Effects of Mixing Ratio of Silicon Carbide Particles on the Etch Characteristics of Reaction-Bonded Silicon Carbide |
Jung, Youn-Woong
(Department of Advanced Materials Engineering, Korea Polytechnic University)
Im, Hangjoon (Department of Advanced Materials Engineering, Korea Polytechnic University) Kim, Young-Ju (R&D center, DSTechno Co., Ltd.) Park, Young-Sik (R&D center, DSTechno Co., Ltd.) Song, Jun-Baek (R&D center, DSTechno Co., Ltd.) Lee, Ju-Ho (R&D center, DSTechno Co., Ltd.) |
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