• Journal of the Korean Ceramic Society
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• v.53 no.3
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• pp.349-353
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• 2016

We prepared a number of reaction-bonded silicon carbides (RBSCs) made from various mixing ratios of raw SiC particles, and investigated their microstructure and etch characteristics by Reactive Ion Etch (RIE). Increasing the amount of $9.5{\mu}m$-SiC particles results in a microstructure with relatively coarser Si regions. On the other hand, increasing that of $2.6{\mu}m$-SiC particles produces much finer Si regions. The addition of more than 50 wt% of $2.6{\mu}m$-SiC particles, however, causes the microstructure to become partially coarse. We also evaluated their etching behaviors in terms of surface roughness (Ra), density and weight changes, and microstructure development by employing Confocal Laser Scanning Microscope (CLSM) and Scanning Electron Microscope (SEM) techniques. During the etching process of the prepared samples, we confirmed that the residual Si region was rapidly removed and formed pits isolating SiC particles as islands. This leads to more intensified ion field on the SiC islands, and causes physical corrosion on them. Increased addition of $2.6{\mu}m$-SiC particles produces finer residual Si region, and thus decreases the surface roughness (Ra.) as well as causing weight loss after etching process by following the above etching mechanism.

• Laser Solutions
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• v.12 no.3
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• pp.18-22
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• 2009

Experimental results for the laser shock peening of stainless steels, duplex stainless steel and STS304, for the enhancement of surface hardness are reported. A high power Nd:YAG laser (532 nm, 2nd harmonics) was used to irradiate the workpiece in water at the irradiances of 5, 10, $15\;GW/cm^2$. The surface of a workpiece was covered with Fe or Al foil for protection of the original surface and reduction of laser reflection. The laser pulse densities were varied from $25\;pulse/mm^2$ to $75\;pulse/mm^2$. In the case of the STS304, the surface hardness increased with increasing pulse density and the maximum increase of about 29% was achieved using Fe foil at $10\;GW/cm^2$ and $75\;pulse/mm^2$ conditions. The maximum increase in surface hardness of duplex stainless steel was about 8% at $10\;GW/cm^2$ and $75\;pulse/mm^2$ with also Fe foil. In the case of the Al foil, less increase of surface hardness was obtained, possibly due to the thermal expansion effect.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.53 no.1
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• pp.89-97
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• 2017

Butanol has an ability to improve the ignition quality due to its lower latent heat of vaporization; it has an advantage to reduce a volume of a fuel tank because its energy density is higher than that of ethanol. Also, butanol-diesel oil blending quality is good because butanol has an effect to prevent the phase-separation between two fuels. Even if the blended oil contains water, it can reduce the corrosion of the fuel line. Thus, it is possible to use butanol-diesel oil blended fuel in diesel engine without modification, and it may reduce the environment pollution due to NOx and particulate and the consumption of diesel oil. Therefore, some studies are being advanced whether butanol is adequate as an alternative fuel for diesel engines, and the results of the combustion and exhaust gas emission characteristics are being presented. Though the injection and spray characteristics of butanol are more important in diesel combustion, the has not yet dealt with the matter. In this study, the influence in which differences of physical properties between butanol and diesel oil may affect the injection and spray characteristics such as injection rate, penetration, spray cone angle, spray velocity and process of spray development were examined by using CRDI system, injection rate measuring device and spray visualization system. The results exhibited that the injection and macroscopic spray characteristics of two fuels were nearly the same.

• Journal of the Korean Applied Science and Technology
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• v.35 no.3
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• pp.612-621
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• 2018

In this study, $TiO_2$ nanotube plate and metal electrodes(Copper, Nickel, Stainless Steel, Aluminum, Tin, Titanium) were compared on cathodic reduction of nitrate ($NO_3{^-}-N$) during electrolysis. The electrochemical characteristics were compared based on electrochemical impedance spectroscopy (EIS). The surface morphology was obtained using scanning electron microscopy (SEM) method. Brunauer-Emmett-Teller (BET) method was implemented for the specific surface area analysis of the cathodes. To study kinetics, 90 minute batch electrolysis of nitrate solution was performed for each cathodes. In conclusion, under the condition of relatively low ($0.04 A\;cm^{-2}$) current density, $TiO_2$ nanotube plate showed no surface corrosion during the electrolysis, and the reaction rate was measured the highest in the kinetic analysis.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.4
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• pp.65-69
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• 2012

Composite coating can be manufactured during the electroplating with the bath containing a suspension of particles: ceramic, polymer, nanopowders. Improvement of hardness, wear resistance, corrosion resistance and lubrication properties are well-known advantage of composite coating. In this study, nano $TiO_2$ powder dispersed Ni composite plating was investigated. The improvement of surface hardness and photo decomposition effects can be expected in this coating. Zeta potential was measured with pH. The effect of ultrasonication time and types of ultrasonicator were studied to minimize the agglomeration of $TiO_2$ nanopowders in the electrolyte. Optimum conditions for nano $TiO_2$ dispersed Ni composite coating were $40mA/cm^2$ of current density, pH 3.5, and $50^{\circ}C$. At these conditions, $TiO_2$ nanoparticles contents in the Ni deposit was 15-20 at.%.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2005.11a
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• pp.196-197
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• 2005

