• Journal of the Microelectronics and Packaging Society
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• v.6 no.4
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• pp.1-7
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• 1999

We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.16 no.3
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• pp.121-126
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• 2006

HVOF thermal spray coating of Co-alloy T800 is progressively replacing the classical hard coatings such as chrome plating because of the very toxic $Cr^{6+}$ ion known as carcinogen causing lung cancer. For the study of the possibility of replacing of chrome plating, the wear properties of HVOF Co-alloy T800 coatings are investigated using the reciprocating sliding tester both at room and at an elevated temperature of $1000^{\circ}F\;(538^{\circ}C)$. The possibility as durability improvement coating is studied for the application to the high speed spindles vulnerable to frictional heat and wear. Wear mechanisms at the reciprocating sliding wear test are studied for the application to the systems similar to the sliding test such as high speed spindles. Wear debris and frictional coefficients of T800 coatings both at room and at an elevated temperature of $1000^{\circ}F\;(538^{\circ}C)$ are drastically reduced compared to those of non-coated surface of parent substrate Inconel 718. This study shows that the coating is recommendable for the durability improvement coatings on the surfaces vulnerable to frictional heat. The sliding surfaces are weared by the mixed mechanisms such as oxidative wear, abrasion by the sliding ball slurry erosion by the mixture of solid particles and small drops of the melts and semi-melts of the attrited particles cavitation by the relative motions among the coating, sliding ball, the melts and semi-melts. and corrosive wear. The oxide particles and the melts and semi-melts play roles as solid and liquid lubricant reducing the wear and friction coefficient.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.16 no.6
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• pp.273-277
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• 2006

High velocity of oxy-fuel (HVOF) thermal spray coating is progressively replacing the other classical hard coatings such as chrome plating and ceramic coating by the classical methods, since the very toxic $Cr^{6+}$ ion is well known as carcinogen causing lung cancer, and the ceramic coatings are brittle. Co-alloy T800 powder is coated on the Inconel 718 substrates by the HVOF coating procesess developed by this laboratory. For the study of the possibility of replacing of chrome plating, the wear properties of HVOF Co-alloy T800 coatings are investigated using the reciprocating sliding tester with a counter sliding SUS 304 ball both at room and at an elevated temperature of $1000^{\circ}F\;(538^{\circ}C)$. The possibility as durability improvement coating is studied for the application to the high speed spindles vulnerable to frictional heat and wear. Wear mechanisms at the reciprocating sliding wear test are studied far the application to the systems similar to the sliding test such as high speed spindles. Wear debris and frictional coefficients of T800 coatings both at room and at an elevated temperature of $538^{\circ}C$ are drastically reduced compared to those of non-coated surface of Inconel 718 substrates. Wear traces and friction coefficients of both coated and non-coated surfaces are drastically reduced at a high temperature of $538^{\circ}C$ compared with those at room temperature. These show that the coating is highly recommendable far the durability Improvement coating on the surfaces vulnerable to frictional heat and wear.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.06a
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• pp.3-3
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• 2001

Recently TiN, TiAlN, CrN hardcoatings have adapted many industrial application such as die, mold and cutting tools because of good wear resistant and thermal stability. However, in terms of high speed process, general hard coatings have been limited by oxidation and thermal hardness drop. Especially in the case of PCB drill, high speed cutting and without lubricant process condition have not adapted these coatings until now. Therefore more recently, superhard nanocomposite coating which have superhard and good thermal stability have developed. In previous works, WC-TiAlN new nanocomposite film was investigated by cathodic arc ion plating system. Control of AI concentration, WC-TiAlN multi layer composite coating with controlled microstructure was carried out and provides additional enhancement of mechanical properties as well as oxidation resistance at elevated temperature. It is noted that microhardness ofWC-TiA1N multi layer composite coating increased up to 50 Gpa and got thermal stability about $900^{\circ}C$. In this study WC-TiAlN nanocomposite coating was deposited on PCB drill for enhancement of life time. The parameter was A1 concentration and plasma cleaning time for edge sharpness maintaining. The characteristic of WC-TiAlN film formation and wear behaviors are discussed with data from AlES, XRD, EDS and SEM analysis. Through field test, enhancement of life time for PCB drill was measured.

