• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.188-188
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.10
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• pp.598-602
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• 2018

This study examined the characteristics of the waste catalyst used in the petroleum refinery operations. The total pore volume, specific surface area, and average pore size of the spent catalyst used in the petroleum refinery operations were 3.96cc/g, 13.81m2/g, and 1.15A, respectively. The weight loss observed in the range from $25^{\circ}C-700^{\circ}C$ for the spent catalysts using TG and DTA was approximately 23 wt. %. EDS analysis of the waste catalyst sample showed that the five major components were vanadium, nickel, manganese, iron, and copper. The extraction system is attractive for liquid-liquid extraction. In this study, Cynex 272 was used to extract vanadium from waste catalyst. The electrochemical characteristics of the extracted vanadium solution were measured by cyclic voltammetry (CV). As a result, an oxidation / reduction peak appeared, indicating the potential of an electrolytic solution.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.41.2-41.2
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

• Applied Chemistry for Engineering
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• v.3 no.4
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• pp.717-721
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• 1992

Mechanical mixtures of vanadium molybdate and copper molybdate catalysts prepared by coprecipitation method, and those of $MoO_3$ and $V_2O_5$ were used to study the synergistic effects between each metal oxide for the selective oxidation of acrolein. The catalytic activity results revealed that the conversion of acrolein and yield of acrylic acid were increased with the mixture catalysts and it could be explained by a remote control mechanism. Thermal gravimetric analysis confirmed the evolution of lattice oxygen in the mixture catalysts.

• Journal of the Korean Electrochemical Society
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• v.3 no.4
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• pp.219-223
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• 2000

All-solid state lithium rechargeable thin film batteries were fabricated with the configuration of$Cu_{0.5}V_2O_5/Lipon/Li$ using sequential thin film techniques. Copper vanadium oxide thin films and Lipon thin films were prepared by DC reactive dual source magnetron sputtering and RF magnetron sputtering, respectively. According to XRD analysis, we found out that copper vanadium oxide thin films were amorphous. The electrochemical behaviour of them was examined in half cell system using EC : DMC(1:1 in IM $LiPF_5$) liquid electrolyte. The ionic conductivity of Lipon thin film was $1.02\times10^{-6}S/cm$ at $25^{\circ}C$ and $Cu_{0.5}V_2O_5/Lipon/Li$ cell showed that the discharge capacity was about $50{\mu}Ah/cm^2{\mu}m$ beyond 500cyc1es.

• Journal of Powder Materials
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• v.10 no.3
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• pp.164-167
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• 2003

The mechanical alloying effect has been studied on the three Cu-based alloy systems with a positive heat of mixing. The extended bcc solid solution has been formed in the Cu-V system and an amorphous phase in the Cu-Ta system. However, it is round that a mixture of nanocrystalline Cu and Mo Is formed in the Cu-Mo system. The neutron diffraction has been employed at a main tool to characterize the detailed amorphization process. The formation of an amorphous phase in Cu-Ta system can be understood by assuming that the smaller Cu atoms preferentially enter into the bcc Ta lattice during ball milling.

• Journal of Preventive Medicine and Public Health
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• v.31 no.4 s.63
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• pp.666-679
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• 1998

