• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.142.2-142.2
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• 2015

Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

• Journal of Biosystems Engineering
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• v.28 no.1
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• pp.45-52
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• 2003

Red ginsengs are inspected manually by examining those in the dark room with back light illumination. Manual inspection is often influenced by physical condition of inspectors. Sometimes. the best grade, heaven. has some inner holes though it was inspected by a specialist. In order to resolve this problem, this study was performed to develop image processing algorithm to detect the inner holes in the x-ray image of ginseng. Because of little gray value difference between background and ginseng in the image. simple thresholding method was not appropriate. Modified watershed algorithm was used to differentiate the inner holes from background and normal ginseng body. Inner hole edge region detected by watershed algorithm consists of many number of blobs including normal portions. With line profile analysis with scanning one line at a time beginning the starting point. it shelved two peaks both ends representing extracting each blobs. in which setting threshold value as of lower peak value enabled us to obtain inner hole image. Once this procedure has to be done till the finishing point it is completing inner hole detection for one blob. Thus. conducting ail blobs by this procedure is completing inner detection of one whole ginseng. Detection results of the inner holes fer various size of red ginsengs were good even though there was small detection variation. 6.2%. according to position of x-rat tube.

• Smart Media Journal
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• v.6 no.3
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• pp.41-48
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• 2017

Event detection using social media has been widespread since social network services have been an active communication channel for connecting with others, diffusing news message. Especially, the real-time characteristic of social media has created the opportunity for supporting for real-time applications/systems. Social network such as Twitter is the potential data source to explore useful information by mining messages posted by the user community. This paper proposed a novel system for temporal event detection by analyzing social data. As a result, this information can be used by first responders, decision makers, or news agents to gain insight of the situation. The proposed approach takes advantages of deep learning methods that play core techniques on the main tasks including informative data identifying from a noisy environment and temporal event detection. The former is the responsibility of Convolutional Neural Network model trained from labeled Twitter data. The latter is for event detection supported by Recurrent Neural Network module. We demonstrated our approach and experimental results on the case study of earthquake situations. Our system is more adaptive than other systems used traditional methods since deep learning enables to extract the features of data without spending lots of time constructing feature by hand. This benefit makes our approach adaptive to extend to a new context of practice. Moreover, the proposed system promised to respond to acceptable delay within several minutes that will helpful mean for supporting news channel agents or belief plan in case of disaster events.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.26 no.4
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• pp.519-525
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• 2022

The face detection task of detecting a person's face in an image is used as a preprocess or core process in various image processing-based applications. The neural network models, which have recently been performing well with the development of deep learning, are dependent on 2D images, so if noise occurs in the image, such as poor camera quality or pool focus of the face, the face may not be detected properly. In this paper, we propose a face detection method that uses depth information together to reduce the dependence of 2D images. The proposed model was trained after generating and preprocessing depth information in advance using face detection dataset, and as a result, it was confirmed that the FRN model was 89.16%, which was about 1.2% better than the RetinaNet model, which showed 87.95%.

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.9 no.6
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• pp.65-70
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• 1995

This paper describes the detection of the ultrasonic signals reduced by materials of a transformer for diagnosis of the transformer using ultrasonic signal which is generated by partial discharge. When partial discharge is generated on the surface of the winding and between the winding and the core in the transformer, the ultrasonic signal can be measured as the proper selection of the ultrasonic detectors' location.

• Proceedings of the Korea Multimedia Society Conference
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• 2012.05a
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• pp.102-105
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• 2012

ONVIF is becoming a de factor standard specification for supporting interoperability among network video products, which also supports a specification for video analytics service. A smart IP network camera is an IP network supporting video analytics. In this paper, we present our efforts in integrating ONVIF Video Analytics Service into our currently developing smart IP network camera(SS IPNC; Soongsil Smart IP Network Camera). SSIPNC supports object detection, tracking, classification, and event detection with proprietary configuration protocol and meta data formats. SSIPNC is based on TI' IPNC ONVIF implementation which supports ONVI Core specification, and several ONVIF services such as device service, imaging service and media service, but not video analytics service.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2402-2406
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• 2005

A collision query determines the intersection between given objects, and is used in computer-aided design and manufacturing, animation and simulation systems, and physically-based modeling. Bounding volume hierarchies are one of the simplest and most widely used data structures for performing collision detection on complex models. In this paper, we present hierarchy of oriented rounded bounding volume for fast proximity queries. Designing hierarchies of new bounding volumes, we use to combine multiple bounding volume types in a single hierarchy. The new bounding volume corresponds to geometric shape composed of a core primitive shape grown outward by some offset such as the Minkowski sum of rectangular box and a sphere shape. In the experiment of parallel close proximity, a number of benchmarks to measure the performance of the new bounding box and compare to that of other bounding volumes.

• Journal of the Korea Safety Management & Science
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• v.13 no.2
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• pp.147-155
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• 2011

For an effective energy management in intelligent buildings it is necessary to gather information about position/absence of people and the level of population. In this paper the smart occupancy detection system based on the active RFID is developed to satisfy such a demand. The performance of the developed system is tested and verified through various experiments. Furthermore the feasibility test of the active RFID tag is performed to verify whether it can be used as a location-based occupancy sensor. The developed core technology can be also applied to other fields such as security, healthcare, smart home, etc.

• Current Optics and Photonics
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• v.4 no.4
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• pp.277-285
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• 2020

Computer-generated holograms (CGH) are the core devices to solve the problem of freeform surface measurement. In view of the overlay error introduced in the manufacturing process of CGH, this paper proposes an evaluation model for analyzing the overlay error of CGH. The detection method of extracting CGH profile information by an ultra-depth of field micro-measurement system is presented. Furthermore, based on the detection method and technical scheme, the effect of overlay error on the wavefront accuracy of CGH can be evaluated.

• Proceedings of the Korea Information Processing Society Conference
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• 2020.05a
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• pp.595-598
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• 2020

IoU (Intersection over Union) is the most commonly used index in target detection. The core requirement of target detection is what is in the image and where. Based on these two problems, classification training and positional regression training are needed. However, in the process of position regression, the most commonly used method is to obtain the IoU of the predicted bounding box and ground-truth bounding box. Calculating bounding box regression losses should take into account three important geometric measures, namely the overlap area, the distance, and the aspect ratio. Although GIoU (Generalized Intersection over Union) improves the calculation function of image overlap degree, it still can't represent the distance and aspect ratio of the graph well. As a result of technological progress, Bounding-Box is no longer represented by coordinates x,y,w and h of four positions. Therefore, the IoU can be further optimized with the center point and aspect ratio of Bounding-Box.