• 제목/요약/키워드: Cu-Cu Bonding

검색결과 338건 처리시간 0.025초

웨이퍼 범프 도금을 위한 고속용 구리 필러 및 저알파선 주석-은 솔더 도금액 (High Speed Cu Pillar and Low Alpha Sn-Ag Solder Plating Solution for Wafer Bump)

  • 김동현;이성준;노기룡;김건호
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2015년도 춘계학술대회 논문집
    • /
    • pp.31-31
    • /
    • 2015
  • 본 연구는, TAB(Tape Automated Bonding)접속이나 Flip Chip 접속에 의한 패캐징을 실현시키기 위해, 실리콘 웨이퍼 표면에 구리 필러 및 주석 합금을 전기 도금법으로 형성하는 전기 접점용 범프에 관한 것이다. 본 연구에서는, 균일 범프 두께, 범프 표면의 균일화, 범프 내의 보이드 발생 문제 해결, 균일한 합금 조성 및 도금 속도의 고속화를 위해, Cu 도금액 및 Sn-Ag 도금액의 첨가제에 의한 표면 형상의 제어를 중심으로 그 성능에 대해 보고한다.

  • PDF

DEVELOPMENT OF TITANIUM-BASED BRAZING FILLER METALS WITH LOW-MELTING-POING

  • Onzawa, Tadao;Tiyama, Takashi
    • 대한용접접합학회:학술대회논문집
    • /
    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
    • /
    • pp.539-544
    • /
    • 2002
  • Titanium and titanium alloy are excellent in corrosion resistance and specific intensity, and also in the biocompatibility. On the other hand, the brazing is bonding method of which productivity and reliability are high, when the complicated and precise structure of the thin plate is constructed. However, though conventional titanium-based brazing filler metal was excellent in bond strength and corrosion resistance, it was disadvantageous that metal structure and mechanical property of the base metal deteriorated, since the brazing temperature (about 1000 C) is considerably high. Authors developed new brazing filler metal which added Zr to Ti-Cu (-Ni) alloy which can be brazed at 900 C or less about 15 years ago. In this paper, the development of more low-melting-point brazing filler metal was tried by the addition of the fourth elements such as Ni, Co, Cr for the Ti-Zr-Cu alloy. As a method for finding the low-melting-point composition, eutectic composition exploration method was used in order to reduce the experiment point. As the result, several kinds of new brazing filler metal such as 37.5Ti-37.5-Zr-25Cu alloy (melting point 825 C) and 30Ti-43Zr-25Cu-2Cr alloy (melting point: 825 C) was developed. Then, the brazing joint showed the characteristics which were almost equal to the base metal from the result of obtaining metallic structure and strength of joint of brazing joint. However, the brazing filler metal composition of the melting point of 820 C or less could not be found. Consequentially, it was clarified that the brazing filler metal developed in this study could be practically sufficiently used from results such as metal structure of brazing joint and tensile test of the joint.

  • PDF

Chemisorption of CO on ultrathin epitaxial Ni films n Cu(001) surface

  • E.K. Hwang;J.J. Oh;Lee, J.S.;Kim, S.K.;Kim, J.S.;Kim, J.S.
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
    • /
    • pp.182-182
    • /
    • 1999
  • The chemisorption effect of CO on the Ni/Cu(001) surface was investigated using LEED(Low Energy Electron Diffraction) and EELS(Electron Energy Loss Spectrscopy0 under the UHV conditions. after mounting the Cu(001) single crystal in the UHV chamber (base pressure 1$\times$10-10Torr), a clean surface was obtained after a few cycles of repeated Ar+ ion sputtering and annealing at about 40$0^{\circ}C$. The epitaxial thin Ni films were formed on the Cu(001) by evaporation from 99.999% Ni block. The pseudomorphic growth and the orderness of the thin Ni films were monitored by c(2$^{\circ}C$2) LEED pattern. CO adlayers on Ni epitaxial thin films were prepared by dosing pure CO has through a leak valve. After CO adsorpton at room temperature, two pairs of peaks were observed by EELS, whose relative intensities are changed as the film thickness is varied and time is elapsed. These two pair of peaks are likely related to different bonding sites (-top and bridge sites) of C-Ni as well as C-O vibration. Experimental results and qualitative interpretation of the spectra wille be discussed. The possibility of using EELS in combination with probe species (CO) to investigate the nature of thin film growth is mentioned. We will report the experimental result of O2 dosage on Ni film and interaction of CO and O2.

