n-ZnO의 Ti/Au, Al/Au, Ag/Au 금속 전극의 오믹 특성

• Kim, Jun-Ho;Mun, Jin-Yeong;Lee, Ho-Seong;Gong, Bo-Hyeon;Jo, Hyeong-Gyun;Kim, Hong-Seung
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2007.11a
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  • pp.67.1-67.1
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  • 2007
• PDF

DC magnetron sputtering을 이용하여 산소분압별로 증착된 InZnO 기반의 박막 트랜지스터의 특성

• Lee, Si;Mun, Yeon-Geon;Mun, Dae-Yong;Kim, Ung-Seon;Gang, Byeong-U;Park, Jong-Wan
• • Proceedings of the Korean Vacuum Society Conference
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  • 2009.02a
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  • pp.244.1-244.1
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  • 2009
• PDF

Electrical properties of ITO films on plastic substrate deposited by RF superimposed DC magnetron sputtering method

• Kim Do-Geun;Park Mi-Rang;Jeong Yu-Jeong;Lee Seong-Hun;Lee Geon-Hwan
• • Proceedings of the Korean Vacuum Society Conference
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  • 2006.02a
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  • pp.136-136
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  • 2006
• PDF

Electrical properties of AlN thin film deposited by asymmetric bipolar pulsed dc reactive sputtering (비대칭 펄스 직류 반응성 스퍼터링으로 증착된 AlN 박막의 전기적 특성)

• Kim, Ju-Hyeong;Lee, Si-Hyeong;Lee, Jeon-Guk;An, Jin-Ho
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.52.1-52
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  • 2000
• PDF

$CrB_2$ coatings deposited by inductively coupled plasma - assisted DC magnetron sputtering (유도결합 플라즈마(ICP) 스퍼터링법을 이용한 $CrB_2$ 박막의 제조)

• Choe, Hyo-Seok;Lee, Gi-Rak;Park, Bo-Hwan;Kim, Hun;Lee, Jeong-Jung
• • Proceedings of the Korean Institute of Surface Engineering Conference
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  • 2005.11a
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  • pp.116-116
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  • 2005
• PDF

Pulsed-DC Magnetron Sputtering Source에서 Pulse Duty, 자기장의 세기, Target 물질의 종류에 따른 단위 파워당 증착률 특성

• An, Sang-Hyeok;In, Jeong-Hwan;Jang, Hong-Yeong;Han, Jeon-Geon
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.02a
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  • pp.200-200
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  • 2008
• PDF

Low field magnetoresistance of polycrystalline La-Sr-$MnO_3$ thin films prepared by the post annealing of amorphous films deposited by DC-magnetron sputtering

• Kang, Young-Min;Ulyanov, A.N.;Yoo, Sang-Im
• • Proceedings of the Korean Magnestics Society Conference
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  • 2007.12a
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  • pp.22-22
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  • 2007
• PDF

Electrical and Optical Properties of InZnO Films Prepared by DC/RF Sputtering (직류 및 고주파 스퍼터링 방법으로 제조한 InZnO 박막의 전기적, 광학적 특성)

• 노경헌;남윤성;최문구;정창오;정규하;박장우;박승한;주홍렬
• • Proceedings of the Optical Society of Korea Conference
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  • 2001.08a
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  • pp.42-43
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  • 2001
• PDF

A Study on CF IZO Application

• Park, Jae-Ik;Kim, Dong-Hwan;Kim, Seung-Yul;Kim, Tae-Gon;Park, Jun-Yong
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.276-276
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  • 2008
• PDF

DC magnetron sputtering에 의해 제조된 $SnO_2:Sb$ 투명전도막의 특성

• Lee, Seong-Uk;Choe, Won-Seok;Park, Mi-Ju;Kim, Hyeong-Jin;Hong, Byeong-Yu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.08a
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  • pp.293-293
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  • 2007
• PDF

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