• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.248-248
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• 2010

CMOS 축소화가 32nm node를 넘어서 지속적으로 진행되기 위하여 FinFET, Surround Gate and Tri-Gate와 같은 Fully Depleted 3-Dimensional 소자들이 SCE를 다루기 위해서 많이 제안되어 왔다. 하지만 소자의 축소화를 진행함에 있어서 좁고 균일한 patterning을 형성하는 것과 동시에 낮은 Extension Region과 Contact Region에서의 Series Resistance을 제공하여야 하고 Source/Drain Contact Formation을 확보하여야 한다. 그리고 소자의 축소화가 진행됨으로써 Silicide의 응집현상과 Source/Drain Junction의 누설전류에 대한 허용범위가 점점 엄격해지고 있다. ITRS 2005에 따르면 32nm CMOS에서는 Contact Resistivity가 대략 $2{\times}10-8{\Omega}cm2$이 요구되고 있다. 또한 Three Dimensional 소자에서는 Fin Corner Effect가 Channel Region뿐만 아니라 S/D Region에서도 중대한 영향을 미치게 된다. 따라서 본 논문에서 제시하는 Novel S/D Contact Formation 기술을 이용하여 Self-Aligned Dual/Single Metal Contact을 이루어Patterning에 대한 문제점 해결과 축소화에 따라 증가하는 Contact Resistivity 문제점을 해결책을 제시하고자 한다. 이를 검증하기3D MOSFET제작하고 본 기술을 적용하고 검증한다. 또한 Normal Doping 구조를 가진3D MOSFET뿐만 아니라 SCE를 해결하기 위해서 대안으로 제시되고 있는 SB-MOSFET을 3D 구조로 제작하고, 이 기술을 적용하여 검증한다. 그리고 Silvaco simulation tool을 이용하여 S/D에 Metal이 Contact을 이루는 구조가 Double type과 Triple type에 따라 Contact Resistivity에 미치는 영향을 미리 확인하였고 이를 실험으로 검증하여 소자의 축소화에 따라 대두되는 문제점들의 해결책을 제시하고자 한다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.532-535
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• 2003

Vibration of rotating machinery is a factor that is something to do with abnormal machinery. Former days, Perception of vibration at rotating machinery had used Shaft rider type. Shaft rider type was adhered to surface of shaft and detected vibration of rotating machinery. Recently, Perception of vibration at rotating machinery uses to non-contact sensor. Working principle of non-contact sensor is used of eddy current. Vibration at rotating machinery appears to deviation of eddy current. In this paper, We investigate abnormal vibration due to non-contact sensor.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1341-1344
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• 2005

This study was aimed to verify the acceptable contact force between power collector and 3rd rail type conductor rail for the Korean standardized rubber-tired AGT light rail vehicle. The power collector was designed and manufactured to satisfy the Korean standardized Specifications of the rubber-tired AGT light rail vehicle. Based on the dynamic behavior, contact force variation and interruption in the worst installation tolerance of the conductor rail, its initial contact force was set up. At the test track for the Korean standardized rubber-tired AGT light rail vehicle, interruptions, stresses, vibrations, and contact force variations were measured. As the results, initial contact force was verified to ensure power collection stability.

• 대한한방내과학회지
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• 제19권2호
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• pp.333-346
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• 1998

In order In study the effects of an immunosuppression and a mitigation of inflammation of Gamiseungmagalgeuntang(GMSG) on the allergic contact dermatitis, contact hypersensitivity assay, mast cell, VCAM-1, and T cell of the lymph node in mice induced allergic contact dermatitis by the contacts-sensitizing DNCB were obsereved after oral administration of GMSG extract. The results of this study were as follows ; 1. Ear swelling in contact hypersensitivity assay was decreased in the GMSG group as compared with DNCB group. 2. It was investigated that mast cells were appeared degranulated type in DNCB group and a number of granulated type was more GMSG group than DNCB group. 3. VCAM-1 expression in epidermis and CD11b positive cell in dermis were decreased In the GMSG group as compared with DNCB group. 4. In the lymph node ,the distribution of CD4, CD8, IL-2R positive cell were decreased at the cortex and medula in the GMSG group as compared with DNCB group.

• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.90-93
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• 2003

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a circle leaf spring mechanism and a capacitive-type sensor. The, contact probe is attached on the z-axis during measurement while aspheric object are supported on the diamond turning machine(DTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of on-machine measurement system in this investigation is capable of providing a repeatability of 10 nanometers with a $\pm$20 uncertainty of 200nmPv.

• 한국소음진동공학회논문집
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• 제15권2호
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• pp.239-247
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• 2005

This paper deals with the development of a contact-type counting device using a piezoelectric polymer film as a sensor. The piezoelectric and vibration characteristics of the film under a bending vibration were investigated theoretically and experimentally. A counting device, which includes filters, an amplifier, an analog-digital converter, and a display, was designed and fabricated. The performance of the piezoelectric polymer sensor was evaluated in the sense of the responses to contact force, contact frequency, and contact speed. The life and the temperature effect were also investigated for the piezoelectric film sensor.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.122.2-122.2
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• 2015

n-type 실리콘은 p-type과 비교하여 더 높은 소수캐리어 lifetime 으로 금속 불순물에 대하여 더 좋은 내성을 갖는다. 고효율 실리콘 태양전지를 위하여 p-type 웨이퍼를 n-type으로 교체하여 빛을 조사했을 때, 광전자들이 형성되어 p-type과 비교하여 더 좋은 lifetime 안정성을 갖는다. n-type 태양전지의 전면 전극은 AgAl paste로 형성하였다. AgAl 페이스트는 소성 온도와 밀접하게 관련되어 전극의 접합 깊이에 영향을 미친다. p+ emitter 층에 파고드는 금속 접촉의 최적화된 깊이는 접촉 저항에 영향을 미치는 중요한 요소이다. 본 연구에서는 소성 조건을 변화시킴으로써, 금속 깊이의 효과적인 형성을 위한 소성 조건을 최적화하였다. $670^{\circ}C$ 이하의 온도에서 소성을 진행 하였을 때, 충분한 접촉 깊이를 형성하지 못하여 높은 접촉저항을 갖는다. 소성 온도가 증가함에 따라, 접촉 저항은 감소하였다. 최적 소성 온도 $865^{\circ}C$에서 측정된 접촉저항은 $5.99mWcm^2$이다. $900^{\circ}C$ 이상에서 contact junction은 emitter를 통과하여 실리콘과 결합하였다. 그 결과로 접촉저항 shunt가 발생한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.841-842
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• 2011

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.480-480
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• 2008

Vacuum circuit breaker(VCB) is now emerging as an alternative of gas circuit breaker(GCB) which uses SF6 gas as insulating material whose dielectric strength is outstanding. But we have to reduce SF6 gas because SF6 gas is one of greenhouse gas and efforts to reduce greenhouse gas are now trend of the world. Therefore, we can say VCB is the optimal alternative of GCB because vacuum is environmentally friendly. The vacuum interrupter is the core part of VCB to interrupt arcing current. There are mainly two methods to extinguish arc. One is radial magnetic field (RMF) method and the other is axial magnetic field (AMF) method. We deals with RMF method in this paper. Compared with AMP, RMF arc quenching method has different principle to extinguish arc. In case of RMF method, pinch effect is much larger than AMF method. Because of pinch effect RMF type contact electrodes have the single large spot which is severly damaged and melted while AMF type contact electrodes have small and multiple spots which are slightly damaged and melted. To prevent contact electrode being damaged and melted from high temperature-arc, RMF method uses Lorentz force to move arc. In this paper we calculated and compared the arc driving force of two cases and we analyzed the force acting on each part of arc by means of commercial finite element method software Maxwell 3D. They have 3petals and we considered two cases. One is the case when fixed(upper) and movable(lower) contacts are in mirror arrangement (Case 1). The other is the case when one of two contacts (movable contact) is revolved at maximum angle as possible as it can be (Case 2). And at each case above, we analyzed arc driving force at two positions, position 1 is the closest to the center of contact and position 2 is near the edge of petal on fixed contact. As a result we could find that Case 2 generated stronger arc driving force than Case 1 at position 1. But at position 2 Case 1 generated stronger arc driving force than Case 2. This simulation method can contribute to optimizing spiral-type electrode designs in a view of arc driving force.