• Title/Summary/Keyword: CsV

Search Result 359, Processing Time 0.032 seconds

Design of 4th Order ΣΔ modulator employing a low power reconfigurable operational amplifier (전력절감용 재구성 연산증폭기를 사용한 4차 델타-시그마 변조기 설계)

  • Lee, Dong-Hyun;Yoon, Kwang-Sub
    • Journal of IKEEE
    • /
    • v.22 no.4
    • /
    • pp.1025-1030
    • /
    • 2018
  • The proposed modulator is designed by utilizing a conventional structure employing time division technique to realize the 4th order delta-sigma modulator using one op-amp. In order to reduce the influence of KT/C noise, the capacitance in the first and second integrators reused was chosen to be 20pF and capacitance of third and fourth integrators was designed to be 1pF. The stage variable technique in the low power reconfigurable op-amp was used to solve the stability issue due to different capacitance loads for the reduction of KT/C noise. This technique enabled the proposed modulator to reduce the power consumption of 15% with respect to the conventional one. The proposed modulator was fabricated with 0.18um CMOS N-well 1 poly 6 metal process and consumes 305uW at supply voltage of 1.8V. The measurement results demonstrated that SNDR, ENOB, DR, FoM(Walden), and FoM(Schreier) were 66.3 dB, 10.6 bits, 83 dB, 98 pJ/step, and 142.8 dB at the sampling frequency of 256kHz, oversampling ratio of 128, clock frequency of 1.024 MHz, and input frequency of 250 Hz, respectively.

Spectroscopic Characterization of Soil Humic Acid Fractions by Molecular Weight (토양에서 추출한 흄산의 분자량별 분류에 따른 분광학적 성질 비교)

  • Shin, Hyun Sang;Moon, Hichung;Yang, Han Beom;Yun, Sock Sung
    • Journal of the Korean Chemical Society
    • /
    • v.39 no.1
    • /
    • pp.66-70
    • /
    • 1995
  • The soil humic acid was subdivided into four subfractions by molecular weight (F1: >100.000 dalton; F2: >100.000 dalton; F3: >10.000 dalton; F4: >2.000 dalton) using MP-dual hollow fiber ultrafiltration system. The characterization using IR, 1H and 13C NMR spectroscopy, showed similar spectroscopic features of HA, demonstrating that the bulk properties of HA subfractions are very similar to one another. IR spectral data showed a decrease in polysaccharide contents and increase in carboxylate functionality as molecular weight become smaller.functions. The structure of (NO) can be described by two interactions (N${\cdot}{\cdot}{\cdot}$N, N${\cdot}{\cdot}{\cdot}$O). One is the ONNO structure with an (N${\cdot}{\cdot}{\cdot}$N) interaction. In this structure, acyclic cis-ONNO with $C_{2v}$-symmetry, acyclic trans-ONNO with $C_{2h}$, and cyclic ONNO with trapezoidal structure ($C_{2v}$) are optimized at the MP2 level. The other structure is the ONON structure with an (N${\cdot}{\cdot}{\cdot}$O) interaction. In the structure, acyclic cis-ONON with Cs$^{-symmetry}$ and cyclic ONON of the rectangular ($C_{2h}$), square $(D_{2h})$, rhombic $(D_{2h})$, and parallelogramic $(D_{2h})$ geometries are also optimized. It is found that acyclic cis-ONNO $(^1A_1$) is the most stable structure and cyclic ONNO ($^3A_1$) is the least stable. Acyclic trans-ONNO ($^3A_1$) with an (N${\cdot}{\cdot}{\cdot}$N) interaction, acyclic trans-ONON and bicyclic ONON $(C_{2v})$ with (N${\cdot}{\cdot}{\cdot}$O) interaction, and acyclic cis- and trans-NOON with an (O${\cdot}{\cdot}{\cdot}$O) interaction can not be optimized at the MP2 level. Particularly, acyclic trans-ONNO with $C_{2h}$-symmetry can not be optimized at the CCSD(T) level. Meanwhile, acyclic NNOO ($^1A_1$, $C_s)$ and trianglic NNOO ($^1A_1$,$C_{2v})$ formed by the (O${\cdot}{\cdot}{\cdot}$N) interaction between $O_2$and $N_2$are optimized at the MP2 level. The binding energies and the relative energy gaps among the isomers are found to be relatively small./sec. Spiral CT scans during the arterial phase were obtained 35 seconds after the injection of contrast medium. CT findings of 78 lesions less than 4cm in diameter were correlated with angiographic findings. Results : The attenuation of lesions was high(n = 69), iso(n = 5), and low(n = 4) compared with liver parenchyma during the arterial phase of spiral CT. In lesions with high-, iso-, and low-attenuation during the arterial phase of spiral CT, hypervascularity on angiograms was found in 63 of 69(91.3%), three of five(60%), and three of four lesions(75%), respectively. Six lesions with high-attenuation on the arterial phase of spiral CT were not seen on angiography. Two iso-attenuated and one low-attenuated lesion were hypovascular on angiograms. Conclusion : The results of this study suggest that with some exceptions there was good correlation between the arterial phase of spiral CT and angiography.

