• 제목/요약/키워드: CuO-ZnO

검색결과 840건 처리시간 0.033초

RF 마그네트론 스퍼터링에 의한 ZnO박막의 증착 및 구리 도우핑 효과 (Deposition of ZnO Thin Films by RF Magnetron Sputtering and Cu-doping Effects)

  • 이진복;이혜정;서수형;박진석
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권12호
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    • pp.654-664
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    • 2000
  • Thin films of ZnO are deposited by using an RF magnetron sputtering with varying the substrate temperature(RT~39$0^{\circ}C$) and RF power(50~250W). Cu-doped ZnO(denoted by ZnO:Cu) films have also been prepared by co-spputtering of a ZnO target on which some Cu-chips are attached. Different substrate materials, such as Si, $SiO_{2}/Si$, sapphire, DLC/Si, and poly-diamond/Si, are employed to compare the c-axial growth features of deposited ZnO films. Texture coefficient(TC) values for the (002)-preferential growth are estimated from the XRD spectra of deposited films. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values are determined. Effects of Cu-doping conditions, such as relative Cu-chip sputtering areas, $O_{2}/(Ar+O_{2})$ mixing ratios, and reactor pressures, on TC values, electrical resistivities, and relative Cu-compositions of deposited ZnO:Cu films have been systematically investigated. XPS study shows that the relative densities of metallic $Cu(Cu^{0})$ atoms and $CuO(Cu^{2+})$-phases within deposited films may play an important role of determining their electrical resistivities. It should be noted from the experimental results that highly resistive(> $10^{10}{\Omega}cm$ ZnO films with high TC values(> 80%) can be achieved by Cu-doping. SAW devices with ZnO(or Zn):Cu)/IDT/$SiO_{2}$/Si configuration are also fabricated to estimate the effective electric-mechanical coupling coefficient($k_{eff}^{2}$) and the insertion loss. It is observed that the devices using the Cu-doped ZnO films have a higher $k_{eff}^{2}$ and a lower insertion loss, compared with those using the undoped films.

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Characterization of ZnO Nanorods and SnO2-CuO Thin Film for CO Gas Sensing

  • Lim, Jae-Hwan;Ryu, Jee-Youl;Moon, Hyung-Sin;Kim, Sung-Eun;Choi, Woo-Chang
    • Transactions on Electrical and Electronic Materials
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    • 제13권6호
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    • pp.305-309
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    • 2012
  • In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

Fabrication of ZnO and CuO Nanostructures on Cellulose Papers

  • Nagaraju, Goli;Ko, Yeong Hwan;Yu, Jae Su
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.315.1-315.1
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    • 2014
  • The use of cellulose papers has recently attracted much attention in various device applications owing to their natural advantageous properties of earth's abundance, bio-friendly, large-scale production, and flexibility. Conventional metal oxides with novel structures of nanorods, nanospindles, nanowires and nanobelts are being developed for emerging electronic and chemical sensing applications. In this work, both ZnO (n-type) nanorod arrays (NRAs) and CuO (p-type) nanospindles (NSs) were synthesized on cellulose papers and the p-n junction property was investigated using the electrode of indium tin oxide coated polyethylene terephthalate film. To synthesize ZnO and CuO nanostructures on cellulose paper, a simple and facile hydrothermal method was utilized. First, the CuO NSs were synthesized on cellulose paper by a simple soaking process, yielding the well adhered CuO NSs on cellulose paper. After that, the ZnO NRAs were grown on CuO NSs/cellulose paper via a facile hydrothermal route. The as-grown ZnO/CuO NSs on cellulose paper exhibited good crystalline and optical properties. The fabricated p-n junction device showed the I-V characteristics with a rectifying behaviour.