• Journal of the Korean institute of surface engineering
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• v.56 no.5
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• pp.289-298
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• 2023

In this study, the effect of drying temperature on characteristics of the trivalent chromate film on electroplated zinc was investigated. An zinc-electroplated iron specimen with a thickness of 5 ㎛ was used for chromate treatment. Chromate treatment was conducted in a solution diluted 10 times from a mixture of Cr(NO₃)₃·9H₂0 360 g/L, Co(NO₃)₂·6H₂O 60 g/L, Na₂SO₄ 60 g/L, NH₄F·HF 25 g/L, and NaOH 20 g/L. The zinc electroplated specimen was treated using the chromate solution with pH 2.0 at 25 ℃ for 60 s. Subsequently, chromate-treated samples were dried in an electric furnace for 2h with temperature varied from 25 to 125 ℃. The corrosion rate increased with the increase in the drying temperature, and the surface morphology of the chromate-treated film was observed using FE-SEM. When the drying temperature changed, the color of the chromate film changed from green to yellow, and the thickness of the film changed from 362 to 241 nm, respectively. Additionally, corrosion resistance was evaluated via a salt spray test.

• Korean Journal of Environmental Biology
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• v.34 no.2
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• pp.124-131
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• 2016

The toxic responses of flagellate Euglena agilis Carter to 8 heavy metals (Ag, Cd, Cr (VI), Cu, Hg, Ni, Pb, Zn) were measured using E. agilis system (E-Tox), an automated biomonitoring system. The E-Tox measures cell movement parameters, such as velocity, motility, and forms of the cells, as biological endpoints. $EC_{50}$ values from the E. agilis biomonitoring test were compared with the literature data from the tests with Daphnia magna, Vibrio fischeri and Euglena gracilis. Measurement of the E. agilis movement behavior and D. magna acute toxicity test were also conducted for the wastewater samples. E. agilis is less sensitive than D. magna but is comparable to or more sensitive than V. fischeri and E. gracilis for the heavy metals tested in this study. E. agilis shows prompt changes of these parameters for the toxic metal plating wastewater. Major advantages of the E-tox are automatic, easy to handle and fast ecotoxicity monitoring system compared to other biological test systems. These results imply that E. agilis biomonitoring test using E-Tox can be a putative ecotoxicity test as a good early warning tool for the monitoring of toxic wastewater.

• Journal of the Korean institute of surface engineering
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• v.39 no.4
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• pp.179-189
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• 2006

High velocity oxygen fuel(HVOF) thermal spray coating of WC-Co powder is one of the most promising candidate for the replacement of the traditional hard chrome plating and ceramics coating because of the environmental problem of the very toxic $Cr^{6+}$ known as carcinogen and the brittleness of ceramics coating. WC-Co micron and nano powder were coated by HVOF thermal spraying method for the study of durability improvement of the high speed spindle. Coatings were planned by Taguchi program for the four spray parameters of spray distance, flow rates of hydrogen, oxygen and powder feed rate. Optimal coating process was obtained by the studies of coating properties such as porosity, surface roughness, micro hardness, and micro structure. WC-Co micron and nano powder were coated on the Inconel 718 substrate by the optimal coating process obtained in this study. The wear behaviors were studied by the sliding wear tester at room temperature and at an elevated temperature of $500^{\circ}C$ for the application to high speed spindle. Sliding wear test was carried out for four most promising hard coatings of chrome coating, ceramics coatings such as $A1_2O_3,\;Cr_2O_3$ and HVOF Co-alloy T800 for the comparison of their wear behaviors. HVOF WC-Co coating was better than other coatings showing highest micro hardness of 1400 Hv and comparable friction coefficients with others. HVOF WC-Co coating is a strong candidate for the replacement of the traditional hard chrome plating for the high speed spindle.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.25 no.2
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• pp.42-53
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• 2020