  • PDF

Na-Ca Exchange in Sarcolemmal Vesicles Isolated from Cat Ileal Longitudinal Muscle (고양이 회장 종주근에서 Na-Ca 교환 기전의 특성에 관한 연구)

  • Woo, Jae-Suk;Suh, Duk-Joon;Kim, Yong-Keun;Lee, Sang-Ho
    • The Korean Journal of Physiology
    • /
    • v.23 no.2
    • /
    • pp.237-252
    • /
    • 1989
  • Effect of a $Na^+$ gradient on $Ca^{2+}$ uptake was studied in isolated sarcolemmal vesicles of cat ileal longitudinal muscle. $Ca^{2+}$ uptake was markedly stimulated in the presence of an outwardly directed $Na^+$ gradient. External $Na^+$, monensin and A23187 abolished the $Na^+-dependent$ $Ca^{2+}$ uptake. Monovalent cations such as $K^+$, $Li^+$, $Rb^+$, $Cs^+$ and choline could not substitute for $Na^+$ in enhancement of $Ca^{2+}$ uptake. Divalent cations such as $Ba^{2+}$, $Sr^{2+}$, $Mn^{2+}$ and $Cd^{2+}$ but not $Mg^{2+}$ inhibited the $Na^+-dependent$ $Ca^{2+}$ uptake. Increase in external pH in the range of 6.0 to 8.0 stimulated the $Na^+-dependent$ $Ca^{2+}$ uptake. Amiloride inhibited the $Na^+-dependent$ $Ca^{2+}$ uptake at concentrations above 0.5 mM, whereas diltiazem or vanadate did not. The apparent Km of the $Na^+-dependent$ $Ca^{2+}$ uptake for $Ca^{2+}$ was 18.2 ${\mu}M$ and apparent Vmax was 689.7 pmole/mg protein/5 sec. Kinetic analysis of the $Na^+-dependent$ $Ca^{2+}$ uptake showed a noncompetitive interaction between internal $Na^+$ and external $Ca^{2+}$. The dependence of $Ca^{2+}$ uptake on internal $Na^+$ showed sigmoidal kinetics and Hill coefficient for internal $Na^+$ was 2.52. Inside positive membrane potential generated by imposing an inwardly directed $K^+$ gradient and valinomycin significantly stimulated the $Na^+-dependent$ $Ca^{2+}$ uptake. These results indicate that a $Na^+-Ca^{2+}$ exchange system exists in the sarcolemmal membranes isolated from cat ileal longitudinal muscle and it might operate as an electrogenic process.

  • PDF

The Effect of Glide Path on Canal Centering Ability in Reciprocating File System (Reciprocating 파일 시스템에서 Glide Path가 근관만곡도 유지에 미치는 영향)

  • Zang, Ki-Choul;Kim, Jin-Woo;Cho, Kyung-Mo;Park, Se-Hee
    • Journal of Dental Rehabilitation and Applied Science
    • /
    • v.28 no.3
    • /
    • pp.245-252
    • /
    • 2012
  • The purpose of this study was to evaluate the influence of glide path on canal centering ratio after instrumentation with different single file systems; WaveOne and Reciproc. Reciproc R25 (VDW), WaveOne Primary (Dentsply Maillefer) and PathFile #13, 16, 19 (Dentsply Maillefer) were used in this study. In no glide path groups, Reciproc files and WaveOne files used for canal preparation without glide path. In glide path groups, the PathFile were used before canal preparation. Methylene blue dye was introduced into the canal to obtain a clear pre-instrumentation image. Pre-instrumentation images and post-instrumentation images were scanned using Epson Perfection V700 Photo scanner (Epson, Nagano, Japan). Transparencies of post-instrumentation images were changed and superimposed on pre-instrumentation images using Adobe Photoshop CS 3 (Adobe Systems Incorporated, San Jose, CA, USA). The centering ratio was calculated for each instrumented canal using the following formula: CR=|X1-X2|/Y. It was statistically analyzed using two-way ANOVA at 95% confidential level. The centering ratio in glide path groups were significant less than it in no glide path groups at 3, 4, 5 and 6 mm level. Except 1 and 6 mm level, WaveOne groups had significant less centering ration than Reciproc groups. At 6 mm level, there was no significant difference between WaveOne and Reciproc. In the limitation of this study, creation of a previous glide path before reciprocating motion instrumentation in curved canal appears to be appropriate and WaveOne system can be used for preparation of curved canal without severe aberrations.