  • PDF

Development of Titanium-based Brazing Filler Metals with Low-melting-point

  • Onzawa, T.;Iiyama, T.
    • International Journal of Korean Welding Society
    • /
    • 제2권2호
    • /
    • pp.14-18
    • /
    • 2002
  • Titanium and titanium alloy are excellent in corrosion resistance and specific intensity, and also in the biocompatibility. On the other hand, the brazing is bonding method of which productivity and reliability are high, when the complicated and precise structure of the thin plate is constructed. However, though conventional titanium-based brazing filler metal was excellent in bond strength and corrosion resistance, it was disadvantageous that metal structure and mechanical property of the base metal deteriorated, since the brazing temperature ( about $1000^{\circ}C$ ) is considerably high. Authors developed new brazing filler metal which added Zr to Ti-Cu (-Ni) alloy which can be brazed at $900^{\circ}C$ or less about 15 years ago. In this paper, the development of more low-melting-point brazing filler metal was tried by the addition of the fourth elements such as Ni, Co, Cr for the Ti-Zr-Cu alloy. As a method for finding the low-melting-point composition, eutectic composition exploration method was used in order to reduce the experiment point. As the result, several kinds of new brazing filler metal such as 37.5Ti-37.5-Zr-25Cu alloy (melting point: $825^{\circ}C$) and 30Ti-43Zr-25Cu-2Cr alloy (melting point: $825^{\circ}C$) was developed. Then, the brazing joint showed the characteristics which were almost equal to the base metal from the result of obtaining metallic structure and strength of joint of brazing joint. However, the brazing filler metal composition of the melting point of $820^{\circ}C$ or less could not be found. Consequentially, it was clarified that the brazing filler metal developed in this study could be practically sufficiently used from results such as metal structure of brazing joint and tensile test of the joint.

  • PDF

나노 구리-니켈 혼합분말의 충격압축법을 통한 복합벌크재의 제조 및 특성평가 (Manufacturing and Evaluation of the Properties of Hybrid Bulk Material by Shock-compaction of Nanocrystalline Cu-Ni Mixed Powder)

  • 김우열;안동현;박이주;김형섭
    • 한국분말재료학회지
    • /
    • 제21권3호
    • /
    • pp.196-201
    • /
    • 2014
  • In this study, nanocrystalline Cu-Ni bulk materials with various compositions were cold compacted by a shock compaction method using a single-stage gas gun system. Since the oxide layers on powder surface disturbs bonding between powder particles during the shock compaction process, each nanopowder was hydrogen-reduced to remove the oxide layers. X-ray peak analysis shows that hydrogen reduction successfully removed the oxide layers from the nano powders. For the shock compaction process, mixed powder samples with various compositions were prepared using a roller mixer. After the shock compaction process, the density of specimens increased up to 95% of the relative density. Longitudinal cross-sections of the shock compacted specimen demonstrates that a boundary between two powders are clearly distinguished and agglomerated powder particles remained in the compacted bulk. Internal crack tended to decrease with an increase in volumetric ratio of nano Cu powders in compacted bulk, showing that nano Cu powders has a higher coherency than nano Ni powders. On the other hand, hardness results are dominated by volume fraction of the nano Ni powder. The crystalline size of the shock compacted bulk materials was greatly reduced from the initial powder crystalline size since the shock wave severely deformed the powders.

Sn-3.5Ag 무연 솔더를 이용한 Si-wafer와 FR-4기판의 상온접합 (Ultrasonic bonding between Si-wafer and FR-4 at room temperature using Sn-3.5Ag solder)

  • 김정모;조선연;김규석;이영우;정재필
    • 대한용접접합학회:학술대회논문집
    • /
    • 대한용접접합학회 2005년도 춘계학술발표대회 개요집
    • /
    • pp.54-56
    • /
    • 2005
  • Ultrasonic soldering using of Si-wafer to FR-4 PCB atroom temperature was investigated. Sn3.5Ag foil rolled $100{\mu}m$ was used for solder. The UBM of Si-die was Cu/ Ni/ Al from top to bottom and its thickness was $0.4{\mu}m$, $0.4{\mu}m$, $0.3{\mu}m$ respectively. Pad on FR-4 PCB comprised of Au/ Ni/ Cu from top to bottom and its thickness was $0.05{\mu}m$, $5{\mu}m$, $18{\mu}m$ respectively. The ultrasonic soldering time was changed from 0.5sec to 3.0sec and its power 1400W. As experimental result, reliable bond joint by ultrasonic at room temperature was obtained. The shear strength increased with soldering time up to 2.5 sec. That means at 2.5sec, the shear strength showed maximum rate of 65.23N. The strength decreased to 33.90N at 3.0 sec because the cracks generated along the intermetallic compound between Si-wafer and Sn-3.5mass%Ag solder. intermetallic compound produced by ultrasonic between the solder and the Si-die was $(Cu, Ni)_{6}Sn_{5}$ and the intermetallic compound between solder and pad on FR-4 was $(Ni, Cu)_{3}Sn_{4}$.

