• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1998년도 제14회 학술발표회 논문개요집
• /
• pp.120-120
• /
• 1998

Boron nitride (BN) films have attracted a growing interest for a variety of t technological applications due to their excellent characteristics, namely hardness, c chemical inertness, and dielectrical behavior, etc. There are two crystalline phases 1551; of BN that are analogous to phases of carbon. Hexagonal boron nitride (h-BN) has a a layered s$\sigma$ucture which is spz-bonded structure similar to that of graphite, and is t the stable ordered phase at ambient conditions. Cubic boron nitride (c-BN) has a z zinc blende structure with sp3-bonding like as diamond, 따ld is the metastable phase a at ambient conditions. Among of their prototypes, especially 삼Ie c-BN is an i interesting material because it has almost the same hardness and thermal c conductivity as di없nond. C Conventionally, significant progress has been made in the experimental t techniques for synthesizing BN films using various of the physical vapor deposition 밍ld chemical vapor deposition. But, the major disadvantage of c-BN films is that t they are much more difficult to synthesize than h-BN films due to its narrow s stability phase region, high compression stress, and problem of nitrogen source c control. Recent studies of the metalorganic chemical vapor deposition (MOCVD) of I III - V compound have established that a molecular level understanding of the d deposition process is mandatory in controlling the selectivity parameters. This led t to the concept of using a single source organometallic precursor, having the c constituent elements in stoichiometric ratio, for MOCVD growth of 삼Ie required b binary compound. I In this study, therefore, we have been carried out the growth of h-BN thin f films on silicon substrates using a single source precursors. Polycrystalline h-BN t thin films were deposited on silicon in the temperature range of $\alpha$)() - 900 $^{\circ}$C from t the organometallic precursors of Boron-Triethylamine complex, (CZHs)3N:BRJ, and T Tris(dimethylamino)Borane, [CH3}zNhB, by supersonic molecular jet and remote p plasma assisted MOCVD. Hydrogen was used as carrier gas, and additional nitrogen w was supplied by either aDlIDonia through a nozzle, or nitrogen via a remote plasma. T The as-grown films were characterized by Fourier transform infrared spectroscopy, x x-ray pthotoelectron spectroscopy, Auger electron spectroscopy, x-ray diffraction, t transmission electron diffraction, optical transmission, and atomic force microscopy.roscopy.

• 한국전기전자재료학회논문지
• /
• 제33권5호
• /
• pp.373-379
• /
• 2020

In this study, TiN-coated cBN (cubic-structure boron nitride) powders were successfully synthesized by a sol-gel method using titanium (IV) isopropoxide (TTIP) and by controlling the heat treatment conditions. After the sol-gel process, amorphous nano-sized TiO_x was uniformly coated on the surface of cBN powder particles. The obtained TiO_x-coated cBN powders were heated at 1,000~1,300℃ for 1 or 6 h in a flow of 95%N₂-5%H₂ mixed gas. With increasing temperature, the chemical composition of the TiO_x coating layer changed in the order of TiO₂→Ti₆O₁₁→Ti₄O₇→TiN due to reduction of the Ti ions. The TiN coating layer was observable in the samples heated at 1,200℃ and appeared as the main phase in the sample heated at 1,300℃. The resulting thickness of the TiN coating layer of the sample heated at 1,300℃ was approximately 45~50 nm.

• 한국표면공학회지
• /
• 제46권4호
• /
• pp.139-144
• /
• 2013

c-BN(cubic boron nitride) is known to have extremely high hardness next to diamond, as well as very high thermal and chemical stability. The c-BN in the form of film is useful for wear resistant coatings where the application of diamond film is restricted. However, there is less practical application because of difficult control of processing variables for synthesis of c-BN film as well as unclear mechanism on formation of c-BN. Therefore, in the present study, the structural characterization of c-BN thin film were investigated using $B_4C$ target in r.f. magnetron sputtering system as a function of processing variables. c-BN films were coated on Si(100) substrate using $B_4C$ (99.5% purity). The mixture of nitrogen and argon was used for carrier gas. The deposition processing conditions were changed with substrate bias voltage, substrate temperature and base pressure. Fourier transform infrared microscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used to analyze crystal structures and chemical binding energy of the films. In the case of the BN film deposited at room temperature, c-BN was formed in the substrate bias voltage range of -400 V~ -600 V. Less c-BN fraction was observed as deposition temperature increased and more c-BN fraction was observed as base pressure increased.

