• 제목/요약/키워드: Cu electroplating

검색결과 163건 처리시간 0.023초

전해도금 Cu와 Sn-3.5Ag 솔더 접합부의 Kirkendall void 형성과 충격 신뢰성에 관한 연구 (A Study of Kirkendall Void Formation and Impact Reliability at the Electroplated Cu/Sn-3.5Ag Solder Joint)

  • 김종연;유진
    • 마이크로전자및패키징학회지
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    • 제15권1호
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    • pp.33-37
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    • 2008
  • Kirkendall void는 전해도금 Cu/Sn-Ag 솔더 접합부에서 형성되었으며 Cu 도금욕에 함유되는 첨가제에 의존한다. 첨가제로 사용된 SPS의 함량의 증가와 함께 $150^{\circ}C$에서 열처리 후 많은 양의 Kirkendall void가 $Cu/Cu_3Sn$ 계면에 존재하였다. AES 분석은 void 표면에 S가 편석되어 있음을 보여주었다. $Cu/Cu_3Sn$ 계면을 따라 파괴된 시편에서 Cu, Sn, S peak만 검출되었고 AES 깊이 프로파일에서 S는 급격하게 감소하였다. $Cu/Cu_3Sn$ 계면에서 S 편석은 계면에너지를 낮추고 Kirkendall void 핵생성을 위한 에너지장벽을 감소시킨다. 낙하충격시험은 SPS를 사용하여 도금된 Cu의 경우 Kirkendall void가 형성된 $Cu/Cu_3Sn$ 계면에서 파괴가 진행되고 급격하게 신뢰성이 감소됨을 보였다.

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Ni/Cu 금속전극 태양전지의 Ni electroless plating에 관한 연구 (The Research of Ni Electroless Plating for Ni/Cu Front Metal Solar Cells)

  • 이재두;김민정;권혁용;이수홍
    • 한국전기전자재료학회논문지
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    • 제24권4호
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    • pp.328-332
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    • 2011
  • The formation of front metal contact silicon solar cells is required for low cost, low contact resistance to silicon surface. One of the front metal contacts is Ni/Cu plating that it is available to simply and inexpensive production to apply mass production. Ni is shown to be a suitable barrier to Cu diffusion into the silicon. The process of Ni electroless plating on front silicon surface is performed using a chemical bath. Additives and buffer agents such as ammonium chloride is added to maintain the stability and pH control of the bath. Ni deposition rate is found to vary with temperature, time, utilization of bath. The experimental result shown that Ni layer by SEM (scanning electron microscopy) and EDX analysis. Finally, plated Ni/Cu contact solar cell result in an efficiency of 17.69% on $2{\times}2\;cm^2$, Cz wafer.

프르브유닛 소자용 블레이드형 팁 제조방법 (A Fabrication Method of Blade Type Tip for Probe Unit Device)

  • 이근우;이재홍;김창교
    • 전기학회논문지
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    • 제56권8호
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    • pp.1436-1440
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    • 2007
  • Beryllium copper has been known to be an important material for the various fields of industry because it can be used for mechanical and electrical/electronic components that are subjected to elevated temperatures (up to $400^{\circ}C$ for short times). Blade type tip for probing the cells of liquid crystal display(LCD) was fabricated using beryllium copper foil. The dry film resist was employed as a mask for patterning of the blade type tip. The beryllium copper foil was etched using hydrochloric acidic iron-chloride solution. The concentration, temperature, and composition ratio of hydrochloric acidic iron-chloride solution affect the etching characteristics of beryllium copper foil. Nickel with the thickness of $3{\mu}m$ was electroplated on the patterned copper beryllium foil for enhancing its hardness, followed by electroplating gold for increasing its electrical conductivity. Finally, the dry film resist on the bridge was removed and half of the nickel was etched to complete the blade type tip.

