• Title/Summary/Keyword: Copper cross sections

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High Speed Cu Filling into Tapered TSV for 3-dimensional Si Chip Stacking (3차원 Si칩 실장을 위한 경사벽 TSV의 Cu 고속 충전)

  • Kim, In Rak;Hong, Sung Chul;Jung, Jae Pil
    • Korean Journal of Metals and Materials
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    • v.49 no.5
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    • pp.388-394
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    • 2011
  • High speed copper filling into TSV (through-silicon-via) for three dimensional stacking of Si chips was investigated. For this study, a tapered via was prepared on a Si wafer by the DRIE (deep reactive ion etching) process. The via had a diameter of 37${\mu}m$ at the via opening, and 32${\mu}m$ at the via bottom, respectively and a depth of 70${\mu}m$. $SiO_2$, Ti, and Au layers were coated as functional layers on the via wall. In order to increase the filling ratio of Cu into the via, a PPR (periodic pulse reverse) wave current was applied to the Si chip during electroplating, and a PR (pulse reverse) wave current was applied for comparison. After Cu filling, the cross sections of the vias was observed by FE-SEM (field emission scanning electron microscopy). The experimental results show that the tapered via was filled to 100% at -5.85 mA/$cm^2$ for 60 min of plating by PPR wave current. The filling ratio into the tapered via by the PPR current was 2.5 times higher than that of a straight via by PR current. The tapered via by the PPR electroplating process was confirmed to be effective to fill the TSV in a short time.

Investigating the Au-Cu thick layers Electrodeposition Rate with Pulsed Current by Optimization of the Operation Condition

  • Babaei, Hamid;Khosravi, Morteza;Sovizi, Mohamad Reza;Khorramie, Saeid Abedini
    • Journal of Electrochemical Science and Technology
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    • v.11 no.2
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    • pp.172-179
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    • 2020
  • The impact of effective parameters on the electrodeposition rate optimization of Au-Cu alloy at high thicknesses on the silver substrate was investigated in the present study. After ensuring the formation of gold alloy deposits with the desired and standard percentage of gold with the cartage of 18K and other standard karats that should be observed in the manufacturing of the gold and jewelry artifacts, comparing the rate of gold-copper deposition by direct and pulsed current was done. The rate of deposition with pulse current was significantly higher than direct current. In this process, the duty cycle parameter was effectively optimized by the "one factor at a time" method to achieve maximum deposition rate. Particular parameters in this work were direct and pulse current densities, bath temperature, concentration of gold and cyanide ions in electrolyte, pH, agitation and wetting agent additive. Scanning electron microscopy (SEM) and surface chemical analysis system (EDS) were used to study the effect of deposition on the cross-sections of the formed layers. The results revealed that the Au-Cu alloy layer formed with concentrations of 6gr·L-1 Au, 55gr·L-1 Cu, 24 gr·L-1 KCN and 1 ml·L-1 Lauryl dimethyl amine oxide (LDAO) in the 0.6 mA·cm-2 average current density and 30% duty cycle, had 0.841 ㎛·min-1 Which was the highest deposition rate. The use of electrodeposition of pure and alloy gold thick layers as a production method can reduce the use of gold metal in the production of hallow gold artifacts, create sophisticated and unique models, and diversify production by maintaining standard karats, hardness, thickness and mechanical strength. This will not only make the process economical, it will also provide significant added value to the gold artifacts. By pulsating of currents and increasing the duty cycle means reducing the pulse off-time, and if the pulse off-time becomes too short, the electric double layer would not have sufficient growth time, and its thickness decreases. These results show the effect of pulsed current on increasing the electrodeposition rate of Au-Cu alloy confirming the previous studies on the effect of pulsed current on increasing the deposition rate of Au-Cu alloy.

A Feasibility Study on Developing Snow Melting Systems using CNT-Cement Composite (도로 융설체 개발을 위한 탄소나노튜브-시멘트 복합체 특성에 관한 실험적 연구)

  • Heo, Jinnyung;Park, Bumjin;Kim, Taehyeong
    • International Journal of Highway Engineering
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    • v.15 no.2
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    • pp.29-37
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    • 2013
  • PURPOSES : This study aims to review the possibility of developing a road snow-melting system that can prevent slip accidents by maintaining a constant temperature of the winter roads and enhance performance of structures, including improvement of compressive strength by mixing carbon nanotube (hereafter referred to as CNT) with cement paste, the basic material. METHODS : To achieve the above purpose, an experiment was conducted by mixing power-type CNT and wrap-type CNT up to cement paste formulation by weight of 0.0wt%~4.1wt% in accordance with "KS L ISO 679(of cement strength test method)", and compressive strength was measured at 28 days of curing. In addition, the volume resistivity of the specimen was measured to test thermal and electrical characteristics, and the rate of temperature changes in specimen surface by power consumption was measured by passing electricity through the cross-sections of the specimen. Meanwhile, the criteria for checking the performance as a road snow-melting system was determined as volume resistivity of $100{\Omega}{\cdot}cm$ or less. RESULTS : A comparative analysis between specimen with 0wt% CNT content in plain status and specimen containing various types of CNTs was carried out. From its results, it was found that compressive strength increased approximately 19%, showing the highest rate when 0.2wt% of wrap-type CNT was contained, but volume resistivity of $100{\Omega}{\cdot}cm$ or less appeared only in specimens containing more than 0.2wt% CNT. In addition, it was observed that the surface temperature increased by $4.62^{\circ}C$ per minute on average in specimens containing 3.2wt% CNT. CONCLUSIONS : In this study, CNT was examined as an underlying material for a road snow-melting system, and the possibility of developing the road now-melting system was reviewed by conducting various experiments using CNT-Cement composites. From the experimental results, the specimens were found to have a superior performance when compared to the existing road snow-melting systems that place the heat transfer medium such as copper on the road. However, satisfactory strength performance were not obtained from the specimen containing CNT(2.0% or more) that functions as a heating element, which leads to the need for reviewing methods to increase the strength by using plasticizer or admixture.

A Characteristics on the Ancient Glass Beads Excavated from the Site of Hapgang-ri in Sejong, Korea (세종 합강리 유적 출토 고대 유리구슬의 특성 연구)

  • kim, Eun a;Kim, Gyu Ho;Kang, Ji Won;Yun, Cheon Su
    • Journal of Conservation Science
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    • v.36 no.5
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    • pp.405-420
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    • 2020
  • A convergence research was conducted on glass beads excavated at the ruins of Hapgang-ri, Sejong, using the archeology and conservation approach. The period of appearance of Jugu Towangmyo in the ruins of Hapgang-ri can be estimated to begin in the late 2nd century; for Jugu Towangmyo No. 15, the period spans from the late 2nd to early 3rd century. Form, color, and manufacturing techniques of complete glass beads were examined, and the cross-sections and chemical composition of 16 samples were observed. Based on these analyses, the glass beads were divided into blue, purple, and red colors. The blue-colored beads could be further sub-divided based on their gloss and brightness; in contrast, the red-colored beads were highly uniform with regard to these parameters. Based on the stripe and bubble arrangement on the surface of the glass beads, their drawing technique was identified. Traces of heat treatment or polishing were observed at the ends of the beads. According to their chemical composition, the 16 samples were classified into 3 potash glass and 13 soda glass groups; in the latter, the properties of the stabilizers were divided according to the blue and red bead colors. The stabilizers of the red beads are unique in that they allow the distinction among beads excavated in other areas in South Korea owing to their compositional differences. Colorants in blue- and red-colored beads are cobalt (containing MnO), and copper and iron, respectively.