This study aims at providing the fundamental data on the field of cosmetics by comparing heavy metal concentration in terms of domestic/foreign products, items, companies and colors. This study has determined the concentration of chromium, lead, mangagnese, nickel, copper and vanadium in cosmetics such as moisturizer, concealer, foundation (Ivory-yellow), compact powder (Ivory-yellow), lip colo. (Red, brown), eye shadow (Red, brwon and dark green) and eye liner (Black) manufactured by five domestic cosmetic companies and five foreign cosmetic companies on the market. The samples have been collected in cosmetic stores in Pusan from Dec. lst 1996 to Jan. 3lst 1997. The results are as follows : 1. The heavy metal concentration in cosmetics was $2.420{\mu}g/g$ for chromium, $0.82{\mu}g/g$ for lead, $4.49{\mu}g/g$ for manganese, $1.69{\mu}g/g$for nickel, $0.53{\mu}g/g$ for copper, and $51{\mu}g/g$ for vanadium, respectively. 2. Lead and vanadium concentration were significantly higher in domestic cosmetics than foreign cosmetics(p<0.05). 3. The mean(GM) concentrations of heavy metal were different significantly (p<0.01) when classified with cosmetic items. The highest means shown at eye shadow in $Cr(14.96{\mu}g/g),\;Cu(1.32{\mu}g/g),\;V(1.28{\mu}g/g),\;and\;Ni(8.30{\mu}g/g)$, compact powder in $Pb(2.50{\mu}g/g)$, eye liner in $Mn(90.62{\mu}g/g)$. 4. The mean(GM) concentrations of heavy metal were different significantly (p<0.01) among colored cosmetics. The highest mean concentration of Cr, Ni, Cu and V were dark green-colored cosmetics, that of Mn was black-colored cosmetics, and that of Pb was ivory yellow- colored cosmetics.

• Journal of Power System Engineering
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• v.21 no.4
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• pp.94-99
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• 2017

Single walled carbon nanotubes were mixed with various metal powders by mechanical ball milling and sintered by spark plasma sintering processes. Two compositional (0.1 and 1 vol%) of the single walled carbon nanotubes were dispersed onto the pure aluminum, 5052 aluminum alloy, pure titanium, Ti6Al4Vanadium alloy, pure copper, and stainless steel 316L. Each composite powders were spark plasma sintered at $600^{\circ}C$ and well synthesized regardless of the matrices. Vickers hardness of the composite materials was measured and they exhibited higher values regardless of the carbon nanotubes composition than those of the pure materials. Moreover, single walled carbon nanotubes reinforced copper matrix composites showed highest enhancement between the other metal matrices system. We believe that low energy mechanical ball milling and spark plasma sintering processes are useful tool for fabricating of the carbon nanotubes-reinforced various metal matrices composite materials. The single walled carbon nanotubes-reinforced various metal matrices composite materials could be used as an engineering parts in many kind of industrial fields such as aviation, transportation and electro technologies etc. However, detail strengthening mechanism should be carefully investigated.

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.77-80
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• 2007

To increase the capacity of hydrogen adsorption, transition metals were adopted as catalyst. The PAN-based CNFs involving transition metal were obtained by electrospinning method and heat treatment. To study the surface of carbon fibers, SEM analysis was conducted. The mass of transition metals were spreaded or covered among CNFs. XRD and EDX analysis were used to confirm transition metals on the surface of carbon fibers. Volumetric method was used for studying the capacity of hydrogen adsorption on the carbon fibers involving transition metals. In this study. vanadium has the best characteristics among chromium, titanium, and copper for hydrogen adsorption.

• Asian-Australasian Journal of Animal Sciences
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• v.12 no.6
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• pp.1002-1008
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• 1999

Essential metabolic functions have been identified for seven macrominerals (calcirum, phosprorus, magnesium, sodium, potassium, chloride, and sulfur), and eight microminerals (cobalt, copper, iodine, iron, manganese, molybdenum, selenium, and zinc). Major functions for each of these minerals are summarized. Considerable research suggests that chromium is also essential and that it functions by facilitating insulin activity. Studies are reviewed which indicate that chromium supplementation of animal diets may: 1) increase glucose removal from blood, 2) reduce carcass fat and increase lean in nonruminants, 3) alter egg cholesterol content, and 4) enhance immunity and disease resistance in ruminants. A number of other minerals including nickel, boron, vanadium, arsenic, silicon, lithum, and lead have been reported to be essential, but specific metabolic functions have not been defined for any of these elements. Limited research in poultry suggests that boron may be of practical significance in some instances.