• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2003년도 가을 학술논문집
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• pp.78-82
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• 2003

국내 원전에서 증기발생기 세정 후 발생되는 Fe-EDTA 함유 폐액 처리를 위한 초임계수 산화공정 (Supercritical Water Oxidation Process), 광촉매 산화 공정 (Photocatalyst Oxidation Process) 및 DBD 상온 플라즈마 공정 (Dielectric Barrier Discharge Atmospheric Pressure Plasma Process)이 평가되었다. 초임계수 산화 공정에 의해 99.98 %이상의 EDTA 전환율을 나타내어 EDTA 처리를 위한 효과적인 반응공정임을 확인하였으나 공정의 안정성, 부식 방지대책 등이 마련되어야 할 것으로 판단된다. 광촉매산화공정으로는 10 % 정도의 낮은 EDTA전환율을 보여 세정폐액 처리 공정으로는 부적합한 것으로 나타났다. DBD를 이용한 Methylene Blue 분해 결과 저 에너지 소비율로 높은 유기물 분해 효율을 얻을 수 있었으나 실 EDTA 공정에의 적용 및 공정 규모 확장 등에 대한 향후 연구 평가가 필요한 것으로 사료된다.

• 한국대기환경학회지
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• 제19권2호
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• pp.157-165
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• 2003

A combined process of non-thermal plasma and catalytic technique has been investigated to treat $CH_3$CN gas in the atmosphere. A planar type dielectric barrier discharge (DBD) reactor has been used to generate the non-thermal plasma that produces various chemically active species, such as O, N, OH, $O_3$, ion, electrons, etc. Several different types of the beads. which are Molecular Sieve (MS) 5A, MS 13X, Pt/alumina beads, are packed into the DBD reactor, and have been tested to characterize the effects of adsorption and catalytic process on treating the $CH_3$CN gas in the DBD reactor. The test results showed that the operating power consumption and the amounts of the by-products of the non-thermal plasma process can be reduced by the assistance of the adsorption and catalytic process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.15-16
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• 2008

We have grown N-doped ZnO thin films on sapphire substrate by employing dielectric barrier discharge in pulsed laser deposition (DBD-PLD). DBD guarantees an effective way for massive in-situ generation of N-plasma under the conventional PLD process condition. Low-temperature photoluminescence spectra of the N-doped ZnO film provided near band-edge emission after thermal annealing process. The emission peak was resolved by Gaussian fitting and showed a dominant acceptor-bound exciton peak ($A^0X$) that indicated the successful p-type doping of ZnO with N.

• 한국환경과학회지
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• 제15권5호
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• pp.479-484
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• 2006

Removal of elemental mercury $(Hg^0)$ with the reactive species produced from dielectric barrier discharge (DBD) was studied. We investigated the effect of operating parameters such as the applied voltage, residence time, initial concentration and co-existence of other pollutants. The removal of $(Hg^0)$ was significantly promoted by an increase in the applied voltage of the DBD reactor system. It is important to note that at the same input power, the removal efficiency of $(Hg^0)$ was much higher than that of NO gas. These results imply that if the DBD system is used as a NOx treatment facility, it is capable of removing $(Hg^0)$ simultaneously with NOx.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.183-189
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• 2007

대표적인 수은 발생원인 도시폐기물 소각로와 화력 발전소 등지에서 배출되는 원소수은($Hg^0$)은 산화수은($Hg^{2+}$) 및 입자상 수은($Hg^p$)과 달리 기존의 대기오염 방지시설로 제거하기 난해한 편이다. 그로 인해 원소수은의 효율적 제거에 대한 많은 연구가 진행중이며, 이 연구에서는 저온 플라즈마(non-thermal plasma)의 하나인 유전체 장벽 방전(dielectric barrier discharge: DBD) 공정을 이용하여 원소수은 산화에 관한 실험을 수행하였다. 실험 결과, 공기 상의 DBD 공정에서는 생성되는 산소 원자와 오존에 의해서 원소수은이 산화수은으로 전환됨을 알 수 있었으며, 원소수은의 산화율을 결정하는 주된 변수는 반응기에 주입되는 에너지 밀도임을 확인할 수 있었다.