레이저 클래딩 공정을 이용한 Ni-Cr-B-Si + WC/12Co 복합 코팅층의 제조 및 기계적 특성 (Manufacturing of Ni-Cr-B-Si + WC/12Co Composite Coating Layer Using Laser Cladding Process and its Mechanical Properties)

  • 함기수;김철오;박순홍;이기안
    • 한국분말재료학회지
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    • 제24권5호
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    • pp.370-376
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    • 2017
  • In this study we manufacture a Ni-Cr-B-Si +WC/12Co composite coating layer on a Cu base material using a laser cladding (LC) process, and investigate the microstructural and mechanical properties of the LC coating and Ni electroplating layers (reference material). The initial powder used for the LC coating layer is a powder feedstock with an average particle size of $125{\mu}m$. To identify the microstructural and mechanical properties, OM, SEM, XRD, room and high temperature hardness, and wear tests are implemented. Microstructural observation of the initial powder and LC coating layer confirm the layer is composed mainly of ${\gamma}-Ni$ phases and WC and $Cr_{23}C_6$ carbides. The measured hardness of the LC coating and Ni electroplating layers are 653 and 154 Hv, respectively. The hardness measurement from room up to high temperatures of $700^{\circ}C$ result in a hardness decrease as the temperature increases, but the hardness of the LC coating layer is higher for all temperature conditions. Room temperature wear results show that the wear loss of the LC coating layer is 1/12 of the wear level of the Ni electroplating layer. The measured bond strength is also greater in the LC coating than the Ni electroplating.

코팅층을 이용한 몰리브덴의 확산접합 (Diffusion Bonding of Mo with Coating Layer)

  • 박재현;권영각;장래웅
    • Journal of Welding and Joining
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    • 제10권3호
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    • pp.26-39
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    • 1992
  • Diffusion bonding of Mo was performed by using the metallic coating of Cu and Cr on the surface to be bonded. Joint characteristics of Mo with or without coating layer were compared in metallurgical and fractograpical aspects. The results showed that the diffusion bonding with coating layer, especially with Cu coating, increased the bending strength of joint. Variation of heating cycle(elevation of temperature for a moment) did not affect significantly the mechanical properties of joint. Fractographical analysis showed that the fracture of joint bonded with Cr coating occurred at the coating layer, while that with Cu coating occurred at the base metal.

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CRYSTAL ORIENTATION OF ELECTROLESS COPPER AND ELECTRODEPOSITED NICKEL FILMS ON THE MAGNETS

  • Chiba, Atsushi;Kobayashi, Katsuyoshi;Miyazaki, Hiroki.;Yoshihara, Sachio;Wu, Wen-Chang
    • 한국표면공학회지
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    • 제32권3호
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    • pp.372-376
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    • 1999
  • The deposited Cu film on the ferrite magnet was more deposited comparing with that on the plastic magnet. The Cu film became thicker on the S pole comparing with that on the N pole in the both of magnets. The thickness and texture coefficient of deposited copper film affected with direction of line of magnetic force. The difference of pole had little or no effect to the texture coefficient of deposited nickel film. The reaction rate on ferrite magnet and S pole was faster comparing with that on plastic magnet and N pole.

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결정질 실리콘 태양전지의 고효율 화를 위한 Selective emitter 구조 및 Ni/Cu plating 전극 구조 적용에 관한 연구 (PA study on selective emitter structure and Ni/Cu plating metallization for high efficiency crystalline silicon solar cells)

  • 김민정;이재두;이수홍
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.91.2-91.2
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    • 2010
  • The use of plated front contact for metallization of silicon solar cell may alternative technologies as a screen printed and silver paste contact. This technologies should allow the formation of contact with low contact resistivity a high line conductivity and also reduction of shading losses. The better performance of Ni/Cu contacts is attributed to the reduced series resistance due to better contact conductivity of Ni with Si and subsequent electroplating of Cu on Ni. The ability to pattern narrower grid lines for reduced light shading combined with the lower resistance of a metal silicide contact and improved conductivity of plated deposit. This improves the FF as the series resistance is deduced. This is very much required in the case of low concentrator solar cells in which the series resistance is one of the important and dominant parameter that affect the cell performance. A selective emitter structure with highly dopes regions underneath the metal contacts, is widely known to be one of the most promising high-efficiency solution in solar cell processing. This paper using selective emitter structure technique, fabricated Ni/Cu plating metallization cell with a cell efficiency of 17.19%.