  • PDF

Crystal Structures and Magnetic Properties of Sparteinium Tetrahalocuprate Monohydrate Compounds

  • Lee, Yong-Min;Park, Sung-Min;Kang, Sung-Kwon;Kim, Young-Inn;Choi, Sung-Nak
    • Bulletin of the Korean Chemical Society
    • /
    • 제25권6호
    • /
    • pp.823-828
    • /
    • 2004
  • The crystal structures of sparteinium tetrachlorocuprate monohydrate $[(C_{15}H_{28}N_2)CuCl_4{\cdot}H_2O]$, 1 and sparteinium tetrabromocuprate monohydrate $[(C_{15}H_{28}N_2)CBr_4{\cdot}H_2O]$, 2, were determined. The structures of 1 [orthorhombic, $P2_12_12_1$, a = 8.3080(10) ${\AA}$, b = 14.6797(19) ${\AA}$ and c = 16.4731(17) ${\AA}$], and 2 [orthorhombic, $P2_12_12_1$, a = 8.4769(7) ${\AA}$, b = 15.166(3) ${\AA}$ and c = 16.679(3) ${\AA}$], are composed of a doubly protonated sparteinium cation, $[C_{15}H_{28}N_2]^{2+}$, a discrete $CuX_4^{2-}$ anion $(X=Cl^-\;or\;Br^-)$, and one water molecule. These monomeric compounds are stabilized through various types of hydrogen bonding interaction in their packing structures. Crystal 2 exhibits weak anti-ferromagnetism (J = -3.24 $cm^{-1}$) as opposed to the magnetically isolated paramagnetism observed for 1. The results of comparative magneto-structural investigations of 1 and 2 suggest that the pathway for the weak anti-ferromagnetic super-exchange in 2 might be through a Cu-Br${\cdots}$Br-Cu contact.

리튬이온 배터리용 다층박판 금속의 초음파 용착시 용착강도 (Welding Strength in the Ultrasonic Welding of Multi-layer Metal Sheets for Lithium-Ion Batteries)

  • 김진범;서지원;박동삼
    • 한국기계가공학회지
    • /
    • 제20권6호
    • /
    • pp.100-107
    • /
    • 2021
  • As a significant technology in the smartization era promoted by the Fourth Industrial Revolution, the secondary battery industry has recently attracted significant attention. The demand for lithium-ion batteries (LIBs), which exhibit excellent performance, is considerably increasing in different industrial fields. During the manufacturing process of LIBs, it is necessary to join the cathode and anode sheets with thicknesses of several tens of micrometers to lead taps of the cathode and anode with thicknesses of several hundreds of micrometers. Ultrasonic welding exhibits excellent bonding when bonded with very thin plates, such as negative and positive electrodes of LIBs, and dissimilar and highly conductive materials. In addition, ultrasonic welding has a small heat-affected zone. In LIBs, Cu is mainly used as the negative electrode sheet, whereas Cu or Ni is used as the negative electrode tab. In this study, one or two electrode sheets (t0.025 mm Cu) were welded to one lead tab (t0.1 mm Cu). The welding energy and pressure were used as welding parameters to determine the welding strength of the interface between two or three welded materials. Finally, the effects of these welding parameters on the welding strength were investigated.

STEM에 의한 구리와 코디에라이트 접촉면의 특성 연구 (Characterization of Cu/cordierite Interfaces by STEM)

  • 한병성
    • 대한전자공학회논문지
    • /
    • 제27권10호
    • /
    • pp.101-105
    • /
    • 1990
  • $900^{\circ}C$에서 합성된 코디에라이트의 합성 방법인 졸겔방법은 구리와 세라믹간의 상호 열처리를 가능하게 해준다. 구리와 코디에라이트 기판과의 강한 결합은 eutectic bonding 기술로 얻어질 수 있다. 구리와 코디에라이트의 접촉면에서 미시적 특성을 STEM을 이용하여 연구하였는데 구리의 확산은 강한 화학적, 구조적 변화와 함께 접촉면 영역에서 이루어지고 있다. 비록 이들 접촉면이 강한 접촉력을 가지고 있지만 접촉면에서 구리화합물의 형성에 대한 명백한 입증을 얻어내지는 못하였다.

  • PDF

접합계면반응에 미치는 직류전원부하의 영향 (Effect of applying a DC voltage on the interfacial reactions at the zirconia to copper interface)

  • 김성진;김인수;오명훈;최환
    • 대한용접접합학회:학술대회논문집
    • /
    • 대한용접접합학회 1996년도 특별강연 및 춘계학술발표 개요집
    • /
    • pp.6-9
    • /
    • 1996
  • The Joining of copper rod and zirconia tube was carried out in Ar gas atmosphere. There are two type of the joining. The one is the reaction bond consisting of Cu and zirconia was dominated by surface reaction wi th a undetctable very thin layer. It was found that copper elements were diffused to zirconia side, but that most of Z $r^{4+}$ ions were not diffused to copper side. This result means application of a DC voltage to migrate oxygen to the copper/zirconia interface can oxidize metal at the copper /zirconia interface, and the bonding reaction between zirconia and copper oxide may occur. The other is the reaction bonding was dominated by interdiffusion with a very thick interface layer. This result means application of a DC voltage can reduce zirconia at the interface. The bonding reaction is to be an alloying between Zr and Cr.

  • PDF