• 반도체디스플레이기술학회지
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• 제17권2호
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• pp.16-19
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• 2018

The development speed of semiconductor and display device manufacturing technology is growing faster than the development speed of process equipment. So, there is a growing need for process diagnostic technology that can measure process conditions in real time and directly. In this study, a plasma diagnosis was carried out using impedance variation due to the plasma discharge. Variation of the measurement impedance appears as a voltage change at the reference impedance, and the plasma density is calculated using this. The above experiment was conducted by integrating the plasma diagnosis system and the linear atmospheric pressure DBD plasma source. It was confirmed that plasma density varies depending on various parameters (gas flow rate, $Ar/O_2$ mixture ratio, Input power).

• 한국환경과학회지
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• 제32권3호
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• pp.197-204
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• 2023

This study aims to inactivate Artemia sp. (Zooplankton) in ballast water through the dielectric barrier discharge (DBD) plasma process. The DBD plasma process has the advantage of enabling direct electric discharge in water and utilizing chemically active species generated by the plasma reaction. The experimental conditions for plasma reaction are as follows; high voltage of 9-22 kV, plasma reaction time of 15-600 s, and air flow rate of 0.5-5.5 L/min. The results showed that the optimal experimental conditions for Artemia sp inactivation were 16 kV, 60 s, 2.5 L/min, respectively. The concentrations of total residual oxidants and ozone generated by plasma reaction increased with an increase of in voltage and reaction time, and the concentration of generated air did not increase above a certain amount.

• 한국환경과학회지
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• 제23권9호
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• pp.1627-1634
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• 2014

Odor control technology include absorption, adsorption, incineration and biological treatments. But, most of processes have some problems such as secondary organic acids discharge at the final odor treatment facility. In order to solve the problems for effective treatment of organic acids in odor, it is necessary to develop a new type advanced odor control technology. Some of the technology are plasma only process and plasma hybrid process as key process of the advanced technology. In this study, odor removal performance was compared DBD(Dielectric Barrier Discharge)plasma process with PCHP(plasma catalysis hybrid process) by gaseous ammonia, formaldehyde and acetic acid. Plasma only process by acetic acid obtained higher treatment efficiency above 90%, and PCHP reached its efficiency up to 96%. Acetic acid is relatively easy pollutant to control its concentration other than sulfur and nitrogen odor compounds, because it has tendency to react with water quickly. To test of the performance of DBD plasma process by applied voltage, the tests were conducted to find the dependence of experimental conditions of the applied voltage at 13 kV and 15 kV separately. With an applied voltage at 15 kV, the treatment efficiency was achieved to more higher than 13 kV from 83% to 99% on ammonia, formaldehyde and acetic acid. It seems to the odor treatment efficiency depends on the applied voltage, temperature, humidity and chemical bonding of odors.

• 공업화학
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• 제18권3호
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• pp.213-217
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• 2007

본 연구에서는 유전체장벽방전을 이용하여 휘발성 유기화합물의 일종인 벤젠의 분해 경향과 분해 생성물의 선택성에 대해서 연구하였다. 유전체장벽방전의 공정변수에 따른 벤젠의 분해율과 분해 생성물의 선택성을 높이기 위해서 반응기 내부에 촉매(H-ZSM-5, Na-Y)를 사용하였다. 실험은 대기압에서 수행하였으며, 방전전압, 체류시간, 농도 등의 공정변수에 따른 분해율을 조사하였다. 유전체 장벽방전만을 사용하는 방법과 비교하여 여기에 촉매를 동시에 사용하는 하이브리드 방전이 같은 전압과 체류시간조건에서 보다 효과적인 벤젠의 분해 방법임을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권1호
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• pp.15-21
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• 2002

We investigated effects of electrical, physical, and chemical parameters on energy transfer, NO conversion, and light emission in the dielectric barrier discharge (DBD) process. As gap distance between electrodes increased, discharge onset voltage increased. However, as gap distance between electrodes increased, electric field which initiates discharge showed approximately the same value, 30kV/cm. The discharge onset voltage of the coarse surface electrode was lower than that of the smooth surface electrode. And, energy transfer was slightly enhanced in the coarse electrode condition. However, NO conversion rate decreased with the coarse surface electrode because more uniform discharge can be obtained on the smooth surface electrode. The NO conversion rate increased with decreasing the initial concentration, so the DBD process is more feasible in the lower concentration condition. The variation of gas residence time tested at the same energy density in the experiment did not affect on the NO conversion. The result shows that the NO conversion rate mainly depends on the energy density. The DBD process is able to adjust on plasma-photocatalyst process because it emits the short wavelength light in the range of ultraviolet. The intensity of light emission increased with the increase of the energy transfer to the reactor and the gas flow rate.