한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제32권3호
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- Pages.351-355
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
MODIFICATION OF INITIALLY GROWN BN LAYERS BY POST-N$^{+}$ IMPLANTATION
- Byon, E-S. (Korea Institute of Machinery & Materials) ;
- Lee, S-H. (Korea Institute of Machinery & Materials) ;
- Lee, S-R. (Korea Institute of Machinery & Materials) ;
- Lee, K-H. (Korea Institute of Machinery & Materials) ;
- Tian, J. (Harbin Institute of Technology) ;
- Youn, J-H. (Changwon National University) ;
- Sung, C. (Center for Advanced Materials, University of Massachusetts)
- 발행 : 1999.06.01
초록
BN films with a high content of cubic phase has been deposited by a variety of techniques. It is well known that c-BN films grow with a unique microstructure consisting of