있는 Co-Cr 합금에 비하여 마모량을 2배 이상 감소시키는 것을 확인 할 수 있었으며, dynamic ion mixing 공정을 도입한 경우 장시간의 마모 시험에 대한 마모 특성이 향상 되는 것을 확인 할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.144.2-144.2
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• 2016

Diamond-like carbon (DLC) coatings have been widely applied to the mechanical components, cutting tools due to properties of high hardness and wear resistance. Among them, hydrogenated amorphous carbon (a-C:H) coatings are well-known for their low friction properties, stable production of thin and thick film, they were reported to be easily worn away under high temperature. Non-hydrogenated tetrahedral amorphous carbon (ta-C) is an ideal for industrial applicability due to good thermal stability from high $sp^3$-bonding fraction ranging from 70 to 80 %. However, the large compressive stress of ta-C coating limits to apply thick ta-C coating. In this study, the thick ta-C coating was deposited onto Inconel alloy disk by the FCVA technique. The thickness of the ta-C coating was about $3.5{\mu}m$. The tribological behaviors of ta-C coated disks sliding against $Si_3N_4$ balls were examined under elevated temperature divided into 23, 100, 200 and $300^{\circ}C$. The range of temperature was setting up until peel off observed. The experimental results showed that the friction coefficient was decreased from 0.14 to 0.05 with increasing temperature up to $200^{\circ}C$. At $300^{\circ}C$, the friction coefficient was dramatically increased over 5,000 cycles and then delaminated. These phenomenon was summarized two kinds of reasons: (1) Thermal degradation and (2) graphitization of ta-C coating. At first, the reason of thermal degradation was demonstrated by wear rate calculation. The wear rate of ta-C coatings showed an increasing trend with elevated temperature. For investigation of relationship between hardness and graphitization, thick ta-C coatings(2, 3 and $5{\mu}m$) were additionally deposited. As the thickness of ta-C coating was increased, hardness decreased from 58 to 49 GPa, which means that graphitization was accelerated. Therefore, now we are trying to increase $sp^3$ fraction of ta-C coating and control the coating parameters for thermal stability of thick ta-C at high temperatures.