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아노드의 결정성에 따른 전기도금 구리박막의 기계적 특성 연구 (Crystallographic Effects of Anode on the Mechanical Properties of Electrochemically Deposited Copper Films)

  • 강병학;박지은;박강주;유다영;이다정;이동윤
    • 한국재료학회지
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    • 제26권12호
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    • pp.714-720
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    • 2016
  • We performed this study to understand the effect of a single-crystalline anode on the mechanical properties of as-deposited films during electrochemical deposition. We used a (111) single- crystalline Cu plate as an anode, and Si substrates with Cr/Au conductive seed layers were prepared for the cathode. Electrodeposition was performed with a standard 3-electrode system in copper sulfate electrolyte. Interestingly, the grain boundaries of the as-deposited Cu thin films using single-crystalline Cu anode were not distinct; this is in contrast to the easily recognizable grain boundaries of the Cu thin films that were formed using a poly-crystalline Cu anode. Tensile testing was performed to obtain the mechanical properties of the Cu thin films. Ultimate tensile strength and elongation to failure of the Cu thin films fabricated using the (111) single-crystalline Cu anode were found to have increased by approximately 52 % and 37 %, respectively, compared with those values of the Cu thin films fabricated using apoly-crystalline Cu anode. We applied ultrasonic irradiation during electrodeposition to disturb the uniform stream; we then observed no single-crystalline anode effect. Consequently, it is presumed that the single-crystalline Cu anode can induce a directional/uniform stream of ions in the electrolyte that can create films with smeared grain boundaries, which boundaries strongly affect the mechanical properties of the electrodeposited Cu films.

열처리에 따른 Cu 전해도금막의 미세구조 및 물리적성질 변화 (The Microstructure and physical properties of electroplated Cu films)

  • 권덕렬;박현아;김충모;이종무
    • 한국진공학회지
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    • 제13권2호
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    • pp.72-78
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    • 2004
  • TaN막 위에 magnetron sputtering으로 증착 시킨 Cu seed 막을 Cu 전해도금을 하기에 앞서 ECR plasma 장치로 전처리 세정하였다. 이때 Cu 막을 200∼$500^{\circ}C$로 변화시키면서 알곤 또는 질소 분위기에서 RTA(rapid themal annealing) 방법으로 열처리하였다. Cu seed 막 위에 전해도금법으로 형성한 Cu 막을 열처리했을 때 미세구조와 물리적 특성변화를 XRD(x-ray diffraction), EBSD(electron back-scattered diffraction), AFM(atomic force microscopy) 분석을 이용하여 조사하였다. $400^{\circ}C$보다 높은 온도에서 재결정이 일어났으며, 열처리 온도를 증가함에 따라 Cu막의 비저항이 감소하고 (111) 우선배향성이 증가하는 경향을 나타냈다. 최소의 비저항과 부드러운 표면 및 (111) 배향성이 뛰어난 Cu막을 얻기 위한 최적의 열처리 조건은 $400^{\circ}C$의 질소분위기에서 120초간 RTA처리를 하는 것으로 판단된다. 이 조건하에서 전해도금된 Cu막의 비저항(resistivity)과 표면 거칠기(surface roughness)는 각각 1.98$\mu$O-cm 및 17.77nm였다.

전해도금욕의 종류에 따른 수지상 구리분말의 형상 비교 분석 (Morpholopy Comparison of Dendritic Cu Powders from Various Electroplating baths)

  • 박다정;박채민;강남현;이규환
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.154-154
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    • 2016
  • 다공성 수지상 구리분말은 그 구조적 특성으로 인해 다양한 촉매 분야에 사용되어왔으며, 본 연구에서는 전해도 금욕의 종류에 따라 수지상 구리의 표면적 특성에 대해 연구하였다. 도금욕의 종류($CuSO_4$, $CuCl_2$, $Cu_2P_2O_7$), 인가 전위, 도금시간(1, 5, 10, 30min)에 따른 수지상 형상을 비교하였다. SEM 이미지 분석 결과 황산구리와 염화구리 도금용액에서는 plate-like dendrite 형상이 관찰되었으며, 피로인산구리 도금용액에서는 needle-like dendrite 형상이 관찰되었다. 정전위 실험결과 도금용액별 한계전류밀도에서 음(-)의 방향으로 100mV 낮은 지점의 인가 전위 및 도금시간 10분에서 3가지 용액 모두 가장 미세한 수지상 입자가 관찰되었다. 도금용액별 겉보기 밀도 및 BET 비표면적을 측정해본 결과 미세한 수지상일수록 겉보기밀도는 낮게 비표면적은 크게 측정되었다. 가장 낮은 겉보기 밀도와 가장 높은 BET 비표면적을 가지는 용액은 염화구리 도금용액이었으며 그 값은 $0.951g/cm^3$, $1.8052m^2/g$이었다.

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