• 제목/요약/키워드: Czochralski method

검색결과 146건 처리시간 0.024초

Nd:LSB 마이크로칩 레이저 광소자의 광학 특성 (Optical characteristics of Nd:LSB microchip laser device)

  • 장원권;박종선;김동열;유영문
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.965-967
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    • 2003
  • Czochralski pulling method에 의해 성장된 고농도 도핑 Nd:LSB의 광학적 특성을 조사하였다. 결정 성장조건에 의해 달라지는 space group은 지금까지 C2/c, R32, Cc와 C2등 4가지가 보고되었으며, 기본적으로 6방정계의 구조를 가지고 비선형 광학 결정으로서의 특성을 보였다. x선 회절 분석계를 이용하여 구조를 분석하였고, 도핑 농도에 따른 형광 수명의 변화, 분산곡선 특성을 조사하였다. 또한 흡수 및 저온 형광 스펙트럼을 이용하여 도핑 농도 및 space group의 변화에 따른 에너지 준위의 변화를 관찰하고 비교하였다.

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융액 일방향 응고법에 의한 ${\gamma}$-$6Bi_2O_3$.$GeO_2$ 투명 다결정체의 제조 (Preparation of Transparent ${\gamma}$-$6Bi_2O_3$.$GeO_2$ Polycrystals by Unidirection Solidification of Melt)

  • 김호건;김명섭;류일환
    • 한국세라믹학회지
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    • 제27권4호
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    • pp.567-573
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    • 1990
  • Solidification condition for preparing transparent ${\gamma}$-6Bi2O3.GeO2 polycrystals by unidirectional solidification of melt, were investigaetd and the properties of the polycrystals prepared were measured. The ${\gamma}$-6Bi2O3.GeO2 polycrystals showing transparency like a single crystal were obtained by the unidirectional solidification of ${\gamma}$-6Bi2O3.GeO2 melt at a solidification rate of 0.5mm/h under a thermal gradient of 12$0^{\circ}C$/cm. The transparent polycrystals obtained showed the same photoconduction and optical activity as the ${\gamma}$-6Bi2O3.GeO2 single crystals grown by Czochralski method. But the electro-optic effect of polycrystals was heterogeneous because the colummar ${\gamma}$-6Bi2O3.GeO2 crystals were not oriented to the particular crystallographic direction.

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인상 육성한 $Bi_12GeO_20$ 결정내의 $Bi_4Ge_3O_12$석출상 (Exsolution of $Bi_4Ge_3O_12$ in $Bi_12GeO_20$ Crystals Grown by Pulling Method)

  • 이태근;정수진
    • 한국세라믹학회지
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    • 제28권12호
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    • pp.981-988
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    • 1991
  • Various crystal defects such as voids, inclusions dislocations, stacking faults and precipitates were observed in the Czochralski-grown Bi12GeO20 crystals. Particularly, precipitates were found in the whole crystals. The phase of these precipitates was identified as Bi4Ge3O12 by EPMA and transmission electron microscopy. The precipitates were produced by pulling rapidly from a non-stoichiometric charge. During the pulling of Bi12GeO20 crystals, the melt composition of stoichiometric charge was changed Bi-deficent with gradual volatilization of Bi2O3. Precipition of the second phase may have been affected by an abrube thermal stress. By adding excess Bi2O3 into the stoichiometric batch, the precipitation of Bi4Ge3O12 was suppressed. At a pulling speed of 2 mm/hr, clear and precipitate from crystals of Bi12GeO20 were grown from the melt of the Bi2O3 excess charge.

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$ZnWO_4$ 단결정 성장 ($ZnWO_4$ Single Crystal Growth)

  • 임창성;오권한
    • 한국세라믹학회지
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    • 제23권4호
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    • pp.69-77
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    • 1986
  • Single crystals of zinc tungstates were grown by the Czochralski method. To obtain the seed crystals various methods were employed including 4 points platinum wirse which dipped the melt and the capillary action from the melt led the 3 differently oriented seeds such as [100], [010] and [001] directions. Optimum growing conditions were observed as neck diameter 2mm rotation speed 50-60 rpm maximum diameter 15mm and pulling rate 0-10 mm/hr. Dendrites covered on the olidified surface in a platinum crucible were turned out to be [001] direction because obviously this crystal has the strong [001] preferential growth habit. The (100) and (010) planes of single crystals showed the slip planes and the (010) plane showed the perfect cleavage surface.

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New oxide crystals as substrates for GaN-based blue light emitting devices

  • T. Fukuda;K. Shimamura;H. Tabata;H.Takeda;N. Futagawa;A. Yoshikawa;Vladimir V. Kochurikhin
    • 한국결정성장학회지
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    • 제9권5호
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    • pp.470-474
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    • 1999
  • We have successfully grown <111>-oriented $(La,Sr)(Al,Ta)O_{3}\;(LSAT)$ mixed-perovskite single crystals and <0001>-oriented ${Ca_{8}La_{2}(PO_{4})}_{6}O_2$ (CLPA) single crystals with the apatite structure by the Czochralski method. The compositional and lattice parameter uniformity of the crystals are discussed in relation to the growth conditions. Since LSAT and CLPA single crystals have excellent lattice matching with GaN, they are promising as new substrates for the growth of high quality GaN epitaxial layers.

