• Title/Summary/Keyword: Cu-electrode

검색결과 496건 처리시간 0.031초

저온동시소성용 결정화 유리의 필러 사이즈가 열적 특성에 미치는 영향 (Effect of $Al_2O_3$ Particle Size on Thermal Properties of Glass-Ceramics for LTCC Material)

  • 김진호;황성진;이상욱;김형순
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.281-281
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    • 2007
  • Low Temperature Co-fired Ceramic (LTCC) technology has been used in electronic device for various functions. LTCC technology is to fire dielectric ceramic and a conductive electrode such as Ag or Cu thick film below the temperature of $900^{\circ}C$ simultaneously. The glass-ceramic has been widely used for LTCC materials due to its low sintering temperature, high mechanical properties and low dielectric constants. To obtain the high strength, addition of filler, the microstructure should have various crystals and low pores in a composite. In this study, two glass frits were mixed with different alumina size(0.5, 2, 3.7um) and sintered at the range of $850{\sim}950^{\circ}C$. The microstructure, crystal phases, thermal and mechanical properties of the composites were investigated using FE-SEM, XRD, TG-DTA, Dilatomer. When the particle size of $Al_2O_3$ filler increased, the starting temperatures for the densification of the sintered bodies, onset point of crystallization, peak crystallization temperature in the glass-ceramic composites decreased gradually. After sintered at $900^{\circ}C$, the glass frits were crystallized as $CaAl_2Si_2O_8\;and\;CaMgSi_2O_6$. The purpose of our study is to understand the relationship between the $Al_2O_3$ particle size and thermal properties in composites.

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철 및 코발트-철합금석출 양극산화피막의 초기석출부가 자기특성에 미치는 영향 (The Effects of Bottom Extremity on the Magnetic Properties of Iron and Cobalt-Iron Electrodeposited Anodic Oxided Films.)

  • 강희우
    • 한국자기학회지
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    • 제5권6호
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    • pp.921-927
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    • 1995
  • 양극산화피막에 철이온 및 코발트-철혼합이온 등을 전해석출하여 얻어지는 자성막의 입자는, 입자의 크기 Dp에 따라 모양이 크게 달라진다. Dp가 $300\AA$ 이상일때 나무가지모양의 초기석출부가 반드시 생성된다. 이것은 초기석출부의 형상만을 고려할때 자성막의 국부적충진율을 증가시킴으로, 철석출막의 경우와 같이 항자력 Hc 및 수직자 기이방성 Ku의 감소효과를 가져온다. 코발트-철합금 석출막의 경우, 일부조성에서 초기석출부의 형상효과보다는 여기에 석출한 FeC의 결정배향이 더 크게 작용하여, Hc의 감소와 -Ku를 나타내었다. 이러한 초기석출부의 영향이 규명됨에 따라 코발트-철합금 자성막의 제작시 초기석출부의 FeC석출을 억제시키는 방법을 사용, 임의의 조성에서 수직자기이방성을 갖게하는 것이 가능하였다.

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PZT계 압전 세라믹 파이버 어레이 복합체를 이용한 미소 풍력 에너지 하베스터 (Small-Scale Wind Energy Harvester Using PZT Based Piezoelectric Ceramic Fiber Composite Array)

  • 이민선;나용현;박진우;정영훈
    • 한국전기전자재료학회논문지
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    • 제32권5호
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    • pp.418-425
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    • 2019
  • A piezoelectric ceramic fiber composite (PCFC) was successfully fabricated using $0.69Pb(Zr_{0.47}Ti_{0.53})O_3-0.31[Pb(Zn_{0.4}Ni_{0.6})_{1/3}Nb_{2/3}]O_3$ (PZT-PZNN) for use in small-scale wind energy harvesters. The PCFC was formed using an epoxy matrix material and an array of Ag/Pd-coated PZT-PZNN piezo-ceramic fibers sandwiched by Cu interdigitated electrode patterned polyethylene terephthalate film. The energy harvesting performance was evaluated in a custom-made wind tunnel while varying the wind speed and resistive load with two types of flutter wind energy harvesters. One had a five-PCFC array vertically clamped with a supporting acrylic rod while the other used the same structure but with a five-PCFC cantilever array. Stainless steel (thickness: $50{\mu}m$) was attached onto one side of the PCFC to form the PZT-PZNN cantilever. The output power, in general, increased with an increase in the wind speed from 2 m/s to 10 m/s for both energy harvesters. The highest output power of $15.1{\mu}W$ at $14k{\Omega}$ was obtained at a wind speed of 10 m/s for the flutter wind energy harvester with the PZT-PZNN cantilever array. The results presented here reveal the strong potential for wind energy harvester applications to supply sustainable power to various IoT micro-devices.