Cathodic protection is one of the successful ways to prevent corrosion of steel structures in marine environments. The unique feature of cathodic protection in seawater is the formation of calcareous deposits on cathodic metal surface. The formation principles of calcareous deposit seawater had been known for a long time. That is, cathodic reduction reactions associated with cathodic protection in seawater generate $OH^-$ at the metal surface in accordance with the formular ; 1/2 $O_2$ + $H_2O$ + $2e^-$ $2OH^-$ and $2H_2O$ + $2e^-$ ${\rightarrow}$ $H_2$ + $2OH^-$. These reactions increase the pH at the metal / seawater interface. The high pH causes precipitation of $Mg(OH)_2$ and $CaCO_3$ in accordance with the formular ; $Mg^{2+}$ + $2(OH)^-$ ${\rightarrow}$ $Mg(OH)_2$ and $Ca^{2+}$ + $HCO_3^-$ + $OH^-$ ${\rightarrow}$ $H_2O$ + $CaCO_3$. These are typically the main compounds in calcareous deposits. It obviously has several advantages compared to the conventional coatings, since the environment-friendly calcareous deposit coating is formed by the elements($Mg^{2+}$, $Ca^{2+}$) naturally present in seawater. In this study, environmental friendly calcareous deposit films were prepared on steel plates by electro plating technic in natural seawater. The influence of current density on composition ratio, structure and morphology of the coated films were investigated by scanning electron microscopy formation process of calcareous deposits films in natural seawater. And we confirmed the properties of all the films can be improved greatly by controlling the material structure and morphology with effective use of the electroplating method in natural seawater.

• Journal of Korea Foundry Society
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• v.29 no.6
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• pp.277-283
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• 2009

Recently an increase in production cost of 300 series stainless steel with a sudden increase in nickel cost has caused a decrease in demand for 300 series stainless steel so that 400 series stainless steel has begun to make a mark. Although 400 series stainless steel has good properties, it has a problem of lack of corrosion resistance. There is Ti in 400 series stainless steel alloys to solve the problem above and it has lower density than the others. For that reason, wire feeding process has been applied for adding Ti alloy in 400 series stainless steel. This paper presents consideration of variation on the depth of wire dissolution by conditions of wire feeding which are wire injection speed, the temperature of molten steel, wire diameter and bubble generation rate. The computer program for solution of conducting wire feeding has been developed in Flow3D.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.216-216
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• 1999

The usage of a stationary plasma thruster (SPT) ion source, invented previously for space application in Russia, in experiments with surface modifications and film deposition systems is reported here. Plasma in the SPT is formed and accelerated in electric discharge taking place in the crossed axial electric and radial magnetic fields. Brief description of the construction of specific model of SPT used in the experiments is presented. With gas flow rate 39ml/min, ion current distributions at several distances from the source are obtained. These was equal to 1~3 mA/$\textrm{cm}^2$ within an ion beam ejection angle of $\pm$20$^{\circ}$with discharge voltage 160V for Ar as a working gas. Such an extremely high ion current density allows us to obtain the Ti metal films with deposition rate of $\AA$/sec by sputtering of Ti target. It is shown a possibility of using of reactive gases in SPT (O2 and N2) along with high purity inert gases used for cathode to prevent the latter contamination. It is shown the SPT can be operated at the discharge and accelerating boltages up to 600V. The results of presented experiments show high promises of the SPT in sputtering and surface modification systems for deposition of oxide thin films on Si or polymer substrates for semiconductor devices, optical coatings and metal corrosion barrier layers. Also, we have been tried to establish in application of the modeling expertise gained in electric and ionic propulsion to permit numerical simulation of additional processing systems. In this mechanism, it will be compared with conventional DC sputtering for film microstructure, chemical composition and crystallographic considerations.

• Korean Journal of Materials Research
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• v.27 no.10
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• pp.524-529
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• 2017

The effect of strain aging on the tensile properties of API X70 linepipe steel was investigated in this study. The API X70 linepipe steel was fabricated by controlled rolling and accelerated cooling processes, and the microstructure was analyzed using optical and scanning electron microscopes and electron backscatter diffraction. Strain aging tests consisting of 1 % pre-strain and thermal aging at $200^{\circ}C$ and $250^{\circ}C$ were conducted to simulate U-forming, O-forming, Expansion(UOE) pipe forming and anti-corrosion coating processes. The API X70 linepipe steel was composed of polygonal ferrite, acicular ferrite, granular bainite, and bainitic ferrite whose volume fraction was dependent on the chemical composition and process conditions. As the thermal aging temperature increased, the steel specimens showed more clearly discontinuous type yielding behavior in the tensile stress-strain curve due to the formation of a Cottrell atmosphere. After pre-strain and thermal aging, the yield and tensile strengths increased and the yield-to-tensile strength ratio decreased because yielding and aging behaviors significantly affected work hardening. On the other hand, uniform and total elongations decreased after pre-strain and thermal aging since dislocation gliding was restricted by increased dislocation density after a 1 % pre-strain.