• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.229-229
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• 2010

With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.41-45
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• 2021

In this study, in order to secure the high reliability of the memristor, we adopted a patterned lithium filament seed layer as the main agent for resistive switching (RS) characteristic on the 30 nm thick ZrO₂ thin film at the device manufacturing stage. Lithium filament seed layer with a thickness of 5 nm and an area of 5 ㎛ × 5 ㎛ were formed on the ZrO₂ thin film, and various electrode areas were applied to investigate the effect of capacitance on filament type memristive behavior in the parallel memristive circuit of memristor and capacitor. The RS characteristics were measured in the samples before and after 250℃ post-annealing for lithium metal diffusion. In the case of conductive filaments formed by thermal diffusion (post-annealed sample), it was not available to control the filament by applying voltage, and the other hand, the as-deposited sample showed the reversible RS characteristics by the formation and rupture of filaments. Finally, via the comparison of the RS characteristics according to the electrode area, it was confirmed that capacitance is an important factor for the formation and rupture of filaments.

• Journal of the Speleological Society of Korea
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• no.63
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• pp.1-8
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• 2004

The non-magnetic materials with non-conductive showing high structure dispersity were developed on the base of natural quartz and lava-scoria which was collected from Je-ju island in Korea, and treated by methane-chemical technology those were obtained novel properties of magnetization through the analyzing. Depending on the processing conditions and subsequent applications the materials produced by strong methane-chemical reaction (MCR) in alcohol solution showed concurrently magnetic, dielectric and electrical properties. The obtained magnetic-electrical powders classified by aggregate complex of their features as segnetomagnetics, containing a dielectric material as a carrying nucleus, particularly the quartz on that surface one or more layers of different compounds were synthesized having thickness up to 10～50 nm and showing magnetic, electrical and other properties. It was confirmed in magnetizing process that powders of quartz and lava-scoria produced by MCR were better oil adsorbent as of oleophilic and floating matter on water surface although their specific gravities are comparably more than 1 in quartz or less than unity, as that of water, in lava-scoira. Therefore, it will be Possible and very useful to remove low density and light gravity oil spillage in difficult recovery from sea and inland water contamination spread on water surface, by marine accident and ship sinking accident occurring frequently in recent years, by way of magnetic adsorbent conveyer system in continuous, if it could be built up the mass Production system of water-floating magnetizable oleophilic adsorbent materials with use of iow cost and good Qualify lava-scoria spread on volcano district in Je-ju island. And, there will also be urgent advent of necessity with strong possibility to develop useful applications of various magnetic functional materials include oleophilic adsorbent for removal of sea oil-contaminants and maritime pollutants, and other kinds of various utilities in industrial applications and practical uses of novel functional materials in the fields of environments and health care applications with in deep expectation.

• Economic and Environmental Geology
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• v.30 no.2
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• pp.137-142
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• 1997

At the tailings dam of the disused Brukunga pyrite mine in South Australia, reaction of groundwater with the tailings causes the formation and discharge of sulphuric acid. There is a need to improve remediation efforts by decreasing groundwater flow through the tailings dam. Geophysical methods have been investigated to determine whether they can be used to characterise variations in depth to watertable and map preferred groundwater flow paths. Three methods were used: transient electromagnetic (TEM) soundings, direct current (DC) soundings and profiling, and self potential (SP) profiling. The profiling methods were used to map the areal extent of a given response, while soundings was used to determine the variation in response with depth. The results of the geophysical surveys show that the voltages measured with SP profiling are small and it is hard to determine any preferred channels of groundwater flow from SP data alone. Results obtained from TEM and DC soundings, show that the DC method is useful for determining layer boundaries at shallow depths (less than about 10 m), while the TEM method can resolve deeper structures. Joint use of TEM and DC data gives a more complete and accurate geoelectric section. The TEM and DC measurements have enabled accurate determination of depth to groundwater. For soundings centred at piezometers, this depth is consistent with the measured watertable level in the corresponding piezometer. A map of the watertable level produced from all the TEM and DC soundings at the site shows that the shallowest level is at a depth of about 1 m, and occurs at the southeast of the site, while the deepest watertable level (about 17 m) occurs at the northwest part of the site. The results indicate that a possible source of groundwater occurs at the southeast area of the dam, and the aquifer thickness varies between 6 and 13 m. A map of the variation of resistivity of the aquifer has also been produced from the TEM and DC data. This map shows that the least resistive (i.e., most conductive) section of the aquifer occurs in the northeast of the site, while the most resistive part of the aquifer occurs in the southeast. These results are interpreted to indicate a source of fresh (resistive) groundwater in the southeast of the site, with a possible further source of conductive groundwater in the northeast.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.434-434
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• 2012

Despite recent efforts for fabricating flexible transparent conducting films (TCFs) with low resistance and high transmittance, several obstacles to meet the requirement of flexible displays still remain. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. Recently, it has been demonstrated that acid treatment is an efficient method for surfactant removal. However, the treatment has been reported to destroy most SWNT. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance by Au-ionic doping treatment on PET substrates is researched. Arc-discharge SWNTs were dispersed in deionized water by adding sodium dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then was doped with Au-ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. This was confirmed and discussed on the XPS and UPS studies. We show that 87 ${\Omega}/{\Box}$ sheet resistances with 81% transmittance at the wavelength of 550 nm. The changes in electrical and optical conductivity of SWNT film before and after Au-ionic doping treatments were discussed. The effects of hole transport interface layer using Au-ionic doping SWNT on the performance of organic solar cells were investigated.

