• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.30-34
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• 2003

For an inhomogeneous superconductor, we reveal a relation of an observed superconducting gap, $\Delta$$_{obs}$ and the intrinsic true gap, $\Delta$$_{i}$, $\Delta$$_{obs}$(equation omitted) where band filling, 0＜$\rho$<$\leq$1. $\Delta$$_{obs}$ is the effect of measurement when 0＜$\rho$＜1. The true gap is observed only when $\rho$=1. Parring symmetry analyzed by a coherence-peak shape of density of states, observed in B $i_2$S $r_2$CaC $u_2$ $O_{8}$＋$\chi$ superconductors, is s- wave.X> $O_{8}$＋$\chi$ superconductors, is s- wave. wave.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.11a
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• pp.87-88
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• 2007

무전해 구리 도금 공정에서 첨가제로 사용되는 HIQSA 화합물이 Damascene 공정을 이용한 60nm급 trench 패턴 내 무전해 구리 배선 형성 과정에 미치는 효과를 전기 화학적 기법과 광학적 기법을 이용하여 관찰하였다. HIQSA 농도별 open circuit potential의 변화를 관측한 결과, 3ppm 수준으로 첨가되었을 때, 무전해 도금 과정 중 가장 안정한 전위가 유지됨을 볼 수 있었다. 무전해 도금액 내 HIQSA 농도가 높아짐에 따라 구리 도금층의 두께는 지수적으로 감소하였으며, 표면의 결정 크기도 감소하였다. 60nm급 trench 내 무전해 구리 도금 시, 용액 내 침적 시간 60초가 무결함 superconformal copper filling을 얻기 위한 최적 시간이었다.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.118-126
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• 1998

A study to improve filling of semiconductor contact holes by enhancement of the directionality of the source beams has been undertaken. The collimation of source beams was improved by the ionized cluster beam deposition technique with modification of the cell geometry. The collimation tested with neutral beam was excellent. But, the Cu flims were grown in a columnar mode due to the lack of surface mobilit of the impinged clusters. A shadow effect also caused cleavage and consequent discontinuity at the steos as films grow. By applying acceleration voltage, the columnar growth in a contact hole of 0.5 $\mu$m diameter and 1 $\mu$m height disappeared and considerable coverage at the side wall of the contacts as well as perfect bottom coverage were observed. These are all due to the assistants of the accelerated ionized clusters with high kinetic energy. Thus we demonstrated that the ICB deposition technique can be used to completely fill sub-half-micron contact holes with high aspect ratio.

• Journal of the Korean Society of Radiology
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• v.14 no.5
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• pp.651-660
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• 2020

The purpose of this study was to create a phantom with a HU value similar to that of the human Femur using a 3D printer to replace the existing pig bone. A total of 372 people were analyzed to determine the HU value of human Femur. Using a 3D printer, a human bone model phantom was fabricated using PLA-Cu 20% and subjected to CT examination. Pig bones were 6 months old pigs, and bones 2 days after slaughter were used. As a result of the examination, the 3D printing phantom made with 80% of the internal filling showed a similar value to all data of the human body (p<0.05), and there was a difference from the pig bone (p>0.05). In addition, in the case of the HU value of Femur by age group, it was confirmed that the value of HU decreased as the age group increased (p<0.05). 3D printing and HU values confirmed a weak negative correlation with respect to the stacking height, but confirmed a strong positive correlation (R² = 0.996) with 182.13±1.290 in the inner filling (p<0.05). In conclusion, it was confirmed that the human body model phantom using 3D printing can exhibit a similar level of HU value to the human body compared to the existing pig bone phantom, and this study will provide basic data for the production of a human body model phantom using a 3D printer.

• Journal of Hydrogen and New Energy
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• v.9 no.4
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• pp.169-176
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• 1998

An experimental study on effect of vapor-cooled heat stations in a 5.5 liter cryogenic vessel has been performed. The cryogenic vessel is made of stainless steel of thickness of 1mm and insulated by the combined insulation of vacuum, MLI(multi-layer insulation) and vapor-cooled radiation shield. Vapor-cooled heat stations are also constructed based on the 1-dimensional thermal analysis to reduce the heat inleak through a filling tube. Thermal analysis indicates that the vapor-cooled heat stations can substantially enhance the performance of vessel for cryogenic fluids with high $C_p/h_{fg}$ where $C_p$ the specific heat and $h_{fg}$ the heat of vaporization, such as $LH_2$ and LHe. The experimental results for $LN_2$ shows that the total heat inleak into inner vessel consists of 14% radiation and 86% conduction through the filling tube. Therefore, it is expected that the conduction heat in leak of the vessel for high $C_p/h_{fg}$ cryogenic fluids can be significantly reduced. powders. The amount of copper coating was 20wt%. In order to examine corrosion behavior of the electrodes, the corrosion current and the current density, in 6M KOH aqueous solution after removal of oxygen in the solution, were measured by potentiodynamic and cyclic voltamo methods. The results showed that Co in the alloy increased corrosion resistance of the electrode whereas Ni decreased the stability of the electrode during the charge-discharge cycles. The electrode used Si sealant as a binder showed a lower corrosion current density than the electrode used PTFE and the electrode used Cu-coated alloy powders showed the best corrosion resistance.