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AZO 기반의 투명 Cu Oxide 광검출기 (AZO-Embedded Transparent Cu Oxide Photodetector)

  • 이경남;박왕희;엄성윤;장준민;임솔마루;윤현찬;현성우;김준동
    • 한국전기전자재료학회논문지
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    • 제30권6호
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    • pp.339-344
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    • 2017
  • An all-transparent photodetector was fabricated by structuring $Cu_2O$/ZnO/AZO/ITO on a glass substrate. The visible-range transmittance was as high as 80%, which ensures clear vision forhuman eyes. High-transparency metal conductive oxides (p-type $Cu_2O$ and n-type ZnO) were appliedto form the transparent p/n junction. The functional AZO layer was adopted to improve the transparent photodetector performance between the ZnO and ITO, improving the photoresponses because of its electrical conductivity. To clarify the AZO functionality, a comparator device was prepared without the AZO layer in the formation of $Cu_2O$/ZnO/ITO/Glass. The $Cu_2O$/ZnO/AZO/ITO device provided a rectifying ratio of 113.46, significantly better than the 9.44 of the $Cu_2O$/ZnO/ITO device. In addition, the $Cu_2O$/ZnO/AZO/ITO device's photoresponses at short wavelengths were better than those of the comparator. The functioning AZO layer provides ahigh-performing transparent Cu oxide photodetector and may suggest a route for the design of efficient photoelectric devices.

Cu 도핑된 ZnO 나노구조의 성장 시간 변화에 따른 구조적 및 광학적 특성

  • 배용진;노영수;양희연;김태환
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.405-405
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    • 2012
  • 에너지 갭의 크기가 큰 ZnO는 큰 여기자 결합과 높은 화학적 안정도를 가지고 있기 때문에 전자소자 및 광소자로 많이 응용되고 있다. ZnO는 광학적 및 전기적 성질의 여러 가지 장점 때문에 메모리, 나노발전기, 트랜지스터, 태양전지, 광탐지기 및 레이저와 같은 여러 분야에 많이 사용되고 있다. Zn와 쉘 구조가 비슷한 Cu 불순물은 우수한 luminescence activator이고 다양한 불순물 레벨을 만들기 때문에 전기적 및 광학적 특성을 변화하는데 좋은 도핑 물질이다. Cu가 도핑된 ZnO 나노구조를 전기화학적 증착법을 이용하여 형성하고, 형성시간의 변화에 따른 구조적 및 광학적 성질에 대한 관찰하였다. ITO 코팅된 유리 기판에 전기화학증착법을 이용하여 Cu 도핑된 ZnO를 성장하였다. Sputtering, pulsed laser vapor deposition, 화학기상증착, atomic layer epitaxy, 전자빔증발법 등으로 Cu 도핑된 ZnO 나노구조를 형성하지만 본 연구에서는 낮은 온도와 간단한 공정으로, 속도가 빠르고 가격이 낮아 경제적인 면에서 효율적인 전기 화학증착법으로 성장하였다. 반복실험을 통하여 Cu의 도핑 농도는 Zn과 Cu의 비율이 97:3이 되도록, ITO 양극과 Pt 음극의 전위차가 -0.75V로 실험조건을 고정하였고, 성장시간을 각각 5분, 10분, 20분으로 변화하였다. 주사전자현미경 사진에서 Cu 도핑된 ZnO는 성장 시간이 증가함에 따라 나노세선 형태에서 나노로드 형태로 변하였다. X-선 회절 측정결과에서 성장시간이 변화함에 따라 피크 위치의 변화를 관찰하였다. 광루미네센스 측정 결과는 Oxygen 공핍의 증가로 보이는 500~600 nm 대의 파장에서 나타난 피크의 위치가 에너지가 큰 쪽으로 증가하였다. 위 결과로부터 성장 시간에 따른 Cu 도핑된 ZnO의 구조적 및 광학적 특성변화를 관찰하였고, 이 연구 결과는 Cu 도핑된 ZnO 나노구조 기반 전자소자 및 광소자에 응용 가능성을 보여주고 있다.