The Flow-rate Measurements in a Multi-phase Flow Pipeline by Using a Clamp-on Sealed Radioisotope Cross Correlation Flowmeter (투과 감마선 계측신호의 Cross correlation 기법 적용에 의한 다중상 유체의 유량측정)

  • Kim, Jin-Seop;Kim, Jong-Bum;Kim, Jae-Ho;Lee, Na-Young;Jung, Sung-Hee
    • Journal of Radiation Protection and Research
    • /
    • v.33 no.1
    • /
    • pp.13-20
    • /
    • 2008
  • The flow rate measurements in a multi-phase flow pipeline were evaluated quantitatively by means of a clamp-on sealed radioisotope based on a cross correlation signal processing technique. The flow rates were calculated by a determination of the transit time between two sealed gamma sources by using a cross correlation function following FFT filtering, then corrected with vapor fraction in the pipeline which was measured by the ${\gamma}$-ray attenuation method. The pipeline model was manufactured by acrylic resin(ID. 8 cm, L=3.5 m, t=10 mm), and the multi-phase flow patterns were realized by an injection of compressed $N_2$ gas. Two sealed gamma sources of $^{137}Cs$ (E=0.662 MeV, ${\Gamma}$ $factor=0.326\;R{\cdot}h^{-1}{\cdot}m^2{\cdot}Ci^{-1}$) of 20 mCi and 17 mCi, and radiation detectors of $2"{\times}2"$ NaI(Tl) scintillation counter (Eberline, SP-3) were used for this study. Under the given conditions(the distance between two sources: 4D(D; inner diameter), N/S ratio: $0.12{\sim}0.15$, sampling time ${\Delta}t$: 4msec), the measured flow rates showed the maximum. relative error of 1.7 % when compared to the real ones through the vapor content corrections($6.1\;%{\sim}9.2\;%$). From a subsequent experiment, it was proven that the closer the distance between the two sealed sources is, the more precise the measured flow rates are. Provided additional studies related to the selection of radioisotopes their activity, and an optimization of the experimental geometry are carried out, it is anticipated that a radioisotope application for flow rate measurements can be used as an important tool for monitoring multi-phase facilities belonging to petrochemical and refinery industries and contributes economically in the light of maintenance and control of them.

Element Dispersion and Wallrock Alteration from Samgwang Deposit (삼광광상의 모암변질과 원소분산)

