• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.188-188
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

• 한국산학기술학회논문지
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• 제19권10호
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• pp.598-602
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• 2018

석유정제공장에서 사용된 폐촉매의 특성을 조사하여 바나듐 레독스 흐름전지용 소재인 전해액의 제조에 대하여 연구하였다. 석유정제공정에서 사용된 폐촉매의 총공극 부피, 비표면적 및 평균 기공크기는 BET법과 BJH법으로 계산하여 각각 3.96cc/g, 13.81m2/g, 1.15A 구하여 폐촉매에서 바나듐을 회수하여 전해액으로 제조 할 수 있음을 확인하였다. 폐촉매를 TG-DTA분석결과, $25^{\circ}C$부터 $700^{\circ}C$ 범위에서 중량손실이 약 23wt%였다. 폐촉매의 성분을 ICP 장비를 분석하여 황, 바나듐, 니켈, 알루미늄, 망간 철 구리 등의 원소를 확인하였다. 또한 TEM 장비로 측정한 결과 바나듐 외 다른 원소들이 결정성 클러스터가 밝은 점으로 명백하게 드러남을 알 수 있었다. 액액 추출법을 사용하여 폐촉매로 부터 바나듐을 99.25%로 분리하여 추출한 바나듐용액의 전기화학적 특성분석을 위해 CV(cyclic votammetry)측정한 결과, 산화/환원피크가 나타남으로서 전해질 용액으로서의 가능성을 보여주고 있다. 또한 폐촉매로 부터 추출된 바나듐 용액의 순도를 더욱 높여 전해질 용액을 제조하면 기존 상용화된 전해질 성능과 같은 것을 제조 할 것으로 사료된다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.41.2-41.2
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

• 공업화학
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• 제3권4호
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• pp.717-721
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• 1992

공침법으로 제조한 vanadium molybdate와 copper molybdat촉매의 기계적 혼합물과 $V_2O_5$와 $MoO_3$의 기계적 혼합물을 아크로레인의 선택 산화반응용 촉매로 사용하여 각각의 금속산화물 사이의 상승효과에 대하여 고찰하였다. 반응실험 결과 혼합촉매를 사용한 경우 아크로레인의 전화율과 아크릴산의 수율이 증가하였으며 이는 remote control mechanism으로 설명할 수 있었다. 열중량 분석결과 혼합촉매에서 격자산소가 방출됨을 확인할 수 있었다.

• 전기화학회지
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• 제3권4호
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• pp.219-223
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• 2000

구리-바나듐 산화물 양극을 이용하여 $(Cu_{0.5}V_2O_5)$으로 구성된 전 고상의 리튬이차박막전지를 제작하였다. 구리-바나듐 산화물 박막은 reactive DC magnetron sputtering을 이용하여 co-sputtering에 의해 제조하였고 Lipon고체전해질은 순수한 질소 분위기 하에서 RF 스퍼터링으로 제조하였다. XRD분석을 통해 구리-바나듐 산화물 박막이 비정질임을 확인하였고, EC:DMC(1:1 in IM $LiPF_5$)액체전해질을 사용한 반전지 구조에서 그 전기화학적 특성을 고찰하였다. Lipon고체전해질의 이온전도도는 $25^{\circ}C$에서 $1.02\times10^{-6}S/cm$를 나타내었고 전고상 박막전지는 $1.5V\~3.6V$의 전압구간, $50{\mu}A/cm^2$의 전류밀도에서 500싸이클까지 약 $50{\mu}Ah/cm^2{\mu}m$의 방전용량을 유지하였다

• 한국분말재료학회지
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• 제10권3호
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• pp.164-167
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• 2003

The mechanical alloying effect has been studied on the three Cu-based alloy systems with a positive heat of mixing. The extended bcc solid solution has been formed in the Cu-V system and an amorphous phase in the Cu-Ta system. However, it is round that a mixture of nanocrystalline Cu and Mo Is formed in the Cu-Mo system. The neutron diffraction has been employed at a main tool to characterize the detailed amorphization process. The formation of an amorphous phase in Cu-Ta system can be understood by assuming that the smaller Cu atoms preferentially enter into the bcc Ta lattice during ball milling.

