• Title/Summary/Keyword: Cost of uniformity

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The Minimization of Residual Layer Thickness by using optimized dispensing method in UVnanoimprint Lithography Process (UV 나노임프린트 리소그래피 공정에서 레지스트 도포의 최적화를 통한 잔류층 두께의 최소화)

  • Kim K.D.;Jeong J.H.;Sim Y.S.;Lee E.S.;Kim J.H.;Cho Y.K.;Hong S.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.633-636
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    • 2005
  • Imprint lithography is a promising method for high-resolution and high-throughput lithography using low-cost equipment. As with other nanoimprint methods, ultraviolet-nanoimprint lithography (UV-NIL) resolution appears to be limited only by template resolution, and offers a significant cost of ownership reduction when compared to other next generation lithography (NGL) methods such as EUVL and 157 nm lithography. The purpose of this paper is to suggest optimum values of control parameters of Imprio 100 manufactured by Molecular Imprint, Inc., which is the first commercially available UV-NIL tool, for sound nanoimprint. UV-NIL experiments were performed on Imprio 100 to find dispensing recipe for avoiding air entrapment. Dispensing recipe related to residual layer thickness and uniformity was optimized and 40 nm thick residual layer was achieved.

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Design Improvement and Performance Evaluation of 20kHz Horn for Ultrasonic Cutting (20kHz 초음파 커팅용 혼의 설계 개선과 성능평가)

  • Seo, Jeong Seok;Lee, Yoon Jeong;Kim, Jin Wook;Park, Dong Sam
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.5
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    • pp.135-140
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    • 2013
  • Ultrasonic cutting is a kind of eco-technique and cost-effective technique to be used for cutting of various materials such as baked product, fresh/frozen food, rubber, textile, wood, bone, etc. The performance of ultrasonic cutting is affected by design of cutting horn and cutting conditions. Specially the design of horn to resonate at the longitudinal direction is most important. To analyze the problems from which cracking and noise are often generated with conventional cutting horn, FEA is carried out, and then improved cutting horn which can reduce maximum stress and stress concentration is designed. Vibration characteristics, resonant frequency, gain, and amplitude uniformity of the cutting horn designed optimally are evaluated through FFT analysis and compared with those of conventional cutting horn.

Development of Induction Heating Apparatus for Rapid Heating of Metallic Mold (미세 임프린팅용 금속몰드의 급속가열을 위한 유도가열기구 개발)

  • Hong, S.K.;Lee, S.H.;Heo, Y.M.;Kang, J.J.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.199-204
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    • 2007
  • Hot embossing, one of Nanoimprint Lithography(NIL) techniques, has been getting attention as an alternative candidate of next generation patterning technologies by the advantages of simplicity and low cost compared to conventional photolithographies. A typical hot embossing usually, however, takes more than ten minutes for one cycle of the process because of a long thermal cycling. Over the last few years a number of studies have been made to reduce the cycle time for hot embossing or similar patterning processes. The target of this research is to develop an induction heating apparatus for heating a metallic micro patterning mold at very high speed with the large-area uniformity of temperature distribution. It was found that a 0.5 mm-thick nickel mold can be heated from $25^{\circ}C$ to $150^{\circ}C$ within 1.5 seconds with the temperature variation of ${\pm}5^{\circ}C$ in 4-inch diameter area, using the induction heating apparatus.

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A Study on the expectation of residual layer thickness in roller pressing imprint process (롤러 가압 임프린트 공정에서 잔류막 두께 예측에 관한 연구)

  • Cho, Young Tae;Jung, Yoon-Gyo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.1
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    • pp.104-109
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    • 2013
  • In order to apply nano imprint technology in large area process, roller pressing is promising because of its low cost and high productivity. When pressing mold by roller, liquid resin is locally squeezed between mold and substrate. In this study, the main focus is to understand which process parameter affects residual layer. To do this, a simple analytical model was introduced. Especially, we consider the aspect ratio of patterns as essential cause of variation of the thickness in the equation. As a result, when the aspect ratio of pattern in the mold increases, the thickness of residual layer also increases. In conclusion, we show that the uniformity of residual layer could be accomplished by the control of velocity and pressing force in roller pressing imprint process.