• Journal of the Korean Electrochemical Society
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• v.13 no.4
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• pp.256-263
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• 2010

A Crofer 22 APU mesh coated with a conductive ceramic material was developed as an alternative cathode current collector to Ag-based materials for solid oxide fuel cells. $(La_{0.80}Sr_{0.20})_{0.98}MnO_3$ (LSM) layer was deposited onto the Crofer mesh using a spray-coating technique, in an attempt to mitigate the degradation of electrical properties due to surface oxidation at high temperatures. The oxidation experiments at $800^{\circ}C$ in air indicated that the areaspecific resistance (ASR) of the LSM-coated Crofer mesh was strongly dependent on the wire diameter and the contact morphology between mesh and cell. In addition, the post-heat-treatment in $H_2/N_2$ resulted in a reduced thickness of Cr-containing oxide scales at the interface between Crofer mesh and LSM layer, leading to a decreased ASR.

• Journal of Bio-Environment Control
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• v.29 no.1
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• pp.9-19
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• 2020

Convective heat transfer is the main component of greenhouse energy loss because the energy loss by this mechanism is greater than those of the other two components (radiative and conductive). Previous studies have examined the convective heat transfer coefficients under natural conditions, but they are not applicable to symmetric thermal screens with zero porosity, and such screens are largely produced and used in Korea. However, the properties of these materials have not been reported in the literature, which causes selectivity issues for users. Therefore, in this study, three screens having similar color and zero porosity were selected, and a mathematical procedure based on radiation balance equations was developed to determine their convective heat transfer coefficients. To conduct the experiment, a hollow wooden structure was built and the thermal screen was tacked over this frame; the theoretical model was applied underneath and over the screen. Input parameters included three components: 1) solar and thermal fluxes; 2) temperature of the screen, black cloth, and ambient air; and 3) wind velocity. The convective heat transfer coefficients were determined as functions of the air-screen temperature difference under open-air environmental conditions. It was observed from the outcomes that the heat transfer coefficients decreased with the increase of the air-screen temperature difference provided that the wind velocity was nearly zero.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.11 no.1
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• pp.11-21
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• 2013

The Geyoungju Ca-bentonite with dry density of 1.6 g/$cm^3$ has been considered as a standard buffer material for the disposal of high level waste in KAERI disposal system design. But it had relatively lower thermal conductivity compared with other surrounding materials, that was one of key parameters to limit the increase of the disposal density in the disposal system. In this study, various additives were selected and mixed with the Ca-bentonite in different mixing methods in order to increase the thermal conductivity from 0.8 W/mK to 1.0 W/mK. As an additive, CNT (Cabon Nano Tube), graphite, alumina, CuO, and $Fe_2O_3$ were selected, which are chemically stable and have good thermal conductivity. As mixing methods, dry hand-mixer mixing, wet milling and dry ball mill mixing were applied for the mixing. Above all, the ball mill mixing was proved to be most effective since the produced mixture was most homogeneous and showed higher increase in the thermal conductivity. From this study, it was confirmed that the thermal conductivity for the Geyoungju Ca-bentonite could be improved by adding small amount of highly thermal conductive material to 1.0 W/mk. In conclusion, it was believed that the experimental results will be valuable in the disposal system design if the additive effects on the swelling and permeability on the compact bentonite are also approved in further studies.

• Composites Research
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• v.24 no.1
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• pp.45-50
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• 2011

Transparent and conductive carbon nanotube on polyethylene terephthalate (PET) were prepared by dip-coating method for self-sensing multi-functional nanocomposites. The changes in the electrical and optical properties of CNT coating mainly depended on the number of dip-coating, concentration of CNT solution. Consequently, the surface resistance and transmittance of CNT coating were sensitively controlled by the processing parameters. Surface resistance of CNT coating was measured using four-point method, and surface resistance of coated CNT could be better calculated by using the dual configuration method. Optical transmittance of PET film with CNT coating was evaluated using UV spectrum. Surface properties of coated CNT investigated by wettability test via static and dynamic contact angle measurement were consistent with each other. As dip-coating number increased, surface resistance of coated CNT decreased seriously, whereas the transmittance exhibited little lower due to the thicker CNT networks layer. Interfacial microfailure properties were investigated for CNT and indium tin oxide (ITO) coatings on PET substrates by electrical resistance measurement under cyclic loading fatigue test. CNT with high aspect ratio exhibited no change in surface resistance up to 2000 cyclic loading, whereas ITO with brittle nature showed a linear increase of surface resistance up to 1000 cyclic loading and then exhibited the level-off due to reduced electrical contact points based on occurrence of many micro-cracks.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.1
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• pp.15-19
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• 2005

Conventional eddy current testing has been used for the detection of the defect-like fatigue crack in the conductive materials, such as aluminum, which uses a sinusoidal signal with very narrow frequency bandwidth, Whereas, the pulsed eddy current method uses a pulse signal with a broad bandwidth. This can allow multi-frequency eddy current testing, and the penetration depth is greater than that of the conventional eddy current testing. In this work, a pulsed eddy current instrument was developed for evaluating the metal loss. The developed instrument was composed of the pulse generator generating the maximum square pulse voltage of 40V, an amplifier controlled up to 52dB, an A/D converter of 16 bit and the sampling frequency of 20 MHz, and an industrial personal computer operated by the Windows program. A pulsed eddy current probe was designed as a pancake type in which the sensing roil was located inside the driving roil. The output signals of the sensing roil increased rapidly wich the step pulse driving voltage かn off, and the latter part of the sensing coil output voltage decreased exponentially with time. The decrement value of the output signals increased as the thickness of the aluminum test piece increased.