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ZnS:CU를 이용한 후막 전계 발광소자에 관한 연구 (A Study on Powder Electroluminescencent Device using ZnS:Cu)

  • 이종찬;박대희;박용규
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.121-124
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    • 1998
  • Generally the structure of powder electroluminescent devices (PELDs) on ITO-film was makeup of the ZnS:Cu phosphor layer and BaTiO$_3$ insulating layer. The active layer, which consists of a suitably doped ZnS powder mixed in a dielectric, is sandwiched between two electrodes; one of which are ITO film and the other is aluminum. In this paper, three kinds of powder eleotroluminescent devices (PELDs) : WK-A(ITO/BaTiO$_3$/ZnS:Cu/Silver paste). WK-B(ITO/BaTiO$_3$+ZnS:Cu/Silver paste) and WK-C(ITO/BaTiO$_3$/ZnS:Cu/BaTiO$_3$/Silver paste), fabricated by spin coating method, were investigated. To evaluate the luminescence properties of three kinds of PELDs, EL emission spectroscopy, transferred charge density and time response of EL emission intensity under square wave voltage driving were measured.

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Organic-Inorganic Nanohybrid Structure for Flexible Nonvolatile Memory Thin-Film Transistor

  • 윤관혁;;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.118-118
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    • 2011
  • The Nano-Floating Gate Memory(NFGM) devices with ZnO:Cu thin film embedded in Al2O3 and AlOx-SAOL were fabricated and the electrical characteristics were evaluated. To further improve the scaling and to increase the program/erase speed, the high-k dielectric with a large barrier height such as Al2O3 can also act alternatively as a blocking layer for high-speed flash memory device application. The Al2O3 layer and AlOx-SAOL were deposited by MLD system and ZnO:Cu films were deposited by ALD system. The tunneling layer which is consisted of AlOx-SAOL were sequentially deposited at $100^{\circ}C$. The floating gate is consisted of ZnO films, which are doped with copper. The floating gate of ZnO:Cu films was used for charge trap. The same as tunneling layer, floating gate were sequentially deposited at $100^{\circ}C$. By using ALD process, we could control the proportion of Cu doping in charge trap layer and observe the memory characteristic of Cu doping ratio. Also, we could control and observe the memory property which is followed by tunneling layer thickness. The thickness of ZnO:Cu films was measured by Transmission Electron Microscopy. XPS analysis was performed to determine the composition of the ZnO:Cu film deposited by ALD process. A significant threshold voltage shift of fabricated floating gate memory devices was obtained due to the charging effects of ZnO:Cu films and the memory windows was about 13V. The feasibility of ZnO:Cu films deposited between Al2O3 and AlOx-SAOL for NFGM device application was also showed. We applied our ZnO:Cu memory to thin film transistor and evaluate the electrical property. The structure of our memory thin film transistor is consisted of all organic-inorganic hybrid structure. Then, we expect that our film could be applied to high-performance flexible device.----못찾겠음......

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돌입전류 제한용 $Mn_3$$O_4$-NiO-CuO-$Co_3$$O_4$-ZnO계 NTC 써미스터에서 ZnO/$Mn_3$$O_4$비에 따른 전기적 특성 (Electrical Properties as the ratio of ZnO/$Mn_3$$O_4$ of NTC Thermistor with $Mn_3$$O_4$-NiO-CuO-$Co_3$$O_4$-ZnO system for Inrush Current Limited)

  • 윤중락;김지균;권정렬;이현용;이석원
    • 한국전기전자재료학회논문지
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    • 제13권6호
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    • pp.472-477
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    • 2000
  • Oxides of the form Mn$_{4}$/O$_{4}$-CuO-Co$_{3}$/O$_{4}$-NiO-ZnO present properties that make them useful as power NTC thermistor for current limited. Electrical properties of Mn$_{3}$/O$_{4}$-CuO-Co$_{3}$/O$_{4}$-CuO-Co$_{3}$/O$_{4}$-NiO-ZnO power NTC thermistor such as I-V characteristics tim constant activation energy and heat dissipation coefficient measured as a function of temperature and composition. In Mn$_{4}$/O$_{4}$-CuO-Co$_{3}$/O$_{4}$-NiO-ZnO system with the 5wt% addition of Co$_{3}$/O$_{4}$ it can be seen that resistivity and B-constant were increased as the ratio of ZnO/Mn$_{3}$/O$_{4}$ was increased. Heat dissipation constant, I-V characteristics and time constant showed similar behaviour compared with those of conventional thermistors. In particular resistance change ratio ($\Delta$R) the important factor for reliability varied within $\pm$5% indicating the compositions of these products could be available for power thermistor.

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