Gold/Copper Bi-Metallic Catalysts by Carbothermal Method for CO2 Reduction

  • Yoon, Hee-chan;Jung, Woo-bin;Jung, Hee-Tae
    • 한국환경과학회:학술대회논문집
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    • 한국환경과학회 2019년도 정기학술대회 발표논문집
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    • pp.83-83
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    • 2019
  • Increasing the CO2 concentration in the atmosphere induce high temperature and rising sea levels. So the technology that capture and reuse of the CO2 have been recently become popular. Among other methods, CRR(CO22 reduction reaction) is typical method of CO2 reusing. Electrocatalyst can show more higher efficiencies in CRR than photocatalyst because it doesn't use nature source. Nowadays, finding high efficient electrocatalyst by controlling electronic (affected by stoichiometry) and geometric (affected by atomic arrangement) factors are very important issues. Mono-atomic electro-catalyst has limitations on controlling binding energy because each intermediate has own binding energy range. So the Multi-metallic electro-catalyst is important to stabilize intermediate at the same time. Carbon monoxide(CO) which is our target product and important feedstock of useful products. Au is known for the most high CO production metal. With copper, Not only gold/copper has advantages which is they have FCC packing for easily forming solid solution regardless of stoichiometry but also presence of adsorbed CO on Cu promotes the desorption of CO on Au because of strong repulsion. And gold/copper bi-metal catalyst can show high catalytic activity(mass activity) although it has low selectivity relatively Gold. Actually, multi-metallic catalyst structure control method is limited in the solution method which is takes a lot of time. In here, we introduce CTS(carbo thermal shock) method which is using heat to make MMNP in a few seconds for making gold-copper system. This method is very simple and efficient in terms of time(very short reaction time and using carbon substrate as a direct working electrode) and increasing reaction sites(highly dispersed and mixing alloy structures). Last one is easy to control degree of mixing and it can induce 5 or more metals in one alloy system. Gold/copper by CTS can show higher catalytic activity depending on metal ratio which is altered easily by changing simple variables. The ultimate goals are making CO2 test system by CTS which can check the selectivity depending on metal types in a very short time.

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New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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가곡광산 연-아연 광체의 광대역유도분극 반응 특성 (Spectral Induced Polarization Response Charaterization of Pb-Zn Ore Bodies at the Gagok mine)

  • 신승욱;박삼규;신동복
    • 지구물리와물리탐사
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    • 제17권4호
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    • pp.247-252
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    • 2014
  • 가곡광산은 스카른형 광상으로서 섬아연석, 방연석, 황동석, 자류철석 등의 황화광물을 수반한다. 이러한 광물은 전극분극에 의한 IP effect가 크기 때문에 광대역유도분극(spectral induced polarization; SIP)법을 이용하여 효과적으로 탐사할 수 있다. 따라서 이 연구는 황화광물 함량 및 입자의 크기를 지시하는 충전도와 시간상수를 실내 SIP 측정을 통하여 구하고 이로부터 가곡광산 내 두 광체에 대한 광화작용 차이를 비교하는데 목적을 두었다. 이를 위해 남쪽의 월곡광체와 북쪽의 선곡광체를 대상으로 시료를 채취하였다. 시료의 광화작용 특성을 파악하기 위해 휴대용 XRF 측정기를 이용하여 금속의 함량을 측정했고, 실내 암석 SIP 측정시스템을 이용하여 SIP 자료를 획득했다. XRF 측정결과 가곡광산 광체는 철, 아연, 납, 구리 등의 금속을 수반하고 있다. 특히 아연과 철의 함량이 다른 금속과 비교하여 매우 높았고, 이 두 금속은 현미경 관찰을 통하여 섬아연석과 자류철석에 의한 영향으로 판단하였다. SIP 등가회로 분석 결과, 월곡광체가 선곡광체에 비하여 금속의 함량이 더 높았기 때문에 황화광물을 더 많이 수반하는 것으로 판단했고, 이는 SIP에서 충전도의 결과와 잘 부합한다. 반면 선곡광체의 시간상수가 더 컸기 때문에 선곡광체가 월곡광체보다 황화광물 입자 크기가 더 큰 것으로 판단했다.