• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.390-390
• /
• 2012

Information technology industries has grown rapidly and demanded alternative memories for the next generation. The most popular random access memory, dynamic random-access memory (DRAM), has many advantages as a memory, but it could not meet the demands from the current of developed industries. One of highlighted alternative memories is magnetic random-access memory (MRAM). It has many advantages like low power consumption, huge storage, high operating speed, and non-volatile properties. MRAM consists of magnetic-tunnel-junction (MTJ) stack which is a key part of it and has various magnetic thin films like CoFeB, FePt, IrMn, and so on. Each magnetic thin film is difficult to be etched without any damages and react with chemical species in plasma. For improving the etching process, a high density plasma etching process was employed. Moreover, the previous etching gases were highly corrosive and dangerous. Therefore, the safety etching gases are needed to be developed. In this research, the etch characteristics of CoFeB magnetic thin films were studied by using an inductively coupled plasma reactive ion etching in $CH_4/O_2/Ar$ gas mixes. TiN thin films were used as a hardmask on CoFeB thin films. The concentrations of $O_2$ in $CH_4/O_2/Ar$ gas mix were varied, and then, the rf coil power, gas pressure, and dc-bias voltage. The etch rates and the selectivity were obtained by a surface profiler and the etch profiles were observed by a field emission scanning electron microscopy. X-ray photoelectron spectroscopy was employed to reveal the etch mechanism.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2018년도 춘계학술대회 논문집
• /
• pp.125-125
• /
• 2018

반도체 소자의 미새화에 따라 선폭이 10nm 이하로 줄어듦에 따라, 금속 배선의 저항이 급격하게 상승하고 있다. Cu는 낮은 저항과 높은 전도도를 가지고 있어 현재 배선물질로써 가장 많이 사용되고 있지만, 소자가 미세화됨에 따라 Cu를 미래의 배선물질로써 계속 사용하기에는 몇 가지 문제점이 제기되고 있다. Cu는 electron mean free path (EMFP)가 39 nm로 긴 특성을 가지기 때문에, 선폭이 줄어듦에 따라 surface 및 grain boundary scattering이 증가하여 저항이 급격하게 증가한다. 또한, technology node에 따른 소자의 operating temperature와 current density의 증가로 인해 Cu의 reliability가 감소하게 된다. 텅스텐은 EMFP가 19 nm로 짧은 특성을 가지고 있어, 소자의 크기가 줄어듦에 따라 Cu보다 낮은 저항 특성을 가질 수 있으며, 녹는점이 3695K로 1357K인 Cu보다 높으므로 배선물질로써 Cu를 대체할 가능성이 있다. 본 연구에서는 Inductively Coupled Plasma (ICP) assisted magnetron sputtering을 통해 매우 얇은 텅스텐 박막을 증착하여 저항을 낮추고자 하였다. 고밀도 플라즈마의 방전을 위해, internal-type coil antenna를 사용하였으며 텅스텐 박막의 증착을 위해 DC sputter system이 사용되었다. 높은 에너지를 가진 텅스텐 이온을 이용하여 낮은 온도에서 고품위 박막을 증착할 수 있었으며, dense한 구조의 박막 성장이 가능하였다. ICP assisted를 이용하여 증착했을 때와, 그렇지 않을 때를 비교하여 ICP 조건에 따라서 박막의 저항이 감소함을 확인할 수 있었을 뿐만 아니라 최대 약 65% 감소함을 확인할 수 있었다. XRD를 이용하여 ICP power를 인가했을 때, 높은 저항을 갖는 A-15 구조를 가진 ${\beta}$ peak의 감소와 낮은 저항을 갖는 BCC 구조를 가진 ${\alpha}$ peak의 증가를 상온과 673K에서 증착한 박막 모두에서 확인하였으며, 이를 통해 ICP power가 저항 감소에 영향을 미친다는 것을 확인하였다. 또한, 두 온도 조건에서 grain size를 계산하여 ICP power를 인가함에 따라 두 조건 모두 grain size가 증가하였음을 조사하였다. 또한, XPS 분석을 통해 ICP power를 인가하였을 때 박막의 저항에 많은 영향을 끼치는 O peak이 감소하는 것을 통해 ICP assisted의 효과를 확인하였다. 이를 통해, ICP assisted magnetron sputtering을 통해 텅스텐 박막을 증착함으로써 차세대 배선물질로써 텅스텐의 가능성을 확인할 수 있었다.