  • Yoo, Bong-Chul;Lee, Gil-Jae;Lee, Jong-Kil;Ji, Eun-Kyung;Lee, Hyun-Koo
    • Economic and Environmental Geology
    • /
    • v.42 no.3
    • /
    • pp.177-193
    • /
    • 2009
  • The Samgwang deposit consists of eight massive mesothermal quartz veins that filled NE and NW-striking fractures along fault zones in Precambrian granitic gneiss of the Gyeonggi massif. The mineralogy and paragenesis of the veins allow two separate discrete mineralization episodes(stage I=quartz and calcite stage, stage II-calcite stage) to be recognized, temporally separated by a major faulting event. The ore minerals are contained within quartz and calcite associated with fracturing and healing of veins that occurred during both mineralization episodes. The hydrothermal alteration of stage I is sericitization, chloritization, carbonitization, pyritization, silicification and argillization. Sericitic zone occurs near and at quartz vein and include mainly sericite, quartz, and minor illite, carbonates and chlorite. Chloritic zone occurs far from quartz vein and is composed of mainly chlorite, quartz and minor sericite, carbonates and epidote. Fe/(Fe+Mg) ratios of sericite and chlorite range 0.45 to 0.50(0.48$\pm$0.02) and 0.74 to 0.81(0.77$\pm$0.03), and belong to muscovite-petzite series and brunsvigite, respectiveIy. Calculated $Al_{IV}$-FE/(FE+Mg) diagrams of sericite and chlorite suggest that this can be a reliable indicator of alteration temperature in Au-Ag deposits. Calculated activities of chlorite end member are $a3(Fe_5Al_2Si_3O_{10}(OH)_6$=0.0275${\sim}$0.0413, $a2(Mg_5Al_2Si_3O_{10}(OH)_6$=1.18E-10${\sim}$7.79E-7, $a1(Mg_6Si_4O_{10}(OH)_6$=4.92E-10${\sim}$9.29E-7. It suggest that chlorite from the Samgwang deposit is iron-rich chlorite formed due to decreasing temperature from high temperature(T>450$^{\circ}C$). Calculated ${\alpha}Na^+$, ${\alpha}K^+$, ${\alpha}Ca^{2+}$, ${\alpha}Mg^{2+}$ and pH values during wallrock alteration are 0.0476($400^{\circ}C$), 0.0863($350^{\circ}C$), 0.0154($400^{\circ}C$), 0.0231($350^{\circ}C$), 2.42E-11($400^{\circ}C$), 7.07E-10($350^{\circ}C$), 1.59E-12($400^{\circ}C$), 1.77E-11($350^{\circ}C$), 5.4${\sim}$6.4($400^{\circ}C$), 5.3${\sim}$5.7($350^{\circ}C$)respectively. Gain elements(enrichment elements) during wallrock alteration are $TiO_2$, $Fe_2O_3(T)$,CaO, MnO, MgO, As, Ag, Cu, Zn, Ni, Co, W, V, Br, Cs, Rb, Sc, Bi, Nb, Sb, Se, Sn and Lu. Elements(Ag, As, Zn, Sc, Sb, Rb, S, $CO_2$) represents a potential tools for exploration in mesothermal and epithermal gold-silver deposits.

TCO 박막의 결정 구조 및 표면 특성에 따른 OLED 소자의 특성

  • Lee, Bong-Geun;Lee, Yu-Rim;Lee, Gyu-Man
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.11a
    • /
    • pp.183-183
    • /
    • 2009
  • OLED소자의 양극재료로써 현재는 산화인듐주석(ITO : indium tin oxide) 박막이 널리 이용되고 있다. 그러나 낮은 전기 비저항과 높은 투과도를 갖는 ITO 박막을 얻기 위해서는 $300^{\circ}C$ 이상의 고온에서 성막되어야 하며, 원료 물질인 인듐의 수급량 부족으로 인한 문제점과 독성, 저온증착의 어려움, 스퍼터링 시 음이온 충격에 의한 막 손상으로 저항의 증가의 문제점이 있고, 또한 유기발광소자의 투명전극으로 쓰일 경우에 유기물과의 계면 부적합성, 액정디스플레이의 투명전극으로 사용될 경우에 $400^{\circ}C$정도의 놓은 온도와 수소 플라즈마 분위기에서 장시간 노출 시 열화로 인한 광학적 특성변화가 문제가 된다. 이러한 문제점을 지닌 ITO 박막을 대체할 수 있는 물질로 산화 인듐아연(lZO) 박막이 많은 각광을 받고 있다. IZO(Indium Zinc Oxide) 박막은 저온 ($100^{\circ}C$ 이상)에서 증착이 가능하고 추가적인 열처리 없이도 가시광 영역에서 90% 이상의 광 투과도와 ${\sim}10^{-4}{\Omega}cm$ 이하의 낳은 전기 비저항을 갖는 것으로 알려져 있다. 이러한 IZO박막은 성막 후 고온의 열처리 과정이 필요 없기 때문에 폴리카보네이트와 같은 유기물 기판을 사용하여 제작 가능한 유연한 평판형 표시 소자의 제작에도 적용될 수 있다. IZO(Indium Zinc Oxide) 박막은 상온 공정에서도 우수한 전기적, 광학적, 표면 특성을 나타낼 뿐만 아니라 양극재료로써 높은 일함수를 가지고 있어 고효율의 유기 발광 소자를 구현하는데 유리한 재료라 판단된다. 본 연구에서는 TCO 박막의 면 저항과 표면 거칠기가 OLED 소자의 성능에 미치는 영향을 조사하였다. R.F Magnetron Sputtering을 이용하여 투명 전도막을 성막 형성 하였으며, 기판온도와 증착과정에서 주입되는 산소, 수소의 유랑 변화가 박막의 구조적, 전기적 특성에 어떠한 영향 미치는 것인가를 자세히 규명하였다 ITO 와 IZO박막은 챔버 내 다양한 가스 분위기(Ar, $Ar+O_2$ and $Ar+H_2$) 에서 R.F Magnetron Sputtering 방법으로 증착했다. TCO박막의 구조적인 이해를 돕기 위해서 X-ray diffraction 과 FESEM으로 분석했다. 광학적 투과도와 박막의 두께는 Ultraviolet Spectrophotometer(Varian, cary-500)와 Surface profile mersurement system으로 각각 측정하였다. 면저항, charge carrier농도, 그리고 TCO박막의 이동성과 길은 전기적특성은 Four-point probe와 Hall Effect Measurement(HMS-3000)로 각각 측정한다. TCO 박막의 표면 거칠기에 따른 OLED소자의 성능분석 측면에서는 TCO 박막의 표면 거칠기 조절을 위해 photo lithography 공정을 사용하여 TCO 박막을 에칭 하였다. 미세사이즈 패턴 마스크가 사용되고 에칭의 깊이는 에칭시간에 따라 조절한다. TCO박막의 표면 형태는 FESEM과 AFM으로 관찰하고 그리고 나서 유기메탈과 음극 전극을 연속적으로 TCO 박막위에 증착한다. 투명전극으로 사용되는 IZO기판 상용화를 위해 IZO기판 위에 $\alpha$-NPB, Alq3, LiF, Al순서로 OLED소자를 제작하였다. 전류밀도와 전압 그리고 발광과 OLED소자의 전압과 같은 전기적 특성은 Spectrometer (minolta CS-1000A) 에 의하여 I-V-L분석을 했다.