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RTA를 이용하여 수소 열처리한 실리콘 웨이퍼의 표면 및 근처의 변화 연구 (Investigation into the variation on Si wafer by RTA annealing in $H_2$ gas)

  • 정수천;이보영;유학도
    • 한국결정성장학회지
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    • 제10권1호
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    • pp.42-47
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    • 2000
  • 일반적인 쵸크랄스키(CZ)방법으로 성장된 실리콘 단결정봉(Ingot)을 가공하여 경면 연마한 후 RTA법으로 수소 분위기에서 열처리하여 실리콘 웨이퍼 표면 및 표면 근처의 특성 변화에 대하여 고찰하였다 수소 열처리를 통하여 표면의 COP (결정결함)가 현저히 감소하는 것을 확인하였고 깊이 5um까지의 영역에서도 결정결함의 밀도가 감소하였다. 또한 수소 열처리에 의해 실리콘 웨이퍼 표면이 에칭 및 실리콘의 재배열에 의해 형성되는 테라스(Terrace) 형태도 관찰되었다.

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The removal of saw marks on diamond wire-sawn single crystalline silicon wafers

  • Lee, Kyoung Hee
    • 한국결정성장학회지
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    • 제26권5호
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    • pp.171-174
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    • 2016
  • The diamond wire sawing method to produce silicon wafers for the photovoltaic application is still a new and highly investigated wafering technology. This technology, featured as the higher productivity, lower wear of the wire, and easier recycling of the coolant, is expected to become the mainstream technique for slicing the silicon crystals. However, the saw marks on the wafer surface have to be investigated and improved. This paper discusses the removal of saw marks on diamond wire-sawn single crystalline silicon wafer. With a pretreatment step using tetramethyl ammonium hydroxide ($(CH_3)_4NOH$, TMAH) and conventional texturing process with KOH solution (1 % KOH, 8 % IPA, and DI water), the saw marks on the surface of the diamond wire-sawn silicon wafers can be effectively removed and they are invisible to naked eyes completely.

실리콘 웨이퍼에서 광열 변위법과 소수 반송자 재결합 수명 측정에 의한 기계적 후면 손상 평가 (Evaluation of mechanical backside damage by minority carrier recombination lifetime and photo-acoustic displacement method in silicon wafer)

  • 최치영;조상희
    • 한국결정성장학회지
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    • 제8권1호
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    • pp.117-123
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    • 1998
  • 초크랄스키 실리콘 기판의 뒷면에 형성된 기계적 손상이 미치는 효과에 대하여 고찰하였다. 기계적 손상의 정도는 레이저 여기/극초단파 반사 광전도 감쇠법에 의한 소수반송자 재결합 수명, 광열범위, X-선 단면 측정 및 습식산화/선택적 식각 방법으로 평가하였다. 그 결과, 웨이퍼 뒷면에 가해지는 기계적 손상의 세기가 강할수록 소수반송자 재결합 수명은 짧아지고, 광열 변위의 평균값은 비례적으로 증가하였으며, 손상된 웨이퍼에서 Grade 1의 과잉 광열 변위값을 1로 봤을 때 과잉 광열 변위의 정규화한 상대 정량 비는 Grade 1: Grade 2:Grade 3 = 1:19.6:41이다.

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$YCa_4O(BO_3)_3$ 비선형광학 단결정 성장 및 Second Harmonic Generation 소자 제조에 관한 연구 (Crystal Growth of $YCa_4O(BO_3)_3$ and Preparation of Device for Second Harmonic Generation)

  • 유영문;;장석종;장원권;임기수
    • 한국결정학회지
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    • 제11권1호
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    • pp.16-21
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    • 2000
  • (Yb/sub x/Y/sub 1-x/)Ca₄O(BO₃)₃ single crystals where x=0.3,8,15,20% were grown by Czochralski Method. The crystals grown under the optimum conditions were transparent and colorless with good crystal form. Using polarizing microscope, crystal defects such as parasite crystals and bubbles were detected depending on the composition of melts and pulling rates. The optimum growth parameters for high quality of single crystals were 15∼20 rpm of rotation rate and 2mm/h of pulling rate at the flow rate of 2 l/min of Nitrogen gas. The relationship between crystal axes and optical axes was investigated by optical crystallographic method, polarization technique and single crystal X-ray method. From the spectroscopic measurements, it was confirmed that there were strong absorption bands at 900 and 976.4 nm and strong emission band at 976.4 nm in Yb/sup 3+/ ion doped YCa₄O(BO₃)₃ crystal. For the application of second harmonic generation of 1.064 ㎛ laser, non-linear optical devices with θ=32.32° and Ψ=0°, λ/10 of flatness and the size of 6x8x5.73 mm were fabricated from the grown YCa₄O(BO₃)₃ crystal.

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GROWTH AND CHARACTERIZATION OF $La_3Ga_5SiO_{14}$ SINGLE CRYSTALS BY THE FLOATING ZONE METHOD

  • Yoon, Won-Ki;Auh, Keun-Ho
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.253-269
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    • 1999
  • The development of telecommunication and information technology requires to develop new piezoelectric materials with small size, low impedance, wide pass band width and high thermal stability of frequency. Langasite (La3Ga5SiO14) single crystal has been researched substitute of quartz and LiNbO3 for the applications of SAW filter, BAW filter and resonator. Its single crystal growth has been carried out by Czochralski Method. So, in order to get single crystal with higher quality, in this study, lnagasite (La3Ga5SiO14) single crystal was grown by using Floating Zone (FZ) method and characterized. For the growth of langasite single crystals, the langasite powder was synthesized at 135$0^{\circ}C$ for 5hrs and the feed rod was sintered at 135$0^{\circ}C$ for 5hrs. The growing rate was 1.5mm/h and the rotation speed was 15 rpm for an upper rotation and 13 rpm for a lower rotation. In order to prevent the evaporation of gallium oxide, Ar and O2 gas mixture was flowed. The growth direction was analyzed by Laue back-scattered analysis. The composition of grown crystal was analyzed suing XRD and WDS. The electrical properties of grown crystal at various frequencies and temperature were discussed.

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