Measurement System of the Transverse Temperature Profile of Hot Rolled Strip (열간압연공정에서의 스트립 폭방향온도 모니터링시스템 개발)

  • Lee, Sung-Jin
    • Proceedings of the KSME Conference
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    • 2001.06c
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    • pp.197-201
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    • 2001
  • Output and cost efficiency in the production of hot-rolled strip depend to a large content on the uniformity of geometric and mechanical properties over the length and width of the rolled end product. To ensure the homogeneous temperatures required for this during the rolling process a system to measure and evaluate the transverse temperature profile was developed and implemented in production. The systems used consist of temperature scanners and computers for measurement and data evaluation. The systems have been installed in Kwangyang hot strip mills, in the cases at the exit of the finishing train and at the entry of the coiler. They are used in production to determine the effect of the finishing train and the cooling zone on the technological properties of the hot rolled strip.

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Design and Software Implementation of Noise Reduction Filter for Mid-wave Infrared Images (중적외선 영상 잡음 감소를 위한 SW 필터의 설계 및 구현)

  • Park, Hyunsung;Kim, Jungho;Lee, Sungho
    • Journal of the Korea Institute of Military Science and Technology
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    • v.19 no.4
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    • pp.500-507
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    • 2016
  • In order to increase the survivability of combatant ship, measuring and analyzing the infrared radiation is important. Consequently, providing analysis report is also important for the progress of the new combatant ship design. This paper proposes a design and software implementation of filtering for the noise reduction of mid-wave IR camera image. We reduced the total test cost by using the suggested software filtering technique instead of hardware replacement or re-calibration. In addition, we enhanced the accuracy of analysis results by adjusting the parameters of software filtering according to the results of filtered image.

Characteristic of size distribution of rock chip produced by rock cutting with a pick cutter

  • Jeong, Hoyoung;Jeon, Seokwon
    • Geomechanics and Engineering
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    • v.15 no.3
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    • pp.811-822
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    • 2018
  • Chip size distribution can be used to evaluate the cutting efficiency and to characterize the cutting behavior of rock during cutting and fragmentation process. In this study, a series of linear cutting tests was performed to investigate the effect of cutting conditions (specifically cut spacing and penetration depth) on the production and size distribution of rock chips. Linyi sandstone from China was used in the linear cutting tests. After each run of linear cutting machine test, the rock chips were collected and their size distribution was analyzed using a sieving test and image processing. Image processing can rapidly and cost-effectively provide useful information of size distribution. Rosin-Rammer distribution pamameters, the coarseness index and the coefficients of uniformity and curvature were determined by image processing for different cutting conditions. The size of the rock chips was greatest at the optimum cut spacing, and the size distribution parameters were highly correlated with cutter forces and specific energy.

Experimental Demonstration of Holographic Demultiplexer using Volume Diffraction Grating Based on Photopolymer

  • An, Jun-Won;Kim, Nam;Lee, Kwon-Yeon;Gil, Sang-Keun
    • Journal of the Optical Society of Korea
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    • v.6 no.4
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    • pp.141-164
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    • 2002
  • A 42 channel demultiplexer for dense wavelength division multiplexing(WDM) using photopoly-mer volumetric diffraction grating that has excellent optical properties and low cost capability, has been designed and optically demonstrated. From the experimental results, we have obtained the 3 dB bandwidth of 0.18 nm, crosstalk suppression of 20 dB and channel uniformity of 1.6 dB for 50 GHB channel spacing.

Precision enhancement for a CCD/LSB type shape measuring system (CCD/LSB 방식의 형상측정시스템의 정밀도 향상 방법)

  • 유주상;정규원
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.04a
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    • pp.137-142
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    • 2001
  • Since recent production system becomes that of the small quantity, large volume with high quality production, accurate and high speed inspection system is required. In such situation, noncontact 3D measurement system which utilized CCD cameras is useful technique in terms of system cost, speed of data acquisition, measuring accuracy and application. However, it has low accuracy compared with contact 3D measurement system because of the camera distortion, non uniformity of laser distribution and so on. For those reasons, in this paper precision enhancement method is studied considering radial camera distortion, and laser distribution. A distortion correction method is applied even to the standard lens. The laser slit beam trajectory is determined by 3 method: based of the Gaussian function signal approximation, the median method, the center of gravity method and the peak point of the Gaussian function method.

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Effect of viscosity of paste and speed of printing on green transparent dielectric during screen printing process in PDP

  • Cha, Gun-Young;Huh, Jeung-Soo;Park, Jun-Hyun;Kim, Hyung-Sun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.1085-1087
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    • 2002
  • To have cost down and get improved image quality and performance of plasma display panel, several factors have been developed including development of low price material and improvement in production for PDP front plate. In this work, viscosity and surface characteristics of transparent dielectric were investigated to find the optimum and low price materials fabrication condition of transparent dielectric paste. It was found that uniformity and transmissivity of green and fired dielectrics had some relationship with the kinds and content of binder, and solvent as well.

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