  • PDF

Performance of OLED devices with the surface characteristics of TCO thin films (투명전도성 박막의 표면 특성에 따른 OLED 소자의 특성)

  • Lee, Bong-Kun;Lee, Yu-Lim;Lee, Kyu-Mann
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.06a
    • /
    • pp.313-313
    • /
    • 2009
  • OLED 소자는 직접발광, 광시야각, 그리고 빠른 응답속도 때문에 동영상에 적합하여 최근 각광받고 있는 디스플레이장치 중의 하나이다. OLED 소자의 양극재료로는 높은 광투과율과 $\sim10^{-4}{\Omega}\;cm$ 수준의 낮은 전기 비저항을 갖는 ITO (Sn-doped $In_2O_3$)가 널리 사용되고 있다. 하지만 원료 물질인 인듐의 수급량 부족으로 인한 문제점과 독성, 저온증착의 어려움, 스퍼터링시 음이온 충격에 의한 막 손상으로 저항의 증가의 문제점이 있고, 또한 액정디스플레이의 투명전극으로 사용될 경우 $400\;^{\circ}C$정도의 높은 온도와 수소 플라즈마 분위기에서 장시간 노출 시 열화로 인한 광학적 특성변화가 문제가 된다. 반면에 Al이 도핑 된 ZnO (AZO)박막은 넓은 밴드갭 (3.37eV)와 400nm에서 700nm 사이의 가시광 영역에서 80% 이상의 우수한 투과성을 지니고 있다. 특히 Al이 도핑된 ZnO는 박막의 전기적 특성이 크게 향상되어 디스플레이나 태양전지로의 응용이 가능하다. 또한 비교적 낮은 비용과 플라즈마에서의 안정성, 무독성, 그리고 전기전도성과 같은 많은 이점이 있다. 그 결과 AZO 박막은 ITO기판을 대안하는 지원물질로 활발히 연구가 진행되고 있다. 본 연구에서는 TCO 박막의 면 저항과 표면 거칠기에 따른 OLED 소자의 특성을 분석하였다. ITO와 AZO 박막은 챔버 내 다양한 가스 분위기(Ar, Ar+$O_2$ and Ar+$H_2$)에서 R.F Magnetron Sputtering방법으로 증착하였다. TCO 박막의 구조적인 이해를 돕기 위해서 X-ray diffraction 과 FESEM으로 분석하였다. 광학적 투과도와 박막의 두께는 ultraviolet spectrophotometer (Varian, cary-500)와 surface profile measurement system으로 각각 측정하였다. 면저항 charge carrier 농도, 그리고 TCO 박막의 이동도와 같은 전기적특성은 four-point probe와 hall effect measurement(HMS-3000)로 각각 측정하였다. TCO 박막의 표면 거칠기 조절을 위해 photo lithography 공정을 사용하여 TCO 박막을 화학에칭 하였다. 미세사이즈 패턴 마스크가 사용되었으며 에칭의 깊이는 에칭시간에 따라 조절하였다. TCO 박막의 표면 형태는 FESEM과 AFM으로 관찰하였다. 투명전극으로 사용되는 ITO 및 AZO 기판 상용화를 위해 ITO 및 AZO 기판 위에 ${\alpha}$-NPB, Alq3, LiF, Al 의 순서로 증착 및 패터닝함으로써 OLED 소자를 제작하였다. 전류밀도와 전압 그리고 발광휘도와 전압과 같은 전기적 특성은 spectrometer(minolta CS-1000A)를 이용하여 측정하였다.