In this study, heavy metal in road-deposited sediments (RDS) and marine sediment around Gwangyang Bay area have been investigated to assess the pollution status of metals and to understand the environmental impact of RDS as a potential source of metal pollution. Zn concentration for <63 ㎛ size fraction was the highest (2,982 mg/kg), followed by Cr, Ni, Pb, Cu, As, Cd, and Hg. Metal concentrations in RDS increased with decreasing particle size and relatively higher concentrations were observed around the metal waste and recycling facilities. For particle size in RDS smaller than 125 ㎛, EF values indicated that Zn was very high enrichment and Cr, Cd, Pb were significant enrichment. The concentrations of metals in marine sediments were mostly below the TEL value of sediment quality guidelines of Korea. However, the Zn concentrations has increased by 30~40% compared to 2010 year. The amounts of Zn, Cd and Pb in less than 125 ㎛ fraction where heavy metals can be easily transported by stormwater runoff accounted for 54% of the total RDS. The study area was greatly affected by Zn pollution due to corrosion of Zn plating materials by traffic activity as well as artificial activities related to the container logistics at Gwangyang container terminal. The fine particles of RDS are not only easily resuspended by wind and vehicle movement, but are also transported to the surrounding environments by runoff. Therefore, further research is needed on the adverse effects on the environment and ecosystem.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.7
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• pp.718-728
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• 2013

Analysis of scenarios of transportation oil and gas which produced in the Arctic and others cold seas shows that in the near-term there will be a significant increase of tonnage of tankers for oil and gas and number of ships which should be exploited in difficult ice conditions. For the construction of ice-resistant structures (IRS) intended for production of oil and gas and transportation of these products at ice-class vessels, calculating the load from ice to board the ship and on surface of supports of the platforms are the actuality and urgent tasks. These tasks have one basis in both cases: at beginning of the contact occurs fracture of edge of ice, then occurs compressing of rubble shattered of ice, then they extruding from contact area, after this next layer of ice begin to destruct. At calculating the strength of plating and elements construct of vessels, icebreakers and ice-resistant platforms the specific energy of mechanical destruction ice ${\epsilon}_{cr}$ is an important parameter. For the whole period of study of physical and mechanical characteristics of sea ice have been not many experimental studies various researchers to obtain numerical values of this energetic characteristic of the strength of ice by a method called Ball Drop Test. This study shows that the destruction of the ice from dynamic loading in zone of contact occurs in several cycles, and the ice destructed with a minimum numerical values of ${\epsilon}_{cr}$. The author offer this energy characteristic to take as a base value for the calculation of ice load on ships and offshore structures.

• Journal of the Korean institute of surface engineering
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• v.40 no.4
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• pp.170-174
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• 2007

High Velocity Oxygen Fuel (HVOF) thermal spray coating of nano size WC-Co powder (nWC-Co) has been studied as one of the most promising candidate for the possible replacement of the traditional hard plating in some area which causes environmental and health problems. nWC-Co powder was coated on Inconel 718 substrates by HVOF technique. The optimal coating process obtained from the best surface properties such as hardness and porosity is the process of oxygen flow rate (FR) 38 FMR, hydrogen FR 57 FMR and feed rate 35 g/min at spray distance 6 inch for both surface temperature $25^{\circ}C\;and\;500^{\circ}C$. In coating process a small portion of hard WC decomposes to less hard $W_2C$, W and C at the temperature higher than its decomposition temperature $1,250^{\circ}C$ resulting in hardness decrease and porosity increase. Friction coefficient increases with increasing coating surface temperature from 0.55-0.64 at $25^{\circ}C$ to 0.65-0.76 at $500^{\circ}C$ due to the increase of adhesion between coating and counter sliding surface. Hardness of nWC-Co is higher or comparable to those of other hard coatings, such as $Al_2O_3,\;Cr,\;Cr_2O_3$ and HVOF Tribaloy 400 (T400). This shows that nWC-Co is recommendable for durability improvement coating on machine components such as high speed spindle.