• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.190-194
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• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• 전력전자학회논문지
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• 제4권4호
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• pp.384-394
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• 1999

This paper deals with a fixed frequency full-bridge inverter type DC-DC high-power converter with high frequency high voltage(HFHV) transformer-coupled stage, which operates under quasi-resonant ZVS transition priciple in spite of a wide PWM-based voltage regulation processing and largely-changed load conditions. This multi-resonant(MR) converter topology is composed of a series capacitor-connected parallel resonant tank which makes the most of parasitic circuit reactive components of HFHV transformer and two additional quasi-resonant pole circuits incorporated into the bridge legs. The soft-switching operation and practical efficacy of this new converter circuit using the latest IGBTs are actually ascertained through 50kV trially-produced converter system operating using 20kHz/30kHz high voltage(HV) transformers which is applied for driving the diagnostic HV X-ray tube load in medical equipments. It is proved from a practical point of view that the switching losses of IGBTs and their electrical dynamic stresses relating to EMI noise can be considerably reduced under a high frequency(HF) switching-based phase-shift PWM control process for a load setting requirements.

• Journal of Communications and Networks
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• 제12권5호
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• pp.449-458
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• 2010

In this paper, we present a distributed resource allocation algorithm for multi-cell uplink systems that increases the weighted sum of the average data rates over the entire network under the average transmit power constraint of each mobile station. For the distributed operation, we arrange each base station (BS) to allocate the resource such that its own utility gets maximized in a noncooperative way. We define the utility such that it incorporates both the weighted sum of the average rates in each cell and the induced interference to other cells, which helps to instigate implicit cooperation among the cells. Since the data rates of different cells are coupled through inter-cell interferences, the resource allocation taken by each BS evolves over iterations. We establish that the resource allocation converges to a unique fixed point under reasonable assumptions. We demonstrate through computer simulations that the proposed algorithm can improve the weighted sum of the average rates substantially without requiring any coordination among the base stations.

• Korean Membrane Journal
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• 제7권1호
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• pp.1-18
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• 2005

The permeate flux decline due to membrane fouling can be addressed using a variety of theoretical stand-points. Judicious selection of an appropriate theory is a key toward successful prediction of the permeate flux. The essential criterion f3r such a decision appears to be a detailed characterization of the feed solution and membrane properties. Modem theories are capable of accurately predicting several properties of colloidal systems that are important in membrane separation processes from fundamental information pertaining to the particle size, charge, and solution ionic strength. Based on such information, it is relatively straight-forward to determine the properties of the concentrated colloidal dispersion in a polarized layer or the cake layer properties. Incorporation of such information in the framework of the standard theories of membrane filtration, namely, the convective diffusion equation coupled with an appropriate permeate transport model, can lead to reasonably accurate prediction of the permeate flux due to colloidal fouling. The schematic of the essential approach has been delineated in Figure 5. The modern approaches based on appropriate cell models appear to predict the permeate flux behavior in crossflow membrane filtration processes quite accurately without invoking novel theoretical descriptions of particle back transport mechanisms or depending on adjust-able parameters. Such agreements have been observed for a wide range of particle size ranging from small proteins like BSA (diameter ${\~}$6 nm) to latex suspensions (diameter ${\~}1\;{\mu}m$). There we, however, several areas that need further exploration. Some of these include: 1) A clear mechanistic description of the cake formation mechanisms that clearly identifies the disorder to order transition point in different colloidal systems. 2) Determining the structure of a cake layer based on the interparticle and hydrodynamic interactions instead of assuming a fixed geometrical structure on the basis of cell models. 3) Performing well controlled experiments where the cake deposition mechanism can be observed for small colloidal particles (< $1\;{\mu}m$). 4) A clear mechanistic description of the critical operating conditions (for instance, critical pressure) which can minimize the propensity of colloidal membrane fluting. 5) Developing theoretical approaches to account for polydisperse systems that can render the models capable of handing realistic feed solutions typically encountered in diverse applications of membrane filtration.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.179-200
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• 1996

The intrinsic instabilities of fluid flow occurred in the melt of the Czochralski crystal growth system Czochralski method, asymmetric flow patterns and temperature profiles in the melt have been studied by many researchers. The idea that the non-symmetric structure of the growing equipment is responsible for the asymmetric profiles is usually accepted at the first time. However further researches revealed that some intrinsic instabilities not related to the non-symmetric equipment structure in the melt could also appear. Ristorcelli had pointed out that there are many possible causes of instabilities in the melt. The instabilities appears because of the coupling effects of fluid flow and temperature profiles in the melt. Among the instabilities, the B nard type instabilities with no or low crucible rotation rates are analyzed by the visualizing experiments using X-ray radiography and the 3-D numerical simulation in this study. The velocity profiles in the Silicon melt at different crucible rotation rates were measured using X-ray radiography method using tungsten tracers in the melt. The results showed that there exits two types of fluid flow mode. One is axisymmetric flow, the other is asymmetric flow. In the axisymmetric flow, the trajectory of the tracers show torus pattern. However, more exact measurement of the axisymmetrc case shows that this flow field has small non-axisymmetric components of the velocity. When fluid flow is asymmetric, the tracers show random motion from the fixed view point. On the other hand, when the observer rotates to the same velocity of the crucible, the trajectory of the tracer show a rotating motion, the center of the motion is not same the center of the melt. The temperature of a point in the melt were measured using thermocouples with different rotating rates. Measured temperatures oscillated. Such kind of oscillations are also measured by the other researchers. The behavior of temperature oscillations were quite different between at low rotations and at high rotations. Above experimental results means that the fluid flow and temperature profiles in the melt is not symmetric, and then the mode of the asymmetric is changed when rotation rates are changed. To compare with these experimental results, the fluid flow and temperature profiles at no rotation and 8 rpm of crucible rotation rates on the same size of crucible is calculated using a 3-dimensional numerical simulation. A finite different method is adopted for this simulation. 50×30×30 grids are used. The numerical simulation also showed that the velocity and flow profiles are changed when rotation rates change. Futhermore, the flow patterns and temperature profiles of both cases are not axisymmetric even though axisymmetric boundary conditions are used. Several cells appear at no rotation. The cells are formed by the unstable vertical temperature profiles (upper region is colder than lower part) beneath the free surface of the melt. When the temperature profile is combined with density difference (Rayleigh-B nard instability) or surface tension difference (Marangoni-B nard instability) on temperature, cell structures are naturally formed. Both sources of instabilities are coupled to the cell structures in the melt of the Czochralski process. With high rotation rates, the shape of the fluid field is changed to another type of asymmetric profile. Because of the velocity profile, isothermal lines on the plane vertical to the centerline change to elliptic. When the velocity profiles are plotted at the rotating view point, two vortices appear at the both sides of centerline. These vortices seem to be the main reason of the tracer behavior shown in the asymmetric velocity experiment. This profile is quite similar to the profiles created by the baroclinic instability on the rotating annulus. The temperature profiles obtained from the numerical calculations and Fourier transforms of it are quite similar to the results of the experiment. bove esults intend that at least two types of intrinsic instabilities can occur in the melt of Czochralski growing systems. Because the instabilities cause temperature fluctuations in the melt and near the crystal-melt interface, some defects may be generated by them. When the crucible size becomes large, the intensity of the instabilities should increase. Therefore, to produce large single crystals with good quality, the behavior of the intrinsic instabilities in the melt as well as the effects of the instabilities on the defects in the ingot should be studied. As one of the cause of the defects in the large diameter Silicon single crystal grown by the