• Economic and Environmental Geology
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• v.8 no.1
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• pp.25-56
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• 1975

Most fluorite deposits of South Korea are distributed in three metallogenic zones namly as: Hwacheon, Hwangangni and Geumsan metallogenic zones. Fluorite deposits of each zone show The characteristic features owing to the geological setting, the structural patterns and their forming processes. deposits of the Hwacheon metallogenic zone are wholly fissure filling hydrothermal veins emThe bedded in shear fractures of the granite gneiss or schists of Precambrian age or in the cooling fractures of the granite and acidic hypabyssal rocks which are assumed to be a differentiated sister rock of the granite. Localization of most fluorite veins of the region is structurally controlled by NW and EW fracture systems and genetically related to the granite intrusion which ascertained as motivating rock of the fluorite mineralization. Fluorites are in most cases accompanied by quartz, chalcedony mainly and rarely agate, calcite, barite and sulphide base metals in some localities. The deposits of the Hwangangni metallogenic zone were formed at the last stage of hydrothermal polymineralization of W, Mo, Cu, Pb, Zn. The majority of the fluorite ore bodies were originated from replacement in limestone beds of Great Limestone Series or in calcareous interbeds of metasediments, whereas some cavity-filling ore bodies were embedded in phyllites and schists of the Ockcheon system and along the fissures in the replaced beds which were originated by volume decrease. The localization of fluorite deposits in this region is genetically related to the Moongyong granite which has been dated as middle Cretaceous, and controlled structurally by the $N20^{\circ}{\sim}50^{\circ}W$ extension fracture system or axial planes of folds, and by faults of NE direction that acted as paths of ore solution. The deposits of the Geumsan metallogenic zone are seemed to be formed through the similar process as that of Hwangangni metallogenic zone, but characteristic distinctions are in that they are more prevailing fracture filling veins and large number of the deposits are localized in roof-pendants or xenolithes of limestone in granites and porphyries. Igneous rocks that presumably motivated the mineraltzation are middle Cretaceous Geumsan granite and porphyries. Metallogenic epoch of the fluorite mineralization of South Korea are puesumably limited in early-middle Cretaceous. Studies of the fluid inclusions in fluorites of the region reveal that the homogenization temperature of the fluorite deposits are as follows: Hwacheon metallogenic zone : $95^{\circ}C{\sim}165^{\circ}C$; Hwangangni metallogenic zone : $97^{\circ}C{\sim}235^{\circ}C$; Geumsan metallogenic zone : $93^{\circ}C{\sim}236^{\circ}C$. Judging from the above results, the deposits of the Hwancheon region were formed at the epithermal stage, and those in the Hwangangni and Geumsan regions, were deposited at epithermal stage preceded by mesothermal mineralization of small scale in which some sulphide minerals were deposited. The analytical data of minor elements in the fluorites reveal that ore solutions of Hwangangni metallogenic zone seemed to be emanated in more acidic stage of magma differentiation than Hwacheon metallogenic zone did.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Progress in Superconductivity and Cryogenics
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• v.14 no.3
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• pp.1-4
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• 2012

Effects of artificial holes on the cooling efficiency of single grain YBCO bulk superconductors were studied. Single grain YBCO bulk superconductors without artificial holes, with six 2.4 mm holes and six holes filled with Bi-Pb-Cd-Sn metal solder were fabricated by a top-seeded melt growth process for powder compacts with/without holes. Simulation for the cooling rate to a liquid nitrogen temperature (77 K) of YBCO samples was carried out using a finite element method (FEM) and the results are compared with the actual cooling rates of samples in liquid nitrogen. The simulated cooling times for the YBCO sample without holes, with six holes and with six holes filled with the metal solder were 80, 47 and 75 sec. respectively, which are similar to the actual cooling times of 84, 52 and 78 sec. estimated for the same samples cooled in liquid nitrogen. The shorter cooling time of the sample with artificial holes are attributed to the increased surface areas associated with the presence of artificial holes. The metal filling into the holes did not give any remarkable effect on the cooling efficiency.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.4
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• pp.149-156
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• 2019

A stretchable thermoelectric module consisting of 5 pairs of Bi₂Te₃-based hot-pressed p-n thermoelectric legs was processed by filling the module inside with polydimethylsiloxane (PDMS) and removing the top and bottom substrates. Its stretchable characteristics and power generation properties were measured. The integrity of the module was kept well even after 10 strain cycles ranging from 0 to 0.1. With increasing the tensile strain to 0.2, the module circuitry became open because of joint failure between Cu electrodes and thermoelectric legs. The stretchable thermoelectric module exhibited an open circuit voltage of 4.6 mV with a temperature difference of 2.2K across both ends of thermoelectric legs, and changes in its open circuit voltage were below 5% for tensile strains of 0~0.1. Being elongated for a strain of 0.1, it exhibited the maximum output power of 18.5 ㎼ with the temperature difference of 2.2K across its both ends.

• Journal of the Korean earth science society
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• v.29 no.7
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• pp.551-558
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• 2008

The Soowang deposits occur in the quartz veins that were filled fissures in the middle Cretaceous porphyritic granite and/or the Precambrian Sobaegsan gneiss complex. Paragenetic studies suggest that the vein filling can be divided into four identifiable stages. Sphalerites were deposited by the cooling fluids at stages I, II, and III. The results of microscopic observation and EPMA analysis suggest that the chalcopyrite dots and disease in sphalerite are replacement products by later hydrothermal solution at the early stage III. The inferred processes of chalcopyrite disease are as follows: (1) Fe enrichment to the margins and along the cracks of the Fe-poor sphalerite by Fe-rich solution, (2) Formation of chalcopyrite dots in the Fe-enriched sphalerite formed at the stage II, and Fe reduction of sphalerite near the chalcopyrite dots by Cu-bearing solution, (3) Formation of "chalcopyrite disease" penetrating the compositional zoning of sphalerite at the early stage III.