• Journal of Biosystems Engineering
• /
• 제39권1호
• /
• pp.21-33
• /
• 2014

Background: Significant technological development and changes happened in the tractor industries. Contrariwise, the test procedures of the major standard development organizations (SDO's) remained unchanged or with a little modification over the years, demanding new tractor test standards or improvement of existing ones for tractor performance, safety, and comfort. Purpose: This study focuses on reviewing the research trends regarding performance, safety and comfort evaluation of agricultural tractors. Based on this review, few recommendations were proposed to revise or improve the current test standards. Review: Tractor power take-off power test using the DC electric dynamometer reduced human error in the testing process and increased the accuracy of the test results. GPS signals were used to determine acceleration and converted into torque. High capacity double extended octagonal ring dynamometer has been designed to measure drawbar forces. Numerical optimization methodology has been used to design three-point hitch. Numerous technologies, driving strategies, and transmission characteristics are being considered for reducing emissions of gaseous and particulate pollutants. Engine emission control technology standards need to be revised to meet the exhaust regulations for agricultural tractors. Finite Element Analysis (FEA) program has been used to design Roll-Over Protective Structures (ROPS). Program and methodology has been presented for testing tractor brake systems. Whole-body vibration emission levels have been found to be very dependent upon the nature of field operation performed, and the test track techniques required development/adaptation to improve their suitability during standardized assessment. Emphasizes should be given to improve visibility and thermal environment inside the cab for tractor operator. Tractors need to be evaluated under electromagnetic compatibility test conditions due to large growing of electronic devices. Research trends reviewed in this paper can be considered for possible revision or improvement of tractor performance, safety, and comfort test standards.

• 구강회복응용과학지
• /
• 제22권1호
• /
• pp.101-110
• /
• 2006

This study was performed to investigate the surface properties and in vitro biocompatibility of electrochemically oxidized Ti-6Al-7Nb alloy by anodic spark discharge technique. Discs of Ti-6Al-7Nb alloy of 20 mm in diameter and 2 mm in thickness were polished sequentially from #300 to 1000 SiC paper, ultrasonically washed with acetone and distilled water for 5 min, and dried in an oven at $50^{\circ}C$ for 24 hours. Anodizing was performed using a regulated DC power supply. The applied voltages were given at 240, 280, 320, and 360 V and current density of $30mA/cm^2$. Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. Samples were soaked in the Hanks' solution with pH 7.4 at $36.5^{\circ}C$ during 30 days. The results obtained were summarized as follows; 1. The oxide films were porous with pore size of $1{\sim}5{\mu}m$. The size of micropores increased with increasing the spark forming voltage. 2. The main crystal structure of the anodic oxide film was anatase type as analyzed with thin-film X-ray diffractometery. 3. Needle-like hydroxyapatie (HA) crystals were observed on anodic oxide films after hydrothermal treatment at $300^{\circ}C$ for 2 hours. The precipitation of HA crystals was accelerated with increasing the spark forming voltage. 4. The precipitation of the fine asperity-like HA crystals were observed after being immersed in Hanks' solution at $37^{\circ}C$. The precipitation of HA crystals was accelerated with increasing the spark forming voltage and the time of immersion in Hanks' solution. 5. The Ca/P ration of the precipitated HA layer was equivalent to that of HA crystal as increasing the spark forming voltage and the time of immersion in Hanks' solution.

• 대한화학회지
• /
• 제33권5호
• /
• pp.496-503
• /
• 1989

란탄나이드 3가 (Pr(III)와 Yb(III))와 2,2,6,6-tetramethyl-3,5-heptanedione(dipivaloylmethane) 착물들의 전기화학적 거동을 DC와 DP 그리고 CV 방법으로 조사하였다. 란탄나이드 3가 착물들 중 Pr(III)의 환원은 Ag-AgCl 전극으로 Epc = -0.13 V와 -0.80 V 그리고 Yb(III)는 -0.02 Ⅴ로 1전자이동에 의한 것임을 알았고, 1차 화학평형반응이 가역과 비가역으로 진행되는 ErCr전극과정임을 DP와 CV로부터 알았다. 평형상수 lnK는 여러 용매들로부터 얻었고, 이들 상수는 용매의 유전상수가 감소함에 따라 증가됨을 알았다. 이들 반응에서 lnK는 여러 용매에 대한 ln(1/D)을 도시하면 좋은 직선관계에 있었고, 이 때 란탄나이드의 거동은 원자번호가 증가함에 따라서 lnK가 감소하였다.

• International Journal of Advanced Culture Technology
• /
• 제3권1호
• /
• pp.120-128
• /
• 2015

In this paper, Residential roof top photovoltaic system with 9.9 kW design is proposed. The system composed of 200 Watts solar array 33 panels connecting in series 10 strings and parallels 3 strings which have maximum voltage and current are 350 V and 23.8 A. The 10 kW sinusoidal grid-connected inverter with window voltage about 270-350 is selected to convert and transfer DC Power to AC Power at PCC (Point of Common Coupling) of power system following to utility standard. However the impact of fluctuation and uncertainty of weather condition of PV may decrease the voltage stability and voltage collapse of power system. In order to solve this problem the energy storage such 120 V 1200 Ah battery bank and 30 kVAR capacitor are designed for voltage stability control. The other expensed for installing the system such battery charger, cable, accessories and maintenance cost are concerned. The economic analysis by using investment from money loan with interest about 7% and use own money which loss income of deposit about 3% are calculated as 671,844 and 547,044 for PV system with energy storage and non energy storage respectively. The solar energy from PV is about 101,616 Bath per year which evaluated by using the value of $5kWh/m^2/day$ from average peak sun hour (PSH) of the Thailand and 6.96 Bath/kWh of Feed in Tariff Incentive. The payback periods of four scenarios are proposed follow as i) PV system with energy storage and use loan money is 15 years ii) PV system with no energy storage and use loan money is 10 years iii) PV system with energy storage and use deposit money is 9 years iv) PV system with energy storage and use deposit money is 7 years. In addition, the other scenarios of economic analysis such no FIT support and other type of economic analysis such NPV and IRR are proposed in this paper.