• Journal of Preventive Medicine and Public Health
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• 제31권4호
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• pp.666-679
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• 1998

This study aims at providing the fundamental data on the field of cosmetics by comparing heavy metal concentration in terms of domestic/foreign products, items, companies and colors. This study has determined the concentration of chromium, lead, mangagnese, nickel, copper and vanadium in cosmetics such as moisturizer, concealer, foundation (Ivory-yellow), compact powder (Ivory-yellow), lip colo. (Red, brown), eye shadow (Red, brwon and dark green) and eye liner (Black) manufactured by five domestic cosmetic companies and five foreign cosmetic companies on the market. The samples have been collected in cosmetic stores in Pusan from Dec. lst 1996 to Jan. 3lst 1997. The results are as follows : 1. The heavy metal concentration in cosmetics was $2.420{\mu}g/g$ for chromium, $0.82{\mu}g/g$ for lead, $4.49{\mu}g/g$ for manganese, $1.69{\mu}g/g$for nickel, $0.53{\mu}g/g$ for copper, and $51{\mu}g/g$ for vanadium, respectively. 2. Lead and vanadium concentration were significantly higher in domestic cosmetics than foreign cosmetics(p<0.05). 3. The mean(GM) concentrations of heavy metal were different significantly (p<0.01) when classified with cosmetic items. The highest means shown at eye shadow in $Cr(14.96{\mu}g/g),\;Cu(1.32{\mu}g/g),\;V(1.28{\mu}g/g),\;and\;Ni(8.30{\mu}g/g)$, compact powder in $Pb(2.50{\mu}g/g)$, eye liner in $Mn(90.62{\mu}g/g)$. 4. The mean(GM) concentrations of heavy metal were different significantly (p<0.01) among colored cosmetics. The highest mean concentration of Cr, Ni, Cu and V were dark green-colored cosmetics, that of Mn was black-colored cosmetics, and that of Pb was ivory yellow- colored cosmetics.

• 동력기계공학회지
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• 제21권4호
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• pp.94-99
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• 2017

Single walled carbon nanotubes were mixed with various metal powders by mechanical ball milling and sintered by spark plasma sintering processes. Two compositional (0.1 and 1 vol%) of the single walled carbon nanotubes were dispersed onto the pure aluminum, 5052 aluminum alloy, pure titanium, Ti6Al4Vanadium alloy, pure copper, and stainless steel 316L. Each composite powders were spark plasma sintered at $600^{\circ}C$ and well synthesized regardless of the matrices. Vickers hardness of the composite materials was measured and they exhibited higher values regardless of the carbon nanotubes composition than those of the pure materials. Moreover, single walled carbon nanotubes reinforced copper matrix composites showed highest enhancement between the other metal matrices system. We believe that low energy mechanical ball milling and spark plasma sintering processes are useful tool for fabricating of the carbon nanotubes-reinforced various metal matrices composite materials. The single walled carbon nanotubes-reinforced various metal matrices composite materials could be used as an engineering parts in many kind of industrial fields such as aviation, transportation and electro technologies etc. However, detail strengthening mechanism should be carefully investigated.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2007년도 춘계학술대회
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• pp.77-80
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• 2007

To increase the capacity of hydrogen adsorption, transition metals were adopted as catalyst. The PAN-based CNFs involving transition metal were obtained by electrospinning method and heat treatment. To study the surface of carbon fibers, SEM analysis was conducted. The mass of transition metals were spreaded or covered among CNFs. XRD and EDX analysis were used to confirm transition metals on the surface of carbon fibers. Volumetric method was used for studying the capacity of hydrogen adsorption on the carbon fibers involving transition metals. In this study. vanadium has the best characteristics among chromium, titanium, and copper for hydrogen adsorption.

• Asian-Australasian Journal of Animal Sciences
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• 제12권6호
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• pp.1002-1008
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• 1999

Essential metabolic functions have been identified for seven macrominerals (calcirum, phosprorus, magnesium, sodium, potassium, chloride, and sulfur), and eight microminerals (cobalt, copper, iodine, iron, manganese, molybdenum, selenium, and zinc). Major functions for each of these minerals are summarized. Considerable research suggests that chromium is also essential and that it functions by facilitating insulin activity. Studies are reviewed which indicate that chromium supplementation of animal diets may: 1) increase glucose removal from blood, 2) reduce carcass fat and increase lean in nonruminants, 3) alter egg cholesterol content, and 4) enhance immunity and disease resistance in ruminants. A number of other minerals including nickel, boron, vanadium, arsenic, silicon, lithum, and lead have been reported to be essential, but specific metabolic functions have not been defined for any of these elements. Limited research in poultry suggests that boron may be of practical significance in some instances.