• 한국표면공학회지
• /
• 제32권3호
• /
• pp.351-355
• /
• 1999

BN films with a high content of cubic phase has been deposited by a variety of techniques. It is well known that c-BN films grow with a unique microstructure consisting of $sp^2$ and $sp^{3-}$ bonded layers. Because of existence of the initially grown $sp^{2-}$ /bonded layer, BN films are not adhesive to the substrates. In this study, post-N$^{+ }$ / implantation was applied to improve the adhesion of the films. A Monte Carlo program TAMIX was used to simulate this modification process. The simulation showed nitrogen concentration profile at $1200\AA$ in depth in case of 50keV -implantation energy. FTIR spectra of the $N^{+}$ implanted specimens demonstrated a strong change of absorption band at 1380 cm$^{ -1 }$The films were also investigated by HRTEM. From these results, it is concluded that the post ion implantation could be an effective technique which improves the adhesion between BN film and substrate.

• 한국정밀공학회지
• /
• 제20권11호
• /
• pp.55-63
• /
• 2003

In this study, an experimental research of grinding characteristics using super-abrasives for surface carburized and heat treated SCM415 materials, which were usually used to make a linear motion guide block and were comparatively hard-to-machine materials, was carried out. In order to conduct a high efficiency and a accuracy grinding of such materials, grinding processes using CBN (Cubic boron nitride) and 38P grinding wheels have been attempted on a surface grinding machine. The grindability according to each grinding conditions was evaluated by means of a grinding force, a surface roughness and a residual stress. The experimental methods and results were presented in this paper. And also, from a proposed truing method the CBN wheels that combined a copper and a break truer gave a full scope to the wheel's performance.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 춘계학술대회 논문집
• /
• pp.1078-1082
• /
• 1997

The use of CBN tool material has been greatil increased because of the superior metal cutting performance for the machining of hardened steels. This paper presents some experimental results on the ball endmilling of hardened steels. Three different hardnesses of STB-11 workpieces were machined using CBN ball endmills, and the machining charteristics including cutting forces, tool wear, and surface roughness of machined surface were compared. It has been found that the CBN ball endmill works better in the machining of harder workpieces. The microscopic examination explains that this unusual phenomenon is cause by the difference of microstructure of each workpieces.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.604-607
• /
• 2003

This study investigates the micro-cutting of cemented carbides using PCD(polycrystalline diamond) and PCBN(polycrystalline cubic boron nitride) cutting tools are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of cemented carbides and the fracture of WC particles at the plastic deformation zone in orthogonal micro-cutting. And also to achieve systematic understanding, the effect of machining parameter on chip formation and machined surface was investigated, including cutting speed. depth of cut and various tool rake angle.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.363-366
• /
• 2003

The hard turning is a turning operation performed in high strength alloy steels (HRC>30) in order to reach surface roughness close to those obtained in grinding. This is possible because of availability of improved tool materials (polycrystalline cubic boron nitride. PCBN), ad more rigid machine tools. According to many previous work of hard turning mechanism, the maximum temperature of cutting can be raised up to 100$0^{\circ}C$. As the heat generation rate is very high, the thermal displacement of tool holder cannot be negligible. Therefore, the aim of this paper is to analyze effects of high heat generation at CBN tool tip to the thermal displacement of a tool holder in hard turning and finally geometric accuracy. The thermal behavior of a CBN tool holder is investigated by numerical simulation and experiment, and the result shows thermal elongation of microns order is possible during hard turning process.

• 한국공작기계학회논문집
• /
• 제16권4호
• /
• pp.119-126
• /
• 2007

Generally, the machinability of materials that have a good mechanical properties is poor. The material having a high strength, high toughness in high temperature and wear resistance, it is difficult to remove a chip from workpiece. STD11 and NAK80 are kinds of these materials and these materials can be used in many industrial fields. But it is limited in use because of high cost and poor machinability. In this experimental study, the cutting of STD11 and NAK80 were used to decide the machinability and the tool shape of CBN ball end mill. From the results, the CBN ball end mill is verified that the estimated cutting edge shape of rake angle 30 degree has consistent effect on the tool wear and cutting force.

• International Journal of Precision Engineering and Manufacturing
• /
• 제3권1호
• /
• pp.76-82
• /
• 2002

This paper presents an experimental study of the effect of cutting tool materials on surface quality when turning hardened steels. Machining tests on a lathe are performed using polycrystalline cubic boron nitride (PCBN) and ceramic tools at various cutting conditions without coolant. From the experiments, it is observed that the radial force is the largest force component regardless the type of tool used. The specific cutting energy for the hard turning is estimated to be considerably smaller than the specific grinding energy. It is also found that cutting force and surface roughness with the PCBN tools are higher and better than those with the ceramic tools under the same cutting condition. It is due that the PCBN tools transfer the generated heat more effectively than the ceramic tools due to their higher thermal conductivity. The optimal cutting conditions for the best surface quality are selected by using an orthogonal array concept.