• 한국세라믹학회지
• /
• 제43권5호
• /
• pp.299-303
• /
• 2006

In this paper, anode supported SOFC with columnar structured YSZ electrolyte was fabricated via Electron Beam Physical Vapor Deposition (EBPVD) method. Liquid condensation process was employed for the preparation of NiO-YSZ substrate and the high power electron beam deposition method was used for the deposition of YSZ electrolyte film. Double layered cathode with LSM-YSZ and LSM was printed on electrolyte via screen-printing method and fired at $1150^{\circ}C$ in air atmosphere for 3 h. The electrochemical performance and the long-term stability of $5{\times}5cm^2$ single cell were investigated with DC current-voltage characteristics and AC-impedance spectroscopy. According to the investigation, $5{\times}5cm^2$ sized unit cell showed the maximum power density of around $0.76W/cm^2$ at $800^{\circ}C$ and maintained the stable performance over 400 h.

• 산업경영시스템학회지
• /
• 제41권1호
• /
• pp.94-101
• /
• 2018

With the development of industrial technology and science, production and manufacturing facilities have been enhanced and improved, and the importance of the safety of workers has also been regulated and limited by various safety management methods. As a way to secure the safety of the workers from the production facility, the fail-safe and fool-proof methods are now being applied. Any possible insecure behavior and unsafe conditions can be removed by adopting the standards and specifications that are now secure the safety of workers and equipment. This research analyzes EN ISO 13849-1 international and European standards during CE certification. In order to secure acceptable reduced risks, the risk assessment process of ISO 12100 and the processes for reducing its risk are applied. In the current ISO 13849-1 standard, the criteria for the required performance level PLr (Required Performance Level) for the applicable risk and safety functions through the risk assessment are subjective and not subdivided. Therefore, the evaluation criteria are likely to cause judge's judgement error due to qualitative judgement. This research focuses on evaluation and acceptable performance level setting for the safety circuit of the equipment. We propose an objective and specific evaluation criteria to secure safety, and the proposed evaluation criteria are applied to the case study of the safety circuit for the equipment. In order to secure the safety of the entire safety circuit, the improvement of the MTTFd and DC level related to the SRP/CS (Safety-Related Parts of Control Systems)' lifetime is required for the future research.

• 한국태양에너지학회 논문집
• /
• 제32권4호
• /
• pp.43-50
• /
• 2012

Metal-metal oxide (M-M oxide) cermet solar selective coatings with a double cermet layer film structure were deposited on the Al-deposited glass substrate by using a directed current (DC) magnetron sputtering technology. M oxide (CrO and ZrO) was used as the ceramic component in the cermets, and Cr and Zr used as the metallic components. In addition, black Cr (Cr-$Cr_2O_3$ cermet) solar selective coatings were deposited on the Ni-plated Cu substrate by using a electroplating method for comparison. The thermal stability tests were carried out for performance evaluation of solar coatings. Reflectance measurements were used to evaluate both solar absorptance(${\alpha}$) and thermal emittance (${\epsilon}$) of the solar coatings before and after thermal testing by using a spectrometer. Optical properties of optimized cermet solar coatings were ${\alpha}{\simeq}0.94-0.96$ and ${\epsilon}{\simeq}0.1$ ($100^{\circ}C$). The results of thermal stability test of M-M oxide solar coatings showed that the Cr-CrO cermet solar selective coatings were more stable than the Zr-ZrO cermet selective coatings at temperature of both $400^{\circ}C$ in air and $450^{\circ}C$ in vacuum. The black Cr solar selective coatings were degraded in air at temperature of $400^{\circ}C$. The main optical degradation modes of these coatings were diffusion of metal atoms, and oxidation.

• 동력기계공학회지
• /
• 제22권1호
• /
• pp.41-47
• /
• 2018

This paper analyzes the output characteristics of a self excited induction generator with isolated mode according to change of its speeds and loads for building a hybrid electric propulsion system in special purpose ships by using power take off. The induction generators are being considered as an alternative choice to the well-developed generators because of their lower unit cost, inherent ruggedness, operational and maintenance simplicity. However, the generator working by stand alone has a few problems that the reactive power is required to establish the air gap magnetic flux, and the induced voltage and magnetizing current fluctuate when the load is varied. In spite of its advantages, basic design data of the capacitor bank and behaviors of the output characteristics of the generator are not sufficient for the system. Based on the operating condition(speed range of main engine) of the target boat, a reduced experimental equipment system was constructed to analyze the output characteristics of the SEIG. And a suitable capacitor bank of a stand-alone generator and its output characteristics under various loads was investigated in detail through these experiments. According to the experimental result, it was confirmed that the capacitor bank should be $70{\mu}F{\sim}100{\mu}F$, and the proper SEIG induced voltage should be DC 80 V ~ 250 V in order to storage electrical energy into a battery.