  • PDF

The Color Characteristics of Masculinity Presented in Modern Women's Suit - Focus on the Paris, London, New York and Milan Collections from 2004 F/W to 2006 F/W - (현대 여성 수트에 있어서 남성성(masculinity)을 나타내는 색채 특성 - 2004~2006년 F/W의 파리, 런던, 뉴욕, 밀라노 컬렉션을 중심으로 -)

  • Kwon, Ji-Hyun;Kim , Young-In
    • Journal of the Korean Society of Costume
    • /
    • v.58 no.2
    • /
    • pp.62-77
    • /
    • 2008
  • This study aims to analyze color characteristics centered by women's suit styles that represent masculinity remarkably. Through this, it figures out color's type and continuance availability as a representing tool to express masculinity to provide useful color information which can be applied effectively to various color planning. For this research, related images were collected among women's pants suits appeared in $2004{\sim}2006's$ Paris, London, New York and Milan collection F/W that are most similar to modern man's suit. Among them, the study analyzes 319 pictures where the features of masculinity were represented effectively. The referred color values were earned by converting $L^*a^*b^*$ values measured through the color extracting tool of Computer program (Adobe Photoshop CS) and color tone characteristic were analyzed by classifying 12 color PCCS and 5 achromatic colors. The result of the study are as follows: First, based on standard of color hue and tone, in terms of color hue, PB, YR, Y were frequently shown up but G, BG series were not found much after analyzing overall women's pants suit color characteristics shown in $2004{\sim}2006$ Paris, London, New York and Milan collection. Second, the color analysis about 3years of $2004{\sim}2006$ tells that achromatic colors have been most widely used in every year. In terms of color hue, PB, YR, Y series were appeared most popular and G, BG classes weren't appeared frequently. In addition, once looking at yearly color tone distribution trend, like overall color tone distribution result, Bk, w, dkg, g, p were highly used as sequential and b, v, dp, sf, ItGy series show low distribution level. And such a distribution level of low and high in frequency has been showed continuously as a similar style. Accordingly, through the study, as a tool to express masculinity in women's suit, achromatic colors like black and white series and PB, YR, Y series color were investigated as most popular uses. And as color tones, Bk, w, dkg, g, p were used frequently.

Thermal characteristics of $W_{67}N_{33}$/GaAs structure (PECVD방법으로 형성한 $W_{67}N_{33}$/GaAs구조의 열적 특성)

  • Lee, Se-Jeong;Hong, Jong-Seong;Lee, Chang-U;Lee, Jong-Mu;Kim, Yong-Tae;Min, Seok-Gi
    • Korean Journal of Materials Research
    • /
    • v.3 no.5
    • /
    • pp.443-450
    • /
    • 1993
  • Self-alignment gatc Schottky contact structure on Si- implanted GaAs was formed by plasma enhanced chemical vapor dcposirion. Tungsten nitride thin films (ahclut 1600$\AA$) \vcre dopositcd on GaAs at $350^{\circ}C$ in order to fahricarc GaAs 1Cs and ttwn rapidly annealed at $750^{\circ}C$ to $900^{\circ}C$. Thermal charac tcristics of PECVD)-$W_{67}N_{43}$/GaAs structure were investigated by X-ray diffraction, photolumintesccnce. and optical deep level transient specrroscopy. Results revealed that $W_{67}N_{33}$ gate was more thermally sta ble with GaAs substrate than W gate and Si atoms implanted In $W_{67}N_{33}$/GaAs structure became morr active than those In W/GaAs after annealing. I-V characteristics of $W_{67}N_{33}$/GaAs diod c exhibired a nearly ideal diode behavior. The termal stability of $W_{67}N_{33}$/GaAs diode was better than that of W/GaAs diode with the post annealing at temperatures from 800 to $900^{\circ}C$ for 20s without As overpressure.

  • PDF